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| Number | Title | Issue Date |
| 8142862 | Method of forming conformal dielectric film having Si-N bonds by PECVD A method of forming a conformal dielectric film having Si—N bonds on a semiconductor substrate by plasma enhanced chemical vapor deposition (PECVD) includes: introducing a nitrogen- and hydrogen-containing reactive gas and an additive gas into a reaction space ins... | 03/27/2012 |
| 8053037 | Device and method for patterning structures on a substrate A device for patterning structures on a substrate includes an imaging device having a scanning tip, a light emitting device, and a space around the scanning tip. The space comprises a vapor of a material which is suitable for Chemical Vapor Deposition onto the subst... | 11/08/2011 |
| 8039062 | Methods of atomic layer deposition using hafnium and zirconium-based precursors Methods of forming a metal-containing film by atomic layer deposition is provided. The methods comprise delivering at least one precursor to a substrate, wherein the at least one precursor corresponds in structure to Formula II: ... | 10/18/2011 |
| 7998538 | Electromagnetic control of chemical catalysis The present disclosure relates to methods and systems that provide heat, via at least Photon-Electron resonance, also known as excitation, of at least a particle utilized, at least in part, to initiate and/or drive at least one catalytic chemical reaction. In some i... | 08/16/2011 |
| 7914858 | Process to seal housing components to contain low density gas A method and apparatus for sealing disk drive housing castings and the resulting housings. A housing component of a data storage device is placed in an environment of decreased pressure where a first tank that is an autoclave is pressurized at a selected pressure an... | 03/29/2011 |
| 7910177 | Sequential pulse deposition A method for growing films on substrates using sequentially pulsed precursors and reactants, system and devices for performing the method, semiconductor devices so produced, and machine readable media containing the method. ... | 03/22/2011 |
| 7700166 | Process for evaporating high-melting materials A process for the evaporation of a high-melting material in an evaporator cell having a crucible for receiving the material to be evaporated, and a heating device with a heating resistor for the resistance heating of the crucible, the heating resistor being provided... | 04/20/2010 |
| 7595098 | Method and apparatus for depositing material on a substrate A method and apparatus for depositing material on a substrate is provided in which material (4) is deposited on a substrate (8) by arranging the material in a container (2), and contacting the surface of the material (4) with a beam of el... | 09/29/2009 |
| 7521097 | Reactive deposition for electrochemical cell production Light reactive deposition can be adapted effectively for the deposition of one or more electrochemical cell components. In particular, electrodes, electrolytes, electrical interconnects can be deposited form a reactive flow. In some embodiments, the reactive flow co... | 04/21/2009 |
| 7442413 | Methods and apparatus for treating a work piece with a vaporous element Methods and apparatus for controlling and delivering a vaporous element or compound, for example, selenium or sulfur, from a solid source to a work piece are provided. The methods and apparatus may be used in photovoltaic cell manufacturing. The apparatus may compri... | 10/28/2008 |
| 7435353 | Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing a beam of energ... | 10/14/2008 |
| 7427435 | Coating composition for adhering metallized layers to polymeric films A metallized film and a process for making the film are disclosed. In general, the metallized film includes a polymeric film layer that is coated with a polyester coating composition. A metal layer is then formed on top of the polyester coating. The polyester coatin... | 09/23/2008 |
| 7425223 | Method for preparing electrochemical device with a layer structure To provide an electrochemical device with a layer structure causing no deterioration of characteristics of materials, in the method for preparing an electrochemical device comprising a first current collector, a first electrode active material layer, a solid electro... | 09/16/2008 |
| 7407686 | Optical film, polarizing plate and display device utilising the film, and production method of optical film An optical film is disclosed having minimal curl, minimal coating unevenness and no cracks. The optical film is obtained by casting a dope comprising a cellulose ester and a non-chlorinated solvent on a metal support, the cellulose ester having a total acyl substitu... | 08/05/2008 |
