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| Number | Title | Issue Date |
| 8182198 | Redundantable robot assembly for workpiece transfer A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation... | 05/22/2012 |
| 7347120 | Robot of SCARA type A SCARA robot has a robot console, a first robot arm articulated on the robot console and swivelable about a first swivel axis, a second swivel arm articulated on the first swivel arm and swivelable around the second swivel axis extending substantially parallel to t... | 03/25/2008 |
| 7336012 | Motor, robot, substrate loader, and exposure apparatus An apparatus that reduces vibration generation and magnetic leakage, wherein the apparatus is a motor, an articulated serial robot that has a motor built in, a substrate loader that includes the articulated robot, and a related exposure apparatus equipped with the s... | 02/26/2008 |
| 7326565 | Storage apparatus The invention provides an incubator 1 wherein a microplate transport device 5 is disposed inside a chamber 11 centrally thereof. The transport device 5 comprises a transport table 50 for placing a microplate thereon and is capable ... | 02/05/2008 |
| 7316537 | Substrate transport apparatus A substrate transport apparatus is provided for stably transporting a substrate and sensing a receiving state of the substrate. The substrate transport apparatus includes a grip member for gripping a substrate placed on the pocket part of the hand when a hand return... | 01/08/2008 |
| 7276123 | Semiconductor-processing apparatus provided with susceptor and placing block A semiconductor-processing apparatus comprises a susceptor and removable placing blocks detachably placed at a periphery of the susceptor for transferring a substrate. Retractable supporting members are provided for detaching/attaching the placing blocks from/to the... | 10/02/2007 |
| 7261511 | Robotic pick up and delivery system A pick up and delivery system for use with mobile robots which have a body with a horizontal upper surface and at least one vertical side. The robot has at least one shelf, each of which contains a stop bar containing a retaining device. The system further uses mult... | 08/28/2007 |
| 7246984 | Method and apparatus for transferring an article to be processed and processing apparatus A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring appa... | 07/24/2007 |
| 7217077 | Storage system for glass offcuts The storage system is for use next to a glass processing line having a loading table, a glass cutting table and a breakout table. The storage system comprises a first tilt table and a second tilt table. A storage rack is positioned between the first and the second t... | 05/15/2007 |
| 7211144 | Pulsed nucleation deposition of tungsten layers A method of forming a tungsten nucleation layer using a sequential deposition process. The tungsten nucleation layer is formed by reacting pulses of a tungsten-containing precursor and a reducing gas in a process chamber to deposit tungsten on the substrate. Thereaf... | 05/01/2007 |
| 7201803 | Valve control system for atomic layer deposition chamber A valve control system for a semiconductor processing chamber includes a system control computer and a plurality of electrically controlled valves associated with the processing chamber. The system further includes a programmable logic controller in communication wi... | 04/10/2007 |
| 7185407 | Side rack rail system apparatus and method A rail system for positioning a toolhead above a workpiece uses a rack cut into one edge of the rail and driven by a pinion gear whose shaft is approximately perpendicular to a workpiece to couple the rail to the toolhead. Multiple rollers placed on the toolhead all... | 03/06/2007 |
| 7168369 | Device for moving a machine A device for moving a machine or the like between plural workstations includes: a mechanism for suspending the machine, a guide, a structure for supplying the guide with electrical energy, a mechanical linkage between the machine and the guide, a connector for elect... | 01/30/2007 |
| 7168747 | Device for gripping and holding an object in a contactless manner A device is proposed for the contactless grasping and holding of an object from a direction directed at least partially in the direction of the force of gravity, using a holding element situated counter to the direction of the force of gravity, at least partially ab... | 01/30/2007 |
| 7147424 | Automatic door opener A wafer carrier opener is provided. The wafer carrier opener may eliminate the use of two separate actuators by using a four-bar linkage mechanism. The wafer carrier opener includes a wafer carrier door receiver, a horizontally stationary member, and a link coupled ... | 12/12/2006 |
| 7132622 | Laser machining apparatus and laser machining method There is provided a laser machining apparatus, and a laser machining method using the same. The laser machining apparatus has a body portion having a plurality of laser irradiating sections and work mounting sections, a supplying stocker for supplying workpieces, an... | 11/07/2006 |
| 7131999 | Lithographic apparatus and device manufacturing method A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support configured to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a ... | 11/07/2006 |
| 7128305 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between process and transport modules. A separate valve is provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separat... | 10/31/2006 |
| 7124687 | Positioning device, especially for offset plates The invention relates to a device for positioning an element with respect to at least two reference points (4a, 4c), in which said device acts upon a working point on the element to be positioned and comprises a positioning arm attached t... | 10/24/2006 |
| 7114907 | Transfer robot A transfer robot includes a swivel base pivotable about a vertical axis, a hand for holding a plate-like work placed thereon, and a linear transfer mechanism supporting the hand and provided on the swivel base. The transfer mechanism is designed to move the hand for... | 10/03/2006 |
