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| Number | Title | Issue Date |
| 8158215 | Magnetic recording media and method of manufacturing the same, and magnetic recording/reproduction device A method of manufacturing magnetic recording media with a high areal recording density, in which there write bleeding during magnetic recording is eliminated by reducing insofar as possible the coercive force and remanent magnetization in areas between magnetic trac... | 04/17/2012 |
| 8119208 | Apparatus and method for focused electric field enhanced plasma-based ion implantation There is disclosed an apparatus and method for focused electric field enhanced plasma-based ion implantation. The apparatus includes an implantation chamber, a vacuum pump for maintaining the pressure in the implantation chamber at a desired level, a sample holder, ... | 02/21/2012 |
| 7943204 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation Methods of implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. A method of manufacturing a semiconductor device including implanting boron-containing ions using fluorinated boron-co... | 05/17/2011 |
| 7935393 | Method and system for improving sidewall coverage in a deposition system Embodiments of a method and system for improving the consistency of a layer or a plurality of layers with a desired profile in a deposition system are generally described herein. Other embodiments may be described and claimed. ... | 05/03/2011 |
| 7914857 | Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film with oxygen content of protective film based on bending characteristics of coated article There is provided a method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. The method may include heat treating a glass substr... | 03/29/2011 |
| 7858155 | Plasma processing method and plasma processing apparatus It is intended to provide a plasma processing method and apparatus capable of increasing the uniformity of amorphyzation processing. A prescribed gas is introduced into a vacuum container 1 from a gas supply apparatus 2 through a gas inlet 11... | 12/28/2010 |
| 7767269 | Method for coating a support with a material The invention concerns a method for coating a support (10) comprising a first material with a coating layer comprising a second material, including at least a phase (A, A′) for deposition of a layer of given thickness of coherent material (11, 13) on... | 08/03/2010 |
| 7604846 | Manufacturing method of colored diamond by ion implantation and heat treatment The present invention relates to a manufacturing method of colored diamond and, more particularly, to a manufacturing method of colored diamond by ion implantation and heat treatment. The manufacturing method comprises a first step of implanting ions to the surface ... | 10/20/2009 |
| 7465478 | Plasma immersion ion implantation process A method of processing a workpiece includes placing the workpiece on a workpiece support pedestal in a main chamber with a gas distribution showerhead, introducing a process gas into a remote plasma source chamber and generating a plasma in the remote plasma source ... | 12/16/2008 |
| 7425353 | Enhancement of magnetic media recording performance using ion irradiation to tailor exchange coupling Magnetic medium recording performance can be enhanced by irradiating a magnetic medium with ions having an acceleration voltage of between 10 keV and 100 keV to induce exchange coupling between grains of the magnetic medium. The magnetic medium is exposed to a cumul... | 09/16/2008 |
| 7419546 | Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof A method for forming a noble metal coating on a gas diffusion medium substantially free of ionomeric components comprising subjecting an electrically conductive web to a first ion beam having an energy not higher than 500 eV, then to a second beam having an energy o... | 09/02/2008 |
| 7417241 | Ion implantation method and method for manufacturing semiconductor device An object of the present invention is to provide an ion implantation method for shortening a down time of an ion implantation apparatus after exposure of a chamber and for improving throughput and a method for manufacturing a semiconductor device. Specifically, the ... | 08/26/2008 |
| 7410890 | Formation of doped regions and/or ultra-shallow junctions in semiconductor materials by gas-cluster ion irradiation Method of forming one or more doped regions in a semiconductor substrate and semiconductor junctions formed thereby, using gas cluster ion beams. ... | 08/12/2008 |
| 7404981 | Printing electronic and opto-electronic circuits A method is provided for printing electronic and opto-electronic circuits. The method comprises: (a) providing a substrate; (b) providing a film-forming precursor species; (c) forming a substantially uniform and continuous film of the film-forming precursor species ... | 07/29/2008 |
| 7390527 | Method for manufacturing a nanostructure at a predetermined point on supporting carrier A method is for manufacturing a nanostructure in-situ, at least one predetermined point on a supporting carrier. The method includes choosing a suitable material for a substrate in the carrier, creating the substrate, and preparing a template on the substrate so tha... | 06/24/2008 |
| 7389580 | Method and apparatus for thin-film battery having ultra-thin electrolyte A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is suppl... | 06/24/2008 |
| 7361421 | Lubricant, magnetic recording medium and production method of magnetic recording medium A lubricant is obtained by mixing at least one compound selected from specific fluorine-based diester dicarboxylic acid compounds having has two carboxyl groups, two ester bonds, terminal groups each of which is an alkyl group or an alkenyl group, and one fluoroethe... | 04/22/2008 |
| 7351986 | Method and apparatus for reducing cross contamination of species during ion implantation A wafer support for an ion implanter includes a wafer holder and a support arm for the holder in the implant chamber. A portion of the support arm adjacent the wafer holder is at least intermittently exposed to the ion beam during implantation, as a result of the re... | 04/01/2008 |
| 7351987 | Irradiation system with ion beam An irradiation system comprises a beam generation source, a mass analysis device, a beam transformer, a deflector for scanning which swings the beam reciprocally, a beam parallelizing device, an acceleration/deceleration device, and an energy filtering device. Accor... | 04/01/2008 |
| 7344760 | Wear-resistant electrically conductive body A method for making a wear-resistant electrically conductive body having an electrically conductive diamond-like carbon coating, by ion-accelerating copper ions from a copper ion source onto a negatively charged electrically conductive body, and simultaneously ion-a... | 03/18/2008 |
