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| Number | Title | Issue Date |
| 6485297 | Thermal treatment furnace having gas leakage preventing function A thermal treatment furnace is described in which gas leakage does not occur during thermal treatment at a high temperature. A thermal treatment furnace having a reaction tube is provided with an opening at one end and a flange surrounding the opening and... | 11/26/2002 |
| 6110289 | Rapid thermal processing barrel reactor for processing substrates A novel rapid thermal process (RTP) barrel reactor processes a larger batch of semiconductor substrates than was previously possible. The RTP barrel reactor is characterized by a short process cycle time in comparison to the same process cycle time in a c... | 08/29/2000 |
| 5772431 | Thin-film solar cell manufacturing apparatus and manufacturing method A base is provided with a gas outlet pipe and a gas inlet pipe. A bell jar is placed on top of the base with an O-ring interposed between them. Thin-film solar cells and a Se powder are placed in a recess formed in a lower heating jig, and the lower heati... | 06/30/1998 |
| 5370371 | Heat treatment apparatus A heat treatment apparatus having a heat treatment boat with a plurality of wafers held thereon, which is to be loaded in a reaction vessel which has one end opened. Once loaded, the boat effects a seal of the reaction vessel, in preparation for subjectin... | 12/06/1994 |
| 5364266 | Method and apparatus for increasing furnace capacity The present invention provides an inexpensive furnace modification which increases the productivity of the furnaces without requiring extensions to the furnace member or the surrounding building. Existing inner covers are extended a predetermined amount t... | 11/15/1994 |
| 4775317 | Oven for the heat treatment of semiconductor substrates An oven for the heat treatment of semiconductor substrates, especially a diffusion oven, having an upright, heatable quartz tube and a support system made of up rods or tubes into which one or more diffusion racks can be inserted which accommodate the waf... | 10/04/1988 |
| 4621794 | Apparatus for producing a grain-oriented electromagnetic steel strip or sheet In a process for producing a grain-oriented electromagnetic steel strip or sheet by annealing, for primary recrystallization, a cold rolled electromagnetic steel strip or sheet having a final thickness, and subjecting said strip or sheet to secondary recr... | 11/11/1986 |
| 4544142 | Rotary hearth finish annealing furnace A rotary hearth finish annealing furnace includes coil tables carrying thereon steel plate coils to be annealed with their axes being vertical, a hearth traveling along a circle having a predetermined radius and supporting thereabove the coil tables, inne... | 10/01/1985 |
| 4504957 | High temperature box annealing furnace A high temperature box annealing furnace for metallic coil annealing practices. The furnace comprises a fixed base and a removable bell capable of achieving a sealed relationship with the base. The interior of the bell side walls, end walls and roof are l... | 03/12/1985 |
| 4165868 | Method and apparatus for heating coils of strip Coils of strip to be annealed are placed in a furnace with their eye vertical and are heated to the annealing temperature by heating elements on the furnace above and below the level of the coils. An improved convector coil support includes a single metal... | 08/28/1979 |
| 4147506 | Method and apparatus for heating coils of strip Coils of strip to be annealed are placed in a furnace with their eye vertical and are heated to the annealing temperature by heating elements on the furnace side wall at the same elevation as the coils. An insulation shield is provided between the heating... | 04/03/1979 |
