U.S. patents available from 1976 to present.
U.S. patent applications available from 2005 to present.

Icon_funbox Did You Know...

...that "patent leather" got its name because the process of applying the polished black finish to leather was once patented?

Newsletter  PatentStorm News

Make the Most of Our Site

See this month's Top Inventors and Most Cited Patents.

Stay on top of the latest innovations by subscribing to an RSS feed.

Registered users: Manage your profile.

 

Class 414/247 - By moving linearly in vertical direction or orbiting in vertical plane


Subclass of Class 414 - Material or article handling
Definition: Apparatus wherein the initial carrier moves either along
No. of patents: 1
Last issue date: 09/30/1997


NumberTitleIssue Date
5673208Focus spot detection method and system
A method and system for detecting focus spots. Data from a file created during stepper operation is extracted to get field coordinate position, leveling scheme, and tilt with respect to the x- and y-axes, and wafer height with respect to the focal plane f... 		09/30/1997
 
Sign InRegister
Username  
Password   
forgot password?