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| Number | Title | Issue Date |
| 8079797 | Substrate processing system and substrate transfer method A substrate processing system includes a control section configured to control a series of transfer operations and preset to control operation of a container transfer apparatus, operation at a substrate access area, and operation of a substrate handling apparatus in... | 12/20/2011 |
| 8021094 | Work handling mechanism and work inspection system In the present invention, through a provision of a relay stand including a first relaying point, a second relaying point and a plurality of work mounting bases, a discharge/feed process of works between the relay stand and the work feed container and the work accomm... | 09/20/2011 |
| 8016538 | System for weighing containers The station for weighing containers comprises a line for transporting containers to be filled with a predetermined product, a zone for dosing and filling the containers with the product, a first transferring organ for picking up and transferring an individual empty ... | 09/13/2011 |
| 7390458 | High throughput processing system and method of using Briefly, the present invention provides a system and method for high throughput processing using sample holders. The system has a plurality of work perimeters, with a rotational robot preferably associated with each work perimeter. At least one transfer station area... | 06/24/2008 |
| 7347656 | Vacuum processing apparatus and semiconductor manufacturing line using the same A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plural... | 03/25/2008 |
| 7165665 | Transfer line for transporting workpieces A transfer line for transporting workpieces from a first workstation to an adjacent second workstation comprises a frame with a depositing place for at least one workpiece. It further comprises a transporting beam, each end area of which having respective work suppo... | 01/23/2007 |
| 7114903 | Apparatuses and method for transferring and/or pre-processing microelectronic workpieces An apparatus and method for handling and/or pre-processing microelectronic workpieces. In one embodiment, the apparatus includes an input/output station configured to removably receive a plurality of microelectronic workpieces at an input/output location, a transfer... | 10/03/2006 |
| 7096770 | Optical recording medium-manufacturing apparatus There is provided an optical recording medium-manufacturing apparatus that is capable of accurately transferring a disk-shaped apparatus during a manufacturing process, and at the same time occupies a small installation area. A control section causes a cut-forming m... | 08/29/2006 |
| 7076865 | Manufacturing system and method A manufacturing system for assembly of component parts to produce an article includes a plurality of separate process modules for executing the various process steps, and a plurality of magazine units, which can be coupled to the process modules, for storage and tra... | 07/18/2006 |
| 7068003 | System to determine proper wafer alignment An apparatus for aligning a wafer is provided, which normally senses a flat zone of the wafer by sensors regardless of an external light so that the wafer is aligned in a set mode, in order to increase or maximize production yield. A body has all kinds of drivers. A... | 06/27/2006 |
| 7066703 | Chuck transport method and system A method and system for transporting a plurality of substrates between a transfer chamber and at least one processing chamber. The system includes a chuck assembly with a plurality of chucks configured to receive wafer substrates, where the chuck assembly is movably... | 06/27/2006 |
| 7032739 | Intermediate product carrying apparatus, and intermediate product carrying method An intermediate product carrying apparatus is provided for loading a carrier, which is carried between a plurality of process systems and stores a plurality of intermediate products, into the corresponding process system, and then transferring the plurality of inter... | 04/25/2006 |
| 6991710 | Apparatus for manually and automatically processing microelectronic workpieces A method and apparatus for manually and automatically processing microelectronic workpieces. The apparatus can include a tool having a plurality of processing stations, all of which are manually accessible to a user, and an input/output station configured to support... | 01/31/2006 |
| 6979168 | Method and apparatus for transferring substrate Bays 100, 200, 300 . . . are connected to an inter-bay transfer line 400 via bay stockers 130, 230, 330 . . . , respectively. The bay 100 is, in this embodiment, composed of a single wafer transfer line 120 having a looped planar s... | 12/27/2005 |
| 6975920 | In-situ randomization and recording of wafer processing order at process tools Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of th... | 12/13/2005 |
| 6929259 | Compact bank note dispensing device to prevent duplication releases A duplicate let off prevention device for sheets includes a first exit guide, a second exit guide which is spaced from the first exit guide at a distance that is larger than the thickness of one sheet and is smaller than the thickness of two sheets, and a pre-exit g... | 08/16/2005 |
| 6926489 | Latch sensor for pod transport gripper A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and the right bars. The gripper also has a left clamp and a right clamp di... | 08/09/2005 |
| 6896466 | Substrate processing apparatus A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopially nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member ( | 05/24/2005 |
| 6889818 | Wafer blade contact monitor A method and apparatus are provided for detecting contact between a wafer blade of a wafer-handling robot and a component in a wafer-handling system. The robot moves the wafer blade within the system while the wafer blade is maintained at an electrical potential, wh... | 05/10/2005 |
