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Class 427/497 - Vapor deposition utilized


Subclass of Class 427 - Coating processes
Definition: Processes wherein a coating material is deposited as a gas,
No. of patents: 87
Last issue date: 08/31/2010


1      
NumberTitleIssue Date
7785671Thermal barrier coating system and method of manufacturing the same
A thermal barrier coating system comprising a metal substrate, a metal bonding layer and a ceramics thermal barrier layer wherein the ceramics thermal barrier layer has a columnar structure of a stabilized zirconia containing a stabilizer or a stabilized ZrO2
08/31/2010
7419546Gas diffusion electrodes, membrane-electrode assemblies and method for the production thereof
A method for forming a noble metal coating on a gas diffusion medium substantially free of ionomeric components comprising subjecting an electrically conductive web to a first ion beam having an energy not higher than 500 eV, then to a second beam having an energy o...
09/02/2008
7351449Chemical vapor deposition methods for making powders and coatings, and coatings made using these methods
Flame produced vapors for combustion chemical vapor deposition are redirected from the direction of the flame by differential atmospheric pressure, such as positive pressure provided by a blower or negative pressure provided by a vacuum. This allows, for example, lo...
04/01/2008
7348041Antireflection film made of a CVD SiOfilm containing a fluoro and/or alkyl modifier
A low refractive index SiO2 film is provided which uses a starting material for forming an SiO2 film and has a lower refractive index than the conventional SiO2 film. A starting material gas comprising a gas containing a fluorine ato...
03/25/2008
7335979Device and method for tilted land grid array interconnects on a coreless substrate package
An article of manufacture and system, as well as fabrication methods therefore, may include a plurality of lands disposed on a surface of a substrate wherein the lands are oriented at an angle to the surface of the substrate and further wherein the substrate is form...
02/26/2008
7326446Method for coating metal surfaces and substrate having a coated metal surface
A process for producing a coated substrate or a product having a coated substrate is provided. The process includes coating at least one metallic surface with a glass, the substrate being coated with an evaporation-coating glass at least on the metallic surface....
02/05/2008
7300538Spinning disk evaporator
Liquid organic material is controllably delivered to a receptacle located in the center of a heated surface capable of horizontally rotating about its central axis. As the heated surface rotates, material deposited within the central receptacle is forced outwardly a...
11/27/2007
7285748Flexible heater device
The heating device includes a conductive layer which is positioned on an electrically insulative substrate. Preferably, the conductive layer is screen printed onto the substrate. The substrate is designed to limit elongation of the conductive layer, thereby improvin...
10/23/2007
7267848Method of fabricating a protective film by use of vacuum ultraviolet rays
In a method of fabricating a protective film, a vacuum ultraviolet radiation CVD (Chemical Vapor Deposition) system is used. The method includes providing a vacuum ultraviolet rays generator, a reactor provided with a platform for supporting a substrate, a heat reta...
09/11/2007
7258901Directed growth of nanotubes on a catalyst
A nanostructure is fabricated using charged particle deposition to deposit a catalyst on a substrate. A charged particle beam is directed to location on the substrate where the catalyst is to be deposited, with a beam-activated precursor gas also being directed to t...
08/21/2007
7220604Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those
The invention relates to a method for enabling repair of a defect in a substrate, particularly the invention provides a method and apparatus for enabling repair of a pattern shape in a semiconductor device, which has not been able to be practiced because of lack of ...
05/22/2007
7208195Methods and apparatus for deposition of thin films
A method for depositing a thin film includes the steps of providing a vapor including at least one selected vapor phase component into an evacuated chamber and condensing the vapor onto a heated substrate to form a liquid phase deposit wherein a temperature of the s...
04/24/2007
7195797High throughput high-yield vacuum deposition system
A vacuum deposition system has been designed to produce thin film based demultiplexers with high throughput and production yields of greater than 25% for use in Dense Wavelength Division Multiplexer (DWDM) systems. The system employs a dense array of high yield fixt...
03/27/2007
7189436Flash evaporation-plasma coating deposition method
The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic material comprising at least one component from at least one source, wher...
03/13/2007
7175888Mischmetal oxide TBC
The present invention is a turbine engine component comprising a superalloy substrate, a bond coat overlying the substrate having a thickness in the range of about 0.0005 inch to about 0.005 inch, a thin alumina scale overlying the bond coat, and a thermal barrier c...
02/13/2007
7148555Method for enhancing electrode surface area in DRAM cell capacitors
Methods for forming the lower electrode of a capacitor in a semiconductor circuit, and the capacitors formed by such methods are provided. The lower electrode is fabricated by forming a texturizing underlayer and then depositing a conductive material thereover. In o...
12/12/2006
7112351Methods and apparatus for vacuum thin film deposition
The present invention provides a polymer coating method. In the method, in a vacuum chamber, a low temperature monomer evaporation chamber is used to heat a liquid monomer and a cooled substrate at a temperature lower than the liquid monomer reservoir or vapor. The ...
09/26/2006
7067414Low k interlevel dielectric layer fabrication methods
A low k inter-level dielectric layer fabrication method includes providing a substrate having integrated circuitry at least partially formed thereon. An oxide-comprising inter-level dielectric layer including carbon and having a dielectric constant no greater than 3...
06/27/2006
7067781Single ply paper product, method for manufacturing, and article
In an embodiment, the invention is a single ply paper product with a paper substrate having a first surface and a second surface and a web of fibers sufficiently refined to have a Canadian Standard Freeness value of greater than about 100 cm3 according to...
