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| Number | Title | Issue Date |
| 7608307 | Method of forming film upon a substrate A method of forming film on a substrate, in which in a preliminary step information on film thickness deposited on a test substrate prepared for use in collecting information over a fixed irradiation time is obtained in advance while shining a laser beam on a target... | 10/27/2009 |
| 7371286 | Wiring repair apparatus A wiring repair apparatus includes an XY stage on which a substrate is placed, a laser source unit disposed above the XY stage, first and second gas windows disposed between the laser source unit and the XY stage, and first and second CVD gas units. The laser source... | 05/13/2008 |
| 7360945 | Apparatus for determining temperature of a portable computer system A method and apparatus for measuring the temperature of a computer system, such as a notebook computer, is described. A sensor module is to mount within the computer system spaced from an interior surface of a chassis of the system, the sensor to measure an internal... | 04/22/2008 |
| 7361421 | Lubricant, magnetic recording medium and production method of magnetic recording medium A lubricant is obtained by mixing at least one compound selected from specific fluorine-based diester dicarboxylic acid compounds having has two carboxyl groups, two ester bonds, terminal groups each of which is an alkyl group or an alkenyl group, and one fluoroethe... | 04/22/2008 |
| 7341765 | Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided ... | 03/11/2008 |
| 7327667 | Semiconductor laser and associated drive circuit substrate A single monolithic semiconductor substrate comprises a first side and a second side. The first side includes an air bearing surface. A laser integrates with the first side. The laser has an emission facet substantially co-planer with the air bearing surface. A cont... | 02/05/2008 |
| 7311947 | Laser assisted material deposition A method of forming a film on a substrate includes activating a gas precursor to form a material on the substrate by irradiating the gas precursor with electromagnetic energy at a frequency tuned to an absorption frequency of the gas precursor. ... | 12/25/2007 |
| 7270848 | Method for increasing deposition rates of metal layers from metal-carbonyl precursors A method for increasing deposition rates of metal layers from metal-carbonyl precursors by mixing a vapor of the metal-carbonyl precursor with CO gas. The method includes providing a substrate in a process chamber of a deposition system, forming a process gas contai... | 09/18/2007 |
| 7270724 | Scanning plasma reactor A scanning plasma reactor for exciting reactant gases at a substrate surface including a beam forming module, a gas injection module, a reaction chamber with a window and a vacuum chuck, a gas exhaust module. Radiation from the beam forming module and the reactant g... | 09/18/2007 |
| 7238328 | Solid-state light source photolytic nitrogen dioxide converter A solid-state light source photolytic NO2 converter including a reaction chamber made of a reflective material with diffuse reflective properties, whereby the reaction chamber includes a low volume gas cell wherein the gas sample residence time is less th... | 07/03/2007 |
| 7211300 | Method and apparatus for performing laser CVD An element is deposited by flowing a gas through a solid donor compound that includes the element, and over a substrate. The flow of gas deposits a film of a few monolayers of donor compound on the substrate. An optical radiation source (e.g., a femtosecond laser) w... | 05/01/2007 |
| 7171918 | Focused ion beam deposition Introducing at least one metal such as cobalt, molybdenum, metal carbonyl, tungsten, platinum, or other suitable metal to a focused ion beam. Introducing the focused ion beam to a substrate within a processing chamber. Forming at least one layer over a substrate. Ap... | 02/06/2007 |
| 7169703 | Method of forming metallic wiring layer, method of selective metallization, apparatus for selective metallization and substrate apparatus A method of forming a metallic wiring layer in a selected region of a layer-stacked plate, which includes the first process of introducing gas consisting of organometallic molecules into a reaction chamber having a layer-stacked plate arranged therein, and forming a... | 01/30/2007 |
| 7164188 | Buried conductor patterns formed by surface transformation of empty spaces in solid state materials A plurality of buried conductors and/or buried plate patterns formed within a monocrystalline substrate is disclosed. A plurality of empty-spaced buried patterns are formed by drilling holes in the monocrystalline substrate and annealing the monocrystalline substrat... | 01/16/2007 |
