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| Number | Title | Issue Date |
| 8177469 | Magnetic disk handling apparatus An apparatus and method for handling disks as part of a magnetic disk manufacturing process is provided. In one embodiment, during a drying process the disks are engaged at the inner diameter rather than the outer diameter to eliminate the formation of residue on th... | 05/15/2012 |
| 7390458 | High throughput processing system and method of using Briefly, the present invention provides a system and method for high throughput processing using sample holders. The system has a plurality of work perimeters, with a rotational robot preferably associated with each work perimeter. At least one transfer station area... | 06/24/2008 |
| 7364028 | Glass substrate transporting facility Glass substrates are transported to a plurality of processing devices to be processed. Certain of the processing devices have associated storage shelf for storing glass substrates and a transfer device. The transfer device is adapted to move the glass substrate betw... | 04/29/2008 |
| 7270510 | Device and method for transporting wafer-shaped articles An apparatus for treating wafer-shaped articles includes at least one linear arranged array of a plurality of at least two process units wherein in each such process unit one single wafer-shaped article can be treated, a cassette-holding unit for holding at least on... | 09/18/2007 |
| 7244086 | Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the vacuum transport chamber. A loadlock arrangement communicates by at least... | 07/17/2007 |
| 7127786 | Machine tool The present invention provides a machine tool capable of enhancing approachability to a spindle to improve work efficiency even when it includes a workpiece changer. The present invention includes: a bed; a saddle disposed on the bed to be movable in a forward and b... | 10/31/2006 |
| 7013198 | Robotic carousel workstation A storage and retrieval apparatus including a robotic device capable of gripping items stored in the apparatus and delivering the item to a separate, proximate instrument. The items to be stored are loaded from the outside of the apparatus at each face of the hexago... | 03/14/2006 |
| 6979165 | Reduced footprint tool for automated processing of microelectronic substrates The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool desig... | 12/27/2005 |
| 6930762 | Master transport apparatus An exposure apparatus has a mask stage (9), a prealignment device (7) which prealigns a mask (1) to be transferred to the stage (9), and a manipulating mechanism (10) which transports a master or exchanges two masters between the s... | 08/16/2005 |
| 6896466 | Substrate processing apparatus A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopially nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member ( | 05/24/2005 |
| 6811370 | Wafer handling robot having X-Y stage for wafer handling and positioning An apparatus for handling and positioning wafers or other flat objects. The apparatus has an XY stage with an X-drive and a Y-drive, and a bed attached to the XY stage. A chuck (e.g. a vacuum chuck) is disposed on the bed and an effector is attached to the bed. The ... | 11/02/2004 |
| 6772493 | Workpiece changing system A workpiece changing system capable of automatically changing a heavy workpiece using a robot. A jig for attaching a workpiece thereto is mounted on a jig mounting device. The jig mounting device comprises a jig mounting unit having a rotary member and a swing membe... | 08/10/2004 |
| 6736590 | Lifting device for substrates The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured such that it can be made to engage the substrate holder ... | 05/18/2004 |
| 6729834 | Wafer manipulating and centering apparatus Apparatus for manipulating wafers comprising a fixture including seats each for receiving and supporting a wafer in a seated condition and an element mounted for reciprocal movement in opposition to the fixture between a retracted condition and an extended condition... | 05/04/2004 |
| 6705816 | Wafer transport mechanism A wafer transfer apparatus provides a rotational and translational motions using only one stationary motor drive. The apparatus includes a drive assembly and a transport arm assembly. The transport arm assembly includes a transport arm rotatably attached to a linkin... | 03/16/2004 |
| 6675666 | Substrate transportation apparatus This invention provides a substrate transportation apparatus in which a loader and macroinspection/transportation section are separate to be independent of each other. The loader can be arranged on the left side or rear side of the macroinspection/transpo... | 01/13/2004 |
| 6560510 | Simultaneous auto-loading tower An apparatus and method for the efficient simultaneous loading and unloading a plurality of compact disc media into and out of a plurality of recording bays. The present invention provides a plurality of two position platters that allow the simultaneous r... | 05/06/2003 |
| 6549825 | Alignment apparatus An alignment apparatus which obtains an amount of correction for centering a semiconductor wafer from four points of a wafer edge detected by noncontact proprioceptors in a wafer delivery position P1 where the semiconductor wafer is passed to a... | 04/15/2003 |
| 6517691 | Substrate processing system A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processin... | 02/11/2003 |
| 6375403 | Loading and unloading station for semiconductor processing installations In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as... | 04/23/2002 |
| 6371716 | Apparatus and method for unloading substrates Disclosed is an apparatus for unloading substrates. The apparatus includes a handling station, a conveying robot, and a process apparatus controller. The handling station arranges substrates having different sizes and processed by a prior process apparatu... | 04/16/2002 |
