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Class 427/240 - CENTRIFUGAL FORCE UTILIZED


Subclass of Class 427 - Coating processes
Definition: Processes which include the use of centrifugal force in
No. of patents: 1001
Last issue date: 05/01/2012


1                      
NumberTitleIssue Date
8168255Coating method and manufacturing method of photochromic lens
To manufacture a photochromic lens by uniformly applying a coating liquid having a photochromic function without leaving an uncoated area, with a minimum necessary coating amount. There is provided a manufacturing method of the photochromic lens for dripping and app...
05/01/2012
8153194Method for producing laminate
The invention intends to provide a method for preventing deterioration in quality of the primer layer resulting from spinning-off and reattachment of a primer liquid on forming a polyurethane primer layer on a substrate for an eyeglass lens or the like using a coati...
04/10/2012
8119196Semiconductor manufacturing apparatus, liquid container, and semiconductor device manufacturing method
A semiconductor manufacturing apparatus comprises a discharge portion discharging a coating liquid onto a substrate; a gas supply tube supplying an inert gas into a liquid container that contains the coating liquid, and pressurizing an interior of the liquid contain...
02/21/2012
8114477Cleaning of a substrate support
A method of fabricating a cleaning wafer capable of cleaning process residues from a substrate support surface is disclosed. The method comprises providing a cleaning disc, and applying a liquid polymer precursor to the cleaning disc by spraying or spin coating the ...
02/14/2012
8092860Topographically selective oxidation
Methods for oxidizing organic compounds coated or adsorbed on a topographically patterned solid surface are provided. The methods can be used to selectively remove the organic compounds from the non-recessed areas. ...
01/10/2012
8088438Resin layer formation method, resin layer formation device, and disk manufacturing method
A resin layer formation method, resin layer formation device, disk and disk manufacturing method for making a resin layer uniform on a substrate before lamination or on a substrate to be coated by a simple procedure are provided. Adhesive A is coated at the inner ci...
01/03/2012
8080279Method for double-dip substrate spin optimization of coated micro array supports
The present invention discloses a method for preparing a substrate coated support for use in micro-array devices. The method of the present invention comprises the steps of applying a first coat of substrate to a support, making the substrate coating ramp by subject...
12/20/2011
8067060Method for depositing a polymer layer on a surface of a support comprising at least a recessed zone
A polymer layer is deposited on a surface of a support, said surface comprising a flat main part and at least one recessed zone with respect to the flat main part. The polymer layer is achieved by at least the following successive steps: ...
11/29/2011
8062705Method and apparatus for control of layer thicknesses
It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate, e.g. a semiconductor wafer or a datastorage media, by conditioning the substrate thermally, locally specific before or during the spin coating process. ...
11/22/2011
8043657Coating treatment method
The present invention supplies a solvent to the front surface of a substrate while rotating the substrate. Subsequently, the substrate is acceleratingly rotated to a first number of rotations, and a resist solution is supplied to a central portion of the substrate d...
10/25/2011
7985448Substrate processing system and method of controlling the same
A process system includes a plurality of processing modules each processing a substrate with a process liquid. There is disposed a dispensing mechanism that dispenses the process liquid to the vertically arranged modules. The dispensing mechanism is provided with a ...
07/26/2011
7976896Method of processing a substrate and apparatus processing the same
A spin chuck rotatably holds a semiconductor wafer, while resist is dropped on a surface of the semiconductor wafer through a resist application nozzle and thus applied thereon, and before the resist applied on the wafer dries, a cleaning liquid is supplied through ...
07/12/2011
7972654Planarizing coating method
A planarizing coating method for filling a step between patterns formed on a board surface, includes the steps of: preparing at least two types of coating liquids different in non-volatile matter densities, first coating one of the coating liquids higher in density ...
07/05/2011
7939131Method to provide a layer with uniform etch characteristics
The present invention includes a method and a composition to form a layer on a substrate having uniform etch characteristics. To that end, the method includes controlling variations in the characteristics of a solid layer, such etch characteristics over the area of ...
05/10/2011
7927657Liquid processing apparatus and liquid processing method
In a liquid processing apparatus for forming a coating film on a polygonal substrate by spin coating in an ambient with a descending clean air flow, a spin chuck includes a support plate for substantially horizontally supporting the substrate thereon. Air flow contr...
04/19/2011
7906173Resist coating method and resist coating apparatus
A resist coating method supplies a resist solution to substantially the center of a target substrate to be processed while rotating the target substrate at a first rotational speed, then reduces a rotational speed of the target substrate to a second rotational speed...
03/15/2011
7897206Method of manufacturing an optical data storage medium, optical data storage medium and apparatus for performing said method
A method of manufacturing an optical data storage medium, comprising at least one substrate (11) and a plurality of layers deposited on the substrate (11) is described. The medium includes at least one of a transparent spacer layer and transparent cove...
03/01/2011
7879395Method of preparing a coating solution and a corresponding use of the coating solution for coating a substrate
A method of preparing a coating solution, comprising the steps of providing a first solution comprising a lower alcohol; a polyethylene glycol; a complexing agent; and water; providing a second solution comprising a higher alcohol; and at least one metal alkoxide, w...
02/01/2011
7867559Photoresist coating liquid supplying apparatus, and photoresist coating liquid supplying method and photoresist coating apparatus using such photoresist coating liquid supplying apparatus
This invention provides a photoresist coating liquid supplying apparatus and a photoresist coating liquid supplying method, for supplying a photoresist coating liquid having a low particle content to a photoresist coating apparatus, and a photoresist coating apparat...
01/11/2011
7851018Method of manufacturing optical information recording medium
The present invention relates to a method of manufacturing an optical information recording medium, which forms a light-transmitting layer made of a radiation curing resin on a substrate having a signal recording layer, a liquid foundation is formed by coating the r...
