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| Number | Title | Issue Date |
| 7717681 | Leak detector comprising a vacuum apparatus A leak detector operating according to the counterflow principle comprises a first high vacuum pump that operates in series with a primary pump. A second high vacuum pump is branched at a connecting point and an entry side thereof is connected to a mass spectrometer... | 05/18/2010 |
| 7329105 | Multi-directional pump A multi-directional pump is disclosed generally comprising a housing with inlet and outlet ports, a pumping device disposed therein, a first chamber in fluid communication with the inlet port, and a second chamber in fluid communication with the first chamber. The f... | 02/12/2008 |
| 7278831 | Apparatus and method for control, pumping and abatement for vacuum process chambers The present invention is an apparatus and method for controlling pressure, pumping a vacuum and providing abatement for a plurality of vacuum processing chambers. The system may be used in semiconductor manufacture. Multiple vacuum processing chambers are exhausted ... | 10/09/2007 |
| 7156922 | Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor A multi-chamber installation (1) treats objects under vacuum. An evacuation system (5) is connected to a plurality of chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump (5) has several stages (11, 12, 13... | 01/02/2007 |
| 7021903 | Fore-line preconditioning for vacuum pumps The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The gases are treated in the abatem... | 04/04/2006 |
| 6827559 | Piezoelectric micropump with diaphragm and valves A micropump comprising a pump body including a fluid inlet channel, a fluid outlet channel and pumping reservoir, the fluid inlet channel and the fluid outlet channel communicating with the pumping reservoir, a diaphragm covering the pumping reservoir, a piezoelectr... | 12/07/2004 |
| 6776587 | Dual-stage, plunger-type piston compressor with minimal vibration The invention relates to a piston arrangement for a dual-stage piston compressor, comprising a cranksbaft and several cylinders which house the operating piston. Said arrangement allows two or more low-pressure stages and at least one high-pressure stage to be forme... | 08/17/2004 |
| 6676384 | Gas friction pump A vacuum pump including two gas friction pumps arranged parallel to each other and having each at least one stage having an inlet communicating with a common suction region and an outlet communicating with a separate discharge region, a multi-stage pump a... | 01/13/2004 |
| 6648609 | Pump as a pressure source for supercritical fluid chromatography involving pressure regulators and a precision orifice The invention is a device and method in a high-pressure chromatography system, such as a supercritical fluid chromatography (SFC) system, that uses a pump as a pressure source for precision pumping of a compressible fluid. The preferred exemplary embodime... | 11/18/2003 |
| 6428014 | Piston sealing ring assembly A piston sealing ring assembly (70) for sealing the piston/cylinder interface of a double-acting gas compressor including a first and second cut piston sealing ring (54,72) each bounded by first and second planar surfaces (6,8), the first piston sealing r... | 08/06/2002 |
| 6409477 | Vacuum pump A vacuum pump including suction and discharge regions, two gas friction pumps arranged on opposite side of the suction region and parallel to each other and each having at least one stage and a discharge region channels connecting the discharge regions an... | 06/25/2002 |
| 6305910 | Multi-stage pump device A multi-stage pump device includes a plurality of pump devices, each of the pump devices having a pump portion feeding working fluid under pressure, and a connecting portion provided between at least two of the pump devices, through which working fluid pu... | 10/23/2001 |
| 6196810 | Multistage vacuum pump assembly A multistage vacuum pump assembly comprising plural independent pumping stages connected in series is disclosed. A first pumping stage located at one end of the series is connected to a room to be evacuated, and a final pumping stage located at the other ... | 03/06/2001 |
| 5820354 | Cascaded progressing cavity pump system At least two progressing cavity pumps or pump sections are connected in series. The flow volume rate of the second pump or pump section is less than the flow volume rate of the first pump or pump section. If there are more than two pumps or pumps sections... | 10/13/1998 |
