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Class 432/41 - Of purger, purge period, scavenger or cleaner


Subclass of Class 432 - Heating
Definition: Apparatus in which the control is of means dislodging, removing,
No. of patents: 3
Last issue date: 12/29/1992


NumberTitleIssue Date
5174748Chamber having a hot zone and a cold zone and at least one gas inlet tube
A reactor (100) is provided which comprises an enclosure (1,2,3) which has along its longitudinal axis (4--4') a hot zone (1), a cold zone (2) and between the hot and the cold zone an intermediate zone (3) and which has at least one gas inlet tube (12,32)...
12/29/1992
5118286Closed loop method and apparatus for preventing exhausted reactant gas from mixing with ambient air and enhancing repeatability of reaction gas results on wafers
Mixing of spent reactant gases with ambient air inside a semiconductor wafer fabrication facility is avoided and consequently corrosion of a scavenger box in a wafer fabrication facility is avoided. Repeatability of reaction gas results on wafers in a pro...
06/02/1992
4318690Venting process for organic heat transfer media
A process for automatically venting noncondensable contaminants from a number of process vessels heated with an organic heat transfer vapor medium involves monitoring the temperature at each vessel and intermittently venting all vessels simultaneously in ...
03/09/1982
 
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