12/14/2010
7846495Method of forming hydrophobic coating layer on surface of nozzle plate of inkjet head
An inkjet head having a hydrophobic coating layer and a method of forming the hydrophobic coating layer on a surface of a nozzle plate of the inkjet head. The method includes filling a wax into a plurality of nozzles formed in the nozzle plate while coating the surf...
12/07/2010
7820243Resist coating method and resist coating apparatus
A resist coating method supplies a resist solution to substantially the center of a target substrate to be processed while rotating the target substrate at a first rotational speed, then decelerates the rotation of the substrate to a second rotational speed lower th...
10/26/2010
7815968Centrifugal method for filing high aspect ratio blind mirco vias powdered materials for circuit formation
The present disclosure relates generally to semiconductor, integrated circuits, and particularly, but not by way of limitation, to centrifugal methods of filling high-aspect ratio vias and trenches with powders, pastes, suspensions of materials to act as any of a co...
10/19/2010
7790227Coating process apparatus and coating film forming method
The resist coating unit (COT) has a spin chuck (41) which holds the wafer to be supplied with a resist liquid, and a process cup (50) which accommodates the spin chuck (41) and exhaustes an atmosphere around the wafer W from a bottom thereof. Th...
09/07/2010
7758919Method of self-assembly and optical applications of crystalline colloidal patterns on substrates
This invention describes methods of synthesis and applications of a composite material of a colloidal crystal and a substrate. The method includes steps of (a) providing a substrate having a surface with a surface relief pattern; and (b) applying a liquid dispersion...
07/20/2010
7740908Method for forming a film by spin coating
It is an object of the present invention to provide a method for producing a solid substrate used for sensors having a film with a small film thickness distribution, and a solid surface used for sensors having a film with a small film thickness distribution. The pre...
06/22/2010
7736696Methods, systems, and compositions for fire retarding substrates
A closed-loop system and process is used for applying fire retardant chemicals to substrates including fibers, yarns, fabrics or mixtures thereof. Substrates are preferably positioned in a vessel such as a dye machine which circulates the fire retardant chemicals. A...
06/15/2010
7722924Coated display pieces and method of producing same
Coated display pieces. Display pieces for electronic and mechanical displays are coated with a coating material coating. The coating helps to reduce or prevent breakage or shattering and/or to improve light transmission. Methods of making the coated display pieces a...
05/25/2010
7709055Polymers with ether containing side chains and compositions thereof
The present invention provides compounds of formulae (I), (II), and (III), which can be block copolymers with various substituents and side-chain groups. The side-chains can include semifluorinated alkyl- and PEG-derived groups. The block copolymers can be surface a...
05/04/2010
7691439Highly conducting transparent thin polymers films formed from double and multiple layers of poly(3,4, ethylenedioxythiophene) and its derivatives
A polymer film comprising at least two layers, wherein each layer comprises a compound comprising the formula: wherein R1 and R2 are independently selected organic groups. A me...
04/06/2010
7678417Coating method and coating apparatus
A coating apparatus has a stage module, a temperature regulating module which adjusts a temperature of a substrate to a set temperature, a coating module which applies a coating liquid to the temperature-regulated substrate, and a heating module which heats the coat...
03/16/2010
7670643Method and system for dispensing resist solution
An apparatus and method for dispensing a solution on a substrate is described in which the solution is dispensed through a solution nozzle assembly while the substrate is rotated. As the solution is dispensed, the solution on the substrate forms a wave front that ra...
03/02/2010
7666473Optical recording medium and method for producing such an optical recording medium
The present invention relates to a method for producing an optical recording medium. In the method, on the surface of a recording layer formed by spin-coating a first coating solution containing a photo-isomerizable component, a second coating solution that contains...
02/23/2010
7662436Method of spin coating a film of non-uniform thickness
Embodiments of the invention provide a method for spin coating a film onto a substrate. Preferred embodiments deposit a film, such as a resist, having a thickness gradient from the substrate's centrifugal center to its edge. The gradient may be linear or stepwise co...
02/16/2010
RE40961Coating layer forming machine and method of forming it
A coating layer forming apparatus for minimizing the amount of the coating solution when forming a coating layer on a part and enhancing a dimensional precision of a formed surface of the coating layer. The coating layer forming apparatus has a rotation supporting d...
11/10/2009
7585544Flow-through dip-spin coating method and system therefor
A process and system for continuous flow-through dip-coating of a workpiece requires the introduction of the workpiece in a porous coating basket at a first side of a coating chamber and the removal of the coated workpiece in the coating basket from a second side of...
09/08/2009
7560137Process and coating plant of containers
A process and relating plant for applying protective coats of paint to containers, especially plastic bottles. The process involves gripping the bottles by means of rotating gripping devices fastened to a conveyor chain, and conveying said bottles to all the differe...
07/14/2009
7534467Reduced-pressure drying unit and coating film forming method
The invention includes a hermetic container provided with a substrate mount; a vacuum exhauster connected to the hermetic container; a current member; and a current member raising and lowering mechanism. When the current member is raised and lowered as a function of...
05/19/2009
7462374Method for coating using film coating apparatus
A coating method includes rotatably supporting both ends of the piston or product to be coated; injecting coating material to a first parts of the piston or product to be coated through a first nozzle while rotating the piston, and simultaneously spreading to a unif...
12/09/2008
7452568Centrifugal method for filing high aspect ratio blind micro vias with powdered materials for circuit formation
The present disclosure relates generally to semiconductor, integrated circuits, and particularly, but not by way of limitation, to centrifugal methods of filling high-aspect ratio vias and trenches with powders, pastes, suspensions of materials to act as any of a co...
11/18/2008
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