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| Number | Title | Issue Date |
| 7396199 | Substrate processing apparatus and substrate processing method A substrate processing apparatus for processing a substrate while transferring the substrate among a plurality of units with which the substrate is to be processed or on which the substrate is to be placed. This apparatus is provided with: a first unit group dispose... | 07/08/2008 |
| 7211149 | Method for applying a coating to a medical device This invention provides a method for efficiently applying a coating to each of a plurality of objects selected from the group consisting of ophthalmic lenses, molds for making ophthalmic lenses, and other medical devices, the method comprising dipping the plurality ... | 05/01/2007 |
| 7089655 | System for operating and resetting PCB holding device A system for performing an operation to a printed wiring board (PWB) having an apparatus for automatically resetting a PWB supporting device including a supporting table, supporting members which are set on a surface of the supporting table to support the PWB, a sup... | 08/15/2006 |
| 6997664 | Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead scre... | 02/14/2006 |
| 6968753 | Vibration-dampening base for ball-type lead screw of load port transfer system A vibration-dampening base for a ball-type lead screw of a load port transfer system is disclosed. A load port transfer system includes a vertical arm drive motor assembly, a ball-type lead screw, and a vibration-dampening base connecting the vertical arm drive moto... | 11/29/2005 |
| 6651316 | Apparatus for automatically resetting printed-circuit-board holding device An apparatus for automatically resetting a printed-wiring-board supporting device including a supporting table and a plurality of supporting members which are set on a surface of the supporting table to support a back surface of a printed wiring board, th... | 11/25/2003 |
| 6375403 | Loading and unloading station for semiconductor processing installations In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as... | 04/23/2002 |
| 5674039 | System for transferring articles between controlled environments A SMIF system for transferring semiconductor wafers between two controlled environments, one being within a wafer cassette carrier and the other being within an enclosure around a wafer processing apparatus. In a carrier loading position, a carrier door r... | 10/07/1997 |
| 5007783 | Positioning apparatus for an automatic carrier system Disclosed is an automatic carrier system having one or more self-propelled robotic carriers for carrying products-in-assembly between assembly stations of an automated assembly line. The running speed and stopping position of individual carriers is contro... | 04/16/1991 |
| 4699555 | Module positioning apparatus A housing has a flange for engagement with an evacuable vessel having a work table for supporting devices to be processed with an ion beam inside the vessel. The housing has rails extending into the vessel toward the work table. A carriage rides on the ra... | 10/13/1987 |
| 4693370 | Pallet A pallet for feeding components to a robotic assembly system at accurate reference locations and orientations includes a pair of parallel sheet members rigidly secured together. One sheet member has an array of locating apertures for receiving and locatin... | 09/15/1987 |
| 4575299 | Automated work transfer system for chemical processing baths A work transfer system conveying a work basket in a programmed sequence to the processing tanks of an assembly thereof placed at various positions on a work bench. The system acts to transfer the basket to a selected tank and to properly orient the basket... | 03/11/1986 |
| 4566837 | Automatic work exchanging apparatus An automatic work exchanging apparatus for transferring works between a transport truck running in front of plural machine tools and the plural machine tools. The automatic work exchanging apparatus is made to run along the row of the machine tools, and a... | 01/28/1986 |
