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Class 427/509 - Vapor deposition utilized


Subclass of Class 427 - Coating processes
Definition: Processes wherein the coating material is deposited as a
No. of patents: 124
Last issue date: 02/01/2011


1        
NumberTitleIssue Date
7879410Method of fabricating an electrochemical device using ultrafast pulsed laser deposition
A method of fabricating a multi-layered thin film electrochemical device is provided. The method comprises: providing a first target material in a chamber; providing a substrate in the chamber; emitting a first intermittent laser beam directed at the first target ma...
02/01/2011
7776406Optical materials and optical devices
Nanoscale particles, particle coatings/particle arrays and corresponding consolidated materials are described based on an ability to vary the composition involving a wide range of metal and/or metalloid elements and corresponding compositions. In particular, metallo...
08/17/2010
7470454Non-thermal process for forming porous low dielectric constant films
Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same. In certain embodiments of the invention, there is provided a low-temperatu...
12/30/2008
7387813Methods of preparation of hollow microstructures and nanostructures
Structures in the nanoscale and mesoscale domain are provided. The structures typically have a shell which can be comprised of a porous polymeric material such as parylene. The surfaces of the shell can further comprise pendant functional groups that can provide rea...
06/17/2008
7373259Method and apparatus for performing chemical reactions in a plurality of samples
A method and apparatus for simultaneously performing chemical reactions and determining molecular transport dynamics on a plurality of samples such as thin film samples. The apparatus of the present invention is capable of containing multiple samples in individual s...
05/13/2008
7300743Radiation durable organic compounds with high transparency in the vacuum ultraviolet, and method for preparing
This invention concerns radiation durable organic compositions which are well-suited for use in 157 nm lithography by virtue of their high transparency and excellent radiation durability, and to a process for the preparation thereof. ...
11/27/2007
7294364Method for curing composite materials
A curing light system useful for curing light activated composite materials is disclosed. Various configurations of light emitting semiconductor chips and heat sinks are disclosed, as well as various structures and methods for driving, controlling and using them.
11/13/2007
7288014Design, fabrication, testing, and conditioning of micro-components for use in a light-emitting panel
A method of forming micro-components is disclosed. The method includes pretesting and conditioning of the micro-components. The micro-components that fail testing or conditioning are discarded, and those remaining are assembled into a panel. ...
10/30/2007
7282190Silicon layer production method and solar cell production method
A solar cell is produced by dipping a multicrystalline silicon substrate 28 in a solution 24 containing silicon, growing a silicon layer on the substrate 28 while decreasing with time the temperature drop rate of the solution during the dipping ...
10/16/2007
7220318Semiconductor device manufacturing apparatus and semiconductor device manufacturing method
A semiconductor device manufacturing apparatus which uses a thermal CVD reaction to deposit a film onto a substrate has a ring with an electrode terminal that makes contact with either the substrate or the deposited film thereon, a power supply that applies a curren...
05/22/2007
7201937Methods for forming composite coatings on MEMS devices
The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated te...
04/10/2007
7189917Stacked photovoltaic device
To provide a stacked photovoltaic device including: at least one pair of a first photovoltaic device and a second photovoltaic device stacked in order from a light incident side; and a selective reflection layer formed between the at least one pair of the first phot...
03/13/2007
7140941Liquid manufacturing processes for panel layer fabrication
A method for manufacturing a light-emitting panel sandwiches a plurality of micro-components between two flexible substrates in a web configuration. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large voltage is supplie...
11/28/2006
7137857Method for manufacturing a light-emitting panel
An improved light-emitting panel having a plurality of micro-components sandwiched between two subtrates is disclosed. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large voltage is supplied across the micro-component v...
11/21/2006
7125305Light-emitting panel and a method for making
An improved light-emitting panel having a plurality of micro-components sandwiched between two substrates is disclosed. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large voltage is supplied across the micro-component ...
10/24/2006
7112351Methods and apparatus for vacuum thin film deposition
The present invention provides a polymer coating method. In the method, in a vacuum chamber, a low temperature monomer evaporation chamber is used to heat a liquid monomer and a cooled substrate at a temperature lower than the liquid monomer reservoir or vapor. The ...
09/26/2006
7049233Apparatus and method for manufacturing thin film electrode of hydrous ruthenium oxide
An apparatus and method are provided for manufacturing an electrode of hydrous ruthenium oxide thin film, consisting of an injector for spraying a precursor solution, a substrate for depositing the precursor solution, a base for supporting the substrate and a haloge...
05/23/2006
7033939Chemistry for chemical vapor deposition of titanium containing films
Titanium-containing films exhibiting excellent uniformity and step coverage are deposited on semiconductor wafers in a cold wall reactor which has been modified to discharge plasma into the reaction chamber. Titanium tetrabromide, titanium tetraiodide, or titanium t...
04/25/2006
7026635Particle beam processing apparatus and materials treatable using the apparatus
Methods, and materials made by the methods, are provided herein for treating materials with a particle beam processing device. According to one illustrative embodiment, a method for treating a material with a particle beam processing device is provided that includes...
04/11/2006
7025648Liquid manufacturing processes for panel layer fabrication
A method for manufacturing a light-emitting panel sandwiches a plurality of micro-components between two flexible substrates in a web configuration. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large voltage is supplie...
