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Class 432/93 - HAVING WORK HEATING CHAMBER AND OPEN ACCESS WORK SUPPORTING AND HEATING AND HEATING STRUCTURE OUTSIDE OF CHAMBER


Subclass of Class 432 - Heating
Definition: Apparatus including a work heating enclosure and a structure
No. of patents: 11
Last issue date: 10/24/2006


NumberTitleIssue Date
7126232Defect repair apparatus for an electronic device
A method is described for repairing failure points, regions or locations in an electronic device to have a perfect function when a semiconductor device including an LCD of other electronic device has defects. Described is a method of transferring a single or multi-l...
10/24/2006
7122844Susceptor for MOCVD reactor
A susceptor for holding semiconductor wafers in an MOCVD reactor during growth of epitaxial layers on the wafers is disclosed. The susceptor comprises a base structure made of a material having low thermal conductivity at high temperature, and has one or more plate ...
10/17/2006
6500737System and method for providing defect free rapid thermal processing
A system and method for providing substantially defect free rapid thermal processing. The present invention includes a wafer processing system used to process semiconductor wafers into electronic devices. In accordance with the present invention, once the...
12/31/2002
6268270Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization
Methods of optimizing a preheat recipe for rapid thermal processing workpieces are provided. In one aspect, a method of manufacturing is provided that includes preheating a rapid thermal processing chamber according to a preheating recipe and processing a...
07/31/2001
6210158Method and apparatus for firing ceramic compact
A firing apparatus for a green ceramic compact including: a furnace; and a firing tube provided in the furnace with a given space from the side wall of the furnace. The bottom end of the firing tube can be placed on a first stage loaded with a casing cont...
04/03/2001
6045619Horizontal-type silicon-nitride furnace
A horizontal-type silicon-nitride furnace (HOSINF) having two tubes is provided. The HOSINF includes an outer tube and an inner tube. One end of the outer tube is coupled to a pump. The other end of the outer tube can be well sealed by a door through a fl...
04/04/2000
5429497Apparatus for sintering ceramic formed bodies
A method of sintering ceramic formed bodies, in which a container for sintering is disposed in a sintering space of a sintering furnace, and atmospheric gas is introduced from an atmospheric gas inlet port provided on a bottom surface of the container for...
07/04/1995
5312574Method for sintering ceramic formed bodies
A method of sintering ceramic formed bodies, in which a container for sintering is disposed in a sintering space of a sintering furnace, and atmospheric gas is introduced from an atmospheric gas inlet port provided on a bottom surface of the container for...
05/17/1994
4439145Aluminum furnace and preheater therefor
A reverberatory furnace for melting aluminum or other metals which includes a preheater (12) which utilizes exhaust flue gasses from the furnace (10) to preheat the metal before it enters the furnace. A set of horizontal flue ducts (18, 20, 22) conduct th...
03/27/1984
4385889Apparatus for preheating material for making steel
A preheating apparatus for preheating the material, such as scrap, to be charged into steel making equipment with the heat of exhaust gas from the equipment. The apparatus comprises a plurality of preheating units for dischargeably accommodating the charg...
05/31/1983
4257337Silicon carbide furnace side frames
A side for a furnace used in the manufacture of silicon carbide from silicon dioxide and carbon comprises a plurality of gates which are removably affixed to the furnace or plant floor. Each gate has a base portion intended to be supported by a plant floo...
03/24/1981
 
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