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Class 427/237 - Coating by vapor, gas, mist, or smoke


Subclass of Class 427 - Coating processes
Definition: Processes wherein a coating is produced on an article by
No. of patents: 348
Last issue date: 03/20/2012


1                  
NumberTitleIssue Date
8137749Method of aluminization in the vapor phase on hollow metal parts of a turbomachine
A method of aluminization by deposit in the vapor phase for protection against oxidation at high temperature of a metal part of a turbomachine. The part includes a cavity with an opening that can be accessed from the outside. A halide is formed by reaction between a...
03/20/2012
7981470Interior chemical treatments for inflatable balloons
A commercial method for the interior chemical treatment of inflatable balloons, the method including inflating a balloon with air, coating the interior surface of a balloon with a micro-atomized chemical mixture and allowing the chemical mixture to coat and permeate...
07/19/2011
7927656Method and apparatus for controlling diffusion coating of internal passages
A method and apparatus for controlling the thickness of a coating deposited on internal passages of a component. The coating is a diffusion coating, preferably a diffusion aluminide coating, deposited by a vapor phase process that entails placing a component within ...
04/19/2011
7897205Film forming method and film forming apparatus
A film forming method is characterized in that the method is provided with a step of introducing a processing gas including inorganic silane gas into a processing chamber, in which a mounting table composed of ceramics including a metal oxide is arranged, and precoa...
03/01/2011
7892601Corrosion inhibiting powders and processes employing powders
A corrosion inhibiting agent is provided as a finely ground powder that is dispensed into a sheath or other casing enclosing a metal bar, cable, or other tension member. The agents are produced by preparing salts of amines with benzoic acid or nitric acid, drying th...
02/22/2011
7851017Method and apparatus for duct sealing using a clog-resistant insertable injector
A method for forming a duct access region through one side of a previously installed air duct, wherein the air duct has an air flow with an air flow direction by inserting an aerosol injector into a previously installed air duct through the access region. The aeroso...
12/14/2010
7838070Method of coating gas turbine components
A method of forming a metal coating on surfaces of internal passages of a turbine blade includes, in an exemplary embodiment, the steps of positioning the turbine blade in a CVD chamber, coupling a reagent gas manifold to at least one internal passage inlet, and coa...
11/23/2010
7799373In situ recoating of catalyst beds
A process for coating internals in a reactor, except for the coating of electrically heatable, at least partly open-cell foams, with a catalytically active material or a precursor thereof, in which an aerosol which contains the catalytically active material or the p...
09/21/2010
7387814Process for in situ coating of turbo-machine components
A method for coating a component of a turbo-machine. The method allows arranging a turbine rotor in the turbo-machine and introducing a coating material into the interior of the turbo-machine such that the rotor is coated. The rotor is rotated while it is being coat...
06/17/2008
7371427Reduction of hillocks prior to dielectric barrier deposition in Cu damascene
Unwanted hillocks arising in copper layers due to formation of overlying barrier layers may be significantly reduced by optimizing various process parameters, alone or in combination. A first set of process parameters may be controlled to pre-condition the processin...
05/13/2008
7371428Duplex gas phase coating
Method of forming different diffusion aluminide coatings on different surface regions of the same superalloy substrate involves positioning the substrate in a coating chamber having a aluminum-bearing coating gas flowing therein with a first substrate surface region...
05/13/2008
7354620Method for deposition of inert barrier coating to increase corrosion resistance
The present invention reduces corrosion rates on metal surfaces, such as the interior surfaces of gas flow control components by depositing a chemically inert layer on the metal surface of the component and other associated parts of the component that are exposed to...
04/08/2008
7335397Pressure gradient CVI/CVD apparatus and method
An apparatus and method for densifying porous structures inside a furnace using pressure gradient CVI/CVD. The apparatus includes a stack of porous structures where each porous structure has an aperture therethrough. The apparatus also includes at least one ring-lik...