| 7108647 | Tool changer of machine tool The present invention provides a tool changer of a machine tool capable of suppressing cost increase and preventing size increase of the machine when a tool magazine is mounted. In a tool changer of a machine tool provided with a pallet change mechanism 10 in... | 09/19/2006 |
| 7101795 | Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer A method and system to form a refractory metal layer on a substrate features nucleating a substrate using sequential deposition techniques in which the substrate is serially exposed to first and second reactive gases followed by forming a layer, employing vapor depo... | 09/05/2006 |
| 7085616 | Atomic layer deposition apparatus A method and apparatus for atomic layer deposition (ALD) is described. The apparatus comprises a deposition chamber and a wafer support. The deposition chamber is divided into two or more deposition regions that are integrally connected one to another. The wafer sup... | 08/01/2006 |
| 7070379 | Semiconductor fabrication apparatus having FOUP index in apparatus installation area A semiconductor fabrication apparatus, located in an apparatus installation area, includes a front-opening unified pod (FOUP) index, a plate, a first transfer device, a second transfer device, and an engineering FOUP index and multiple processing chambers. The FOUP ... | 07/04/2006 |
| 7059583 | Unitary slot valve actuator with dual valves A unitary slot valve actuator is in a vacuum body between adjacent vacuum chambers, such as process and transport modules. Separate valves are provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of... | 06/13/2006 |
| 7056080 | Two-arm transfer robot A two-arm transfer robot includes a swivel base arranged to swivel about a vertical swivel axis, and a pair of link arm mechanisms attached to the swivel base. These two link arm mechanisms are symmetrical in structure and function with respect to the swivel axis. A... | 06/06/2006 |
| 7022948 | Chamber for uniform substrate heating Embodiments of the invention generally provide an apparatus and a method for providing a uniform thermal profile to a plurality of substrates during heat processing. In one embodiment, a cassette containing one or more heated substrate supports is moveably disposed ... | 04/04/2006 |
| 6998579 | Chamber for uniform substrate heating In a first aspect, a first apparatus is provided for heating substrates. The first apparatus includes (1) a chamber having a bottom portion and a top portion; (2) a plurality of heated supports disposed within the chamber to support at least two substrates thereon; ... | 02/14/2006 |
| 6998014 | Apparatus and method for plasma assisted deposition Embodiments of the present invention relate to an apparatus and method of plasma assisted deposition by generation of a plasma adjacent a processing region. One embodiment of the apparatus comprises a substrate processing chamber including a top shower plate, a powe... | 02/14/2006 |
| 6951804 | Formation of a tantalum-nitride layer A method of forming a tantalum-nitride layer (204) for integrated circuit fabrication is disclosed. Alternating or co-reacting pulses of a tantalum containing precursor and a nitrogen containing precursor are provided to a chamber (100) to form layers ... | 10/04/2005 |
| 6936906 | Integration of barrier layer and seed layer The present invention generally relates to filling of a feature by depositing a barrier layer, depositing a seed layer over the barrier layer, and depositing a conductive layer over the seed layer. In one embodiment, the seed layer comprises a copper alloy seed laye... | 08/30/2005 |
| 6924462 | Pedestal for flat panel display applications An apparatus for supporting a substrate in a processing system comprising a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon. ... | 08/02/2005 |
| 6917755 | Substrate support An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus for supporting a substrate includes ball disposed on an inclined ball s... | 07/12/2005 |
| 6916398 | Gas delivery apparatus and method for atomic layer deposition One embodiment of the gas delivery assembly comprises a covering member having an expanding channel at a central portion of the covering member and having a bottom surface extending from the expanding channel to a peripheral portion of the covering member. One or mo... | 07/12/2005 |
| 6917177 | Robot arm mechanism Provided is a robot arm mechanism that conveys and supports a work, which requires neither a traveling axis that demand a high installation accuracy nor a jig for fixedly supporting a work. A robot 1 includes: a parallel link mechanism 6 having a lower... | 07/12/2005 |
| 6911391 | Integration of titanium and titanium nitride layers Embodiments of the present invention generally relate to an apparatus and method of integration of titanium and titanium nitride layers. One embodiment includes providing one or more cycles of a first set of compounds, providing one or more cycles of a second set of... | 06/28/2005 |
| 6873402 | Reticle stop block apparatus and method Methods and apparatus for ensuring the proper handling of reticles in the manufacturing of microdevices are disclosed. The methods and apparatus employ one or more reticle stop blocks fixed to a reticle handling arm. The one or more reticle stop blocks are designed ... | 03/29/2005 |
| 6669434 | Double arm substrate transport unit A double arm substrate transport unit for transporting a work piece, such as a semiconductor wafer, includes a robotic arm formed of a first forearm supported by the tip part of a base arm so as to be freely rotatable. A first end effector on which a work... | 12/30/2003 |
| 6614201 | Substrate transfer system A substrate transfer system comprises plural end-effectors that are placed so as to touch a periphery of a cone having a vertical angle at a 2θ angle with respect to a central axis at an arbitrary θ angle to a horizontal plane, wherein substrates are in... | 09/02/2003 |
| 6609874 | Handler for the transporting of flat substrates for application in the semi-conductor industry A handler for transporting planar substrates, in particular wafers, used in the semiconductor industry, between at least two stations. The handler includes a movable flat support arm for receiving a substrate and means for defining the location of the sub... | 08/26/2003 |
