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| Number | Title | Issue Date |
| 8163262 | Method for production of nitrogen trifluoride from trimethylsilylamines Presented is a method for Batch or continuous production of nitrogen trifluoride (NF3) using direct fluorination of organic solution of trimethylsilylamines at low temperatures. Fluorine gas reacts with a solution of tris(trimethylsilyl)amine or bis(trime... | 04/24/2012 |
| 7820127 | Method and apparatus for producing nitrogen trifluoride A method for producing nitrogen trifluoride related to the present invention is characterized in that a fluorine gas and an ammonia gas are fed into a tubular reactor and are reacted with each other in the presence of a diluting gas in a gaseous phase under the cond... | 10/26/2010 |
| 7438883 | High-pressure phase silicon nitride having a cubic spinel structure and the manufacturing method A method for preparing a high-pressure phase cubic spinel-type silicon nitride includes housing a molding containing low-pressure phase silicon nitride powder and a metal powder in a cylindrical container, arranging an explosive in the cylindrical container so as to... | 10/21/2008 |
| 7422631 | Mould parts of silicon nitride and method for producing such mould parts The present invention relates to silicon nitride mould parts, particularly crucibles for use in connection with directional solidification and pulling of silicon single crystals. The mould parts consist of Si3N4 having a total open porosity bet... | 09/09/2008 |
| 7413722 | Method and apparatus for manufacturing nitrogen trifluoride A method and apparatus for manufacture of NF3 by gas-liquid phase reaction of fluorine and ammonia in molten ammonium acid fluoride (AAF) in a static reactor in which the reactants are conveyed primarily by thermal conduction or siphon. Optimally, the rea... | 08/19/2008 |
| 7395823 | Method and apparatus for local fluorine and nitrogen trifluoride production The present invention relates to a process for production, shipment, and treatment of a NH4F(HF)x feedstock for local production of fluorine and NF3 for semiconductor chamber cleaning without the need for storage of large quantities ... | 07/08/2008 |
| 7384618 | Purification of nitrogen trifluoride A process and system for adsorption purification of NF3 wherein a crude product containing NF3 and impurities such as CF4 is brought into contact with a polyacrylonitrile-based carbon molecular sieve so that at least a portion of one... | 06/10/2008 |
| 7273835 | Azeotrope-like compositions of difluoromethane The invention relates to azeotropic and azeotrope-like mixtures of HFC-32 and HCl or a mixture of HCl and Cl2, and a process for separating the azeotrope-like mixtures. ... | 09/25/2007 |
| 7128885 | NF3 production reactor A process for the production of nitrogen trifluoride by reacting fluorine gas and liquid ammonia acid fluoride in a first reaction zone having a relatively low energy input followed by treatment of the resulting reaction product in a second reaction zone having a re... | 10/31/2006 |
| 7083773 | Method for producing nitrogen trifluoride using jet-loop reactors Nitrogen trifluoride is produced with a high yield by the method comprising forming a fast stream of micro droplets of a fused ammonium fluoride salt by rapidly ejecting the fused ammonium fluoride salt into a reactor through a nozzle while circulating the fused amm... | 08/01/2006 |
| 7074378 | Process for the purification of NF This invention describes an improvement in a process for purifying a nitrogen trifluoride (NF3) stream containing unreacted F2, HF, and nitrogen oxides from an NF3 reactor wherein the F2, and HF are removed and then the ni... | 07/11/2006 |
| 7045107 | Process for the production of nitrogen trifluoride The present invention is directed to an improved reaction process that allows for the achievement of excellent NF3 production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt... | 05/16/2006 |
| 7021487 | Processing method for high pressure gas container and halogen containing gas filled in said container A metal container to be filled with a halogen containing gas, with the inner surface processed with a polishing agent. The gas has a reduced purity decline by the increase of the water content or impurities from the inner surface of the container which is absorbed b... | 04/04/2006 |
