Class 427/589 - Silicon carbide

Subclass of Class 427 - Coating processes
Definition: Processes wherein the silicon utilized in the coating is
No. of patents: 24
Last issue date: 04/04/2006

Number	Title	Issue Date
7022545	Production method of SiC monitor wafer The present invention has its object to obtain an SiC monitor wafer which can flatten the surface until particle detection is possible. SiC of a crystal system 3C is deposited on a substrate by a CVD (Chemical Vapor Deposition) method, and the SiC is detached from a...	04/04/2006
6746776	Laminated structure, and manufacturing method thereof There is provided a laminated structure having a silicon carbide coating layer formed by sputtering on an alloy substrate, and the silicon carbide has a light transmittance of 70% or greater. It is preferable that the alloy substrate is a magnetic alloy or a phase-c...	06/08/2004
6436361	Silicon carbide and process for its production Silicon carbide having a resistivity of from 103 to 106 Ω.multidot.cm and a powder X-ray diffraction peak intensity ratio of at least 0.005 as represented by Id1 /Id2 where Id1 is the peak intensity ...	08/20/2002
6407013	Soft plasma oxidizing plasma method for forming carbon doped silicon containing dielectric layer with enhanced adhesive properties Within a method for forming a dielectric layer within a microelectronic fabrication there is first provided a substrate. There is then formed over the substrate a carbon doped silicon containing dielectric layer. There is then treated the carbon doped sil...	06/18/2002
6365527	Method for depositing silicon carbide in semiconductor devices A silicon carbide film is formed in a manner which avoids the high level contents of oxygen by depositing the film in at least two consecutive in-situ steps. Each step comprises plasma enhanced chemical vapor deposition (PECVD) of silicon carbride and amm...	04/02/2002
6331362	Refractory composite materials protected against oxidising at high temperature, precursors of the said materials, their preparation The present invention provides: refractory composite materials protected against oxidation at high temperature; said materials are of the type made by a solid process and include, in characteristic manner, over their entire outside surface, a complex laye...	12/18/2001
6268061	Objects constructed of silicon carbide An object constructed of silicon carbide is made up of a plurality of sintered silicon carbide component parts in simple solid forms. This approach allows the production of objects having configurations that are obtainable only with difficulty or not at a...	07/31/2001
6221154	Method for growing beta-silicon carbide nanorods, and preparation of patterned field-emitters by chemical vapor depositon (CVD) A method and an apparatus have been developed to grow beta-silicon carbide nanorods, and prepare patterned field-emitters using different kinds of chemical vapor deposition methods. The apparatus includes graphite powder as the carbon source, and silicon ...	04/24/2001
6033533	Method of forming films over inner surface of cylindrical member The present invention relates to a method of forming an intermediate film and a hard cabon film over the inner surface of a cylindrical member having a bore, such as a bushing or a cylinder, with the hard carbon film being formed on the intermediate film ...	03/07/2000
5854495	Preparation of nucleated silicon surfaces A structure is disclosed for growing semiconductor surfaces. A substrate such as a single crystal silicon substrate is treated by electrical biasing in the presence of a carbon-containing plasma to cause nucleation of the surface. By direct observation us...	12/29/1998
5738908	Method of densifying porous substrates by chemical vapor infiltration of silicon carbide A reaction gas containing methyltrichlorosilane (MTS) and hydrogen is injected into the infiltration chamber (30) in which the substrate is placed and where predetermined infiltration temperature and pressure conditions obtain. The gas entering the infilt...	04/14/1998
5738951	Method of manufacturing a composite material with lamellar interphase between reinforcing fibers and matrix, and material obtained The interphase is formed by nanometric scale sequencing of a plurality of different constituents including at least a first constituent that intrinsically presents a lamellar microtexture, and at least a second constituent that is suitable for protecting ...	04/14/1998
5733611	Method for densification of porous billets A porous preform is densified by heating while emersed in a precursor liquid. Heating is achieved by passing a current through the preform or by an induction coil immersed in the liquid. Ways to control the densification process are also described....	03/31/1998
5448418	Mirror for SOR A mirror for SOR includes a base (1) made of a heat resistant ceramic material having a surface, a first SiC coating (2, 3) formed on the surface of the base (1), which has a first smoothed surface, and a second SiC coating (4, 5) formed on the first smoo...	09/05/1995
5319479	Deposited multi-layer device with a plastic substrate having an inorganic thin film layer A deposited multi-layer device of an electronic element and a plastic substrate on which an inorganic substance thin film layer is simultaneously formed on both surfaces of the substrate wherein each of the electronic element, plastic substrate and inorga...	06/07/1994
5284544	Apparatus for and method of surface treatment for microelectronic devices An apparatus for surface treatment according to the present invention used for carrying out dry etching, thin film deposition and so forth is provided with a neutral beam etching apparatus in order to improve etching rate. In an embodiment, microwave wave...	02/08/1994
4999228	Silicon carbide diffusion tube for semi-conductor Disclosed is a silicon carbide type diffusion tube comprising a diffusion tube base made of reaction-sintered silicon carbide having an iron concentration of 20 ppm or below and a density of 3.0 g/cm3 or over, and a silicon carbide layer consis...	03/12/1991
4900483	Method of producing isotropically reinforced net-shape microcomposites A novel isotropically reinforced microcomposite is described. An entirely fluid-phase method has been devised for producing the net-shape filamentary structures. The process depends for its success on the ability to generate in situ, within a shaped mold,...	02/13/1990
4842888	Ceramic coatings from the pyrolysis in ammonia of mixtures of silicate esters and other metal oxide precursors Hydrolyzed or partially hydrolyzed mixtures of silicate esters and metal oxide precursors, are pyrolyzed at relatively low temperature in the presence of ammonia to form ceramic coatings on substrates such as electronic devices. The metal oxide precursors...	06/27/1989
4810526	Method of coating a recrystallized silicon carbide body with a compact silicon carbide coating A method of coating a surface of recrystallized silicon body by CVD method comprising a step of heating a feedstock gas containing a silicon source and a carbon source and said non-metallic element by a resistance heat which is generated by electrifying s...	03/07/1989
4565711	Method of and apparatus for the coating of quartz crucibles with protective layers A silicon crucible for use in holding a silicon melt in the drawing of silicon bars for the production of silicon wafers in the semiconductor industry is provided with a protective coating, e.g. of silicon nitride, by the use of a vapor generator in which...	01/21/1986
4426405	Method for producing improved silicon carbide resistance elements Silicon carbide shapes of the general type shown and described in U.S. Pat. No. 4,125,756 are densified and nitrided in such a way as to produce shapes with improved durability and reduction in temperature span in response to voltage changes....	01/17/1984
4401689	Radiation heated reactor process for chemical vapor deposition on substrates A method of chemically vapor depositing a material on a plurality of stacked substrates comprising heating a tubular susceptor surrounding the stack to thereby heat the substrates by radiant heating....	08/30/1983
3985917	Method of depositing material on a heated substrate The invention is directed to the deposition of a coating on a substrate by reacting vaporized chemicals on contact with a heated surface to deposit a coating. According to the invention, the deposition surface is cleaned and coated in a single stage react...	10/12/1976

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Class 427/589 - Silicon carbide