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| Number | Title | Issue Date |
| 8147222 | Vacuum divider for differential pumping of a vacuum system A vacuum divider is positioned between rotor blades of a turbo-molecular pump and a vacuum manifold formed from multiple vacuum chambers. A first coupling aperture passes through the vacuum divider and allows gas to pass from a first of the multiple vacuum chambers ... | 04/03/2012 |
| 8109744 | Turbo vacuum pump An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, a main shaft for supp... | 02/07/2012 |
| 8087907 | Turbo vacuum pump An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, and a main shaft for ... | 01/03/2012 |
| 8066495 | Turbo vacuum pump and semiconductor manufacturing apparatus having the same A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bea... | 11/29/2011 |
| 7896625 | Vacuum pumping system and method of operating a vacuum pumping arrangement A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising a turbomolecular pumping mechanism; and a backing pumping mechanism. The drive shaft drives said ... | 03/01/2011 |
| 7753661 | Vacuum pump A vacuum pump evacuates gas from a chamber by coaction of a rotationally driven rotor and a stator. An electrical equipment section that rotates the rotor is housed within a stator column integral with the stator. A cooling water pipe is buried in a wall of the stat... | 07/13/2010 |
| 7717684 | Turbo vacuum pump and semiconductor manufacturing apparatus having the same A turbo vacuum pump is suitable for evacuating a corrosive process gas or evacuating a gas containing reaction products. The turbo vacuum pump includes a casing having an intake port, a pump section comprising rotor blades and stator blades housed in the casing, bea... | 05/18/2010 |
| 7645126 | Vacuum pump and semiconductor manufacturing apparatus To provide a vacuum pump capable of evacuating in pressure ranges from an atmospheric pressure to a high vacuum, capable of rotating at a high speed to be downsized and improved in pumping performance, and capable of producing a completely oil-free vacuum. A ... | 01/12/2010 |
| 7641451 | Turbo pump and processing apparatus comprising the same A turbo pump for evacuating a process chamber minimizes the amount time necessary to reduce the speed of the rotor in preparation for performing maintenance in the process chamber or the like. The turbo pump includes a housing communicating with the reaction chamber... | 01/05/2010 |
| 7600989 | Leak detector comprising an inlet A leak detector includes an inlet, a high-vacuum pump, and a test gas detector, which is connected to the entry of the high-vacuum pump. A backing pump is connected to an outlet area of the high-vacuum pump, and a test gas line extends between the inlet of the leak ... | 10/13/2009 |
| 7438534 | Wide range pressure control using turbo pump The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressu... | 10/21/2008 |
| 7438538 | Pump and method A pump for moving a liquid including a rotor rotatable within a housing and slidable relative to the housing between a first axial rotor position during normal pump operation and a second axial rotor position during a pump inoperative condition. ... | 10/21/2008 |
| 7436093 | Turbomolecular vacuum pump The turbomolecular vacuum pump with active magnetic bearings comprises an enclosure (110) defining a primary vacuum chamber (116), a rotor (120), an electric motor (107), an axial magnetic bearing (103), radial magnetic bearings ( | 10/14/2008 |
| 7417398 | Vacuum pump A vacuum pump includes at least one magnetic body located on a circle about a rotor rotational axis and having a Curie temperature within a rotor temperature monitoring range; an inductance detecting portion facing the circle so as to establish a gap between the cir... | 08/26/2008 |
| 7413411 | Electronically controlled vacuum pump A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processo... | 08/19/2008 |
| 7404698 | Turbomolecular pump with static charge control The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Ele... | 07/29/2008 |
| 7354254 | Compact vacuum pump A compact turbomolecular vacuum pump (1) is driven by a cup-type motor (8). The cup-shaped rotor of the motor is preferably integrated into the pump rotor (14) and may define corresponding pumping stages, for instance Holweck stages, wherein the... | 04/08/2008 |
| 7341423 | Molecular pump and connecting device A flange of a molecular pump is connected to a vacuum vessel by first bolts that extend through elongate holes in the flange and are bolted to the vacuum vessel. One or more buffering members are attached to the flange by the first bolts that extend through first op... | 03/11/2008 |
| 7319507 | Apparatus and method for removing contaminant on original, method of manufacturing device, and original At least one exemplary embodiment is directed to an apparatus which includes an original stage, to hold an original, which moves in a scan direction, an illumination optical system configured to illuminate the original held by the original stage with exposure light,... | 01/15/2008 |
| 7300261 | Vibration damper with nested turbo molecular pump A gas turbo pump assembly for connection to a port of a vacuum chamber and having high throughput with low vibration. The assembly comprises a turbo pump and a vibration damper. The pump has a pump body with an external surface and a center axis defining a first axi... | 11/27/2007 |
