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Class 427/249.11 - Hot filament utilized


Subclass of Class 427 - Coating processes
Definition: Process which include forming the diamond coating by using
No. of patents: 51
Last issue date: 06/01/2010


1    
NumberTitleIssue Date
7727590Robust filament assembly for a hot-wire chemical vapor deposition system
A hot wire chemical vapor deposition apparatus comprises a vacuum chamber, a substrate support member located in the vacuum chamber, a filament assembly support member located in the vacuum chamber, a precursor gas inlet located in the vacuum chamber and a device fo...
06/01/2010
7410669Process and apparatus for the coating or modification of surfaces
In a process according to the invention and an apparatus according to the invention for the coating or modification of a surface a flow of a first gaseous phase or of a first aerosol comprising one or more precursor compounds is guided along a heated filament so tha...
08/12/2008
7404980Method for producing an addressable field-emission cathode and an associated display structure
The inventive method relates to microelectronic and consists in the application of an emission layer to elements of an addressable field-emission electrode with the aid of a gas-phase synthesis method in a hydrogen flow accompanied by a supply of a carbonaceous gas....
07/29/2008
7220168Processes for producing a whetstone and whetstone pellets with uniform abrasion layers
A whetstone pellet 1 is composed of a columnar base body 2 to be fixed on a pedestal 9, and an abrasive grain part 5 containing numerous abrasive grains formed by electroless plating on an end surface 3 of the base body 2. U...
05/22/2007
7160616DLC layer system and method for producing said layer system
The invention describes a device and a process that render possible the production of a layer system for wear protection, corrosion protection and improvement of the slipping properties and the like with an adhesion layer to be arranged on a substrate, a transition ...
01/09/2007
7118782Method for manufacturing diamond coatings
A method of manufacturing diamond coatings, at low temperature and low pressure on a substrate utilizing chemical vapor transport (CVT) comprising the steps of: providing a wire-wrapped graphite assembly component and the substrate into a chamber; filling the chambe...
10/10/2006
6981465Chemical vapor deposition process and apparatus thereof
The present invention is related to an apparatus for forming diamond via a chemical vapor deposition process using hot metal filament based on hydrogen and methane gas, and a method thereof. In particular, the present invention provides an apparatus for using the ho...
01/03/2006
6933018Processes for producing a whetstone and whetstone pellets with uniform abrasion layers
A process for producing a whetstone, wherein a whetstone pellet is composed of at least one columnar base body fixed on a pedestal, and an abrasive grain part, formed on an end surface of the base body, containing numerous abrasive grains formed by electroless plati...
08/23/2005
6863938Filled diamond foam material and method for forming same
A diamond foam article comprises diamond deposited material on a substrate having an open contiguous structure at least partially filled with a filler material. Methods for forming a diamond foam article comprise providing a foam substrate; preparing the foam substr...
03/08/2005
6656339Method of forming a nano-supported catalyst on a substrate for nanotube growth
Methods of forming a nano-supported catalyst on a substrate and at least one carbon nanotube on the substrate are comprised of configuring a substrate with an electrode (102), immersing the substrate with the electrode into a solvent containing a first me...
12/02/2003
6582780Substrate support for use in a hot filament chemical vapor deposition chamber
A carbon deposition chamber is provided with several advantages. The substrate and the heating filaments are cooled to a temperature to prevent carbonization by permitting a cooling fluid to be passed through tubing connected to these elements in a heat s...
06/24/2003
6558742Method of hot-filament chemical vapor deposition of diamond
A method of forming diamond crystals and diamond films from a dissociated precursor solution of methanol and at least one carbon containing compound having a carbon to oxygen ration of greater than one is disclosed. The A hot filament is applied to dissoc...
05/06/2003
6528115Hard carbon thin film and method of forming the same
A hard carbon thin film formed on a substrate has a graded structure in which a ratio of sp2 to sp3 carbon-carbon bonding in the thin film decreases in its thickness direction from a thin film/substrate interface toward a surface of ...