| 5768901 | Refrigerating system employing a compressor for single or multi-stage operation with capacity control A compressor having plural banks of cylinders can be operated multi-stage, single stage, plural parallel single stages and, when multi-stage, with or without an economizer. One of the low stage banks of cylinders can be unloaded to reduce the first stage ... | 06/23/1998 |
| 5755561 | Piston pumping system delivering fluids with a substantially constant flow rate A pumping system in accordance with the invention comprises n (nࣙ1) piston or diaphragm primary pumping modules (P1 to Pn) including each at least one pumping unit, connected by means of unidirectional valves (V11-V1n) respectively to n tanks (R1-Rn) co... | 05/26/1998 |
| 5704768 | Motor pump family of centrifugal pumps A motor pump group has a plurality of centrifugal pumps of the same nominal port diameter including a plurality of impellers having stepwise greater outside diameters for stepwise higher pump heads, and a plurality of respective motors for actuating the p... | 01/06/1998 |
| 5676528 | Motor pump family with single stage and multiple stage impellers A motor pump group has a plurality of centrifugal pumps of the same nominal port diameter including a plurality of impellers having stepwise greater outside diameters for stepwise higher pump heads, and a plurality of respective motors for actuating the p... | 10/14/1997 |
| 5445502 | Vacuum pump having parallel kinetic pump inlet section A vacuum pump includes a positive displacement vacuum pump structure section disposed on a discharge opening side; a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high vacuum; and a kinetic vacuum pump structur... | 08/29/1995 |
| 5431545 | Pumper system for in-situ pigging applications A pumper system is adapted to enable pumps to be switched between parallel operation, for the high flow conditions normally desired for in-situ pigging operations within a line to be cleaned, and series operation, for the high pressure conditions needed i... | 07/11/1995 |
| 4787211 | Refrigeration system There is disclosed a refrigeration system employing multi-stage compressors, several unique modes of operation thereof, a sub-cooler/economizer for sub-cooling the condensed refrigerant prior to vaporization in the evaporator, as well as an improved expan... | 11/29/1988 |
| 4778350 | Hydraulic pump assemblies A hydraulic pump assembly includes a cam shaft, a pair of high pressure plunger pumps opposed to each other on a first common axis, each of the high pressure plunger pumps having a first plunger of small diameter perpendicular to the cam shaft for recipro... | 10/18/1988 |
| 4725204 | Vacuum manifold pumping system Vacuum pumping system comprises a plurality of vacuum processing vessels, semiconductor processing reactors, and the like, connected to a common manifold evacuated by a generously large central vacuum unit. The manifold is maintained at a substantially co... | 02/16/1988 |
| 4679986 | Energy conserving refrigeration apparatus and method An energy-conserving refrigeration apparatus which employs a atmospheric pressure and vacuum-pressure actuated partial compressor for a refrigerant gas in combination with a conventional prime mover-driven compressor and also achieves lower compressor hea... | 07/14/1987 |
| 4607486 | Centrifugal main fuel pump A high speed centrifugal fuel pump delivers fuel to the main metering valve of a fuel control of a gas turbine engine for feeding the engine's burners, and a boost pump and positive displacement pump pressurize fuel for the servo medium for actuating the ... | 08/26/1986 |
| 4599049 | High pressure meter pump A high pressure meter pump system with improved accuracy is provided by subdividing a large meter pump capacity into metered subvolume charges which are incrementally delivered to a high pressure slave pump. This enables the pump sytem to achieve improved accu... | 07/08/1986 |
| 4097198 | Internal combustion assisted hydraulic engine This hydraulic engine utilizes two sets of hydraulic cylinders connected to a shaft so as to be alternately pressurized as the shaft is reciprocally driven by a pair of conventional internal combustion chambers. The outlets of all hydraulic cylinders are ... | 06/27/1978 |
| 4003679 | High pressure pump with metering A pumping system is provided in which a low pressure metering pump injects fluid charges into a high pressure pump which in turn operates into a high pressure load. The high pressure pump is designed to always present a low pressure at its input on its in... | 01/18/1977 |
| 3976400 | Gradient pump apparatus A high pressure positive displacement gradient pump for two flowable materials utilizing two reciprocating pistons with the pair of pistons pumping in an overlapping reasonably pulse free manner. The gradient of the two flowable materials is created by ad... | 08/24/1976 |