02/26/2008
7323231Apparatus and methods for plasma vapor deposition processes
One aspect of the invention is directed toward a method of forming a conductive layer on a microfeature workpiece. In one embodiment, the method comprises placing a microfeature workpiece in a vapor reaction chamber, depositing an electrically conductive material on...
01/29/2008
7309269Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
In this embodiment, an interval distance between a desposition source holder 17 and an object on which deposition is performed (substrate 13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source hol...
12/18/2007
7303789Methods for producing thin films on substrates by plasma CVD
Methods are provided to form a thin film reproducibly in a process for forming the thin film on the inner wall surface facing a space formed in a substrate by plasma CVD. A thin film is produced on an inner wall surface of a substrate facing a space formed in the su...
12/04/2007
7288284Post-cleaning chamber seasoning method
A method for seasoning a process chamber is disclosed. The seasoning method includes providing a seasoning film on the interior surfaces of a process chamber, typically after cleaning of the chamber. ...
10/30/2007
7282183Atmospheric control in reaction chambers
Apparatus and methods are disclosed for controlling atmospheric characteristics inside a chamber. An apparatus comprises a mechanism for diffusively introducing pressurized gas into the apparatus, an outlet element in fluid communication with the mechanism, and a ch...
10/16/2007
7270764Method for removing aluminide coating from metal substrate and turbine engine part so treated
A method for selectively removing an aluminide coating from at least one surface of a metal-based substrate by: (a) contacting the surface of the substrate with at least one stripping composition comprising nitric acid at a temperature less than about 20° C. to deg...
09/18/2007
7252480Methods for generation of dual thickness internal pack coatings and objects produced thereby
A method for generating an internal pack coating having different, controlled thicknesses includes partially filling a root opening of a turbine blade having a cavity therein with a first powder and a second powder having different formulations so that the first pow...
08/07/2007
7189290Method and device for cleaning raw material gas introduction tube used in CVD film forming apparatus
A method and apparatus for cleaning a source gas introduction pipe, which can prevent strong adhesion of contaminant mainly containing carbon powder on an outer surface of the source gas introduction pipe to easily remove the contaminant in a short period of time. W...
03/13/2007
7175552Ball bat formed of carburized steel
A ball bat includes a substantially tubular frame having a handle portion and a primary hitting portion. The handle portion is formed of a non-steel material. The hitting portion is formed separately from, and coupled to, the handle portion. The hitting portion is f...
02/13/2007
7166336DLC film, DLC-coated plastic container, and method and apparatus for manufacturing DLC-coated plastic container
Disclosed is an apparatus for producing DLC film-coated plastic containers, which comprises an outer electrode unit disposed outside a plastic container, an inner electrode disposed inside the plastic container, a duct through which a raw material gas of a carbon so...
01/23/2007
7157114Platinum coating process
A process for depositing pure platinum on a substrate is disclosed. In accordance with one embodiment, the process comprises applying a solution consisting of Pt(acetylacetonate)2 and ethanol or acetone onto a substrate and wrapping at least a portion of ...
01/02/2007
7135407Method of manufacturing a semiconductor device
In a method of manufacturing a semiconductor device, a tungsten layer pattern having an oxidized surface is formed on a substrate. A source gas including silicon is provided to the oxidized surface of the tungsten layer pattern to form a protecting layer on the oxid...
11/14/2006
7118779Reactor surface passivation through chemical deactivation
Protective layers are formed on a surface of an atomic layer deposition (ALD) or chemical vapor deposition (CVD) reactor. Parts defining a reaction space for an ALD or CVD reactor can be treated, in situ or ex situ, with chemicals that deactivate reactive sites on t...
10/10/2006
7108730Method for providing controlled heat to a process
This invention relates to a method for providing controlled heat to a process utilizing a flameless distributed combustion. The method of the invention comprises providing an oxidation chamber, with an inlet for oxidant, an outlet for combustion products, and a flow...
