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| Number | Title | Issue Date |
| 7413411 | Electronically controlled vacuum pump A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processo... | 08/19/2008 |
| 7410348 | Multi-speed compressor/pump apparatus A pumping/compressing apparatus for use in a fluid handling system transferring a fluid from one location, e.g., a tank, to another location or to an end use is provided. The apparatus basically includes a motor and a multistage, e.g., two stage, device including at... | 08/12/2008 |
| 7356996 | Apparatus and method for holding a cryogenic fluid and removing cryogenic fluid therefrom with reduced heat leak The apparatus comprises a double walled vacuum insulated vessel defining a cryogen space for holding a cryogenic fluid, a pump assembly comprising a pump with a suction inlet disposed within the cryogen space, and at least one elongated member extending from the pum... | 04/15/2008 |
| 7297055 | Vacuum-insulating system and method for generating a high-level vacuum A method of generating a high-level vacuum comprises evacuating a chamber having a substantially-pure gas therein to a medium-level vacuum, and freezing the residual gas to generate the high-level vacuum within the chamber. Impurities, such as atmospheric air, may b... | 11/20/2007 |
| 7223080 | Double-acting, high pressure cryogenic pump A double-acting, reciprocating piston, high discharge pressure, cryogenic fluid pump having a unique blow-by venting system. In two different embodiments, a double-acting piston has two pair of piston heads and two sets of seals. In a first embodiment, a blow-by ven... | 05/29/2007 |
| 7077626 | Turbomachine A turbomachine has a turborotor made up of a shaft and a rotor disk, and an electric machine having an electric rotor. The rotor disk is arranged at one end of the shaft, in overhung manner, and the electric rotor is connected with the shaft of the turborotor. The e... | 07/18/2006 |
| 7051759 | Processing apparatus having integrated pumping system An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock ch... | 05/30/2006 |
| 7037083 | Radiation shielding coating A vacuum conduit connected to a vacuum pump has a shield surface which absorbs radiation to reduce the total radiation falling on the vacuum pump. The vacuum system includes the vacuum conduit connected between a process chamber and the vacuum pump and a surface tre... | 05/02/2006 |
| 6902378 | Electronically controlled vacuum pump A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processo... | 06/07/2005 |
| 6659730 | High pressure pump system for supplying a cryogenic fluid from a storage tank A method and apparatus is provided for supplying both cryogenic liquid and vapor from a storage tank to a pump to reduce the need for venting. The pump is operable to pump cryogenic liquid or a mixture of liquid and vapor. Different operating modes are se... | 12/09/2003 |
| 6655930 | Insulation means for a centrifugal pump A centrifugal pump for pumping low temperature fluid includes a motor portion driving an impeller of a pump portion. The motor portion and impeller are coaxial. A pot, sealed to the pump portion, receives the low temperature fluid. The low temperature flu... | 12/02/2003 |
| 6653792 | Ion implanting system An ion implanting system including an ion implanting chamber for implanting an ion into a semiconductor wafer, a load lock chamber for loading the semiconductor wafer into the ion implanting chamber, a turbo pump for creating a high vacuum atmosphere in t... | 11/25/2003 |
| 6620250 | Method and apparatus for shielding a device from a semiconductor wafer process chamber A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The apparatus comprises a shield connected to a mounting portion. The mounting portion has a fluid passage wherein the temper... | 09/16/2003 |
| 6550256 | Alternative backing up pump for turbomolecular pumps As an alternative to the use of a mechanical backing pump in the application of wide range turbomolecular pumps in ultra-high and extra high vacuum applications, palladium oxide is used to convert hydrogen present in the evacuation stream and related volu... | 04/22/2003 |
| 6510697 | System and method for recovering from a power failure in a cryopump In a power failure recovery, the operating state before a power failure and present conditions of a cryopump are determined to initiate a regeneration or startup process. Where the refrigerator was operating before power failure, it is turned on during re... | 01/28/2003 |
| 6460351 | Electronically controlled cryopump A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly res... | 10/08/2002 |
| 6327863 | Cryopump with gate valve control The present invention provides a cryopump coupled to a gate valve in which the gate valve is automatically prevented from being opened during unsafe conditions, for example, when combustible gases such as hydrogen may be present in the cryopump, but may b... | 12/11/2001 |
| 6318093 | Electronically controlled cryopump A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly res... | 11/20/2001 |
| 6233948 | Control apparatus for a plurality of cryopumps For simultaneously controlling a plurality of cryopumps, one processor and communication conversion sections of the respective cryopumps are connected to each other with a communication network. The processor and a host computer are connected to each othe... | 05/22/2001 |
| 6220037 | Cryogenic pump manifold with subcooler and heat exchanger A cryogenic pump manifold with subcooler and heat exchanger. The manifold comprises an inlet header with a subcooler disposed around it and a heat exchanger on the inlet side of the inlet header and subcooler. An expansion device is disposed between the i... | 04/24/2001 |
