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| Number | Title | Issue Date |
| 6838126 | Method for forming I-carbon film A film comprising an i-carbon is formed by converting a reactive gas containing a carbon compound gas into plasma by a resonance using a microwave and a magnetic field. ... | 01/04/2005 |
| 6572935 | Optically transparent, scratch-resistant, diamond-like carbon coatings A plasma-based method for the deposition of diamond-like carbon (DLC) coatings is described. The process uses a radio-frequency inductively coupled discharge to generate a plasma at relatively low gas pressures. The deposition process is environmentally f... | 06/03/2003 |
| 6447851 | Field emission from bias-grown diamond thin films in a microwave plasma A method of producing diamond or diamond like films in which a negative bias is established on a substrate with an electrically conductive surface in a microwave plasma chemical vapor deposition system. The atmosphere that is subjected to microwave energy... | 09/10/2002 |
| 6432537 | Diamond-like-carbon coated aramid fibers having improved mechanical properties A process for improving the mechanical properties, particularly the flexural rigidity, of aramid fibers by directly depositing a diamond-like-carbon coating onto the surface of the fibers is disclosed. Diamond-like-carbon (DLC) coated aramid fibers having... | 08/13/2002 |
| 6423383 | Plasma processing apparatus and method A plasma processing apparatus and method is equipped with a reaction chamber, a microwave generator for generating a microwave within the reaction chamber, and main and auxiliary magnets for producing a magnetic filed parallel with microwave propagation d... | 07/23/2002 |
| 6224952 | Electrostatic-erasing abrasion-proof coating and method for forming the same An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and... | 05/01/2001 |
| 6183816 | Method of fabricating the coating In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated betw... | 02/06/2001 |
| 6136386 | Method of coating polymer or glass objects with carbon films An object such as an automobile part, an image forming apparatus part, a bicycle part, other machine parts, a sport article or its part, a toy or its part, or a rain article or its part has a portion to be in contact with a contact object. The contact por... | 10/24/2000 |
| 6117496 | Method of forming a hard carbon film over an inner surface of a guide bush using a jig A hard carbon film is formed over an inner surface of a guide bush including the steps of fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary ele... | 09/12/2000 |
| 6110542 | Method for forming a film A method for forming a film by a plasma CVD process in which a high density plasma is generated in the presence of a magnetic field is described, characterized by that the electric power for generating the plasma has a pulsed waveform. The electric power ... | 08/29/2000 |
| 6103305 | Method of forming a stress relieved amorphous tetrahedrally-coordinated carbon film A stress-relieved amorphous-diamond film is formed by depositing an amorphous diamond film with specific atomic structure and bonding on to a substrate, and annealing the film at sufficiently high temperature to relieve the compressive stress in said film... | 08/15/2000 |
| 6090456 | Process for large area deposition of diamond-like carbon films A new method for ion beam deposition of diamond-like carbon coatings onto a variety of substrates is described. A high power, radio frequency excited-inductively coupled ion gun directs a beam of carbon and hydrogen ions at a substrate inside an ultra vac... | 07/18/2000 |
| 6086962 | Method for deposition of diamond-like carbon and silicon-doped diamond-like carbon coatings from a hall-current ion source A unique Hall-Current ion source apparatus is used for direct ion beam deposition of DLC coatings with hardness values greater than 10 GPa and at deposition rates greater than 10 Å per second. This ion source has a unique fluid-cooled anode with a shadow... | 07/11/2000 |
| 6077572 | Method of coating edges with diamond-like carbon A method of creating a diamond-like carbon film on a substrate, including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5×1010 pe... | 06/20/2000 |
| 6037016 | Capacitively coupled RF diamond-like-carbon reactor A process of coating a non-conductive fiber with diamond-like carbon, including passing a non-conductive fiber between a pair of parallel metal grids within a reaction chamber, introducing a hydrocarbon gas into the reaction chamber, forming a plasma with... | 03/14/2000 |
| 6020036 | Method of forming hard carbon film over the inner surface of guide bush A guide bush (11), coming in sliding contact with a workpiece, for use in an automatic lathe is placed in a vacuum vessel (61), and after inserting an auxiliary electrode (71), which is grounded or to which a positive DC voltage is applied, in the center ... | 02/01/2000 |