09/19/2006
7094445Dimensionally controlled pack aluminiding of internal surfaces of a hollow article
An article such as a hollow gas turbine blade has an internal cavity therein with an inlet and outlet. The outlet has an outlet minimum transverse dimension of from about 0.009 inch to about 0.012 inch. An aluminiding source powder has a minimum particle size of gre...
08/22/2006
7070687Apparatus and method of surface treatment for electrolytic and electroless plating of metals in integrated circuit manufacturing
Apparatus and method for treating a surface of a substrate for electrolytic or electroless plating of metals in integrated circuit manufacturing. In one embodiment the method includes forming a barrier layer on a substrate. A metal-seed layer is then formed on the b...
07/04/2006
7052736Method for depositing coatings on the interior surfaces of tubular structures
A method is disclosed for substantially uniformly coating an interior surface of a ferromagnetic tubular structure such as a ferromagnetic tube having a high aspect ratio. The method entails inducing a magnetic field of a given magnitude within the tubular structure...
05/30/2006
7026011Aluminide coating of gas turbine engine blade
A method for applying an aluminide coating on a gas turbine engine blade having an external surface and an internal cooling cavity having an internal surface that is connected to the external surface by cooling holes. The method is conducted in a vapor coating conta...
04/11/2006
7018504Loadlock with integrated pre-clean chamber
A wafer carrier adapted to hold a plurality of wafers and is positioned on an elevator plate in a load lock. The elevator plate is adapted to move between a first position with the carrier in a first chamber of the load lock and a second position with the carrier in...
03/28/2006
6989174Method for aluminide coating a hollow article
An aluminide coating is produced on a hollow article by furnishing an article having a hollow interior and an access opening to the hollow interior, placing an aluminide coating tape into the hollow interior through the access opening, and vapor phase aluminiding th...
01/24/2006
6974524Apparatus, method and system for monitoring chamber parameters associated with a deposition process
Apparatus and methods for measuring characteristics of a metallic target as well as other interior surfaces of a sputtering chamber. The apparatus includes a sensor configured to emit an energy beam toward a surface of interest and to detect an energy beam therefrom...
12/13/2005
6949273Methods of forming coatings on gas-dispersion fixtures in chemical-vapor-deposition systems
Integrated circuits are built layer by layer on a substrate. One technique for forming layers is chemical vapor deposition (CVD.). This technique injects gases through a gas-dispersion fixture into a chamber. The gases react and blanket a substrate in the chamber wi...
09/27/2005
6942892Hot element CVD apparatus and a method for removing a deposited film
The present invention provides a method for efficiently and completely removing a film deposited inside a film forming chamber. In addition, the invention provides a CVD apparatus using heating element which an in-situ cleaning method can be applied and its in-situ ...
09/13/2005
6942893Densifying hollow porous substrates by chemical vapor infiltration
A porous substrate having a concave inside face and an outside face is disposed in an enclosure, and reactive gas is introduced into the enclosure to densify the substrate. At least a portion of the gas is divided into two non-zero fractions. The first fraction of t...
09/13/2005
6936299Method and device for in situ layer thickness determination
A method and device for layer thickness determination allows for the layer thickness to be determined in situ during the coating process. This is achieved using a sensor which has an electrical property which, as a result of the coating process, changes in a manner ...
08/30/2005
6929825Method for aluminide coating of gas turbine engine blade
A method for applying an aluminide coating on a gas turbine engine blade having an external surface and an internal cooling cavity having an internal surface that is connected to the external surface by cooling holes. The method is conducted in a vapor coating conta...
08/16/2005
6924001Production device for DLC film-coated plastic container and production method therefor
A production device for a DLC film-coated plastic container and a production method therefor, capable of forming DLC (diamond-like carbon) films simultaneously on the inner surfaces of a plurality of plastic containers, and reducing variations in film thickness. A p...
08/02/2005
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