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| Number | Title | Issue Date |
| 8033772 | Transfer chamber for vacuum processing system A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate bet... | 10/11/2011 |
| 7637708 | Production system for wafer The system includes a first conveying vehicle for holding and conveying wafers as products finished with an inspection step from a stock storage shelf group 11 to a reloading device 17, and a second conveying vehicle for holding and conveying a transpo... | 12/29/2009 |
| 7241099 | Center ball O-ring A self-retaining O-ring having at least two radial struts connectively extending from inside surfaces to a central sphere-shaped retainer. The top surfaces of the radial struts are formed below the top surfaces of the O-ring. The central sphere-shaped retainer is co... | 07/10/2007 |
| 7208047 | Apparatus and method for thermally isolating a heat chamber An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for ... | 04/24/2007 |
| 7179043 | Manipulating arrangement and cell A manipulating arrangement having a horizontal portal on which a slide is horizontally traversable, an arm being pivotably mounted on the slide about a pivot axis which runs parallel to the portal, and a gripper for at least one of workpieces and tools being arrange... | 02/20/2007 |
| 7109477 | Automatic sample loader for use with a mass spectrometer An automatic sample loader is for use in association with a mass spectrometer and at least one vial containing a sample. The loader includes a vial block, an insertion head, an insertion tube, a mechanism for pushing the sample out of the vial and a mechanism for mo... | 09/19/2006 |
| 7108472 | Cartridge loader and methods A device for transporting cartridges comprises a housing for holding a plurality of cartridges in a temperature controlled environment. A transport system is also provided and has a grasping mechanism for grasping one of the cartridges. The transport system is furth... | 09/19/2006 |
| 7018517 | Transfer chamber for vacuum processing system A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate bet... | 03/28/2006 |
| 6945258 | Substrate processing apparatus and method A cleaning processing system including a wafer transfer device, a wafer detecting sensor for detecting a wafer, a memory for storing the position and direction of an extra wafer present inside the cleaning processing system when the power supply is cut off, an alarm... | 09/20/2005 |
| 6930050 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in multi-layers and in parallel along a transfer path situated between the ... | 08/16/2005 |
| 6926489 | Latch sensor for pod transport gripper A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and the right bars. The gripper also has a left clamp and a right clamp di... | 08/09/2005 |
| 6889818 | Wafer blade contact monitor A method and apparatus are provided for detecting contact between a wafer blade of a wafer-handling robot and a component in a wafer-handling system. The robot moves the wafer blade within the system while the wafer blade is maintained at an electrical potential, wh... | 05/10/2005 |
| 6866461 | Device and methods for automating transfer of multiple samples to an analytical instrument The present invention comprises a loading device for automating transfer of a plurality of probes between a cassette within which the plurality of probes are initially constrained and an analytical instrument, e.g., mass spectrometer. The loading device may be confi... | 03/15/2005 |
| 6818108 | Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece A vacuum chamber for transporting at least one workpiece has two or more openings defining respective opening areas for treating or handling the at least one workpiece. A transport device is arranged relative to the openings and includes a drive shaft rotatable arou... | 11/16/2004 |
| 6746198 | Substrate transfer shuttle The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate tra... | 06/08/2004 |
| 6679369 | Machine tool and associated pallet changer A machine tool has a pallet changer at a front of a machine body for automatically changing a preceding-process pallet loaded with a machined workpiece thereon for a next-process pallet loaded with an unmachined workpiece thereon. A working space is provi... | 01/20/2004 |
| 6637998 | Self evacuating micro environment system A mobile, self-evacuating, micro-environment system for transit and storage of substrates between two or more processing chambers in the manufacture of semiconductor devices is provided where the system includes a mobile cart, a vacuum sealable container ... | 10/28/2003 |
| 6591961 | Carrying system With a rail which is used by both a linear conveyor vehicle and a track guided vehicle, the traveling loops 2,3, the short-cuts 4~7 and the access routes 8~11 are provided. The traveling loops 20~25 are arranged in a rail for a track guided vehicle, and a... | 07/15/2003 |
| 6585100 | Arrangement for feeding and/or taking away magazines filled with articles Described is an arrangement for feeding and/or taking away magazines intended to receive individual articles, to and/or from an apparatus for treating and/or handling the articles, wherein the apparatus comprises a first transport element which receives a... | 07/01/2003 |
| 6574857 | Assembly device An assembly device, in particular a fully automatic assembly device for producing microsystem technical products and for assembling components in the semiconductor industries, comprising an assembly table, at least one material transport system that trans... | 06/10/2003 |
| 6575737 | Method and apparatus for improved substrate handling A transfer chamber is provided. The transfer chamber has a temperature adjustment plate located in an upper portion of the chamber, a substrate handler located in a lower portion of the chamber, and a rotatable substrate carriage adapted so as to raise an... | 06/10/2003 |