| 5981000 | Method for fabricating a thermally stable diamond-like carbon film A method for fabricating a thermally stable carbon-based low dielectric constant film such as a hydrogenated amorphous carbon film or a diamond-like carbon film in a parallel plate chemical vapor deposition process utilizing plasma enhanced chemical vapor... | 11/09/1999 |
| 5961717 | Synthesis of phosphorus-doped diamond A synthesis of phosphorus-doped diamond by a microwave plasma method using a volatile hydrocarbon and hydrogen mixed therewith, as a reaction gas, wherein phosphorus is used as a dopant, and hydrogen bonded to the phosphorus is dissociated so that the pho... | 10/05/1999 |
| 5761717 | System and method for determining what position in cache memory to store data elements A cache management system and method monitors and controls the contents of cache memory. A time indication provider provides a time indication signal to a cache indexer, for maintaining a cache index which are stored in cache as well as an indication that... | 06/02/1998 |
| 5747120 | Laser ablated hard coating for microtools Wear-resistant coatings composed of laser ablated hard carbon films, are deposited by pulsed laser ablation using visible light, on instruments such as microscope tips and micro-surgical tools. Hard carbon, known as diamond-like carbon (DLC), films produc... | 05/05/1998 |
| 5648127 | Method of applying, sculpting, and texturing a coating on a substrate and for forming a heteroepitaxial coating on a surface of a substrate Energy, such as from one or more lasers, is directed at the surface of a substrate to mobilize and vaporize a constituent element (e.g., carbide) within the substrate (e.g., steel). The vaporized constituent element is reacted by the energy to alter its p... | 07/15/1997 |
| 5635243 | Method of coating an organic substrate Energy, such as from one or more lasers, is directed at the surface of a substrate to mobilize and vaporize a constituent element (e.g., carbide) within the substrate (e.g., steel). The vaporized constituent element is reacted by the energy to alter its p... | 06/03/1997 |
| 5569501 | Diamond-like carbon films from a hydrocarbon helium plasma The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon... | 10/29/1996 |
| 5554415 | Substrate coating techniques, including fabricating materials on a surface of a substrate Energy, such as from one or more lasers, is directed at the surface of a substrate to mobilize and vaporize a constituent element (e.g., carbide) within the substrate (e.g., steel). The vaporized constituent element is reacted by the energy to alter its p... | 09/10/1996 |
| 5427827 | Deposition of diamond-like films by ECR microwave plasma Hard amorphous hydrogenated carbon, diamond-like films are deposited using an electron cyclotron resonance microwave plasma with a separate radio frequency power bias applied to a substrate stage. The electron cyclotron resonance microwave plasma yields l... | 06/27/1995 |
| 5240749 | Method for growing a diamond thin film on a substrate by plasma enhanced chemical vapor deposition A method is provided for growing a diamond thin film on a selected substrate. First the substrate is prepared by scratching the surface thereof with diamond paste. The substrate is then confined in an enclosed space which includes high purity hydrogen and... | 08/31/1993 |
| 5098737 | Amorphic diamond material produced by laser plasma deposition A method and apparatus are disclosed for producing amorphic or ultra fine-grained, diamond-like material on a substrate. Uniform, high quality dehydrogenated diamond-like material is produced when a hardened target material is used and/or when a laser bea... | 03/24/1992 |
| 5087608 | Environmental protection and patterning of superconducting perovskites A method for the passivation of superconductive rare earth cuprates involves depositing thereon a thin film of an amorphous or diamond-like carbon film of a thickness ranging from 100 Å to 10 microns. The cuprate film may be in the as-deposited form, so ... | 02/11/1992 |
| 5015494 | Microwave enhanced CVD method for depositing diamond A cyclotron resonance chemical vapor deposition method of making a diamond or diamond-like material on a substrate characterized by the use of a higher pressure range of 0.1 to 300 torr, where the substrate is approximately positioned where a standing wav... | 05/14/1991 |
| 5013579 | Microwave enhanced CVD method for coating mechanical parts for improved wear resistance A cyclotron resonance chemical vapor deposition method for coating mechanical component parts, in which the method is particularly advantageous in coating for parts having substantially flat surfaces and corners which are subject to wear. The method inclu... | 05/07/1991 |
