Class 432/243 - Outside conveyor track paralleled by chamber wall slot for conveyor arm

Subclass of Class 432 - Heating
Definition: Apparatus in which a work support within the chamber is
No. of patents: 33
Last issue date: 01/08/2008

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Number	Title	Issue Date
7316966	Method for transferring substrates in a load lock chamber Provided herein is a substrate processing system, which comprises a cassette load station; a load lock chamber; a centrally located transfer chamber; and one or more process chambers located about the periphery of the transfer chamber. The load lock chamber comprise...	01/08/2008
7105463	Load lock chamber having two dual slot regions Provided herein is a substrate processing system, which comprises a cassette load station; a load lock chamber; a centrally located transfer chamber; and one or more process chambers located about the periphery of the transfer chamber. The load lock chamber comprise...	09/12/2006
6949143	Dual substrate loadlock process equipment One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The first support structure is located above the second support structure. T...	09/27/2005
6672864	Method and apparatus for processing substrates in a system having high and low pressure areas A positive pressure gradient is maintained across an open access port of an interface chamber such as a load lock chamber which provides an interface between a low pressure chamber such as a transfer or buffer chamber, and a high pressure area such as a s...	01/06/2004
6607380	Substrate conveying system and device manufacturing method using the same A semiconductor exposure apparatus includes an exposure stage for holding a substrate when a predetermined exposure process is performed to the substrate, a transfer station for receiving a substrate from a resist coating unit, the transfer station having...	08/19/2003
6450804	Compact continuous charging apparatus An improved method and apparatus for charging, preheating and refining steel. The charging apparatus has a skirted charging section for introducing charge materials, a dynamic gas seal adjacent the charging section and a preheater, the preheater for prehe...	09/17/2002
6338626	Load-lock mechanism and processing apparatus A load-lock mechanism according to the invention comprises a vacuum chamber 31 arranged between a vacuum first transferring chamber 20 and atmospheric second transferring chambers 40. The vacuum chamber 31 has a first opening 31A facing the first transfer...	01/15/2002
6207931	Method for the heat treatment of workpieces An apparatus for the heat treatment of workpieces comprising comprising a plurality of evacuable chambers connected through airlocks, a conveyor, preferably a circular chain conveyor for the transport of the workpieces along a path through the chambers, a...	03/27/2001
6147328	Apparatus for the heat treatment of workpieces An apparatus for the heat treatment of work pieces comprising comprising a plurality of evacuable chambers connected through airlocks, a conveyor, preferably a circular chain conveyor for the transport of the workpieces along a path through the chambers, ...	11/14/2000
6133549	Heat treatment furnace and conveyor with multi-conveyance A heat treatment furnace and conveyor with multi-conveyance, wherein the top of the furnace has a feeder and the bottom of which has a disposal. The inside of the furnace has a number of conveying units, each unit is in circular status lined up and move w...	10/17/2000
6086362	Multi-function chamber for a substrate processing system A load lock chamber includes a chamber body having an aperture to allow a substrate to be transferred into or out of the chamber. The load lock chamber is configurable in several configurations, including a base configuration for providing a transition be...	07/11/2000
5919040	Kiln, especially for ceramic products A kiln for ceramic products has a firing chamber including sidewalls with opposed slots. A transport device for transporting the ceramic products through the firing chamber in a transport direction is provided. The transport device includes rods for suppo...	07/06/1999
5919039	Ovens A tunnel oven contains a plurality of transversely extending radiant heating elements 17, 18 arranged at intervals along the length of the oven 1, the oven 1 being provided with conveyor band 10 for transporting material to be heated through the oven radi...	07/06/1999
5899687	Conveying system for a continuous-type oven A conveying system for use in a continuous-type oven is provided. The conveying system comprises a machine unit on which are disposed at least a pair of opposed carriers spaced apart by a predetermined separation distance. The subject conveying system als...	05/04/1999
5855477	Belt conveyance baking furnace A belt conveyance baking furnace which can reduce the weight and size of a belt and can raise and lower the furnace temperature to desired levels in a shorter time. A workpiece is baked while it is on a conveyor belt and conveyed through the furnace there...	01/05/1999
5733116	Heat treatment apparatus A heat treatment apparatus having a heat treatment furnace into which a hydrocarbon gas and an oxidization gas are introduced, wherein an outlet opening of a valve through which a pusher for pushing a work to be heat treated in the heat treatment furnace ...	03/31/1998
