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| Number | Title | Issue Date |
| 7740459 | Micropump having a pump diaphragm and a polysilicon layer A method for producing a micromechanical component, preferably for fluidic applications having cavities. The component is constructed from two functional layers, the two functional layers being patterned differently using micromechanical methods. A first etch stop l... | 06/22/2010 |
| 7682138 | Fluid transferring system and micropump suitable therefor Disclosed herein is a micro fluid transferring system that comprises a micropump having a chamber, a first fluid transferring portion connected to the chamber, and a second fluid transferring portion connected to the chamber. This system is characterized in that at ... | 03/23/2010 |
| 7347533 | Low cost piezo printhead based on microfluidics in printed circuit board and screen-printed piezoelectrics In accordance with one aspect of the present exemplary embodiment, a printhead includes a printed circuit board having at least one base layer, with at least one electrical trace, at least one fluidic passage and at least one fluidic chamber as part of the printed c... | 03/25/2008 |
| 7334630 | Closed-loop microchannel cooling system Apparatus and methods according to the present invention utilize micropumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated r... | 02/26/2008 |
| 7332238 | Electrochemical cells and systems An electrochemical cell or cell system includes an air mover, such as a fan, and one or more pressure-sensitive mechanisms, such as a slit valve, that allow air to enter or to exit the cell or system. ... | 02/19/2008 |
| 7316067 | Forming a perforate membrane by laser drilling and a subsequent electro-polishing step A method of forming a perforate membrane (1) is disclosed for use in a liquid transport device. The membrane has at least plural nozzles (10) formed therethrough. Each of those nozzles has a throat portion (12) opening at opposite end through op... | 01/08/2008 |
| 7316543 | Electroosmotic micropump with planar features An electroosmotic micropump having a plurality of thin, closely-spaced, approximately planar, transversel aligned partitions formed in or on a substrate, among which electroosmotic flow (EOF) is generated. Electrodes are located within enclosed inlet and outlet mani... | 01/08/2008 |
| 7311503 | Micromachined fluidic device and method for making same The fluid-flow device (100) of the invention comprises a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34), and a silicon layer (32). The ... | 12/25/2007 |
| 7290554 | Embedded microfluidic check-valve Embedded check-valve manufacturing assembly (100, 600) for subsequent firing and integration in a micro-fluidic system. The assembly can include a check-valve chamber (104, 604), an inlet port (106, 606) and an outlet port (108, 608) form... | 11/06/2007 |
| 7290555 | Embedded microfluidic check-valve Embedded check-valve manufacturing assembly (100, 600) for integration in a micro-fluidic system. The assembly can include a check-valve chamber (104, 604), an inlet port (106, 606) and an outlet port (108, 608) formed from at least one l... | 11/06/2007 |
| 7284966 | Micro-pump A micro-pump having a first layer, a second layer and an intermediate flexible layer is disclosed. The first layer and second layer may be of moldable plastics. The intermediate layer may be a substantially flat PDMS membrane layer having an inlet hole and an outlet... | 10/23/2007 |
| 7284962 | Micropump This invention provides a fluid pump using perforate elements and closure elements which are alternately displace and relates particularly but not exclusively to miniature fluid pumps and pumps suitable for delivery of liquid pharmaceutical formulations. In the art ... | 10/23/2007 |
| 7231839 | Electroosmotic micropumps with applications to fluid dispensing and field sampling Apparatus and methods according to the present invention preferably utilize electroosmotic pumps in fluid handling and field sampling applications. The electroosmotic pumps used in these applications are capable of generating high pressure and flow without moving me... | 06/19/2007 |
| 7211923 | Rotational motion based, electrostatic power source and methods thereof A power system includes a member with two or more sections and at least one pair of electrodes. Each of the two or more sections has a stored static charge. Each of the pair of electrodes is spaced from and on substantially opposing sides of the member from the othe... | 05/01/2007 |
| 7204961 | Liquid feed apparatus and automatic analyzing apparatus Provided is a liquid feed apparatus for feeding liquid by operating a diaphragm at a high frequency, in which an inlet valve and an outlet valve are integrally incorporated with a liquid feed chamber, the positions of the valve are shifted into peripheral parts of t... | 04/17/2007 |
| 7201881 | Actuator for deformable valves in a microfluidic device, and method A combination is provided that includes a microfluidic device and a pivoting actuator. Methods of using the combination are also provided. The microfluidic device can include deformable valves that can be opened, for example, by the pivoting actuator. ... | 04/10/2007 |
| 7198759 | Microfluidic devices, methods, and systems Microfluidic assemblies, systems, and methods are provided for manipulating fluid samples. Assemblies include an elastically deformable cover layer and a less elastically deformable substrate. The methods include deforming the substrate through the cover layer so th... | 04/03/2007 |
| 7195393 | Micro fluidic valves, agitators, and pumps and methods thereof A valve which has a structure with at least one opening and a member which has a fixed static charge and also has a first position exposing the opening and a second position sealing the opening. A method for making the valve includes providing a structure with at le... | 03/27/2007 |
| 7193316 | Integrated circuit coolant microchannel with movable portion According to some embodiments, a microchannel is provided to transport a coolant. The microchannel may be proximate to an integrated circuit to transfer heat from the integrated circuit to the coolant. Moreover, a movable portion may be provided to adjust a volume o... | 03/20/2007 |