04/11/2006
7011868Fluorine-free plasma curing process for porous low-k materials
Low dielectric constant porous materials with improved elastic modulus and material hardness. The process of making such porous materials involves providing a porous dielectric material and plasma curing the porous dielectric material with a fluorine-free plasma gas...
03/14/2006
7007974Airbag for a restraint system in motor vehicles
An airbag for a restraint system in motor vehicles comprises a wall made of fabric. One surface of the fabric is subjected to a plasma treatment in order to increase the heat resistance of the fabric. There is also proposed a method of producing such airbag and a me...
03/07/2006
7005161Vapor deposition of solid oligomers
A monomer is selected to produce a polymeric film having desirable characteristics for a particular application. The monomer is ppolymerized under controlled conditions to produce a solid oligomer having those characteristics at a molecular weight suitable for evapo...
02/28/2006
7005793Socket for use with a micro-component in a light-emitting panel
An improved light-emitting panel having a plurality of micro-components at least partially disposed in a socket and sandwiched between two substrates is disclosed. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large vol...
02/28/2006
6982206Mechanism for improving the structural integrity of low-k films
According to one embodiment, a method of forming a low-k dielectric composite film is provided. A low-k interconnect dielectric layer is strengthened by forming whiskers in the low-k film. The whiskers are formed simultaneously with the low-k layer. In one embodimen...
01/03/2006
6977138Reactive polymer coatings
A method for coating of variable substrates with highly reactive polymers. Its combination with microcontact printing is used for generating several devices such as patterned arrays of ligands for high throughput screening. ...
12/20/2005
6975068Light-emitting panel and a method for making
An improved light-emitting panel having a plurality of micro-components sandwiched between two substrates is disclosed. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large voltage is supplied across the micro-component ...
12/13/2005
6935913Method for on-line testing of a light emitting panel
A method of testing a light-emitting panel and the component parts therein including an assembled web containing light-emitting micro-components is disclosed. The method utilizes radiometric measuring devices disposed throughout a continuous fabrication process. Qua...
08/30/2005
6929864Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
A film contains first and second metal or metal alloy layers separated by a crosslinked polymeric spacing layer whose thicknesses are such that the film is extensible visible light-transmissive and infrared reflective. The film can be joined or laminated into glazin...
08/16/2005
6930025Transparent conductive film formation process, photovoltaic device production process, transparent conductive film, and photovoltaic device
In a process for forming on a substrate a transparent conductive film having crystallizability, the process comprises a first step of forming a film at a first film formation rate and a second step of forming a film at a second film formation rate, and the relations...
08/16/2005
6913796Plasma curing process for porous low-k materials
Low dielectric constant porous materials with improved elastic modulus and hardness. The process of making such porous materials involves providing a porous dielectric material and plasma curing the porous dielectric material to produce a plasma cured porous dielect...
07/05/2005
6903161Low-acid ethylene copolymers for improving the adhesion of LDPE to aluminum foil in extrusion coating
This invention relates to a low-density polyethylene composition useful for coating polar substrates. This invention particularly relates to a low-density polyethylene composition useful for coating metal foils, wherein the composition comprises an ethylene/(meth)ac...
06/07/2005
6902456Socket for use with a micro-component in a light-emitting panel
An improved light-emitting panel having a plurality of micro-components at least partially disposed in a socket and sandwiched between two substrates is disclosed. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large vol...
06/07/2005
6811829Method of making a coating of a microtextured surface
A method for conformally coating a microtextured surface. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge polymer precursor plasma from the evaporate, cryoc...
11/02/2004
6803073Particle forming method
A submicron particle forming method includes feeding a first set of precursors to a first energy application zone. Energy is applied to the first set of precursors in the first energy application zone effective to react and form solid particles having maximum diamet...
10/12/2004
6793978Method and device for coating at least one wiper-blade element
The invention is based on a method for coating at least one wiper blade element (10) made of an elastomer material, in which first, the surface of the wiper blade element (10) is cleaned and activated by means of a plasma, and then in a CVD process, a ...
09/21/2004
6767590Poled plasma deposition
A poled polymer material is formed on the surface of a substrate by poling a nonlinear optical reactant during a plasma polymerizing deposition of the reactant onto the surface. The substrate is fixed between the positive plasma-generating and ground electrodes in a...
07/27/2004
6756074Methods for the deposition and curing of coating compositions
Systems and methods for creating a combinatorial coating library including a coating system operatively coupled to at least one of a plurality of materials suitable for forming at least one coating layer on a surface of one or more substrates. The systems and method...
06/29/2004
6703296Method for forming metal salicide
A method for forming a metal salicide layer on a shallow junction is described. A substrate having a gate structure thereon and a shallow junction therein is provided. An atomic layer deposition (ALD) process is then performed to deposit a tungsten salici...
03/09/2004
6682782Organic compound having an acetylene group, vacuum deposition polymerization thereof, deposited polymerized thin film, and electroluminescence device containing same
The present invention relates to an organic compound having acetylene group(s), a thin film formed by vacuum deposition polymerization using said organic compound, vacuum deposition polymerization to form said thin film, and an electroluminescence device ...
01/27/2004
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