| 7393392 | Hydrogen-permeable membrane and process for production thereof According to the present invention there is disclosed a hydrogen-permeable membrane which comprises a ceramic material composed of a nitride of aluminum (Al) and/or silicon (Si), an oxide of aluminum (Al) and/or silicon (Si), or a ... | 07/01/2008 |
| 7390381 | Information recording medium and method of manufacturing the same An information recording medium that is excellent in repeated-rewriting performance and is deteriorated less in crystallization sensitivity with time is provided, with respect to which high density recording can be carried out. A method of manufacturing the same als... | 06/24/2008 |
| 7387813 | Methods of preparation of hollow microstructures and nanostructures Structures in the nanoscale and mesoscale domain are provided. The structures typically have a shell which can be comprised of a porous polymeric material such as parylene. The surfaces of the shell can further comprise pendant functional groups that can provide rea... | 06/17/2008 |
| 7374941 | Active reactant vapor pulse monitoring in a chemical reactor A method and apparatus for determining changes in a supply system, designed to supply repeated pulses of a vapor phase reactant to a reaction chamber is disclosed. One embodiment involves providing the reactant source, and a gas conduit to connect the reactant sourc... | 05/20/2008 |
| 7372200 | Light-emitting device, method of manufacturing a light-emitting device, and electronic equipment The present invention uses plastic film in vacuum sealing an OLED. Inorganic insulating films which can prevent oxygen or water from being penetrated therein and an organic insulating film which has a smaller internal stress than that of the inorganic insulating fil... | 05/13/2008 |
| 7368382 | Atomic layer deposition methods The invention includes an atomic layer deposition method of forming a layer of a deposited composition on a substrate. The method includes positioning a semiconductor substrate within an atomic layer deposition chamber. On the substrate, an intermediate composition ... | 05/06/2008 |
| 7369905 | Method and apparatus for pressure and plasma control during transitions used to create graded interfaces by multi-step PECVD deposition A method and apparatus are provided for a graded PECVD process that continuously modulates a set of flow and pressure conditions while the plasma power is turned on and a film is being deposited. A feedback mechanism specific to a give deposition recipe is used to g... | 05/06/2008 |
| 7369828 | Electronically tunable quad-band antennas for handset applications An electronically tunable quad-band antenna which includes a tunable high band antenna tuned by at least one tunable varactor associated therewith; the tunable high band antenna further includes a substrate, a patch element on said substrate, at least one voltage tu... | 05/06/2008 |
| 7365341 | Gas cluster ion beam emitting apparatus and method for ionization of gas cluster An emitting apparatus 50 has a gas cluster generation chamber 2 and a nozzle 3 as means for generating a gas cluster and emitting the gas cluster to a processing object 10. A group of gas clusters jetted from the nozzle 3 is shaped... | 04/29/2008 |
| 7361406 | Ultra-high current density thin-film Si diode A combination of a thin-film μc-Si and a-Si:H containing diode structure characterized by an ultra-high current density that exceeds 1000 A/cm2, comprising: a substrate; a bottom metal layer disposed on the substrate; an n-layer of μc-Si deposited the b... | 04/22/2008 |
| 7351449 | Chemical vapor deposition methods for making powders and coatings, and coatings made using these methods Flame produced vapors for combustion chemical vapor deposition are redirected from the direction of the flame by differential atmospheric pressure, such as positive pressure provided by a blower or negative pressure provided by a vacuum. This allows, for example, lo... | 04/01/2008 |
| 7348042 | Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) The present invention relates to an enhanced sequential atomic layer deposition (ALD) technique suitable for deposition of barrier layers, adhesion layers, seed layers, low dielectric constant (low-k) films, high dielectric constant (high-k) films, and other conduct... | 03/25/2008 |
| 7347900 | Chemical vapor deposition apparatus and method A chemical vapor deposition (CVD) apparatus includes a process chamber where a deposition process is performed on a wafer. A gas supply assembly is mounted in the process chamber for supplying a process gas to the process chamber, and a vacuum pump is mounted in the... | 03/25/2008 |
