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| Number | Title | Issue Date |
| 8177550 | Vertical heat treatment apparatus and method for operating the same A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a fi... | 05/15/2012 |
| 8147241 | Method of object transfer for a heat treatment system Disclosed herein is method for use in a vertical heat treatment system which has an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and and through which an object to be... | 04/03/2012 |
| 8016592 | Method and system for thermal processing of objects in chambers A thermal processing system is disclosed. The thermal processing system includes a transfer stage, one or more thermal processing chambers and an interface to a deposition equipment. The transfer stage is provided to receive workpieces for thermal processing. Furthe... | 09/13/2011 |
| 7811086 | Feeding device for a belt-type sintering machine The invention relates to a feeding device for a belt-type sintering machine, with a feeding container for receiving the material to be sintered, with a conveying device for filling the feeding container with material to be sintered, with a feeding drum and a drum ch... | 10/12/2010 |
| 7798810 | High pressure hot gas generating device A high pressure hot gas generating device comprises a combustion furnace; an interior of the combustion furnace having a combustion chamber; a lower side of the combustion furnace having an ash exhausting opening; an upper side of the combustion furnace having a hig... | 09/21/2010 |
| 7758340 | Heating device and heating method A heating device provided with a cooling plate and a heating plate is formed in a low height, and floats a substrate above the cooling plate and the heating plate and moves the substrate horizontally between the cooling plate and the heating plate by the pressure of... | 07/20/2010 |
| 7677885 | Material supply device for diffusion furnaces A material supply device for diffusion furnaces includes a main body, a fixing pedestal mechanism, a transmission mechanism and a cover mechanism for a furnace door. The main body includes a base portion and a main rod. The base portion is mounted on the main rod an... | 03/16/2010 |
| 7674109 | Guidance system for pusher plate for use in pusher furnaces A pusher plate for use in a pusher furnace includes a shaped guidance groove in its lower surface which preferably has a bow-tie shape with a narrower central section and wider ends proximate the leading and trailing faces of the plate. The groove receives therein a... | 03/09/2010 |
| 7670138 | Quartz-product baking method and quartz product The present invention is a quartz-product baking method for baking a first quartz product and a second quartz product to remove a metal contained therein, the first and second quartz products being to be loaded into a heat-processing apparatus for heat-processing a ... | 03/02/2010 |
| 7547209 | Vertical heat treatment system and automatic teaching method for transfer mechanism A transfer mechanism 21 of a vertical heat treatment system 1 includes a base capable of vertical movement and turning movement, and plural substrate support devices, disposed on the base so as to be movable anteroposterior, that hold wafers W. Provide... | 06/16/2009 |
| 7416405 | Vertical type of thermal processing apparatus and method of using the same A vertical type of thermal processing apparatus of the present invention includes a thermal processing furnace having a furnace opening at a lower portion thereof. A boat holding objects to be processed in a tier-like manner in a vertical direction is adapted to be ... | 08/26/2008 |
| 7411165 | Product stream heater In an apparatus and a method for heating product streams, particularly food product streams containing fruits or fruit pieces, the product 47 flows through a product-carrying channel 2. The apparatus comprises means for generating high electrical alter... | 08/12/2008 |
| 7358469 | Apparatus for microwave heat treatment of manufactured components An apparatus for heat treating manufactured components using microwave energy and microwave susceptor material. Heat treating medium such as eutectic salts may be employed. A fluidized bed introduces process gases which may include carburizing or nitriding gases. Th... | 04/15/2008 |
| 7311520 | Heat treatment apparatus The present invention is a thermal processing unit including: a heating-furnace body whose upper end has an opening; a reaction tube consisting of a single tube contained in the heating-furnace body; a gas-discharging-unit connecting portion formed at an upper porti... | 12/25/2007 |
| 7311519 | Raw material feeding apparatus for rotary hearth furnace The invention provides a raw materials feeding apparatus capable of uniformly dispersing and feeding into a furnace agglomerated raw materials that are likely to undergo dusting, deformation and mutual adhesion. In a raw material feeding apparatus for a rotary heart... | 12/25/2007 |
| 7219610 | Grate plate arrangement for step plates A grate plate arrangement for step grates includes box-like grate plates (4) positioned on a grate carrier (2) with a front plate (24) placed on its end wall (18) and fastened to the end wall (18) using one or more studs (26... | 05/22/2007 |
| 7204751 | Method and apparatus for filtering contaminants A self-contained ventilator includes a housing having a support member for supporting a pollution source. A filter is further disposed in the housing for filtering contaminants emitted from the pollution source. A conduit is adapted to connect to the housing to prov... | 04/17/2007 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat tran... | 04/03/2007 |
| 7150627 | Transported material heating with controlled atmosphere A tunnel oven for heating transported carbonaceous materials includes an enclosure having a passage and a transport device for moving solid carbonaceous materials through and along a length of the passage. A direct convection heater is operably connected to the encl... | 12/19/2006 |
| 7090488 | Heat treatment furnace A heating zone (4), a cooling zone (5), and a quenching zone (6) are provided inside a linear furnace body in this order, the heating zone (4), the cooling zone (5), and the quenching zone (6) being separated by partition do... | 08/15/2006 |