| 6371713 | Substrate processing apparatus A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopically nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member (48)... | 04/16/2002 |
| 6353466 | Apparatus for testing an LCD An LCD handler is disclosed. The LCD handler includes a body having a test site for testing an LCD panel and feeding/recovering sites on both sides of the test site for feeding and recovering the LCD panel. It also includes a pre-aligner in the body for m... | 03/05/2002 |
| 6350097 | Method and apparatus for processing wafers An apparatus for processing wafers one at a time. The apparatus has a vacuum chamber 1 into which wafers are loaded through a pair of loadlocks 3, 4 which are spaced one above the other. A robot within the vacuum chamber 1 has a pair of gripper arms 22, 2... | 02/26/2002 |
| 6341928 | Pallet changer apparatus In a pallet changer apparatus, a pallet changing arm is connected to a motor via a raising/lowering mechanism and an intermittent drive unit. During operation of the motor, the pallet changing arm is raised from a lowermost position to an uppermost positi... | 01/29/2002 |
| 6341929 | Cover apparatus of machine tool In a cover apparatus of a machine tool, a slide cover and turning covers are connected to a motor via an up-down movement mechanism and a cam drive portion. During operation of the motor, the slide cover and the turning covers are raised from a lowermost ... | 01/29/2002 |
| 6319373 | Substrate transfer apparatus of substrate processing system A substrate transfer system is used in an in-line film deposition system. The substrate transfer system is provided with an auxiliary vacuum chamber and a main vacuum chamber. The auxiliary vacuum chamber has a plurality of first substrate cassettes. The ... | 11/20/2001 |
| 6210093 | Transfer apparatus for a plurality of objects An apparatus for displacing a plurality of objects from a pickup station to a deposition station offset horizontally from the pickup station has a support movable in a horizontal transport direction between a position directly above the pickup station and... | 04/03/2001 |
| 6155773 | Substrate clamping apparatus The present invention generally provides a robot that can transfer two workpieces, such as silicon wafers, simultaneously and at increased speeds and accelerations and decelerations. More particularly, the present invention provides a robot wrist associat... | 12/05/2000 |
| 6116100 | Method for automatically assembling a sample cup having a weighted ring on top of a planar sample therewithin and delivering it to a test apparatus A rotatable arm mechanism capable of acquiring two elements simultaneously for purposes of assembly, disassembly and delivery. At one end of the rotatable arm there is mounted a vacuum cup capable of acquiring generally planar elements such as film sample... | 09/12/2000 |
| 6085125 | Prealigner and planarity teaching station A planarity teaching station includes one or more proximity sensors arranged to reflect light off a surface to determine a plane in which a substrate is positioned by a robotic arm. The plane of the substrate is then automatically adjusted by changing a Z... | 07/04/2000 |
| 5923915 | Method and apparatus for processing resist A resist processing method in which a substrate is successively transferred by an arm mechanism into a plurality of process units for successively processing the substrate, comprising the steps of (a) loading a substrate having a reference region which is... | 07/13/1999 |
| 5882403 | System for providing a controlled deposition on wafers A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in t... | 03/16/1999 |
| 5879460 | System for providing a controlled deposition on wafers A robotic arm assembly in a transport module is expansible to have an effector at its end receive a substrate in a cassette module and is then contracted and rotated with the effector to have the effector face a process module. Planets on a turntable in t... | 03/09/1999 |
| 5851296 | Vacuum processing apparatus and method A vacuum processing apparatus includes a reaction chamber, a non-reaction chamber which is a load-lock chamber or a double load-lock chamber. A double arm is accommodated in the non-reaction chamber, and includes a first arm and a second arm for taking ou... | 12/22/1998 |
| 5836735 | Robot powered pass thru port for automated cartridge library A pass thru port, for use in an automated cartridge library, is capable of transferring a cartridge from one module of the automated cartridge library to another module of the automated cartridge library without the use of motors or other powered devices.... | 11/17/1998 |
| 5755546 | Apparatus for loading billets and, if necessary, pressing discs into horizontal metal extrusion presses A loading shell is carried by a movable arm so that a billet to be extruded can be brought from a loading station (furnace) into line with the extrusion axis, between a billet container and a die, extrusion stem or die stem. A pusher which pushes the bill... | 05/26/1998 |
| 5730574 | Transfer apparatus for and method of transferring substrate A transfer apparatus is adapted for transferring a substrate between two processing sections and includes two storage cassettes and two transfer robots. A first storage cassette has an insertion opening inserted in a first direction and a withdrawal openi... | 03/24/1998 |
| 5697751 | Wafer transfer apparatus and method Transfer and processing of semiconductor wafers are performed while maintaining the wafer surfaces in a vertical orientation by holding the water substrate with electrostatic chucking of the rear face thereof. Thereby, the floor area of the transfer and p... | 12/16/1997 |
| 5697752 | Overhead transfer clamp actuator and linkage An apparatus for conveying panels, such as vehicle body side panels to and from work stations located at spaced locations along a conveyor includes a panel support frame mounted on the conveyor for movement along the conveying path with the support frame ... | 12/16/1997 |