| 7022160 | Method of purifying gaseous nitrogen trifluoride The present invention relates to a method of purifying gaseous nitrogen trifluoride from CF4 as impurity. The method comprises selective adsorption of nitrogen trifluoride by dehydrated erionite at a temperature of from −30 to 30° C., displaceme... | 04/04/2006 |
| 7018598 | Process for producing nitrogen trifluoride F2 gas is reacted with NH3 gas in a gaseous phase at 80° C. or less in the presence of a diluting gas to produce NF3. Thus, NF3 is produced with good safety, efficiency and profitability. ... | 03/28/2006 |
| 6986874 | Method and apparatus for the production of nitrogen trifluoride The present invention provides a method and apparatus for producing nitrogen trifluoride. The method comprises contacting a fluorine-containing feed stream with liquid ammonium acid fluoride in a reaction zone for time and under conditions sufficient to produce nitr... | 01/17/2006 |
| 6984366 | Method for nitrogen trifluoride production A method for the production of nitrogen trifluoride from a fluorine reactant and an ammonium ion source that is dispersed within a liquid phase reaction mixture containing one or more perfluorocarbon fluids is disclosed herein. In one embodiment, the fluorine reacta... | 01/10/2006 |
| 6966934 | Gas reclaiming equipment A gas reclaiming equipment capable of separating SF6 gas from a mixed gas efficiently and shortening reclaiming work under reduced pressure. A gas separation equipment is provided between a gas insulated equipment and a gas liquefaction system. The gas se... | 11/22/2005 |
| 6908601 | Method for the production of nitrogen trifluoride The invention provides a method and apparatus for producing nitrogen trifluoride. The invention involves passing a working fluid through a heat engine cycle and using the mechanical energy generated by the working fluid to produce sufficient mixing intensity within ... | 06/21/2005 |
| 6821496 | Process for preparing nitrogen trifluoride The invention relates to a new process for preparing nitrogen trifluoride which finds extensive application in the technology of semiconductors, high energy lasers, and chemical vapor deposition. Nitrogen trifluoride is prepared by the fluorination of urea or... | 11/23/2004 |
| 6790428 | Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride A process for reducing or eliminating NH3/HF/MFz liquid waste melt in the manufacture of NF3 is provided which includes the steps of providing an NF3 reactor for a reaction of F2 with a liquid NH3/HF/MFz mixture... | 09/14/2004 |
| 6458249 | Process for purifying perfluorinated products Nitrogen trifluoride (NF3) containing less than 10 parts-per-million molar impurities, e.g., tetrafluoromethane (PFC-14), is disclosed. Azeotropic and extractive distillation processes using entraining agents for separating NF3 and P... | 10/01/2002 |
| 6432521 | Group III-V compound semiconductor, and semiconductor device using the compound semiconductor This invention provides a Group III-V compound semiconductor that is free from the limitation of the shape and the size, is economical, is excellent in photo-electric characteristics (photo-electric conductivity photo-electromotive current, photo-electrom... | 08/13/2002 |
| 6399225 | Silicon-and-nitrogen-containing luminescent substance, method for forming the same, and light emitting device using the same A luminescent substance contains silicon and nitrogen as major components and has an amorphous structure. The silicon content of the luminescent substance is greater than the stoichiometric silicon content of Si3 N4, and the luminous... | 06/04/2002 |
| 6342194 | NF3 treating process A process for treating NF3 useful as a dry etching gas and cleaning gas in processes for producing LSI, TFT, and solar cell and in an electron photographic processes. The treating process comprises following step: (a) preparing a reactor includ... | 01/29/2002 |
| 6235676 | Process for the preparation of ammonia and ammonia synthesis catalyst Process for the preparation of ammonia from ammonia synthesis gas by contacting the synthesis gas with a bimetallic catalyst comprising a Group VIII metal combined with a Group VIB metal at conditions being effective in the formation of ammonia, wherein t... | 05/22/2001 |
