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| Number | Title | Issue Date |
| 8105008 | Pneumatic multi-weight balancing device A load balancing pneumatic manipulator comprising an inflatable reservoir for establishing via an amplifier a pressure within a lift cylinder that is sufficient to balance the weight of an object being lifted. The reservoir is inflated and deflated by inflation and ... | 01/31/2012 |
| 8011874 | Transfer apparatus A transfer apparatus includes a stationary base, a lift base, a lifting mechanism for vertically moving the lift base, a rotary base mounted to the lift base, a rotating mechanism for rotating the rotary base about a vertical rotation axis, a linear moving mechanism... | 09/06/2011 |
| 7946799 | Transfer apparatus A transfer apparatus includes a fixed base, a swivel, a lift mechanism for raising and lowering the swivel relative to the fixed base, a swivel mechanism for turning the swivel about a vertical swivel axis, a linear movement mechanism supported by the swivel, and a ... | 05/24/2011 |
| 7922439 | Industrial robot A robot comprises a fixed member that has a lower end, a movable member, and an elastic sheet member. The movable member is supported by the fixed member to be movable between an uppermost position and a lowermost position of a movable range given to the movable mem... | 04/12/2011 |
| 7758295 | Handling device and method for the same A handling device and method utilizes a clamping arm that is mounted on a guide rod. The axial direction and the rotation direction of the guide rod are intersected each other at right angles. Makes the clamping arm rotate in the rotation direction of the guide rod ... | 07/20/2010 |
| 7648327 | Wafer engine The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a li... | 01/19/2010 |
| 7371303 | Fastening device for fastening small components to a mounting surface by adhesive bonding A fastening device for fastening a small component, in particular a stud provided with an adhesive flange, to a mounting surface using a heat-activated adhesive that creates an adhesive bond between the component and the mounting surface, has an induction coil to he... | 05/13/2008 |
| 7356976 | Method and an apparatus for automatic change of the reel of extensible film in wrapping machines for the packaging of palletized loads A film changer apparatus changes the reel of extensible film in wrapping machines for packaging palletized loads. A supporting structure has an assembly for carrying the reel of the wrapping film and retains the free end of the film of a reel. Supporting structure i... | 04/15/2008 |
| 7347120 | Robot of SCARA type A SCARA robot has a robot console, a first robot arm articulated on the robot console and swivelable about a first swivel axis, a second swivel arm articulated on the first swivel arm and swivelable around the second swivel axis extending substantially parallel to t... | 03/25/2008 |
| 7336015 | Method of manipulating wafers A method of manipulating preferable thin wafers, preferably having a thickness of less than 200 μm, wherein the wafers are placed prior to polishing or another processing step for reducing the thickness thereof on a transportable electrostatic carrier. The wafers r... | 02/26/2008 |
| 7311214 | Clean room crane assembly A hoist assembly for use in a clean room includes a hoist body which is received in a hoist cover cavity of a hoist cover. A rigging is coupled to a winch of the hoist body and to an attaching member attachable to a load. The rigging is received in a rigging cavity ... | 12/25/2007 |
| 7266421 | System for controlling lifting and remote handling units located in a confined enclosure The control system is used to control manipulation equipment (41) and carrying equipment (43) confined in a containment (40) inaccessible to operators and to perform maintenance operations related to electronic circuits for onboard equipment enc... | 09/04/2007 |
| 7264108 | Transfer unit for transferring glass articles A transfer unit for transferring glass articles from a supporting surface to a carry-off conveyor, the transfer unit includes a pickup member for engaging the articles for transfer and is hinged to one end of an actuating arm to rotate with respect to the actuating ... | 09/04/2007 |
| 7236853 | Automated robot alignment system and method using kinematic pins and end effector sensor A method and system can align a robot arm with a payload station. A probe and a contact detector may be positioned on the robot arm and three pins may be placed on the payload station. A controller may move the robot arm in a pattern over the payload station until c... | 06/26/2007 |
| 7233842 | Method of determining axial alignment of the centroid of an edge gripping end effector and the center of a specimen gripped by it A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector coupled to a robot arm and having a controllable supination angle. A co... | 06/19/2007 |
| 7219792 | Article carrying apparatus An article carrying apparatus for carrying, in a carrying direction, an article placed on a carry face of a carry section making use of a vibration, includes: the carry section provided with the carry face of which the carrying direction is linearly restricted; and ... | 05/22/2007 |
| 7203601 | Work mounting device A work mounting device in which an operation for teaching a robot to mount a work on a work mounting member is automated. The work is gripped by a hand placed on an arm tip portion of the robot and the operation for mounting the work on the work mounting member is t... | 04/10/2007 |
| 7200260 | Teaching model generating device A workpiece W serving as an object for detection is fixed in place. A camera 20 is mounted to the end of a robot RB. The camera is turned about an axis, which passes through the center position of the workpiece W and is perpendicular to the optical axis of th... | 04/03/2007 |