03/04/2003
6511700CVD diamond burrs for odontological and related uses
A process for making CVD diamond burrs, mills and files of odontological and relates uses, for boring, abrading and machining teeth, glass, ceramics, metals, etc. A CVD diamond deposition method and gas mixture deposits a CVD diamond as a thin or thick fi...
01/28/2003
6506451Composite structure and process for producing it
A composite structure having a substantially monocrystalline growth substrate and at least one monocrystalline or polycrystalline layer of diamond or diamond-like material arranged on a surface of the growth substrate, the surface of the growth substrate ...
01/14/2003
6472062Method for making a non-sticking diamond-like nanocomposite
An improved non-sticking diamond-like nanocomposition includes networks of a-C:H and a-Si:O, wherein the H-concentration is between 85% and 125% of the C-concentration. The composition includes preferably 25 to 35 at % of C, 30 to 40 at % of H, 25 to 30 a...
10/29/2002
6432206Heating element for use in a hot filament chemical vapor deposition chamber
A carbon deposition chamber is provided with several advantages. The heating filaments are permitted to expand and contract without breakage by permitting the electrode attached to one end of the filaments to move freely as the filaments change in length....
08/13/2002
6365230Method of manufacturing a diamond film coated cutting tool
In order to provide an excellent toughness and a sufficient adhesive force without any limit in the content of other carbides in the substrate material and Co and in the size of the cemented carbides grains, the present invention provides a diamond film c...
04/02/2002
6200652Method for nucleation and deposition of diamond using hot-filament DC plasma
A method and apparatus for nucleation and growth of diamond by hot-filament DC plasma deposition. The apparatus uses a resistively heated filament array for dissociating hydrogen in the reactant gas. For two sided diamond growth, configurations of substra...
03/13/2001
6054183Method for making CVD diamond coated substrate for polishing pad conditioning head
A flat substrate polishing and polishing pad conditioning head for a chemical-mechanical-planarization apparatus is provided which has been shown to double the useable life of a polishing pad used to planarize and/or polish both oxide and metal outer laye...
04/25/2000
6042900CVD method for forming diamond films
Method is provided for forming CVD nano diamond films for use as cold cathodes in microelectronic devices. Conditions for forming the film outside the plasma region between the cathode and a grid anode are disclosed. Heating of the grid anode makes possib...
03/28/2000
6042886Method for the manufacturing of a coating on a grinding tool
In a method for the manufacture of a coating on a grinding tool, a rough diamond layer (8, 10) is produced as an abrasive layer on the surface (2) of the body (1) of the grinding tool by vapor-phase deposition. This diamond layer is deposited on the grind...
03/28/2000
5993919Method of synthesizing diamond
In a method of synthesizing diamond on a substrate from plasma containing a carbon component, filaments containing tungsten as a thermoelectron-emitting material are arranged above a substrate in a chamber. An electrode is provided at a position separated...
11/30/1999
5795919Insulating paints
An object of the present invention is to provide a method of recovering the insulation by means of simple steps rapidly and easily at low cost, and paints used therefor. For that purpose, the insulating paint of the present invention which comprises an el...
08/18/1998
5660894Process for depositing diamond by chemical vapor deposition
The present invention provides a process for depositing diamond by chemical vapor deposition without using conventionally-used hydrogen, which is an explosive gas, as a reaction gases. The process includes contacting a substrate with a two-component gas m...
08/26/1997
5635258Method of forming a boron-doped diamond film by chemical vapor deposition
A method of forming boron-doped diamond film by, chemical vapor deposition (CVD) utilizing two-component system reactant gas doped with trimethyl borate....
06/03/1997
5591484Process for manufacturing layers of diamond doped with boron
The present invention concerns a process for manufacturing conductive diamond layers, in particular layers of diamond doped with boron which are obtained by chemical vapour deposition (CVD). The process of the invention consists of forming a layer of diamond d...