| 7326446 | Method for coating metal surfaces and substrate having a coated metal surface A process for producing a coated substrate or a product having a coated substrate is provided. The process includes coating at least one metallic surface with a glass, the substrate being coated with an evaporation-coating glass at least on the metallic surface.... | 02/05/2008 |
| 7326445 | Method and apparatus for manufacturing ultra fine three-dimensional structure A method is adopted for deposition technology using a focused ion beam device, characterized by enabling structures to be formed by using phenanthrene as a source gas and using ions of gallium or gold, silicon or beryllium etc. of energies of 5 to 100 keV from a liq... | 02/05/2008 |
| 7323229 | Method and device for coating a substrate The invention relates to a method for coating a substrate with a layer of a material, such as a metal, in which a quantity of electrically conductive material is vaporized in a space with a low background pressure and energy is supplied to the material which is to b... | 01/29/2008 |
| 7311776 | Localized synthesis and self-assembly of nanostructures Systems and methods for local synthesis of silicon nanowires and carbon nanotubes, as well as electric field assisted self-assembly of silicon nanowires and carbon nanotubes, are described. By employing localized heating in the growth of the nanowires or nanotubes, ... | 12/25/2007 |
| 7311938 | Ultra low residual reflection, low stress lens coating A method is provided for coating optical lenses and other optical articles with anti-reflection (AR) coatings. The lenses have low reflectivity, provide a substantially white light reflection and have a low stress AR coating and are ideally suited for optical lenses... | 12/25/2007 |
| 7311942 | Method for binding halide-based contaminants during formation of a titanium-based film A method and apparatus are presented for reducing halide-based contamination within deposited titanium-based thin films. Halide adsorbing materials are utilized within the deposition chamber to remove halides, such as chlorine and chlorides, during the deposition pr... | 12/25/2007 |
| 7309269 | Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device In this embodiment, an interval distance between a desposition source holder 17 and an object on which deposition is performed (substrate 13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source hol... | 12/18/2007 |
| 7305836 | Cryogenic container and superconductivity magnetic energy storage (SMES) system A cryogenic container includes an inner vessel for containing a cryogenic fluid, and an outer vessel for insulating the cryogenic fluid from the environment. The inner vessel includes a superconductive layer formed of a material having superconducting properties at ... | 12/11/2007 |
| 7303789 | Methods for producing thin films on substrates by plasma CVD Methods are provided to form a thin film reproducibly in a process for forming the thin film on the inner wall surface facing a space formed in a substrate by plasma CVD. A thin film is produced on an inner wall surface of a substrate facing a space formed in the su... | 12/04/2007 |
| 7291357 | Thin film deposition method and thin film deposition apparatus A thin film deposition method for producing an optical film with an optical characteristic on a deposition substrate in a vacuum chamber is provided. The method may include preparing in the vacuum chamber a deposition source which is a source of the film producing m... | 11/06/2007 |
| 7288491 | Plasma immersion ion implantation process One method of performing plasma immersion ion implantation on a workpiece in a plasma reactor chamber includes initially depositing a seasoning film on the interior surfaces of the plasma reactor chamber before the workpiece is introduced, by introducing a seasoning... | 10/30/2007 |
| 7285312 | Atomic layer deposition for turbine components A method and superalloy component for depositing a layer of material onto gas turbine engine components by atomic layer deposition. A superalloy component may have a ceramic thermal barrier coating on at least a portion of its surface, comprising a superalloy substr... | 10/23/2007 |
| 7279078 | Thin-film coating for wheel rims A process for coating a non-uniform, thin-film, dichroic pattern to a wheel rim or motorcycle part. The thin-film coating adds a colored or iridescent pattern to the wheel rim or motorcycle part, while maintaining other characteristics, such as brilliance, shine, du... | 10/09/2007 |