| 7341876 | Anti-parallel tab sensor fabrication A method for fabricating a sensor having anti-parallel tab regions. The method includes forming a free layer having tab areas on opposite sides of an active area, forming a first layer of a carbon composition above the active area of the free layer, the first layer ... | 03/11/2008 |
| 7338683 | Superconductor fabrication processes A method of forming a superconductive device is provided, including providing a substrate having a dimension ratio of not less than about 102, depositing a buffer film to overlie the substrate by ion beam assisted deposition utilizing and ion beam, monito... | 03/04/2008 |
| 7335611 | Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer A method of forming a conductor in a thin film structure on a semiconductor substrate includes forming high aspect ratio openings in a base layer having vertical side walls, depositing a dielectric barrier layer comprising a dielectric compound of a barrier metal on... | 02/26/2008 |
| 7327000 | Patterned thin film graphite devices and method for making same In a method of making graphite devices, a preselected crystal face of a crystal is annealed to create a thin-film graphitic layer disposed against selected face. A preselected pattern is generated on the thin-film graphitic layer. A functional structure includes a c... | 02/05/2008 |
| 7326937 | Plasma ion implantation systems and methods using solid source of dopant material Plasma ion implantation apparatus includes a process chamber, a platen located in the process chamber for supporting a substrate, a dopant source including a solid dopant element and a vaporizer to vaporize dopant material from the solid dopant element, a plasma sou... | 02/05/2008 |
| 7323228 | Method of vaporizing and ionizing metals for use in semiconductor processing Techniques for vaporizing and handling a vaporized metallic element or metallic element salt with a heated inert carrier gas for further processing. The vaporized metallic element or salt is carried by an inert carrier gas heated to the same temperature as the vapor... | 01/29/2008 |
| 7323401 | Semiconductor substrate process using a low temperature deposited carbon-containing hard mask A method of processing a thin film structure on a semiconductor substrate using an optically writable mask includes placing the substrate in a reactor chamber, the substrate having on its surface a target layer to be etched in accordance with a predetermined pattern... | 01/29/2008 |
| 7320815 | Method for forming oriented film, oriented film, substrate for electronic device, liquid crystal panel, and electronic device A method for forming an oriented film is provided for forming an oriented film on a base material by irradiating the surface of the base material where the oriented film will be formed with an ion beam comprising nitrogen ions from a direction inclined at a prescrib... | 01/22/2008 |
| 7312148 | Copper barrier reflow process employing high speed optical annealing A method of forming a barrier layer for a thin film structure on a semiconductor substrate includes forming high aspect ratio openings in a base layer having vertical side walls, depositing a dielectric barrier layer comprising a dielectric compound of a barrier met... | 12/25/2007 |
| 7312162 | Low temperature plasma deposition process for carbon layer deposition A method of depositing a carbon layer on a workpiece includes placing the workpiece in a reactor chamber, introducing a carbon-containing process gas into the chamber, generating a reentrant toroidal RF plasma current in a reentrant path that includes a process zone... | 12/25/2007 |
| 7303789 | Methods for producing thin films on substrates by plasma CVD Methods are provided to form a thin film reproducibly in a process for forming the thin film on the inner wall surface facing a space formed in a substrate by plasma CVD. A thin film is produced on an inner wall surface of a substrate facing a space formed in the su... | 12/04/2007 |
| 7300684 | Method and system for coating internal surfaces of prefabricated process piping in the field The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece. A source gas is introduced at an entrance opening, while a vacuum sou... | 11/27/2007 |
| 7294404 | Graded photocatalytic coatings The invention provides graded photocatalytic coatings. In one aspect, the invention provides a substrate carrying a photocatalytic coating that includes a first graded film region and a second graded film region. The first graded film region has a substantially cont... | 11/13/2007 |
| 7294209 | Apparatus and method for depositing material onto a substrate using a roll-to-roll mask A battery-operated device provided on a thin-film battery and a method for making. Some embodiments provide a system that includes a vacuum chamber, a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that suppli... | 11/13/2007 |
| 7270854 | Method for forming a head having improved spin valve properties A method for forming a magnetic head having an improved PtMn layer, including forming a PtMn layer by ion beam deposition, forming an antiparallel (AP) pinned layer structure above the PtMn layer, and forming a free layer above the AP pinned layer structure. The met... | 09/18/2007 |
| 7264741 | Coater having substrate cleaning device and coating deposition methods employing such coater A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a... | 09/04/2007 |
| 7258741 | System and method for producing synthetic diamond Synthetic monocrystalline diamond compositions having one or more monocrystalline diamond layers formed by chemical vapor deposition, the layers including one or more layers having an increased concentration of one or more impurities (such as boron and/or isotopes o... | 08/21/2007 |
| 7255744 | Low-resistivity -type semiconductor diamond and method of its manufacture Concerns lithium-doped diamond: Low-resistivity n-type semiconductor diamond doped with lithium and nitrogen, and a method of manufacturing such diamond are provided. Low-resistivity n-type semiconductor diamond containing 1017 cm−3 or... | 08/14/2007 |
| 7250196 | System and method for plasma plating An exemplary system and method for plasma plating are provided to generate a deposition layer on a substrate. The method for plasma plating includes positioning a substrate within a vacuum chamber, positioning a depositant in a filament within the vacuum chamber, re... | 07/31/2007 |
| 7235801 | Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby A grazing incidence mirror includes a mirror substrate and a mirror surface layer, the mirror surface layer including a first layer and a second layer, the first layer being positioned between the mirror substrate and the second layer. The first layer includes a mat... | 06/26/2007 |
