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| Number | Title | Issue Date |
| 7396199 | Substrate processing apparatus and substrate processing method A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to be placed. This apparatus is provided with: a first unit group dispose... | 07/08/2008 |
| 7314344 | Substrate-transporting device The present invention relates to a substrate-transporting device, including a base, a substrate carrier unit and a shaft unit mounted between the base and the substrate carrier unit. The shaft unit has a supporting shaft and a shaft base to support and control rotat... | 01/01/2008 |
| 7303063 | Sequential stepped movement staging device A sequential stepped movement staging device comprises six legs 70 of equal length extending radially from a central sphere 46 in an X-Y-Z orthogonal relationship. The sphere 46 and legs 70 are held in a horizontally fixed position relati... | 12/04/2007 |
| 7232101 | Hard drive test fixture The present invention is a method and apparatus for testing electrical or optical devices. The invention includes a test fixture having a base component, a first rail and a second rail coupled to the base component, a top component coupled to the first and second ra... | 06/19/2007 |
| 7207763 | Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system A semiconductor manufacturing system and wafer holder for a semiconductor manufacturing system which prevents a semiconductor wafer from being exposed to a process reaction and which includes a reaction tube for providing a sealed process space and a dual boat and w... | 04/24/2007 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat tran... | 04/03/2007 |
| 7191891 | Device for moving products with selective drive engagement Device for moving products from a loading station to an unloading station. Carriers on which containers for the products are arranged move along a guide in the direction of transport. The drive is implemented with the aid of a toothed belt and each carrier is provid... | 03/20/2007 |
| 7151590 | Transport system for a lithographic apparatus and device manufacturing method A lithographic apparatus and a device manufacturing method is disclosed. In particular, a transport system configured to transport substrates between the lithographic apparatus and a track is disclosed, the track comprising one or more processing devices. The transp... | 12/19/2006 |
| 7044833 | Apparatus for transporting and polishing wafers The present invention discloses an apparatus for transporting wafers. The apparatus includes a tray having a sloped portion on which a wafer having a sidewall can be mounted, a plurality of guides that disposed about the tray, and a plurality of sensors for detectin... | 05/16/2006 |
| 7033126 | Method and apparatus for loading a batch of wafers into a wafer boat A receiver frame loads and unloads a batch of semiconductor wafers onto wafer holders in a wafer boat. The wafer holders extends continuously about the perimeter of an overlying wafer. The receiver frame is provided with a plurality of supporting arms which are immo... | 04/25/2006 |
| 7011202 | Conveyor for moving flat battery components A conveyor system is disclosed for sequentially moving a plurality of flat battery components. The conveyor has a plurality of separators for receiving a flat battery component between each of the adjacent separators. The conveyor supports an end of each flat batter... | 03/14/2006 |
| 6966421 | Apparatus for vehicle-body transport carriage A jig switching apparatus includes a locator jig slidably arranged on a transport carriage and having at a front end a locate pin with clamp function. The locator jig has two switching positions selectively switched in accordance with the type of a vehicle body to b... | 11/22/2005 |
| 6929440 | Method and storage loading system for loading and unloading loads in storage The invention relates to a particularly effective method for loading and unloading loads in a rack storage facility with several rack bays and aisles which are located between the rack bays. According to the method, a load is transported to a front end of a rack bay... | 08/16/2005 |
| 6920369 | Methods of operating vacuum processing equipment and methods of processing wafers A method of operating vacuum processing equipment that includes multiple sets of apparatus for performing a succession of different processes on individual wafers, an apparatus for transporting said wafers, and an apparatus for controlling said processing apparatus ... | 07/19/2005 |
| 6843357 | Two-axis robot for specimen transfer A two-axis robot includes a vertical tubular post mounted for rotation about its vertical axis, with a vertically slidable shaft extending through the post. An arm on the upper end of the post projects radially outward and has a gripper assembly thereon with operabl... | 01/18/2005 |
| 6676356 | Device for attaching target substrate transfer container to semiconductor processing apparatus A table for a transfer container is provided with an opening portion formed therein. A clamp is swingably supported on the lower side of the table. The clamp has a second engaging portion hook to project upward from the table through the opening portion, ... | 01/13/2004 |
| 6672820 | Semiconductor processing apparatus having linear conveyer system A transport system for manipulating a semiconductor wafer in a processing tool is set forth. The system includes a transport unit guide disposed within the processing tool for supporting a wafer transfer unit as the unit moves between a first position and... | 01/06/2004 |
| 6574857 | Assembly device An assembly device, in particular a fully automatic assembly device for producing microsystem technical products and for assembling components in the semiconductor industries, comprising an assembly table, at least one material transport system that trans... | 06/10/2003 |
| 5984607 | Transfer apparatus, transfer method, treatment apparatus and treatment method The present invention provides a transfer apparatus and a transfer method capable of reducing the time required for transferring a plurality of to-be-transferred objects, and a treatment apparatus and a treatment method capable of increasing the throughpu... | 11/16/1999 |
