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| Number | Title | Issue Date |
| 7318517 | Process system and device for transporting substrates A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a f... | 01/15/2008 |
| 7282819 | Stage apparatus, exposure apparatus, and device manufacturing method A stage apparatus in which support units supporting a counter-mass surface plate on a reference surface each include a first permanent magnet disposed on one of the surface plate and the reference surface, and a pair of second permanent magnets disposed on the other... | 10/16/2007 |
| 7249668 | Positive displacement sorter shoe A positive displacement sorter apparatus and method includes providing a plurality of interconnected slats defining an endless web, an upper run of the web defining a conveying surface. A plurality of pusher shoes are provided, each moving along at least one of the ... | 07/31/2007 |
| 7226270 | Apparatus for transferring semiconductor device in handler An apparatus for transferring semiconductor devices in a semiconductor device handler is provided which simplifies set up procedures when a species of device to be tested, and the associated change kit, is changed. A reference picker and three variable pickers are p... | 06/05/2007 |
| 7107163 | Magnetic levitation force control An apparatus and method for predicting attractive magnetic levitation force comprising measuring flux density for a component of an attractive magnetic levitation system and computing a predicted attractive magnetic levitation force from the flux density. ... | 09/12/2006 |
| 7086519 | Positive displacement shoe and slat sorter apparatus and method A positive displacement sorter apparatus and method includes providing a plurality of slats being interconnected in an endless web, an upper run of the web defining a conveying surface, and a plurality of pusher shoes gliding along at least some of the slats to late... | 08/08/2006 |
| 6971832 | Magnetically coupled linear delivery system transferring wafers between a cassette and a processing reactor A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The ... | 12/06/2005 |
| 6935828 | Wafer load lock and magnetically coupled linear delivery system A wafer load lock and linear delivery system including within a load lock vacuum chamber a paddle cantilevered from a trolley traveling on a single rail extending on a lateral side of the wafer end of the paddle while it is retracted into the load lock chamber. The ... | 08/30/2005 |
| 6582178 | Mini-modual manufacturing environmental A mini-modular manufacturing environmental chamber for processing and transporting semiconductor devices is disclosed. The cylindrical chamber is provided with a conveyer assembly that transports items within the chamber and divides the interior into two ... | 06/24/2003 |
| 6519273 | Magnetic bearing and circulation fan apparatus A magnetic bearing enables to rotatably support a levitated body non-contactingly disposed in a hermetically sealed container filled with a gaseous process substance of a corrosive nature, while without contaminating the gaseous environment and suffering ... | 02/11/2003 |
| 6471459 | Substrate transfer shuttle having a magnetic drive A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle, and a rotatable pinion with pinion magnets is positioned adj... | 10/29/2002 |
| 6361268 | Frictionless transport apparatus and method A frictionless transport apparatus for transporting an object from a first to a second station is disclosed. The apparatus has a frame extending between the first and second stations and a carriage mounted for movement along said frame, in a levitated con... | 03/26/2002 |
| 6102193 | Method and apparatus for providing parts to workpieces The method and apparatus (10) for moving and positioning parts (150, 250, 350 or 450) on workpieces (160) is described. The apparatus includes a vibratory bowl (12), a conveyance and feed system and a positioning cylinder (82). The bowl aligns the parts a... | 08/15/2000 |
| 6012208 | Machine tool system The invention relates to a novel machine tool system provided with selectively energizable magnets for selectively moving a support for a work piece clamping plate into a floating condition and for changing the disposition of the clamping plate relative t... | 01/11/2000 |
| 5980193 | Magnetically levitated robot and method of increasing levitation force A magnetically levitated transport device provides levitation and propulsion of a vacuum carriage. An air carriage is moved by conventional means through both linear and angular displacements. Non-magnetic coils mounted on the air carriage interact with p... | 11/09/1999 |
| 5639206 | Transferring device A transferring device is provided for transferring an article between vacuum chambers. The transferring device comprises a cylindrical float member, and a transferring rod connected to and extending along an axial direction for supporting an article. At l... | 06/17/1997 |
| 5288199 | Transporting device of magnetically floating type A transporting device of the magnetically floating type is disposed in a central area of a multi-chamber to transport a semiconductor wafer into and out of peripheral processing rooms. The transporting device is comprised of a movable slider member having... | 02/22/1994 |
| 4974439 | Controlled transfer of sheet metal can bodies in can body line Apparatus which eliminates mechanically-moving parts for clasping or releasing a sheet metal can body for moving a can body from a forming station and, which reduces the number of moving parts as well as the type of movements required by such transfer app... | 12/04/1990 |
| 4684315 | Frictionless supporting apparatus A frictionless supporting apparatus comprising a horizontally plane working table having magnet portions on its peripheries. Pairs of stationary magnets define therebetween a vertical space into which the working table is inserted. Magnetic repulsion betw... | 08/04/1987 |
| 4681506 | Table feed apparatus A table feed apparatus is disclosed. The table feed apparatus includes a fixed bed, a first movable table and a second movable table. The first movable table and the second movable table are carried on the fixed bed through the first and second linear bea... | 07/21/1987 |