| 6092373 | Cryopump The invention relates to a cryopump having pump surfaces which are held at different temperatures during operation and are disposed in a housing with a flange for connecting the housing to a vacuum chamber. Additional pump surfaces are provided for the ac... | 07/25/2000 |
| 6053704 | Cryogenic vacuum pump system having a cryopanel and a heat absorbing unit A cryogenic vacuum pump system in which a pump out system such as a cryotrap 13, with which gas is subjected to vacuum pump out by condensing or adsorbing said gas on a cryopanel which has been cooled to a very low temperature, is used, and a radiant heat... | 04/25/2000 |
| 5996472 | Cryogenic reciprocating pump A novel reciprocating pump for cryogenic fluids. The pump has a cylinder sleeve, head, intake valve, discharge valve, and a reciprocating piston including a mechanical spring energized seal having a generally U-shaped jacket and a helical spring in the bi... | 12/07/1999 |
| 5974809 | Cryopump with an exhaust filter A filter standpipe is mounted within a relief conduit of a cryopump. The relief conduit is joined to an exhaust conduit, and the exhaust conduit is joined to a housing which defines a vacuum chamber. The relief conduit and exhaust conduit define passages ... | 11/02/1999 |
| 5906103 | Convection-shielded cryopump A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamb... | 05/25/1999 |
| 5901558 | Water pump with integral gate valve A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A gate valve is formed integrally with... | 05/11/1999 |
| 5887438 | Low profile in line cryogenic water pump A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A cryopumping array having an outer ri... | 03/30/1999 |
| 5884488 | High pressure fuel supply system for natural gas vehicles This invention relates to a medium and high pressure liquid natural gas fuel system for internal combustion engines and for other cryogenic systems. A cryogenic pump comprising: (a) a vessel for containing compressed gas and liquid; (b) a first chamber in... | 03/23/1999 |
| 5865605 | Method and apparatus for removing a high pressure in-tank pump using a low pressure tube Apparatus are disclosed which include a low pressure tube through which a pump discharge line can extend. The tube is sealed in at least two separate elevations to define a purge zone that can be purged of all volatile gases and permit the discharge line ... | 02/02/1999 |
| 5862671 | Purge and rough cryopump regeneration process, cryopump and controller A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If t... | 01/26/1999 |
| 5860798 | Pump for pumping a fluid comprising a liquefied gas and apparatus having a pump The pump has a sleeve-like bearer. This contains a bush in which a piston is displaceable along an axis. The bearer inner surface and the bush outer surface are adjacent to one another in parts and are separated from one another in parts by an intermediat... | 01/19/1999 |
| 5855118 | Combination cryopump/getter pump and method for regenerating same A combination cryopump/getter pump including a cryopump section having a cryopump inlet, a getter pump section having a getter pump inlet, and a mechanism for coupling the cryopump section and the getter pump section to a single port of a process chamber ... | 01/05/1999 |
| 5810570 | Super-low net positive suction head cryogenic reciprocating pump A novel reciprocating pump for cryogenic fluids having a super-low NPSH requirement. The pump has a spring-loaded intake valve made of magnetic material and a reciprocating piston having a permanent magnet at its head end. The intake valve is positioned s... | 09/22/1998 |
| 5806319 | Method and apparatus for cryogenically cooling a deposition chamber A method and apparatus for depositing parylene monomer within the interior of a deposition chamber of a parylene deposition system. In certain embodiments, the method comprises the steps of: (a) introducing a cryogenic fluid into the interior of the depos... | 09/15/1998 |
| 5799493 | Corrosion resistant cryopump A cryopanel is formed of aluminum to avoid copper ions in a work chamber, and the aluminum is coated with a Teflon.RTM. polymer for corrosion resistance. A corrosion resistant thermally conductive link is obtained by surrounding indium with a polymer coat... | 09/01/1998 |
| 5782096 | Cryopump with improved shielding A cryopump includes a two-stage refrigerator, a primary pumping surface, and a radiation shield. The radiation shield is in thermal contact with the first stage of the refrigerator. The primary pumping surface is surrounded by the radiation shield and is ... | 07/21/1998 |
| 5778682 | Reactive PVD with NEG pump An apparatus for carrying out reactive physical vapor deposition on a substrate to form a nitride layer, comprises a vacuum chamber, a substrate support in the vacuum chamber, a target over the substrate support made of a refractory or noble metal, for ex... | 07/14/1998 |
| 5727392 | Convection-shielded cryopump A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamb... | 03/17/1998 |
| 5720174 | Secondary pump unit A secondary pump unit comprising a mechanical secondary pump and a cryogenic trap, wherein the cryogenic trap forms a ring surrounding the outside of the mechanical secondary pump at its intake end, and the trap is enclosed in a casing defining, in parall... | 02/24/1998 |
| 5704214 | Apparatus for removing tramp materials and method therefor A trap body is removably attached in the housing inserted in that portion of the exhaust passage which is situated on the upstream side of a vacuum pump, and has cooling fins for cooling the tramp materials in the exhaust gas brought into contact with the... | 01/06/1998 |