| 6800803 | Semiconductor manufacturing method and apparatus A semiconductor manufacturing apparatus includes a leakage preventing device for preventing outward leakage of electromagnetic waves through an opening defined when a pod having a substrate accommodated therein is mounted on the semiconductor manufacturing apparatus... | 10/05/2004 |
| 6746198 | Substrate transfer shuttle The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate tra... | 06/08/2004 |
| 6745637 | Self-supporting adaptable metrology device A metrology device is described which is couplable to a load port of a semiconductor product handling and/or processing tool. The tool encloses a mini-environmental atmosphere and has a load port table for supporting devices to be coupled to the load port. The metro... | 06/08/2004 |
| 6719877 | Gluing device for auxiliary door seals The bonding system for auxiliary door seals contains a receiving means for detachably holding a mounting template whose peripheral edge at the narrow side is provided with a plurality of spaced-apart trough-like suction members which are connectable via a joint line... | 04/13/2004 |
| 6662465 | Vacuum processing apparatus A vacuum processing apparatus which includes a conveyor structure for transferring a substrate from a substrate storage device held on a substrate storage device mount table. The apparatus further includes a vacuum loader provided with an additional conve... | 12/16/2003 |
| 6652215 | Rotary deblistering apparatus A rotary deblistering apparatus is described. It comprises a rotatable drum having plurality of circumferential pack holding means each adapted to hold and retain a blister pack. The drum can rotate to locate the pack holding means at a plurality of perip... | 11/25/2003 |
| 6637998 | Self evacuating micro environment system A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the system includes a mobile cart, a vacuum sealable container ... | 10/28/2003 |
| 6625899 | Vacuum processing apparatus A vacuum processing apparatus which includes a means for transferring substrates from a loader with a transferring device to a double lock chamber and then to a selected vacuum processing chamber. The substrates are then returned to a substrate by the vac... | 09/30/2003 |
| 6560510 | Simultaneous auto-loading tower An apparatus and method for the efficient simultaneous loading and unloading a plurality of compact disc media into and out of a plurality of recording bays. The present invention provides a plurality of two position platters that allow the simultaneous r... | 05/06/2003 |
| 6517692 | Apparatus for flow-line treatment of articles in an artificial medium An apparatus for flow-line treatment of articles has two chambers. The first chamber is a vacuum working chamber to treat articles in an artificial atmosphere. First transport means transport articles through the first chamber and at least one lock at the... | 02/11/2003 |
| 6517691 | Substrate processing system A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processin... | 02/11/2003 |
| 6511315 | Substrate processing apparatus In a substrate processing apparatus, processing units are stacked in a multistage manner around a transport robot arranged at the center of a processing area for forming a processing part. In a second hierarchy, rotary coating units are arranged through a... | 01/28/2003 |
| 6505415 | Vacuum processing apparatus A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure which includes a robot for conveying a wafer held on the cassette mount table, a vacuum loader which includes an additional robot,... | 01/14/2003 |
| 6487793 | Vacuum processing apparatus and operating method therefor This invention relates to a vacuum processing apparatus having vacuum processing chambers the insides of which must be dry cleaned, and to a method of operating such an apparatus. When the vacuum processing chambers are dry-cleaned, dummy substrates are t... | 12/03/2002 |
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temper... | 12/03/2002 |
| 6484415 | Vacuum processing apparatus A wafer conveyor system for used in a vacuum processing apparatus wherein the conveyor structure is provided with a transfer structure and a robot apparatus is arranged on the transfer structure. The robot provides for rotation of the wafer horizontally f... | 11/26/2002 |
| 6484414 | Vacuum processing apparatus A wafer conveyor system for use in a vacuum processing apparatus wherein the conveyor structure is provided with a robot disposed in the conveyor chamber of the vacuum loader. The robot includes an arm which is extendible into the lock chambers which are ... | 11/26/2002 |
| 6473989 | Conveying system for a vacuum processing apparatus A vacuum processing apparatus which includes a cassette mount table for holding at least one cassette, a conveying structure that includes a robot, a cassette table for holding the cassette, an additional conveying structure for transferring a wafer held ... | 11/05/2002 |
| 6467186 | Transferring device for a vacuum processing apparatus and operating method therefor A transferring device for a semiconductor wafer which transfers a wafer storing structure to a table and/or other positions within the vicinity of a vacuum processing apparatus and removes wafers from the wafer storing structure. The transfer devices main... | 10/22/2002 |
| 6446353 | Vacuum processing apparatus A vacuum processing apparatus which includes a cassette mount table for holding a cassette, a conveying structure for transferring a wafer from the held on the cassette mount table, a robot, and a vacuum loader. The vacuum loader is provided with a vacuum... | 09/10/2002 |
| 6371713 | Substrate processing apparatus A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopically nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member (48)... | 04/16/2002 |