| 7179044 | Method of removing substrates from a storage site and a multiple substrate batch loader A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector i... | 02/20/2007 |
| 7167233 | Lithographic apparatus, device manufacturing method and apparatus for processing an exchangeable object The present invention relates to a lithographic apparatus including an illumination system configured to condition a beam of radiation, a support structure configured to support a patterning device, the patterning device configured to pattern the beam of radiation, ... | 01/23/2007 |
| 7160392 | Method for dechucking a substrate A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substra... | 01/09/2007 |
| 7108647 | Tool changer of machine tool The present invention provides a tool changer of a machine tool capable of suppressing cost increase and preventing size increase of the machine when a tool magazine is mounted. In a tool changer of a machine tool provided with a pallet change mechanism 10 in... | 09/19/2006 |
| 7096983 | Biped robot The height from floor surface contact ends of leg linkages 2 to shoulder joints of a biped robot 1 when the biped robot is in an upright posture is defined to be a value falling within a range (Havg±½σ) set based on an averaged value Havg obtained b... | 08/29/2006 |
| 7077973 | Methods for substrate orientation Method and apparatus for etching a metal layer disposed on a substrate, such as a photolithographic reticle, are provided. In one aspect, a method is provided for processing a photolithographic reticle including positioning the reticle in a first orientation on a re... | 07/18/2006 |
| 7079346 | Data storage methods and apparatus Methods and apparatus for storing data. An apparatus in accordance with the present invention includes a tape cartridge which has a cartridge memory. The cartridge memory can store therein a set of label data and a cartridge stamp. The set of label data is read by a... | 07/18/2006 |
| 7075084 | Ultrasonic thermography inspection method and apparatus A portable thermal imaging analysis for analyzing a specimen includes a frame removably attachable to the specimen by a vacuum and suction cups. The apparatus also includes a sound source and thermal imaging camera that generates thermal images of the specimen along... | 07/11/2006 |
| 7065856 | Machine tool method A machine tool apparatus is provided employing a plurality of tool heads which may be sequentially or simultaneously automatically controlled to perform preprogrammed operations on either the same or different workpieces. In one form, a plurality of tool heads are s... | 06/27/2006 |
| 7066707 | Wafer engine An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The ... | 06/27/2006 |
| 7065462 | Vehicle wheel alignment by rotating vision sensor Apparatus and methods are provided for measuring vehicle wheel alignment characteristics. According to one embodiment, during a first measurement cycle, spatial coordinates of multiple points on the wheel are obtained by positioning a vision sensor at various angula... | 06/20/2006 |
| 7064502 | Power tool with remote stop The present invention is directed to a power tool including a wireless remote stop for terminating the flow of electricity to an electric motor. The electric motor is configured for operating a working element assembly of a power tool, such as an arbor/circular saw ... | 06/20/2006 |
| 7059817 | Wafer handling apparatus and method A high-speed wafer-processing apparatus and method that employs a vacuum chamber having at least two wafer transport robots and a process station. The vacuum chamber interfaces with a number of single-wafer load locks that are loaded and unloaded one wafer at a time... | 06/13/2006 |
| 7052225 | Apparatus for handling mass produced work pieces A high speed device and method for transporting work pieces from one container to another is disclosed. This high speed device utilizes a rotary wheel having a number of pick heads located along the circumference of the rotary wheel. These pick heads are utilized to... | 05/30/2006 |
| 7039498 | Robot end effector position error correction using auto-teach methodology A robot arm positioning error is corrected by employing a specimen gripping end effector in which a light source and a light receiver form a light transmission pathway that senses proximity to the specimen. A robot arm old position is sensed and recorded. The robot ... | 05/02/2006 |
| 6965412 | X-Y video camera support and positioning system An X-Y video camera support and positioning system for enhancing viewing for persons with poor vision. The system includes a positioning device that receives input from a four button control panel, which allows precise positioning of a video camera above a stage. Th... | 11/15/2005 |
| 6923613 | Manipulator A manipulator is provided that includes a foot part and a number of members connected to the foot part and to each other respectively, and at least a gripper part, such that the members, the gripper and the foot part form an arm. One or more motors are provided in t... | 08/02/2005 |
| 6877946 | Wafer transport apparatus A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately... | 04/12/2005 |
| 6871115 | Method and apparatus for monitoring the operation of a wafer handling robot The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storing data sets representing correct, reference characteristics of the co... | 03/22/2005 |
| 6736590 | Lifting device for substrates The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured such that it can be made to engage the substrate holder ... | 05/18/2004 |
| 6679675 | Method and apparatus for processing wafers An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A robot within the vacuum chamber 1 has a pair of gripper arms 22, 2... | 01/20/2004 |
| 6663333 | Wafer transport apparatus A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position ap... | 12/16/2003 |