06/27/2006
7067955Method for making potassium niobate thin film, surface acoustic wave element, frequency filter, frequency oscillator, electronic circuit and electronic apparatus
A method is provided for forming a potassium niobate thin film in which, in a process of manufacturing a surface acoustic wave element, a conductive thin film included in the surface acoustic wave element is used as an electrode for applying an electric field to the...
06/27/2006
7052019Piston ring and method of manufacturing the same
A manufacturing method of a piston ring is developed, wherein the method provides a countermeasure for wear of butt ends of the ion plating film coated piston ring and a countermeasure for breakage of the piston ring and the piston ring manufactured at a low cost. A...
05/30/2006
6956098High modulus polyimide compositions useful as dielectric substrates for electronics applications, and methods relating thereto
The substrates of the present invention comprise a polyimide base polymer derived at least in part from collinear monomers together with crankshaft monomers. The resulting polyimide material has been found to provide advantageous properties, particularly for electro...
10/18/2005
6942903Thin film, method and apparatus for forming the same, and electronic component incorporating the same
A method for forming a thin film includes the steps of: supplying a deposition material in the form of a liquid onto a heated surface; heating and vaporizing the deposition material on the heated surface while the deposition material is undergoing movement; and depo...
09/13/2005
6921722Coating, modification and etching of substrate surface with particle beam irradiation of the same
There is provided a method of performing a surface treatment, such as coating, denaturation, modification and etching, on a surface of a substrate. The method comprises the steps of bringing a surface treatment gas into contact with a surface of a substrate, and irr...
07/26/2005
6855370Fluoropolymer interlayer dielectric by chemical vapor deposition
A process is disclosed for forming a fluoropolymer layer on a thin film device, comprising contacting said thin film device with a gas phase fluoromonomer, and initiating polymerization of said fluoromonomer with a free radical polymerization initiator whereby said ...
02/15/2005
6811829Method of making a coating of a microtextured surface
A method for conformally coating a microtextured surface. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge polymer precursor plasma from the evaporate, cryoc...
11/02/2004
6793978Method and device for coating at least one wiper-blade element
The invention is based on a method for coating at least one wiper blade element (10) made of an elastomer material, in which first, the surface of the wiper blade element (10) is cleaned and activated by means of a plasma, and then in a CVD process, a ...
09/21/2004
6756074Methods for the deposition and curing of coating compositions
Systems and methods for creating a combinatorial coating library including a coating system operatively coupled to at least one of a plurality of materials suitable for forming at least one coating layer on a surface of one or more substrates. The systems and method...
06/29/2004
6710098Methods for reforming polymer surface for improved wettability
The present invention relates to a method for reforming the surface of polymer, especially to a method for providing hydrophilicity or increasing hydrophobicity by reforming the surface of polymer or polymer membrane. The present invention is a method for reforming ...
03/23/2004
6682782Organic compound having an acetylene group, vacuum deposition polymerization thereof, deposited polymerized thin film, and electroluminescence device containing same
The present invention relates to an organic compound having acetylene group(s), a thin film formed by vacuum deposition polymerization using said organic compound, vacuum deposition polymerization to form said thin film, and an electroluminescence device ...
01/27/2004
6660339Process for hydrophobic treatment of water vapor permeable substrates
The present invention relates to a process, preferably a continuous process, of coating a substrate, which allows water vapor and preferably air permeation, with a hydrophobic coating. The process preferably uses a thin film vacuum condensation step to cr...
12/09/2003
6656537Plasma enhanced chemical deposition with low vapor pressure compounds
A method for plasma enhanced chemical vapor deposition of low vapor monomeric materials. The method includes flash evaporating a polymer precursor forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge polymer ...
12/02/2003
6627267Plasma enhanced chemical deposition with low vapor pressure compounds
A method for plasma enhanced chemical vapor deposition of low vapor pressure monomeric materials. The method includes making an evaporate by receiving a plurality of monomeric particles of the low vapor pressure monomeric materials as a spray into a flash...
09/30/2003
6613395Method of making molecularly doped composite polymer material
A method of making a composite polymer of a molecularly doped polymer. The method includes mixing a liquid polymer precursor with molecular dopant forming a molecularly doped polymer precursor mixture. The molecularly doped polymer precursor mixture is fl...
09/02/2003
6596655Plasma processes for depositing low dielectric constant films
A method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas at a constant RF power level from about 10W to about 200W or a pulsed RF power level from about 20W to about 500W. Dissociat...
07/22/2003
6576567Film deposition method and apparatus for semiconductor devices
In a film deposition method of depositing a film by adhering an organometallic fluid onto a to-be-processed body such as a semiconductor wafer and causing a pyrolytic decomposition reaction to occur, an organic solvent such as heptadecane is first applied...
06/10/2003
6569534Optical material and optical element using the same
An optical material including a crystalline silicon and Fex Si2 in the form of dots, islands, or a film is provided. The Fex Si2 has a symmetrical monoclinic crystalline structure belonging to the P21...
05/27/2003
6544600Plasma enhanced chemical deposition of conjugated polymer
A method for making conjugated polymers. The method includes flash evaporating a conjugated material forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge conjugated material plasma from the evaporate, and cry...
04/08/2003
6509065Plasma enhanced chemical deposition of conjugated polymer
The method of the present invention has the steps of (a) flash evaporating a conjugated material in an evaporate outlet forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from ...
01/21/2003
6497924Method of making non-linear optical polymer
A method for making a non-linear optical polymer layer. The method includes flash evaporating a liquid polymer precursor mixture containing a plurality of non-linear optical molecules forming an evaporate, cryocondensing the evaporate on a substrate formi...
12/24/2002
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