| 5560309 | Material handling system A material handling system for forming an air bag in a plurality of workstations. The system includes a pallet for holding a workpiece in a predetermined orientation and a locator for locating the pallet in a plurality of workstations for performing diffe... | 10/01/1996 |
| 5363785 | Non-intrusive workpiece pallet locator A workpiece pallet locator is provided which is adapted to engage a workpiece pallet on a support surface in a non-intrusive manner. The pallet locator includes slots formed in the workpiece support surface and pawl members which are movable in a vertical... | 11/15/1994 |
| 5362221 | Manufacturing device with an automatic self-aligning connector for attachment to a docking station A manufacturing device is disclosed which has a connector which automatically self-aligns with a mating connector of a docking station. The device includes a receptacle for receiving and holding an unfinished workpiece. At least one connector is provided ... | 11/08/1994 |
| 5183368 | Apparatus for transporting light loads by means of self-propelled carriages on rails An apparatus is disclosed for transporting loads of the type comprising self-propelled carriages movable on rails and having assembly structure on which removable containers may be engaged and temporarily fixed, loading and unloading of such containers ta... | 02/02/1993 |
| 5145048 | Pallet changer A pallet exchanger includes a machine tool table movable along a first axis and a second axis, a mounting arrangement for mounting a plurality of pallets each of which has a workpiece, a support for supporting the mounting arrangement, and a motive device... | 09/08/1992 |
| 5100276 | Production system using wafer-like carrier jig The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of th... | 03/31/1992 |
| 5024570 | Continuous semiconductor substrate processing system A continuous semiconductor substrate processing system is operated by a system control structure in accordance with a predetermined processing program. A wafer conveying mechanism conveys wafers to and from each of plural process stations, each of which p... | 06/18/1991 |
| 4923353 | Apparatus for automated cassette handling An automated cassette handler transports a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transpor... | 05/08/1990 |
| 4859137 | Apparatus for transporting a holder between a port opening of a standardized mechanical interface system and a loading and unloading station An apparatus is provided for transporting a holder for holding articles between a port opening providing access to the system and a loading and unloading station, the apparatus comprising: a first platform for supporting the holder in the course of transp... | 08/22/1989 |
| 4836354 | Tray positioning arrangement for delivery system A tray positioning arrangement for delivery system in which a tray is formed of a casing opened at its top and an article receptacle member accommodated therein and having plural article holding pits. The article receptacle member has abutment portions an... | 06/06/1989 |
| 4824310 | Automated work-piece handling system for machine tool An automated workpiece handling system for use with a machine tool having a plurality of workstations spaced along a longitudinally movable, elongate workpiece comprising a first cart for transporting workpieces to one end of the tooling machine, adjacent... | 04/25/1989 |
| 4797989 | Combination machine tool apparatus and pallet changing system Combination machine tool apparatus and pallet changing system includes a single changer for changing both work pieces at a work piece machining station on the machine tool and tools at a tool storage station on the machine tool. The work piece machining s... | 01/17/1989 |
| 4757890 | Tray positioning arrangement for delivery system A tray positioning arrangement for delivery system in which a tray is formed of a casing opened at its top and an article receptacle member accommodated therein and having plural article holding pits. The article receptacle member has abutment portions an... | 07/19/1988 |
| 4751995 | Jig for car body assembly A jig assembly for a car body including a movable jig unit having a frame with a universal configuration and removable jig members configured exclusively for a distinctive body part; and a fixed station jig unit for positioning and fixing the movable unit... | 06/21/1988 |
| 4747193 | Pallet supply apparatus for machine tool An apparatus for supplying a pallet to a machine tool has two rows of pallet supports and a pallet carrier between the two rows. The two rows of pallet supports consist of one or more modules so that a change of the number of pallet supports can be easily... | 05/31/1988 |
| 4718533 | Transport installation for a production line having parallel-arranged processing stations A production line for the manufacture of electric parts includes a conveyor belt and a plurality of parallel-arranged processing stations disposed along the belt. Workpiece carriers are transported by the belt. Each processing station includes a lifting m... | 01/12/1988 |
| 4705444 | Apparatus for automated cassette handling An automated cassette handler for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and tr... | 11/10/1987 |
| 4626160 | Unmanned transfer system for transferring works to machining tools An unmanned transfer system for transferring necessary materials such as works or tools between the racks of an automatic warehouse and machining tools. The unmanned transfer system includes a plurality of machining tools which are arranged along the rack... | 12/02/1986 |
| 4610595 | Closed loop automated workpiece handling system for machine tool An automated workpiece handling system for use with a machine tool having a plurality of workstations spaced along a longitudinally movable, elongate worktable comprising a first cart for transporting workpieces to one end of the tooling machine, adjacent... | 09/09/1986 |
| 4538950 | Automatic system for conveying works in a machine shop A system is disclosed for automatically transporting works between an automated warehouse and a machine tool, and for maintaining the works in a precise position with respect to the machine tool. The system includes an automated warehouse, a pallet for pr... | 09/03/1985 |