| 7067018 | Automated system for handling and processing wafers within a carrier A workpiece handling and processing system has a interface section for loading wafers from cassettes into carriers. The wafers are lifted out of cassettes by a buffer elevator and moved into a position over an open carrier by a buffer robot. A comb elevator lifts co... | 06/27/2006 |
| 7059467 | Conveyor belt assembly A conveyor belt assembly includes a conveyor belt to move an item, a drive pulley driven by a motor and a non-drive pulley. The conveyor belt includes a v-belt on the inner surface of the conveyor belt proximate to both of the edges. Each v-belt is received in a gro... | 06/13/2006 |
| 6971832 | Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The ... | 12/06/2005 |
| 6945388 | Anti-shingling product conveying chain A product conveying chain includes a top plate fixed to a base chain. The base chain is formed from a series of pairs of inner sidebars pivotally connected to adjacent pairs of outer sidebars. The top plate is fixed to the base chain, and has a trailing edge adjacen... | 09/20/2005 |
| 6942738 | Automated semiconductor processing system An automated semiconductor processing system has an indexer bay perpendicularly aligned with a process bay within a clean air enclosure. An indexer in the indexer bay provides stocking or storage for work in progress semiconductor wafers. Process chambers are locate... | 09/13/2005 |
| 6935828 | Wafer load lock and magnetically coupled linear delivery system A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The ... | 08/30/2005 |
| 6824736 | Pusher furnace rails with plate-shaped sliding supports and sliding shoes The invention relates to a pusher furnace (1) for the annealing treatment of aluminum bars for instance. Rails (7) with plate-shaped sliding supports (8) are provided. Said supports cover the entire width of the rails (7) and are produced... | 11/30/2004 |
| 6814573 | Vacuum heat-treatment apparatus A vacuum heat-treatment apparatus for heat-treating a workpiece in a treating cell includes a hermetic chamber disposed at the center. A plurality of treating cells are disposed along the periphery of the hermetic chamber, and a workpiece transfer mechanism is dispo... | 11/09/2004 |
| 6736636 | Thermal processor with gas supply A thermal processing unit of the invention includes a processing container that can contain an object to be processed therein, the processing container having a lower end provided with an opening. The opening is opened and closed by a lid. A flange is provided at a ... | 05/18/2004 |
| 6669471 | Furnace conveyer belt having thermal barrier A brazing furnace includes a housing defining an interior environment having an inlet and an outlet, a plurality of heating elements mounted within the housing and adapted to heat the interior environment to an elevated temperature, and a conveyor belt ex... | 12/30/2003 |
| 6575739 | Configurable wafer furnace A processing system including a chamber defining an interior cavity having a processing tube assembly arranged within the interior cavity. A heating assembly moveable relative to the processing tube assembly from a first position where said processing tub... | 06/10/2003 |
| 6537010 | Wafer boat support and method for twin tower wafer boat loader An apparatus for automatically and simultaneously loading/unloading a plurality of wafer boats (24) onto/from a cantilever paddle includes a cantilever paddle (47-1) and a carriage (42-1) supporting the cantilever paddle First and second vertical translat... | 03/25/2003 |
| 6503079 | Substrate processing apparatus and method for manufacturing semiconductor device An apparatus and a method for manufacturing a semiconductor device can provide a good quality film growth in a highly clean reaction atmosphere unaffected by contamination from a furnace opening portion. A reverse-diffusion preventing body 8 is provided b... | 01/07/2003 |
| 6494994 | Pulp heating apparatus A pulp heating apparatus has a heater main body 1 which has a pulp introduction port for introducing pulp, a vapor introduction port for introducing vapor, a disperser for dispersing the pulp introduced via the pulp introduction port under a high temperat... | 12/17/2002 |
| 6483082 | Heater lift lead screw for vertical furnaces A heater lift mechanism with a ball screw linear actuator provides a relatively maintenance free lift mechanism with low starting torque and high positional accuracy. The heater lift mechanism can also be used to move wafer boats in a vertical furnace. Th... | 11/19/2002 |
| 6450804 | Compact continuous charging apparatus An improved method and apparatus for charging, preheating and refining steel. The charging apparatus has a skirted charging section for introducing charge materials, a dynamic gas seal adjacent the charging section and a preheater, the preheater for prehe... | 09/17/2002 |
| 6431860 | Material feeding mechanism in association with continuous sintering apparatus In a material feeding mechanism in association with a continuous sintering apparatus, a material (S) carried by a transporting conveyer (1) into an atmosphere-displacement chamber (2) is fed into a furnace casing (4) of the continuous sintering apparatus ... | 08/13/2002 |
| 6409503 | Heat treatment method and heat treatment apparatus When carrying workpieces from a loading area in which the workpieces are handled into a heat treatment furnace to make the workpieces subjected to a heat treatment process using a predetermined process gas, the loading area is evacuated and controlled at ... | 06/25/2002 |
| 6402508 | Heat and cooling treatment apparatus and substrate processing system The present invention is an apparatus for performing heat and cooling treatments for a substrate includes: a heating table for mounting the substrate thereon to perform the heat treatment for the substrate; a cooling table for mounting the substrate there... | 06/11/2002 |
| 6390811 | High-temperature and high-pressure treatment device To provide a high-temperature and high-pressure treatment device in which articles to be treated such as wafers of LSI semiconductors can be transported in a stable attitude, and the entire apparatus is made compact. A high-temperature and high-pressure t... | 05/21/2002 |