| 6542786 | Apparatus and method for feeding electronic components Apparatus for feeding electronic components comprises a slide base, a plurality of tape cassettes mounted on the slide base, a linear motor 14, and a control unit for the motor. The control unit includes a motor driver 61, a memory device 66, and a contro... | 04/01/2003 |
| 6517691 | Substrate processing system A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processin... | 02/11/2003 |
| 6503365 | Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing A multi-chamber system of an etching facility for manufacturing semiconductor devices occupies a minimum amount of floor space in a cleanroom by installing a plurality of processing chambers in multi-layers and in parallel along a transfer path situated b... | 01/07/2003 |
| 6491802 | Magnetic film forming system A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction is disclosed. The magnetic film forming system includes a vacuum container, a substrate pallet for holding a substrate in the vacuum container an... | 12/10/2002 |
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing An apparatus and method for controlling wafer temperature and environment is provided. The apparatus includes a batch processing fixture for batch processing wafers at a first elevated temperature. The batch of wafers is not substantially ramped in temper... | 12/03/2002 |
| 6468353 | Method and apparatus for improved substrate handling A method and apparatus are provided for substrate handling. In a first aspect, a temperature adjustment plate is located below a substrate carriage and is configured such that a substrate may be transferred between the temperature adjustment plate and the... | 10/22/2002 |
| 6427096 | Processing tool interface apparatus for use in manufacturing environment A method and apparatus for automated interfacing with a processing tool in a manufacturing environment having a tilt mechanism and a rotation mechanism. In one embodiment, semiconductor wafers in a cassette are presented to a processing tool by tilting th... | 07/30/2002 |
| 6413035 | Sheet working system Sheet metal working system includes a housing rack provided with a plurality of shelves for housing pallets, an elevator provided on a side of the housing rack, and a pallet holder located on a bottom shelf of the housing rack for temporarily holding a pa... | 07/02/2002 |
| 6405610 | Wafer inspection apparatus This invention relates to a wafer inspection apparatus having various types of structures for realizing a reduction in convey time of a selected wafer as an inspection target, an improvement in operability, or the like. In particular, this wafer inspectio... | 06/18/2002 |
| 6321898 | Display panel transporting apparatus and a display panel transporting unit A display panel transporting apparatus and a display panel transporting unit improves efficiency of display panel manufacturing processes and a display panel production line. The display panel transporting unit includes a loaded cassette transporting unit... | 11/27/2001 |
| 6319373 | Substrate transfer apparatus of substrate processing system A substrate transfer system is used in an in-line film deposition system. The substrate transfer system is provided with an auxiliary vacuum chamber and a main vacuum chamber. The auxiliary vacuum chamber has a plurality of first substrate cassettes. The ... | 11/20/2001 |
| 6315879 | Modular deposition system having batch processing and serial thin film deposition A flexible, modular thin film deposition machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a thin film deposition station including a serial deposition chamber and an inte... | 11/13/2001 |
| 6312519 | Transferring device for optical discs being processed in a disc manufacturing assembly, disc manufacturing assembly incorporating the transferring device, and associated transferring method A transferring device which operates on an apparatus for producing optical discs comprising several different work stations, each arranged to perform a predetermined operation on the discs being processed. The transferring device performs a sequential tra... | 11/06/2001 |
| 6290824 | Magnetic film forming system A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction. The magnetic film forming system comprises a vacuum container, a substrate pallet for holding a substrate in the vacuum container and being remo... | 09/18/2001 |
| 6260783 | Automated yarn creeling device An automated yarn creeling method and apparatus for the textile industry. Preferably, the present yarn creeling system is used in the carpet tufting industry to automate, ultimately, the intelligent transfer of packages of yarn from the shipping pallets t... | 07/17/2001 |
| 6190103 | Wafer transfer device and method A substrate handling apparatus includes a transfer elevator and a process station disposed inside a load lock chamber. The process station includes a top module, a bottom module, and a seal ring which is disposed between the top module and the bottom modu... | 02/20/2001 |
| 6148988 | Automatic pallet changer An automatic pallet changer is composed of a pallet lifting mechanism and a revolving mechanism. The pallet lifting mechanism has a pallet platform and a lifting rod which is fastened with the bottom of the pallet platform. The pallet platform and the lif... | 11/21/2000 |
| 6139695 | Modular deposition system having batch processing and serial thin film deposition A flexible, modular thin film deposition machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a thin film deposition station including a serial deposition chamber and an inte... | 10/31/2000 |
| 6036425 | Component-feeding device in electronic component-mounting apparatus There is provided a component-feeding device for an electronic component-mounting apparatus which has a main block for carrying out electronic component-pickup and mounting operations. The component-feeding device selectively transports a plurality of pal... | 03/14/2000 |
