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Class 438/309 - FORMING BIPOLAR TRANSISTOR BY FORMATION OR ALTERATION OF SEMICONDUCTIVE ACTIVE REGIONS


Subclass of Class 438 - Semiconductor device manufacturing: process
Definition: Process for forming a transistor structure which upon completion
No. of patents: 485
Last issue date: 03/06/2012


1                      
NumberTitleIssue Date
8129248Method of producing bipolar transistor structures in a semiconductor process
In the method of producing bipolar transistor structures in a semiconductor process, an advanced epitaxial trisilane process can be used without the risk of poly stringers being formed. A base window is structured in a polycrystalline silicon layer covered with an o...
03/06/2012
8093131Lateral insulated gate bipolar transistor having a retrograde doping profile in base region and method of manufacture thereof
In a semiconductor device of the present invention, a first base region 16 is extended to a part under a gate electrode 7 while having a vertical concentration profile of an impurity that increases from the surface of a semiconductor layer 3 and...
01/10/2012
8067290Bipolar transistor with base-collector-isolation without dielectric
The disclosed invention provides a method for the fabrication of a bipolar transistor having a collector region comprised within a semiconductor body separated from an overlying base region by one or more isolation cavities (e.g., air gaps) filled with low permittiv...
11/29/2011
8021951Formation of longitudinal bipolar transistor with base region in trenches having emitter and collector regions disposed along portions of side surfaces of base region
Provided is a semiconductor device including: a silicon substrate; at least two trenches spaced apart from each other, being in parallel with each other, and being formed by vertically etching the silicon substrate from a surface thereof; an electrically insulating ...
09/20/2011
8003473Bipolar transistor with silicided sub-collector
Embodiments of the invention provide a method of fabricating a semiconductor device. The method includes defining a sub-collector region in a layer of doped semiconductor material; forming an active region, a dielectric region, and a reach-through region on top of t...
08/23/2011
7989301Semiconductor device with bipolar transistor and method of fabricating the same
Disclosed is a semiconductor device with a bipolar transistor and method of fabricating the same. The device may include a collector region in a semiconductor substrate. A base pattern may be disposed on the collector region. A hard mask pattern may be disposed on t...
08/02/2011
7981753Method and device for electrostatic discharge protection
A device for providing electrostatic discharge (ESD) protection is provided. The device includes a semiconductor substrate having a drain, a source, and a gate formed therein. The drain contains a region having a resistance that is higher than the resistance of the ...
07/19/2011
7951681Substrate-triggered bipolar junction transistor and ESD protection circuit
An ESD protection circuit using a novel substrate-triggered lateral bipolar junction transistor (STLBJT) for providing a discharging path between power rails. The ESD protection circuit comprises an ESD detection circuit and a STLBJT device. The STLBJT device formed...
05/31/2011
7939414Ion implantation and process sequence to form smaller base pick-up
Methods for forming a bipolar junction transistor device are described herein. A method for forming the bipolar junction transistor device may include doping a first portion of a substrate with a first dopant to form a base pick-up region, and after doping the first...
05/10/2011
7932155Structure and method for performance improvement in vertical bipolar transistors
A method of forming a semiconductor device having two different strains therein is provided. The method includes forming a strain in a first region with a first straining film, and forming a second strain in a second region with a second straining film. Either of th...
04/26/2011
7927955Adjustable bipolar transistors formed using a CMOS process
By providing a novel bipolar device design implementation, a standard CMOS process (105-109) can be used unchanged to fabricate useful bipolar transistors (80) and other bipolar devices having adjustable properties by partially blocking the P or...
04/19/2011
7910447System and method for providing a self aligned bipolar transistor using a simplified sacrificial nitride emitter
A system and method are disclosed for providing a self aligned bipolar transistor using a simplified sacrificial nitride emitter. An active region of a transistor is formed and a silicon nitride sacrificial emitter is formed above the active region of the transistor...
03/22/2011
7846805Self-aligned vertical PNP transistor for high performance SiGe CBiCMOS process
A structure and a process for a self-aligned vertical PNP transistor for high performance SiGe CBiCMOS process. Embodiments include SiGe CBiCMOS with high-performance SiGe NPN transistors and PNP transistors. As the PNP transistors and NPN transistors contained diff...
