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"Transmission of documents via telephone wires is possible in principle, but the apparatus required is so expensive that it will never become a practical proposition."
Dennis Gabor, British physicist
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| Number | Title | Issue Date |
| 8079800 | Articulated robot An articulated robot includes a first arm which is horizontally angularly movable, a sectorial support plate coaxial with a center about which the first arm is angularly movable, an auxiliary arm parallel to the first arm, and a joint member connected to respective ... | 12/20/2011 |
| 8043042 | Industrial robot An industrial robot may include a robot hand structured to mount a transfer object, a multi-joint arm section having at least two arms including a robot hand supporting arm structured to support the robot hand to be rotatable; and a main section structured to suppor... | 10/25/2011 |
| 8016541 | Substrate handling system for aligning and orienting substrates during a transfer operation A system is provided for sensing, orienting, and transporting wafers in an automated wafer handling process that reduces the generation of particles and contamination so that the wafer yield is increased. The system includes a robotic arm for moving a wafer from one... | 09/13/2011 |
| 8016542 | Methods and apparatus for extending the reach of a dual scara robot linkage Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first ar... | 09/13/2011 |
| 7967549 | Robotic system including foldable robotic arm A system includes an end effector, a robotic wrist for orienting the end effector; and a robotic arm for positioning the end effector. The robotic arm is foldable into a stack. The robotic wrist is mounted to a last link of the robotic arm. ... | 06/28/2011 |
| 7955043 | Substrate transfer apparatus Provided is a substrate transfer apparatus which can perform stable and highly accurate transfer without making a configuration complicated. A substrate transfer apparatus according to the present invention includes a multijoint arm whose one end is arranged on a ba... | 06/07/2011 |
| 7946800 | Substrate transport apparatus with multiple independently movable articulated arms A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting ... | 05/24/2011 |
| 7905699 | Transfer robot, transfer method, and control method A transfer robot includes a hand section on which an object is placed; a horizontal arm mechanism connected to the hand section, the horizontal arm mechanism including at least two rotary joints, the horizontal arm mechanism extending and contracting so as to move t... | 03/15/2011 |
| 7891935 | Dual arm robot A dual arm robot assembly has two arms each having a set of joint/link pairs that, in conjunction with an actuator assembly, define at least three degrees of freedom to provide independent horizontal translation and rotation of a distalmost link. A vertical motion m... | 02/22/2011 |
| 7837425 | Transportation apparatus and drive mechanism A transfer apparatus (20) for a target substrate (W) includes a rotatable rotary base (24). First and second arm mechanisms (26, 28) are attached to the rotary base and configured to bend and stretch. Each of the first and second arm mechanisms ... | 11/23/2010 |
| 7785060 | Multi-directional mechanical scanning in an ion implanter A scanning arm assembly for multi-directional mechanical scanning of a semiconductor wafer or other substrate to be implanted includes a pair of drive arms connected by two linkage arms to form a quadrilateral. Rotary joints are provided to join adjacent arms togeth... | 08/31/2010 |
| 7704036 | Drive source and transportation robot The invention includes a base member attached to a casing. The inside of the casing can be a vacuum atmosphere. A partition wall is provided on the base member, the base member separating an air atmosphere and the vacuum atmosphere. A rotating member (a rotating por... | 04/27/2010 |
| 7661921 | Semiconductor material handling system A semiconductor material handling system including a frame mounting a wafer cassette and a plurality of load ports thereon, and a wafer moving robot including a robot body which has a lifting member mounted in the frame and vertically moving along a predetermined li... | 02/16/2010 |
| 7645112 | Transport apparatus, control method for the same, and vacuum processing system A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct... | 01/12/2010 |
| 7578649 | Dual arm substrate transport apparatus A substrate transport apparatus comprising a drive section, an upper arm, a first forearm, and a second forearm. The upper arm is rotatably connected to the drive section at a first end of the upper arm. The upper arm is rotatably connected to the drive section for ... | 08/25/2009 |
| 7572093 | Transport apparatus, control method for the same, and vacuum processing system A transport apparatus includes first and second linkages. The first linkage includes first and third arms that can be rotated around a coaxial rotary shaft of first through third driving shafts coaxially arranged, and transports a first carrier. The second linkage i... | 08/11/2009 |
| 7572092 | Substrate alignment system A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the substrate transport apparatus. The sensor has a sensing path pointed in an ou... | 08/11/2009 |
| 7566198 | Industrial robot An industrial robot may include a main body part and an arm part including a first arm, a second arm and a hand arm. The main body part is provided with a first turnable shaft for performing an expansion-contraction operation of the arm part, a second turnable shaft... | 07/28/2009 |
