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| Number | Title | Issue Date |
| 8057153 | Substrate transfer device, substrate processing apparatus and substrate transfer method To correct any positional misalignment of a substrate manifesting along the horizontal direction by utilizing a substrate transfer device alone without engaging a transfer arm in operation. A substrate transfer device comprises a plurality of support pins disposed a... | 11/15/2011 |
| 7360984 | Automatic analyzer and part feeding device used for the analyzer An automatic analyzer, comprising disposable parts such as large quantities of nozzle tips and reaction containers for use in sample analysis inspection, wherein the part rack (12) holding unused parts is raised from a lowest position to a rack separation sta... | 04/22/2008 |
| 7328442 | Robotic corner negotiating systems and methods for automated storage libraries In one aspect of the invention, an apparatus for transferring storage cartridges within an automated storage library is provided. The apparatus includes a sled and a track for supporting and guiding the sled. The track includes a corner portion wherein the sled move... | 02/05/2008 |
| 7301623 | Transferring, buffering and measuring a substrate in a metrology system A chuck that clamps a substrate to the top surface using, e.g., a vacuum, electrostatic force, or other appropriate means, includes a plurality of lift pins that can raise the substrate off the top surface of the chuck. The chuck may be used with a metrology device ... | 11/27/2007 |
| 7201823 | High throughput plasma treatment system A method for the plasma treatment of parts. The method includes sending loading signals from an electronic control to a transfer mechanism and loading the parts from a position outside of the treatment chamber to a plurality of treatment positions within the treatme... | 04/10/2007 |
| 7153083 | Material handling and transport process A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor... | 12/26/2006 |
| 7114246 | Method for handling boards in a component mounting machine and a component mounting machine for performing the method A component mounting machine is arranged to perform a method for handling boards in a component mounting machine includes the steps of moving a plurality of boards substantially simultaneously from a first plurality of cassettes, arranged in parallel at the machine,... | 10/03/2006 |
| 7103443 | Directed gas injection apparatus for semiconductor processing A method and system for utilizing a gas injection plate comprising a number of shaped orifices (e.g., sonic and simple orifices, and divergent nozzles) in the gas inject system as part of a plasma processing system. By utilizing the shaped orifices, directionality o... | 09/05/2006 |
| 7009689 | Holder of photomask An apparatus suitable for holding a photomask comprises a photomask holder having a plurality of through holes and a plurality of protrusions detachably connected to the photmask holder via the through holes. The photomask is positioned on supporting ridges of the p... | 03/07/2006 |
| 7000543 | Method and apparatus for loading and unloading flexographic plates for computer-to-plate imaging A method and apparatus to aid the loading and unloading of flexographic plates to and from an imager. The apparatus includes a magazine containing a plurality of compartments each for holding a single flexographic plate, the compartments arranged vertically, and mov... | 02/21/2006 |
| 6971835 | Vapor-phase epitaxial growth method A single opening is formed in a central portion of a susceptor of a vapor phase epitaxial growth system. Consequently, any dopant diffused off outwardly from the back surface of a wafer during an epitaxial growth process can be exhausted through the opening to the b... | 12/06/2005 |
| 6972071 | High-speed symmetrical plasma treatment system A plasma treatment system (10) and related methods for rapidly treating a workpiece (56) with ions from a plasma having an ion density that is reproducibly uniform and symmetrical. The processing chamber (12) of the plasma treatment system (1... | 12/06/2005 |
| 6955516 | Single wafer dryer and drying methods In a first aspect, a module is provided that is adapted to process a wafer. The module includes a processing portion having one or more features such as (1) a rotatable wafer support for rotating an input wafer from a first orientation wherein the wafer is in line w... | 10/18/2005 |
| 6913133 | Transfer and tilt apparatus A transfer device has an undercarriage with two or more carriage portions which are movable along a travel path between a first location and a second location. The carriage portions carrying at least one work piece support. A linkage extending between the carriage p... | 07/05/2005 |
| 6783316 | Apparatus and method for testing semiconductor devices The present invention provides apparatus for supporting during a testing operation a leadframe formed with at least one row of non-singulated semiconductor devices. The apparatus comprises a main body and a leadframe support member, and the leadframe support member ... | 08/31/2004 |
| 6732851 | Apparatus for delivery of impact-sensitive articles A device for the transfer of objects that are sensitive to impact, such as eggs, includes a horizontally-feeding collection conveyor, a vertically-feeding elevator, and at least one separation wheel located in a transition area between the horizontally feeding colle... | 05/11/2004 |
| 6575685 | Hoisting platform system The invention pertains to a hoisting platform system which is usable in the construction of high rise buildings Included in the system are two I-beams which are mounted on a higher floor of the building under construction which has been finished already. ... | 06/10/2003 |
| 6499980 | Automated green tire conveyance system An automated conveyance system moves green tires (24) with monorail carriers (18) to tire molding presses (40). Each monorail carrier (18) deposits a green tire (24) into an elevator system (31) which, in turn, transfers the green tire to within reach of ... | 12/31/2002 |
| 6443686 | Material handling and transport system and process A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported o... | 09/03/2002 |
| 6343905 | Edge gripped substrate lift mechanism A substrate lift mechanism includes a plurality of fingers mounted on a hoop controlled by an actuator to transfer a substrate, such as a wafer or a flat panel display, from an edge grip arm to a chuck on a processing tool, such as integrated metrology to... | 02/05/2002 |