| 7188931 | Doubly-anchored thermal actuator having varying flexural rigidity A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable elemen... | 03/13/2007 |
| 7185697 | Electroosmotic microchannel cooling system Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as wel... | 03/06/2007 |
| 7174739 | Air chiller unit The invention provides an improved drain valve for dew condensation in an air chiller unit mounted on an aircraft. The drain valve 160 attached to a drain of a drain pan in an air chiller unit is equipped with a valve seat member 162 having an opening ... | 02/13/2007 |
| 7169601 | Microfabricated reactor An integrated microfabricated instrument for manipulation, reaction and detection of microliter to picoliter samples. The instrument is suited for biochemical reactions, particularly DNA-based reactions such as the polymerase chain reaction, that require thermal cyc... | 01/30/2007 |
| 7135147 | Closing blade for deformable valve in a microfluidic device and method A microfluidic manipulation system is provided that includes a blade for manipulating deformable material and at least one movable support that is capable of moving the blade into contact with a microfluidic device including a deformable feature. When the microfluid... | 11/14/2006 |
| 7134486 | Control of electrolysis gases in electroosmotic pump systems Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as wel... | 11/14/2006 |
| 7131486 | Electroosmotic microchannel cooling system Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as wel... | 11/07/2006 |
| 7104768 | Peristaltic micropump A Peristaltic micropump includes a first membrane region with a first piezo-actor for actuating the first membrane region, a second membrane region with a second piezo-actor for actuating a second membrane region, and a third membrane region with a third piezo-actor... | 09/12/2006 |
| 7094040 | Fluid transferring system and micropump suitable therefor Disclosed herein is a micro fluid transferring system that comprises a micropump having a chamber, a first fluid transferring portion connected to the chamber, and a second fluid transferring portion connected to the chamber. This system is characterized in that at ... | 08/22/2006 |
| 7090471 | Integrated electrostatic peristaltic pump method and apparatus An electrostatic fluid regulating device and methods. The device has a substrate. The device also has a first electrode coupled to the substrate. The device has a polymer based diaphragm. A second electrode is coupled to the diaphragm. A polymer based fluid chamber ... | 08/15/2006 |
| 7083398 | Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages A micro-electro-mechanical vibrating pumping stage comprises a silicon substrate (15) on which there are formed a single-layer or multilayer oscillating assembly (27; 127; 227; 327) with a vibrating membrane and a device controlling the membrane in ord... | 08/01/2006 |
| 7070699 | Bistable microelectromechanical system based structures, systems and methods A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a ... | 07/04/2006 |
| 7064036 | Dual-gate transistor device and method of forming a dual-gate transistor device Embodiments in accordance with the present invention provide methods of forming a dual gated semiconductor-on-insulator (SOI) device. Such methods encompass forming a first transistor structure operatively adjacent a first side of the semiconductor layer of an SOI s... | 06/20/2006 |
| 7061104 | Apparatus for conditioning power and managing thermal energy in an electronic device In one aspect, the present invention is a technique of, and a system for conditioning power for a consuming device. In this regard, a power conditioning module, affixed to an integrated circuit device, conditions power to be applied to the integrated circuit device.... | 06/13/2006 |
| 7056759 | Method for making a microelectromechanical system using a flexure protection layer A microelectromechanical system is made by establishing a flexure protection layer over a portion of at least one flexure which is located on a substrate. The flexure protection layer is deposited such that a portion of the flexure is left exposed. Contact is establ... | 06/06/2006 |
| 7048519 | Closed-loop piezoelectric pump A closed-loop piezoelectric pump is disclosed for use in a fluid delivery system. The pump housing includes a movable diaphragm that defines a pumping chamber within the pump housing, the pumping chamber having an inlet for admitting fluid and an outlet for emitting... | 05/23/2006 |
| 7029951 | Cooling system for a semiconductor device and method of fabricating same A cooling system for a semiconductor substrate incudes a plurality of trenches formed from a backside of the semiconductor substrate, and thermally conductive material deposited in the plurality of trenches. A method of forming cooling elements in a semiconductor su... | 04/18/2006 |
| 7008193 | Micropump assembly for a microgas chromatograph and the like A MEMS-fabricated microvacuum pump assembly is provided. The pump assembly is designed to operate in air and can be easily integrated into MEMS-fabricated microfluidic systems. The pump assembly includes a series of pumping cavities with electrostatically-actuated m... | 03/07/2006 |
| 6942815 | Ink jet recording head and method for manufacturing the same An ink jet recording head is capable of: preventing any of stagnation in ink flow, formation of vapor bubbles, cavitation, or like problems from occurring in the ink flow; realizing an excellent ink ejection operation, and thereby realizing a high quality gradation ... | 09/13/2005 |
| 6942018 | Electroosmotic microchannel cooling system Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as wel... | 09/13/2005 |
| 6929354 | Multi-layer ink jet recording head and manufacturing method therefor The present invention is an ink jet recording head having multi-layer structure including a pressure generating unit and a flow path unit. The pressure generating unit contains a vibrating member with piezoelectric transducers on its surface, a first spacer with a p... | 08/16/2005 |