| 7160614 | Crystalline superfine particles, complex material, method of manufacturing crystalline superfine particles, inverted micelles, inverted micelles enveloping precursor superfine particles, inverted micelles enveloping crystalline superfine particles, and precursor superfine particles Crystalline superfine particles capable of emitting light depending upon a time-rate-of-change of a stress and controlled in grain size in the range from 5 nm to 100 nm are complexed with another material such as resin. The crystalline superfine particles are manufa... | 01/09/2007 |
| 7157144 | Giant remnant polarization in laser ablated SrBiNbOthin films on Pt/TiO/SiO/Si substrates SrBi2Nb2O9 (SBN) thin films are deposited on Pt/TiO2/SiO2/Si substrates using off-axis pulsed laser deposition technique. Off-axis laser ablation avoids plasma damaging of the surface of SBN thin films and is favorable to grow films ... | 01/02/2007 |
| 7153542 | Assembly line processing method An apparatus for sequential processing of a workpiece comprises an assembly line processing system. The apparatus comprises multiple workpieces moving in an assembly line fashion under multiple process stations. The multiple process stations provide different proces... | 12/26/2006 |
| 7144119 | System and method for programmable illumination pattern generation An apparatus providing programmable illumination pattern generation for the manipulation of colloidal particulates and biomolecules in suspension between electrodes, is disclosed. The apparatus implements LEAPS (Light-controlled electrokinetic assembly of particles ... | 12/05/2006 |
| 7137859 | High-pressure discharge lamp A high-pressure discharge lamp is produced using tungsten wire that is wound as a double coiled winding around an electrode metal rod, leaving a tip end thereof, and the double coiled winding is machined into a melted tip end by a YAG laser beam, with the remaining ... | 11/21/2006 |
| 7132128 | Method and system for depositing material on a substrate using a solid precursor A system and method is disclosed for vaporizing a solid precursor and transporting the precursor vapor to a process chamber. The film precursor vaporization system is coupled to the process chamber and positioned directly above the substrate. A precursor valve syste... | 11/07/2006 |
| 7118781 | Methods for controlling formation of deposits in a deposition system and deposition methods including the same A method for controlling parasitic deposits in a deposition system for depositing a film on a substrate, the deposition system defining a reaction chamber for receiving the substrate and including a process gas in the reaction chamber and an interior surface contigu... | 10/10/2006 |
| 7109024 | Biomolecule-bound substrates This invention features a biomolecule-bound substrate that includes a support made of an organic polymer and having an unmodified surface; and a plurality of unmodified biomolecules immobilized on the unmodified surface. The organic polymer is acrylic resin, polypro... | 09/19/2006 |
| 7087119 | Atomic layer deposition with point of use generated reactive gas species An apparatus for atomic layer deposition preventing mixing of a precursor gas and an input gas. From the apparatus a flow of the input gas is provided over a surface of the workpiece wherein a beam of the electromagnetic radiation is directed into the input gas in c... | 08/08/2006 |
| 7057704 | System and method for programmable illumination pattern generation An apparatus providing programmable illumination pattern generation for the manipulation of colloidal particulates and biomolecules in suspension between electrodes, is disclosed. The apparatus implements LEAPS (Light-controlled electrokinetic assembly of particles ... | 06/06/2006 |
| 7041342 | Thin-film solar cells and method of making There are now provided thin-film solar cells and method of making. The devices comprise a low-cost, low thermal stability substrate with a semiconductor body deposited thereon by a deposition gas. The deposited body is treated with a conversion gas to provide a micr... | 05/09/2006 |
| 7014885 | Direct-write laser transfer and processing A device and method for depositing a material of interest onto a receiving substrate includes a first laser and a second laser, a receiving substrate, and a target substrate. The target substrate comprises a laser transparent support having a back surface and a fron... | 03/21/2006 |
| 7001672 | Laser based metal deposition of implant structures A method of depositing a hard wear resistant surface onto a porous or non-porous base material of a medical implant. The medical implant device formed by a Laser Based Metal Deposition (LBMD) method. The porous material of the base promotes bone ingrowth allowing th... | 02/21/2006 |