| 7422412 | Horizontal articulated robot A horizontal articulated robot has a plurality of horizontal arms coupled by joint shafts, and a working shaft disposed at the extreme end of an extreme end arm among the horizontal arms has mounting portions of an end effector formed to both the upper and lower end... | 09/09/2008 |
| 7374393 | Method of retaining a substrate during a substrate transferring process A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer ... | 05/20/2008 |
| 7371041 | Assembly station with rotatable turret which forms and unloads a completed stack of articles Method and apparatus for forming and unloading a completed stack of articles. An assembly station includes a rotatable turret from which at least one stacker arm projects. The turret rotates to each of a number of article loading positions to sequentially load artic... | 05/13/2008 |
| 7367245 | Joint structure and robot arm A joint structure includes a rotating guide pulley, a fixed guide, and a rotating guide pulley. The rotating guide pulley is coaxial with a rotating shaft of a revolute joint, and is arranged so as to be rotatable about the rotating shaft. The fixed guide is arrange... | 05/06/2008 |
| 7363092 | Multi-joint robot and control device thereof It is an object of the invention to provide an articulated robot capable of reducing a number of axes, making the robot light-weighted, reducing fabrication cost and promoting a working efficiency by mounting two or more of hands at a single unit of the robot and sh... | 04/22/2008 |
| 7347120 | Robot of SCARA type A SCARA robot has a robot console, a first robot arm articulated on the robot console and swivelable about a first swivel axis, a second swivel arm articulated on the first swivel arm and swivelable around the second swivel axis extending substantially parallel to t... | 03/25/2008 |
| 7341266 | Portable folding robotic system A portable robotic system having a folding carriage is disclosed. The carriage in one embodiment includes two legs and a lateral stabilizer. The folding legs and stabilizer allow the carriage to be maneuvered into a plurality of open and closed positions. In the ope... | 03/11/2008 |
| 7336009 | Hobby servo enhancements An independent and modular apparatus is disclosed for extending the operational capacity of a servo motor. The apparatus includes a frame member having a servo motor and a rotatable shaft mounted therein. The output shaft of the servo motor and the rotatable shaft a... | 02/26/2008 |
| 7334826 | End-effectors for handling microelectronic wafers End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of abutments and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutmen... | 02/26/2008 |
| 7336012 | Motor, robot, substrate loader, and exposure apparatus An apparatus that reduces vibration generation and magnetic leakage, wherein the apparatus is a motor, an articulated serial robot that has a motor built in, a substrate loader that includes the articulated robot, and a related exposure apparatus equipped with the s... | 02/26/2008 |
| 7316537 | Substrate transport apparatus A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand return... | 01/08/2008 |
| 7311515 | Blow-molding apparatus A first transfer mechanism of a biaxial stretch blow-forming apparatus has sliders that are transported along a circular transportation passage. The sliders slide along a circular guide rail installed on a turntable. Each of the sliders is swung to left and right by... | 12/25/2007 |
| 7313462 | Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These ... | 12/25/2007 |
| 7300082 | Active edge gripping and effector The present invention generally relates to an end effector that utilizes a gripping mechanism to grip a peripheral edge of the wafer and secure the wafer to the end effector. In one embodiment, the gripping mechanism includes a pair of gripper arms that pivot betwee... | 11/27/2007 |
| 7296962 | Split assembly robotic arm A robotic arm assembly (101) is provided which comprises a hub (103), a first arm segment (105) which is attached to the hub, and a second arm segment (107) which is attached to the first arm segment such that said second arm segment can ... | 11/20/2007 |
| 7291565 | Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry comprises fl... | 11/06/2007 |
| 7292354 | Apparatus for photoelectric measurement of an original An apparatus for the photoelectric measurement of an essentially planar measurement original includes a photoelectric scanner and a positioning arrangement for the two dimensional movement of the scanner over the measurement original positioned on a supporting surfa... | 11/06/2007 |
| 7286890 | Transfer apparatus for target object A processing system includes a transfer chamber, a plurality of chambers connected to the transfer chamber, a transfer apparatus disposed in the transfer chamber, and a control section configured to control the transfer apparatus. The transfer apparatus includes a b... | 10/23/2007 |
| 7285884 | Hobby servo attachment mechanisms An apparatus for extending the operational capacity of a servo motor is disclosed. The apparatus includes a frame member. A first aperture is defined within the frame member and is configured to support a servo motor. A servo motor is positioned within the first ape... | 10/23/2007 |
| 7281741 | End-effectors for handling microelectronic workpieces End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abu... | 10/16/2007 |
| 7274464 | Position measuring device A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a movable element and a base body and an angle-measuring apparatus that me... | 09/25/2007 |
| 7273408 | Paired pivot arm The present invention relates to an apparatus and method for polishing semiconductor substrates. In one embodiment, two polishing heads are mounted on two independent pivoting arms that share one pivot point. Each of the pivoting arms enable the corresponding polish... | 09/25/2007 |