| 6190802 | Transition metal based ceramic material and electrodes fabricated therefrom A transition metal based ceramic material having the general formula Li M1-ଲ Tଲ Nx O67, wherein M is a transition metal, T is a dopant metal, and wherein x is greater than 0 and les... | 02/20/2001 |
| 6183713 | Method for producing nitrogen trifluoride by gas-solid reaction The invention relates to a method for producing nitrogen trifluoride by gas-solid reaction. This method includes the steps of (a) providing a packed-bed-type vessel filled with a particulate solid of an ammonium complex of a metal fluoride; (b) introducin... | 02/06/2001 |
| 6007789 | Method of nitriding silicon A process for nitriding materials containing silicon to form a silicon nitride material predominantly in the alpha phase is disclosed which includes nitriding the silicon-containing material by (a) heating the silicon-containing material in an atmosphere ... | 12/28/1999 |
| 5981094 | Low compressibility carbon nitrides A cubic form of C3 N4 with a zero-pressure bulk modulus exceeding that of diamond. The product is prepared by combining carbon and nitrogen at a pressure of 120,000 to 800,000 atmosphere and a temperature of 1000-3000° C.... | 11/09/1999 |
| 5637285 | Process for nitrogen trifluoride synthesis The present invention is directed to a method for the synthesis of nitrogen trifluoride from elemental fluorine gas and a source of ammonia in a gas-liquid phase reaction comprising; 3 F2 +NH4 H.sub.(x-1) Fx .fwdarw.NF3 | 06/10/1997 |
| 5591547 | Method of manufacturing a negative electrode for lithium secondary battery A method of manufacturing a negative electrode for a lithium secondary battery includes the steps of mixing graphite particles as a main constituent that generates intercalation and de-intercalation of lithium ions with a compound including copper ions, o... | 01/07/1997 |
| 5478649 | Silicon nitride powder and method for producing the same The invention relates to material silicon nitride powder used for production of silicon nitride ceramics products. Provided herein is a material powder which can offer a compact having a homogeneous packing structure of the powder with good reproducibilit... | 12/26/1995 |
| 5401473 | Method and apparatus for treatment of NF3 gas In accordance with this invention, a waste gas containing toxic NF3 gas is contacted with a honeycomb structure of a carbonaceous material to thereby convert NF3 into nontoxic CF4 and N2 gases with high efficien... | 03/28/1995 |
| 5344634 | Method of nitriding silicon A process for nitriding materials containing silicon to form a silicon nitride material predominantly in the alpha phase is disclosed which includes nitriding the silicon-containing material by (a) heating the silicon-containing material in an atmosphere ... | 09/06/1994 |
| 5340561 | Process fo the production of Si2 N4 using a silicon, phosphorous and nitrogen containing precursor The present invention relates to a process for the production of low-needle silicon nitride of high -content, wherein an amorphous nitrogen-containing silane compound is mixed with a crystalline or amorphous compound comprising the elements silicon... | 08/23/1994 |
| 5302366 | Production of silicon product containing both carbon and nitrogen A ceramic product comprising both carbon and nitrogen and a method for its production are provided. The product is formed in a reactor having a chamber defined therein which is divided into a combustion zone and a reaction zone. A combustible mixture is i... | 04/12/1994 |
| 5284639 | Method for the preparation of niobium nitride A method is disclosed for preparing and recovering metal nitrides from their ferrometal alloys and nickel metal alloys. Exemplary steps of the process involve niobium nitride prepared from ferroniobium alloys (FeNb) which are first hydrided to provide a f... | 02/08/1994 |
| 5248490 | Process for the preparation of silicon nitride having a small crystallite size To prepare silicon nitride having a crystallite size of 40 to 60 nm and a specific surface area according to BET of 21 to 40 m2 /g, amorphous silicon nitride or amorphous silicon nitridoimide is brought into surface contact with gas containing ... | 09/28/1993 |
| 5211921 | Process of making niobium oxide A process for making metal oxides including niobium or tantalum oxides from ferro and nickel alloys containing these metals involving the multiple steps of hydriding the ferro or nickel alloy selected, under conditions of suitable temperature and pressure... | 05/18/1993 |