01/07/1997
5516554Cyclic hot-filament CVD of diamond
The steady state operating parameters of a low pressure cyclic hot-filament chemical vapor deposition process for making diamond, i.e., nucleation-growth and graphite removal, are applied as controlled sequential steps to favor nucleation and growth....
05/14/1996
5476693Method for the deposition of diamond film by high density direct current glow discharge
There is disclosed a method for depositing a diamond film on a substrate which utilizes high density direct current glow discharge at a glow-arc transition region to form plasma between a cathode and an anode in a reactor, wherein the cathode maintains it...
12/19/1995
5445851Method for forming tabular diamond crystals
A tabular diamond crystal is formed on a substrate by gas phase synthesis, wherein the diamond crystal has a ratio of thickness to width of from 1:4 to 1:1,000 and the surface of the substrate on which the diamond crystal has been formed and the top surfa...
08/29/1995
5437891Chemical vapor deposition of polycrystalline diamond with <100> orientation and <100> growth facets
Chemical vapor deposition of diamond with orientation and (100) growth facets is performed at an increased growth rate and affords cubic diamond crystals when a gas mixture comprising hydrogen, a hydrocarbon such as methane and specific minor amount...
08/01/1995
5427053Diamond film and method of producing same
A method for making a quasi-single crystal diamond is provided. Small diamond granules, like islands, are epitaxially grown on a single crystal substrate having a lattice constant which is similar to that of diamond. A deposition layer is formed on the is...
06/27/1995
5425965Process for deposition of ultra-fine grained polycrystalline diamond films
This invention is directed to a method for enhancing the diamond nucleation on a substrate prior to providing a diamond film thereon. More particularly, it is directed to a method which involved ultrasonic treatment of the substrate surface with a fluid c...
06/20/1995
5424096HF-CVD method for forming diamond
Diamond is produced by chemical vapor deposition on a substrate by hot filament activation of a hydrogen-hydrocarbon gas mixture. An edge of the substrate faces the filament at a distance; therefrom up to about 1 mm. and preferably about 0.3-0.7 mm., and ...
06/13/1995
5415674Cemented carbide substrate having a diamond layer of high adhesive strength
An improved process for improving the adhesion between a cemented carbide substrate and a diamond layer deposited thereon by removing the binder phase of the cemented material from the surface of the substrate prior to diamond coating. For this purpose, t...
05/16/1995
5389400Method for making a diamond/carbon/carbon composite useful as an integral dielectric heat sink
A method for producing a diamond/carbon/carbon composite is provided which includes the steps of densifying a preform of interwoven vapor grown carbon fibers form a carbon/carbon composite, and then depositing a polycrystalline diamond film on the carbon/...
02/14/1995
5340401Diamond deposition cell
In a first embodiment of an improved diamond deposition cell, a chamber is evacuated to a low pressure and a graphite element in the chamber is heated to a selected high temperature and heats a substrate positioned within the chamber spaced by a selected ...
08/23/1994
5300313Method for determining thickness of chemical vapor deposited layers
The thickness of a layer of material deposited by chemical vapor deposition, especially a diamond layer, is monitored by providing at least one substrate on which the material is deposited, with at least one perforation of a predetermined size therein. Th...
04/05/1994
5240736Method and apparatus for in-situ measuring filament temperature and the thickness of a diamond film
Provided is a method and apparatus for in-situ measuring filament temperature and the thickness of a film deposited on a substrate disposed within a hot-filament chemical vapor deposition reactor. In accordance with the invention, white light which is emi...
08/31/1993
5225245Chemical vapor deposition method for forming thin film
An apparatus for forming, by a chemical vapor deposition process, a thin film of crystals such as diamond on a surface of a heated substrate placed in a reaction vessel. The apparatus has a substrate supporting structure, a heater for heating the substrat...
07/06/1993
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