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| Number | Title | Issue Date |
| 6767192 | Vapor jet pump with ejector stage in foreline A vapor jet vacuum pump includes a housing having an inlet port and a foreline conduit, a vapor jet assembly within the housing, a vapor source for supplying a vapor to the vapor jet assembly, and at least one ejector stage. The ejector stage includes an ejector noz... | 07/27/2004 |
| 5879135 | Monolithic high vacuum housing with vapor baffle and cooling fins A housing that defines a high vacuum work environment includes a monolithic member that has one side having a baffle region and a wall region. The baffle region includes at least one angularly contoured evacuation opening that forms a zig-zag flow path fr... | 03/09/1999 |
| 5137429 | Diffusion pump A high vacua diffusion pump for use in a vacuum system including a chamber to be evacuated and a positive displacement pump. The diffusion pump includes a pump body structure having an open upper end and a closed lower end. A boiler and jet assembly is yi... | 08/11/1992 |
| 4845360 | Counterflow leak detector with high and low sensitivity operating modes A counterflow helium mass spectrometer leak detector in which a helium sample passes in a reverse direction through a diffusion pump to a mass spectrometer for measurement. The diffusion pump includes a conventional foreline and a second foreline provided... | 07/04/1989 |
| 4610603 | Protective control system for diffusion pump A control system for a diffusion pump is provided which serves to protect the pump from loss of the pumping fluid, from loss of water cooling, as well as from overheating of the heater. The protective system includes a thermally responsive switch mounted ... | 09/09/1986 |
| 4566861 | Method of and apparatus for operating a diffusion pump A diffusion pump is operated by controlling the rate at which vapor is evaporated from a pool in response to an indication of the effectiveness of a fluid in cooling a condensation surface for the vapor as derived by sensors for the temperatures of the po... | 01/28/1986 |
| 4373868 | Diffusion pump for leak detector A diffusion pump for a leak detector of helium or other light gases includes a foreline, responsive to gases from vacuum equipment being monitored for leak detection, and an inlet, connected to a mass spectrometer or other similar high vacuum gas measurin... | 02/15/1983 |
| 4251713 | Electric heater assembly for diffusion pumps A diffusion pump includes a flat metal boiler plate having an upper face defining a floor for a pool of a vaporizable diffusion pump fluid or oil and a lower face against which the metallic sheath of a tubular electric heater is pressed by a coextensive m... | 02/17/1981 |
| 4242052 | Diffusion pump An improved vacuum diffusion pump is shown. The pump consists of the conventional elements of a pump body with inlet and outlet ports, a vaporizer, a vapor jet assembly such as a vapor chimney within the pump body and cooling means associated with the out... | 12/30/1980 |
| 4214853 | Evacuation apparatus with cryogenic pump and trap assembly A thin-film deposition apparatus comprises a cabinet having a vessel mounted therein which defines a vacuum chamber adapted to retain processed articles. A vacuum unit is mounted adjacent to the vessel to communicate in substantially unrestricted communic... | 07/29/1980 |
| 4201629 | Fluid refining apparatus A diffusion pump capable of separating impurities from its pump fluid during operation is disclosed. Skimming drains are provided in the pump's boiler for periodically skimming the evaporative surface of the working fluid. This eliminates nearly all conta... | 05/06/1980 |
| 4191512 | Apparatus and method for controlling pressure ratio in high vacuum vapor pumps A predetermined pressure ratio is maintained between a foreline and a load port of a vacuum diffusion pump including a bath of oil that is vaporized by a heater. A property of the pump is sensed to derive a signal indicative of the pressure ratio. The sig... | 03/04/1980 |
| 4170522 | Fluid refining method A diffusion pump capable of separating impurities from its pump fluid during operation is disclosed. Skimming drains are provided in the pump's boiler for periodically skimming the evaporative surface of the working fluid. This eliminates nearly all conta... | 10/09/1979 |
| 4108576 | Low cost, thermally efficient diffusion pump A vacuum diffusion pump includes a body assembly fabricated from a single piece of deep drawn sheet metal whereby a cylindrical wall of the body assembly, a flange for connecting the diffusion pump to a vacuum chamber, and a floor for a pool of diffusion ... | 08/22/1978 |
| 4086031 | Vapor diffusion pump A diffusion pump is provided in which an internal vacuum chamber is surrounded by regions of the pump through which working vapors flow. This configuration enables a single heating unit to heat both the working fluid of the pump and the vacuum chamber. In... | 04/25/1978 |
