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| Number | Title | Issue Date |
| 7126232 | Defect repair apparatus for an electronic device A method is described for repairing failure points, regions or locations in an electronic device to have a perfect function when a semiconductor device including an LCD of other electronic device has defects. Described is a method of transferring a single or multi-l... | 10/24/2006 |
| 7122844 | Susceptor for MOCVD reactor A susceptor for holding semiconductor wafers in an MOCVD reactor during growth of epitaxial layers on the wafers is disclosed. The susceptor comprises a base structure made of a material having low thermal conductivity at high temperature, and has one or more plate ... | 10/17/2006 |
| 6500737 | System and method for providing defect free rapid thermal processing A system and method for providing substantially defect free rapid thermal processing. The present invention includes a wafer processing system used to process semiconductor wafers into electronic devices. In accordance with the present invention, once the... | 12/31/2002 |
| 6268270 | Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization Methods of optimizing a preheat recipe for rapid thermal processing workpieces are provided. In one aspect, a method of manufacturing is provided that includes preheating a rapid thermal processing chamber according to a preheating recipe and processing a... | 07/31/2001 |
| 6210158 | Method and apparatus for firing ceramic compact A firing apparatus for a green ceramic compact including: a furnace; and a firing tube provided in the furnace with a given space from the side wall of the furnace. The bottom end of the firing tube can be placed on a first stage loaded with a casing cont... | 04/03/2001 |
| 6045619 | Horizontal-type silicon-nitride furnace A horizontal-type silicon-nitride furnace (HOSINF) having two tubes is provided. The HOSINF includes an outer tube and an inner tube. One end of the outer tube is coupled to a pump. The other end of the outer tube can be well sealed by a door through a fl... | 04/04/2000 |
| 5429497 | Apparatus for sintering ceramic formed bodies A method of sintering ceramic formed bodies, in which a container for sintering is disposed in a sintering space of a sintering furnace, and atmospheric gas is introduced from an atmospheric gas inlet port provided on a bottom surface of the container for... | 07/04/1995 |
| 5312574 | Method for sintering ceramic formed bodies A method of sintering ceramic formed bodies, in which a container for sintering is disposed in a sintering space of a sintering furnace, and atmospheric gas is introduced from an atmospheric gas inlet port provided on a bottom surface of the container for... | 05/17/1994 |
| 4439145 | Aluminum furnace and preheater therefor A reverberatory furnace for melting aluminum or other metals which includes a preheater (12) which utilizes exhaust flue gasses from the furnace (10) to preheat the metal before it enters the furnace. A set of horizontal flue ducts (18, 20, 22) conduct th... | 03/27/1984 |
| 4385889 | Apparatus for preheating material for making steel A preheating apparatus for preheating the material, such as scrap, to be charged into steel making equipment with the heat of exhaust gas from the equipment. The apparatus comprises a plurality of preheating units for dischargeably accommodating the charg... | 05/31/1983 |
| 4257337 | Silicon carbide furnace side frames A side for a furnace used in the manufacture of silicon carbide from silicon dioxide and carbon comprises a plurality of gates which are removably affixed to the furnace or plant floor. Each gate has a base portion intended to be supported by a plant floo... | 03/24/1981 |