12/07/2010
7816221Dielectric ledge for high frequency devices
High frequency performance of (e.g., silicon) bipolar devices (40, 100, 100″) is improved by reducing the capacitive coupling (Cbc) between the extrinsic base contact (46) and the collector (44, 44′, 44″). A dielectric ledge (453, 453...
10/19/2010
7811894Bipolar junction transistor and manufacturing method thereof
An improved bipolar junction transistor and a method for manufacturing the same are provided. The bipolar junction transistor includes: a buried layer and a high concentration N-type collector region in a P-type semiconductor substrate; a low concentration P-type ba...
10/12/2010
7807539Ion implantation and process sequence to form smaller base pick-up
Methods for forming a bipolar junction transistor device are described herein. A method for forming the bipolar junction transistor device may include doping a first portion of a substrate with a first dopant to form a base pick-up region, and after doping the first...
10/05/2010
7795102ESD high frequency diodes
In a SiGe BJT process, a diode is formed by defining a p-n junction between the BJT collector and BJT internal base, blocking the external gate regions of the BJT and doping the emitter poly of the BJT with the same dopant type as the internal base thereby using the...
09/14/2010
7785974Methods of employing a thin oxide mask for high dose implants
A method for forming a bipolar transistor device includes providing a semiconductor substrate. An oxide layer is formed on the semiconductor substrate. The oxide layer is patterned to form an opening that exposes a portion of the semiconductor substrate. A dopant, s...
08/31/2010
7691716Vertical bipolar transistor with a majority carrier accumulation layer as a subcollector for SOI BiCMOS with reduced buried oxide thickness for low-substrate bias operation
The present invention provides a “subcollector-less” silicon-on-insulator (SOI) bipolar junction transistor (BJT) that has no impurity-doped subcollector. Instead, the inventive vertical SOI BJT uses a back gate-induced, majority carrier accumulation layer as th...
04/06/2010
7674681Semiconductor device and method for manufacturing the same
Disclosed are a semiconductor device and a method for manufacturing the same. The semiconductor device includes a semiconductor substrate including first and second well areas doped with second conductive ions, a third well area in the first well and doped with the ...
03/09/2010
7666749SiGe semiconductor device and method of manufacturing the same
Provided are a SiGe semiconductor device and a method of manufacturing the same. The method includes the steps of: forming a buried collector by doping impurity ions into a buried collector region formed on a substrate; forming a collector layer which is an active r...
02/23/2010
7638404Method for forming low temperature polysilicon thin film transistor with low doped drain structure
A method for forming a low temperature polysilicon thin film transistor with a low doped drain structure comprises: a) forming a polysilicon island on a substrate; b) forming a dielectric layer, a metal layer and a cap layer in sequence cover to the polysilicon isla...
12/29/2009
7622357Semiconductor device structures with backside contacts for improved heat dissipation and reduced parasitic resistance
The present invention relates to a device structure that comprises a substrate with front and back surfaces, and at least one semiconductor device with a first conductive structure located in the substrate and a second conductive structure located thereover. A first...
11/24/2009
7618871Method for the production of a bipolar transistor comprising an improved base terminal
For the production of an improved bipolar transistor comprising a low-resistance base terminal, a dielectric layer is deposited over the semiconductor substrate and is highly doped via an implantation mask. In a subsequent controlled thermal step, the dopant is then...
11/17/2009
7615455Integrated circuit bipolar transistor
A bipolar transistor having a base region resting by its lower surface on a collector region and surrounded with a first insulating layer, a base contact conductive region in contact with an external upper peripheral region of the base region, a second insulating re...
11/10/2009
7611953Bipolar transistor with isolation and direct contacts
A bipolar transistor has a collector that is contacted directly beneath a base-collector junction by metallization to reduce collector resistance. A conventional reach-through and buried layer, as well as their associated resistance, are eliminated. The transistor i...
11/03/2009
7605046Active matrix structure for a display device and method for its manufacture
The invention relates to an active matrix structure and method for manufacturing the active matrix structure for a display device, wherein the structure includes: providing a matrix substrate with a number of row lines and a number of column lines, with each point o...
