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| Number | Title | Issue Date |
| 6544033 | Wafer carrier Provided herein is a wafer carrier comprising a disk and a pocket, wherein the pocket is centered in the disk and holds a wafer. Also provided is a method of processing or testing a wafer for a semiconductor device, comprising the steps of placing the waf... | 04/08/2003 |
| 5449883 | Continuous heat treatment system of semiconductor wafers for eliminating thermal donor A heat treatment system is fabricated from a loading section, a heat treatment section and a outlet section integrated with one another, and the heat treatment section comprises a transfer mechanism provided between the loading section and the outlet sect... | 09/12/1995 |
| 5413164 | Heating furnace in combination with electronic circuit modules For use in the fabrication of electronic circuit modules, there is provided a heating furnace which can be arbitrarily set in a desired temperature profile. The furnace includes a plural number of independently controllable heaters located in spaced posit... | 05/09/1995 |
| 5269370 | Thermal cycling device A thermal cycling apparatus having an upper heat chamber and a lower cold chamber positioned vertically beneath the upper heat chamber and vertically coaxial therewith whereby a material to the thermal cycle tested can be transferred between the upper hea... | 12/14/1993 |
| 4775776 | Multi stage heater A multi stage heater heats items on a conveyor so that they follow a predetermined temperature profile. The heater is used for printed circuit boards or the like when heated for soldering and avoids thermal gradients that can occur with heating different ... | 10/04/1988 |
| 4605161 | Pattern-switching temperature control apparatus An apparatus controls the temperature of a multi-zone furnace based on a given temperature distribution pattern, which pattern is automatically modified zone by zone as the work being heat-treated is changed by using a memory storing a series of such patt... | 08/12/1986 |
| 4004138 | Method of and system for controlling temperature of continuous furnace A method of and system for controlling the temperature of a continuous furnace through which steel bodies are transported at a constant speed, in which the temperature is controlled so as to keep the distance from the entry port of the furnace to a positi... | 01/18/1977 |