| 6994894 | Method and system for thick-film deposition of ceramic materials A method of depositing a solid film on a substrate in which a stream comprising particles suspended in a transport gas is moved through a heating zone. The particles are combined with the transport gas from a powder feeder operatively coupled to a gas flow tube. The... | 02/07/2006 |
| 6940223 | Film forming apparatus and method of manufacturing light emitting device The problem regarding volatileness of a solvent in an EL forming material, which occurs in adopting printing, are solved. An EL layer is formed in a pixel portion of a light emitting device by printing. Upon formation of the EL layer, a printing chamber is pressuriz... | 09/06/2005 |
| 6926933 | Method of manufacturing water-repelling film A water-repelling film is formed by using a vacuum ultraviolet rays chemical vapor deposition (CVD) system (100) comprising a vacuum ultraviolet rays generating section (102), a reaction room (106), and a window (104) for separating the r... | 08/09/2005 |
| 6838125 | Method of film deposition using activated precursor gases A method for depositing a film on a substrate is provided. In one aspect, the method includes providing a metal-containing precursor to an activation zone, and activating the metal-containing precursor to form an activated precursor. The activated precursor gas is t... | 01/04/2005 |
| 6803073 | Particle forming method A submicron particle forming method includes feeding a first set of precursors to a first energy application zone. Energy is applied to the first set of precursors in the first energy application zone effective to react and form solid particles having maximum diamet... | 10/12/2004 |
| 6797336 | Multi-component substances and processes for preparation thereof The present invention is a method and apparatus for the synthesis of multi-component substances, comprising entities of at least two elements, molecules, grains, crystals, structural units, or phases of matter, in which the scale of the distribution of the elements,... | 09/28/2004 |
| 6797341 | Method for producing boride thin films Thin films of conducting and superconducting materials are formed by a process which combines physical vapor deposition with chemical vapor deposition. Embodiments include forming boride films, such as magnesium diboride, in high purity with superconducting properti... | 09/28/2004 |
| 6793980 | Method of forming photo-catalytic film made of titanium oxide on base material and laminated material thereof A method of forming a photo-catalytic film made of titanium oxide on a base material based on a simple process at low temperatures, particularly a method of forming a laminated material comprising photo-catalytic film of titanium oxide formed on a base material is p... | 09/21/2004 |
| 6783811 | Method of reducing resistance for conductive film formed on base material A method of reducing resistance for a conductive film based on simple process at low temperatures, particularly a method of reducing resistance for a conductive film formed on a base of plastic resins is provided. A method of reducing resistance for a conductive fil... | 08/31/2004 |
| 6740368 | Beam shaped film pattern formation method When forming a beam shaped body by deposition using a focused ion beam device on the end of a sample, the present invention adopts a beam shaped film pattern formation method for irradiating the focused ion beam to a narrow strip shaped region from an open end of th... | 05/25/2004 |
| 6733848 | Thin film forming equipment and method A thin film forming equipment and a method for forming thin films are provided which are capable of forming the thin film of high quality and of effectively preventing CVD material gas from leaking to surroundings at a low cost. The thin film equipment contains a su... | 05/11/2004 |
| 6641863 | Method of forming thin film of inorganic solid electrolyte A method of producing a thin film of an inorganic solid electrolyte having a relatively high ionic conductance is provided. In the method, a thin film made of an inorganic solid electrolyte is formed, by a vapor deposition method, on a base member being h... | 11/04/2003 |
| 6596343 | Method and apparatus for processing semiconductor substrates with hydroxyl radicals A method for processing semiconductor substrates by reacting hydroxyl radicals with a precursor to cause the precursor to decompose and form a film which deposits on a substrate. Hydroxyl radicals, which are produced in a hydroxyl-ion producing apparatus ... | 07/22/2003 |