| 7270137 | Apparatus and method of securing a workpiece during high-pressure processing An apparatus is disclosed for performing high-pressure processing of a workpiece having a top face and a bottom face. The apparatus comprises a processing chamber and a holder for securing the workpiece within the processing chamber so that a substantial portion of ... | 09/18/2007 |
| 7258346 | Sliding element A primary objective of a sliding element of the present invention is to decrease a friction coefficient of the sliding face and to improve seal performance thereof. The sliding element comprises a first dam section (6) which is configured in an annular form o... | 08/21/2007 |
| 7244113 | Scroll pump with controlled axial thermal expansion Vacuum pumping apparatus includes a pump frame, a stationary scroll element secured to the pump frame, the stationary scroll element including a stationary scroll blade, an orbiting scroll element including an orbiting scroll blade intermeshed with the stationary sc... | 07/17/2007 |
| 7240536 | Test-gas leak detector A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas con... | 07/10/2007 |
| 7225820 | High-pressure processing chamber for a semiconductor wafer A processing chamber having an improved sealing means is disclosed. The processing chamber comprises a lower element, an upper element, and a seal energizer. The seal energizer is configured to maintain the upper element against the lower element to maintain a proce... | 06/05/2007 |
| 7223064 | Baffle configurations for molecular drag vacuum pumps A molecular drag compressor includes a rotor disk coupled to a drive shaft for rotation about an axis, a stator disposed about the rotor disk, the stator defining a tangential flow channel, an inlet to the tangential flow channel and an outlet from the tangential fl... | 05/29/2007 |
| 7186093 | Method and apparatus for cooling motor bearings of a high pressure pump A system for cooling the bearings and motor in a pump assembly used for circulating supercritical fluid is disclosed. The system uses a pressurized coolant fluid that can be substantially pure CO2. The pressure difference between the circulating supercrit... | 03/06/2007 |
| 7156922 | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor A multi-chamber installation (1) treats objects under vacuum. An evacuation system (5) is connected to a plurality of chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump (5) has several stages (11, 12, 13... | 01/02/2007 |
| 7153093 | Vacuum pump A vacuum pump (10) comprises at least one rotor shaft (12) having a rotor section (14) with a rotor (16), a bearing section (18) with a bearing (20), and a shaft sealing system (22) that is axially situated between th... | 12/26/2006 |
| 7140833 | Integrated turbo/drag/regenerative pump with counter-rotating turbo blades The present invention relates to vacuum pumps and a method for creating and maintaining a high vacuum. A vacuum pump includes a regenerative section and a turbo-molecular section. A common first rotor carries forward-rotating elements of both the regenerative sectio... | 11/28/2006 |
| 7140847 | Integrated high vacuum pumping system The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-... | 11/28/2006 |
| 7097431 | Mechanical kinetic vacuum pump A mechanical vacuum pump includes a rotor made of a light metal alloy by powder metallurgy. The powder metallurgy increases the resistance of the rotor to heat and creep. ... | 08/29/2006 |
| 7090469 | Turbomolecular pump A turbomolecular pump (10) comprises a stator (12, 18), a pump rotor (20) a motor (28) for driving the pump rotor and a control device (42). The control device (42) controls the motor output power such that the motor output ... | 08/15/2006 |
| 7086827 | Turbo molecular high-vacuum pump with a circular intake area In a turbo-molecular pump with a high vacuum-side induction area and of a rotational symmetrical arrangement, comprising a compressor turbine including a rotor and a stator tube having axially alternately tightly arranged rotor blade rings and stator vane rings with... | 08/08/2006 |
| 7059823 | Molecular pump equipped with flange having buffering portion A molecular pump has a casing having a gas inlet port and a gas discharge port, a stator disposed within the casing, a shaft disposed in the casing concentrically with the stator, a bearing rotatably supporting the shaft for undergoing rotation relative to the stato... | 06/13/2006 |
| 7059828 | Gas friction pump A gas friction pump, comprising stationary pump-active components (14) and rotatable pump-active components (15) secured on a rotatable rotor shaft (4), wherein the rotor shaft is supported with a bearing (5) at the high-vacuum-side end a... | 06/13/2006 |
| 7033142 | Vacuum pump system for light gases A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet o... | 04/25/2006 |
| 7021888 | Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump An ultra-high speed vacuum pump evacuation system includes a first stage ultra-high speed turbofan and a second stage conventional turbomolecular pump. The turbofan is either connected in series to a chamber to be evacuated, or is optionally disposed entirely within... | 04/04/2006 |
| 7011491 | Friction vacuum pump A friction vacuum pump (1) comprises a fixed element (7) bearing rows of stator blades (3) and a rotating element (6) bearing rows of rotor blades (2). The rows of stator blades and rotor blades are arranged concentrically with res... | 03/14/2006 |
| 6991439 | Vacuum pump A vacuum pump apparatus has a casing and a base connected to the casing. The base has an opening communicating with an interior space of the casing. A heater is mounted on the base for heating the base to maintain a gas discharge path at a temperature high enough to... | 01/31/2006 |