| 6331095 | Transportation system and processing apparatus employing the transportation system Two pairs of lifters 9A and two pairs of lifters 9B are arranged on a table 7 in a processing chamber 2. In a transporting chamber 3 communicating with the processing chamber 2, a transporting mechanism 10 of an articulated robot is provided with a catch ... | 12/18/2001 |
| 6301776 | System and method for assembling an outdoor unit of a dual-unit type air conditioner An assembly system and method thereof for manufacturing an outdoor unit of a dual-unit type air conditioner employs an assembly system in which the outdoor unit is assembled, a refrigerant charging section in which the assembled outdoor unit is charged wi... | 10/16/2001 |
| 6293749 | Substrate transfer system for semiconductor processing equipment A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate int... | 09/25/2001 |
| 6231716 | Processing chamber with rapid wafer exchange An apparatus for processing substrates includes a chamber, a substrate transfer element for transferring a substrate to and from the chamber, and a substrate support for receiving and holding a substrate within the chamber. The apparatus also includes mul... | 05/15/2001 |
| 6142723 | Transfer apparatus A carrier transfer apparatus for automatically unloading and/or loading semiconductor device packages from and/or to printed circuit boards loaded into a carrier. The apparatus includes a housing, an input portion, an elevator portion and an output portio... | 11/07/2000 |
| 6102164 | Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers A robot assembly including multiple independently operable robot assemblies are provided for use in semiconductor wafer processing. The robot assembly includes independent co-axial upper and lower robot assemblies adapted to handle multiple objects. The u... | 08/15/2000 |
| 6068441 | Substrate transfer system for semiconductor processing equipment A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate int... | 05/30/2000 |
| 6044664 | Synthetic silica glass manufacturing apparatus An apparatus is provided for synthesizing a silica glass ingot. The appartus includes a stage having a target plate thereover, the target plate being rotatable relative to the stage around a predetermined vertical axis, and a furnace for reacting material... | 04/04/2000 |
| 6045318 | Lead frame supplying method and apparatus A lead frame supplying method and apparatus used with, for instance, a wire bonding machine, including a sensor which detects a presence or absence of a lead frame in a frame storing section of a lead frame magazine. The sensor is installed at the level o... | 04/04/2000 |
| 6000901 | Apparatus for indexing magazines holding molded leadframes and a method therefor An apparatus and method are shown for indexing magazines and molded leadframes within the magazines comprising a lateral drive portion coupled to and located below the magazines for selectively moving a selected one of the magazines laterally at a first s... | 12/14/1999 |
| 5980190 | Ready mix concrete conveying apparatus There is provided a ready mixed concrete conveying apparatus which carries up ready mixed concrete in the vertical direction, and continuously and quantitatively feeds out the concrete to a belt conveyor to continuously and quantitatively the concrete to ... | 11/09/1999 |
| 5947677 | Cassette transfer mechanism The cassette transfer mechanism of the present invention comprises a cassette chamber for housing a cassette storing a plurality of substrates, a liftable stand capable of moving up and down in the cassette chamber, a cassette holder having a bottom-surfa... | 09/07/1999 |
| 5927927 | Automatic cart loading machine and method A cart loading machine including a loading section for loading objects onto a multi-tiered cart, and an infeed conveyor section for conveying the objects to the loading section. The loading section includes a framework defining an open area for receiving ... | 07/27/1999 |
| 5903463 | Raising-and-lowering data setting method for magazine elevator device A data, which is used for raising-and-lowering a magazine holder on which a magazine for storing articles such as lead frames is placed in a magazine elevator device, being set by the steps of: placing a magazine on the magazine holder, storing in a memor... | 05/11/1999 |
| 5899657 | Automated mechanical storage facility An automated mechanical storage facility is provided including at least one closed loop track assembly. Also included is a plurality of storage units for being slidably moved along the track assembly and further adapted to contain cargo. Further included ... | 05/04/1999 |
| 5895195 | Rack loader/unloader system and method of using same The rack loader/unloader system includes a rack unloader and a container elevator disposed on opposite sides of a rack conveyor to unload containers from a rack at a transfer station. The container elevator enables unloaded containers to be transported aw... | 04/20/1999 |
| 5863172 | Staging, tracking and retrieval system with a rotatable storage structure A storage system for the storage and retrieval of material goods has a continuous track and a storage carousel movable along the track. The carousel carries a plurality of shelf arrays, each of which includes a plurality of vertically-spaced shelves remov... | 01/26/1999 |
| 5823736 | Substrate processing device and method for substrate from the substrate processing device Main lifter pins and sub-lifter pins are arranged on the top surface of a plate to support a rectangular frame area of a glass substrate of a liquid crystal display. The rectangular frame area is an area surrounding a rectangular center area which is a su... | 10/20/1998 |
| 5807059 | Ready mixed concrete conveying apparatus This invention relates to a ready mixed concrete conveying apparatus which carries up ready mixed concrete in the vertical direction, and continuously and quantitatively feeds out the concrete to a belt conveyor to continuously and quantitatively the conc... | 09/15/1998 |
| 5803700 | Device for mounting and dismounting a heavy weight A device for mounting and dismounting a heavy weight includes a vertical frame having an opening formed on a side thereof, through which a heavy weight is received into the frame. A laterally extending frame is formed at a lower part of the vertical frame... | 09/08/1998 |