5472343	Kiln for the production of ceramic products and process for the operation of the kiln A kiln or oven for producing ceramic products is described having a combustion chamber through which the ceramic products continuously pass, as well as a process for the operation and control of the kiln and the ceramic products perform a rotation about t...	12/05/1995
5345859	Pusher cylinder for tunnel kiln A pusher cylinder for a tunnel kiln is used for moving kiln cars loaded with products such as molded ceramic green products to be sintered in the tunnel kiln. A piston rod of the pusher cylinder is made to have a length more than twice a stroke of the pus...	09/13/1994
5288228	Heat-resistant materials A heat-resistant material having excellent high-temperature strength and high oxidation resistance at temperatures exceeding 1300° C. The material is a heat-resistant Cr-Fe alloy including at least 60% of Cr and at least 5% of Fe, and having a mean grain...	02/22/1994
5242156	Dual belt furnace A dual belt furnace for heat-treating of small parts includes enclosure having a base, a pair of side walls, a top wall, front wall, and a rear wall all being connected together to form at least one heating zone. A plurality of gas burners are positioned ...	09/07/1993
5211557	Heating furnace A heating furnace for e.g. a hot rolling process of any object is disclosed. The furnace has a heat-resistant conveyer device for conveying a treatment object in a high-temperature atmosphere inside the furnace. The conveyer device includes an elongate co...	05/18/1993
5172849	Method and apparatus for convection brazing of aluminum heat exchangers A convection braze furnace for brazing aluminum heat exchangers in an inert gas rich atmosphere includes entrance and exit vestibules forming atmosphere barriers of suspended stainless steel strips. The interior of the braze furnace is divided into multip...	12/22/1992
4938690	Ingot pusher furnace with rail drawbridges An ingot pusher furnace includes means for reducing heat loss from the charging and discharging ends of the furnace so as to produce a more efficient and uniform heating of the ingots. The pusher furnace includes support rails which extend between a first...	07/03/1990
4863376	Walking beam furnace A walking beam furnace with a hearth of fixed beams and of walking beams arranged on supports passing through slots in the floor of the furnace in which, so as to avoid heat loss and undesired heating of the supports in the region of the floor slots, cove...	09/05/1989
4836777	Kiln cars A light-weight base structure for a kiln car comprises vertical, pillars (11,12,13) arranged around the periphery of the base with vertical wall plates (20 to 28) supported between adjacent pillars to define a hollow cavity filled with light-weight insula...	06/06/1989
4834649	Random access oven A random access oven system including an oven, a vestibule, a loading conveyor, and a cooling conveyor. A plurality of load carriers, arranged in one or more tiers, are translated within the oven by one or more drive chains, in response to remotely genera...	05/30/1989
4664624	Metal melting installation A metal melting installation in which a movable carrier has a kiln door fixed at its front end for closing an entrance opening of the kiln and a crucible provided forwardly of the door so as to lodge in the kiln when the entrance opening is closed. A driv...	05/12/1987
4487578	Continuous firing equipment A continuous firing equipment for ceramics is disclosed. A furnace body is equipped with electrical heating elements and has a horizontally looped track extending therethrough. A plurality of cars made of a metal material having a small heat capacity and ...	12/11/1984
4437452	Rotary continuous ash discharge stoker A rotary continuous ash discharge stoker having a circular grate which is designed to support burning fuel as it distributes the fuel from the feedpoint over the entire grate, and at the same time provides for the controlled admission of air for combustio...	03/20/1984
4401038	Progressive moveable hearth cremator A cremator having a pivotable hearth and a secondary moveable hearth displaceable along a primary chamber and a secondary chamber is disclosed. The pivotable hearth is rotated by means of an exterior hydraulic cylinder coupled to a pivotable hearth. The p...	08/30/1983
4300881	Truck or the like for conveying ceramic articles through a kiln The present invention relates to a truck for conveying ceramic articles through a tunnel kiln, comprising a baseplate or trolley, a frame of refractory material formed on the base and bearing a surface for loading ceramic articles. The frame is made up of...	11/17/1981
4236466	Mechanical actuation of furnace grate beams A furnace for the conversion of trash and garbage into useful energy, in which use is made of a movable grating system over which the trash and garbage is advanced for passage through the furnace, the means for driving the grating being located outside of...	12/02/1980
4125365	Roll through billet heater An apparatus for heating billets and the like prior to hot extrusion is disclosed. The apparatus includes an elongated, insulated tunnel having an inlet opening and an outlet opening. A conveyor extends through the tunnel from the inlet to the outlet and ...	11/14/1978

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Class 432/243 - Outside conveyor track paralleled by chamber wall slot for conveyor arm