10/20/2009
7595249Bipolar transistors with vertical structures
A method for fabricating a bipolar transistor includes forming a vertical sequence of semiconductor layers, forming an implant mask on the last formed semiconductor layer, and implanting dopant ions into a portion of one or more of the semiconductor layers. The sequ...
09/29/2009
7541248Integrated semiconductor device and method of manufacturing thereof
An integrated semiconductor device containing semiconductor elements that have respective desired on-resistances and breakdown voltages achieves appropriate characteristics as a whole of the integrated semiconductor element. The integrated semiconductor device inclu...
06/02/2009
7521327High f and fbipolar transistor and method of making same
A high fT and fmax bipolar transistor includes an emitter, a base, and a collector. The emitter has a lower portion and an upper portion that extends beyond the lower portion. The base includes an intrinsic base and an extrinsic base. The intri...
04/21/2009
7517768Method for fabricating a heterojunction bipolar transistor
A bipolar transistor with a SiGe:C film and a seed layer forming beneath the SiGe:C film and methods of making same. The method includes placing a substrate in a reactor chamber and introducing a silicon source gas into the reactor chamber to form a silicon seed lay...
04/14/2009
7494887Method and apparatus for fabricating heterojunction bipolar transistors with simultaneous low base resistance and short base transit time
A method for fabricating heterojunction bipolar transistors that exhibit simultaneous low base resistance and short base transit times, which translate into semiconductor devices with low power consumption and fast switching times, is presented. The method comprises...
02/24/2009
7488662Self-aligned vertical PNP transistor for high performance SiGe CBiCMOS process
A structure and a process for a self-aligned vertical PNP transistor for high performance SiGe CBiCMOS process. Embodiments include SiGe CBiCMOS with high-performance SiGe NPN transistors and PNP transistors. As the PNP transistors and NPN transistors contained diff...
02/10/2009
7485537Method of fabricating a vertical bipolar transistor with a majority carrier accumulation layer as a subcollector for SOI BiCMOS with reduced buried oxide thickness
The present invention provides a a method of fabricating bipolar junction transistors (BJTs) on selected areas of a very thin buried oxide (BOX) using a conventional silicon-on-insulator (SOI) starting wafer with a thick BOX. The reduced BOX thickness underneath the...
02/03/2009
7473610Local collector implant structure for heterojunction bipolar transistors and method of forming the same
A method of forming a heterojunction bipolar transistor (HBT) device is disclosed. The method includes forming an intrinsic base layer over a collector layer; forming a sacrificial block structure over the intrinsic base layer; formina a sacrificial spacer layer sur...
01/06/2009
7473609Surface treatment in preparation for contact placement
A contact is formed on indium-phosphide material. Regions of the indium-phosphide material are exposed. An energetic bombardment is performed on exposed regions of the indium-phosphide material. Metal is deposited on the exposed regions of the indium-phosphide mater...
01/06/2009
7470594System and method for controlling the formation of an interfacial oxide layer in a polysilicon emitter transistor
A method is disclosed for controlling the formation of an interfacial oxide layer in a polysilicon emitter transistor device. The interfacial oxide layer is formed between an underlying substrate of single crystal silicon and an upper layer of polysilicon. The curre...
12/30/2008
7462546Collector tailored structures for integration of binary junction transistors
A bipolar transistor is formed in an integrated BiCMOS process. A buried layer is formed in a semiconductor body. An intrinsic dilute mask is formed over the buried layer that covers at least a portion of a selected region of a target deep well region. The intrinsic...
12/09/2008
7459367Method of forming a vertical P-N junction device
A P-N junction device and method of forming the same are disclosed. The P-N junction device may include a P-N diode, a PiN diode or a thyristor. The P-N junction device may have a monocrystalline or polycrystalline raised anode. In one embodiment, the P-N junction d...
12/02/2008
7459368Method for manufacturing integrated circuits having silicon-germanium heterobipolar transistors
Method for manufacturing integrated circuits having silicon-germanium heterobipolar transistors, wherein a collector semiconductor region is created, an etch stop layer is created on a connection region, an opening is introduced into this etch stop layer, semiconduc...
12/02/2008
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