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Class 414/222.02 - Condition responsive control of transporting means


Subclass of Class 414 - Material or article handling
Definition: Subject matter including means for sensing (a) a change
No. of patents: 69
Last issue date: 03/22/2011


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NumberTitleIssue Date
7909557Arrangement for the filling and/or emptying of containers filled and/or for filling with articles and manipulation device for transporting the containers
The invention concerns an arrangement for filling and/or emptying receptacles filled and/or to be filled with articles, essentially including at least one handling device for transporting receptacles that have been and/or are to be filled between a reservoir and a d...
03/22/2011
7251354Electronic component inspection apparatus
An electronic component inspection apparatus includes an inspection socket which inspects a component, a tray disposition area in which a component waits before it is inspected, tray disposition areas which store a component after it has been inspected, components t...
07/31/2007
7220095Self-threading component tape feeder
The present invention is a method and apparatus for the automatic loading and advancement of component feeder tape in a component feeder for use with a pick-and-place system. The feeder employs sensing technology to determine when a component tape leader is inserted...
05/22/2007
7179334System and method for performing semiconductor processing on substrate being processed
A semiconductor process system (10) includes a measuring section (40), an information processing section (51), and a control section (52). The measuring section (40) measures a characteristic of a test target film formed on a targe...
02/20/2007
7155813Programmer systems
A micro device using assembly system for feeding, programming, and placing micro devices on circuit boards includes a robotic handling system capable of picking up and placing the micro devices on the circuit boards on a conveyor system. A control system controls th...
01/02/2007
7137309High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held b...
11/21/2006
7134825Device for handling substrates inside and outside a clean room
A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room condi...
11/14/2006
7077019High precision gas bearing split-axis stage for transport and constraint of large flat flexible media during processing
A modular split-axis stage is used to inspect and/or repair large flat glass media suitable for LCD/TFT applications. Low-precision air table sections are detachably mounted to a centrally located, high-precision granite inspection/repair section. Glass media held b...
07/18/2006
7062344Fabrication system and fabrication method
Disclosed is a fabricating system including a plurality of processing apparatuses connected to each other by means of an inter-apparatus transporter, wherein one group of semiconductor wafers are processed in processing apparatuses and other group of wafers are tran...
06/13/2006
6957940Unit for sorting and packaging products capable of being hung on a hooking member for the purpose of their conveyance, such as bunches of fruits, in particular table grapes or truss tomatoes
A unit for sorting and packaging products has a conveying line with an endless chain beneath which there are articulated about a vertical axis a plurality of coupling arms equipped with a coupling member for pulling plates equipped with a member for hooking on a pro...
10/25/2005
6945258Substrate processing apparatus and method
A cleaning processing system including a wafer transfer device, a wafer detecting sensor for detecting a wafer, a memory for storing the position and direction of an extra wafer present inside the cleaning processing system when the power supply is cut off, an alarm...
09/20/2005
6935930Polishing apparatus and method, and wafer evacuation program
In a wafer polishing apparatus which polishes a wafer surface or in a wafer cleaner, there are provided a transfer and cleaning chamber which shuts off a wafer from the outside air and an inert gas supply device which fills an inert gas into the transfer and cleanin...
08/30/2005
6926489Latch sensor for pod transport gripper
A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and the right bars. The gripper also has a left clamp and a right clamp di...
08/09/2005
6877220Method for feeding a component
An occurrence component lack at a component arrangement position, designated by a mounting program, of a component feed part, which feeds components to be mounted, is determined. Whether a spare component for the lacking component to be mounted is present in a spare...
04/12/2005
6835040Laser cutting plate conveyor
An overhead conveyor system transports a selectable workpiece from vertically extending storage racks having a plurality of horizontally extending shelves with stationary stacks of workpieces to be processed on each shelf. Each shelf includes horizontally spaced she...
12/28/2004
6830651Load port capable of coping with different types of cassette containing substrates to be processed
A load port which can selectively receive plural types of cassette having substrate which are to be processed accommodated therein is disclosed. The load port has the following constituents. That is, the load port includes a main body, an opening portion (which has ...
12/14/2004
6763281Apparatus for alignment of automated workpiece handling systems
An alignment tool, method and system are provided for aligning a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture adapted to be supported by a transfer chamber support surface or other support surface in the system, in which...
07/13/2004
6616401Part-supplying tray feeder and method of picking-up parts in the tray
In a tray feeder, in which a drawing section draws a palette from a container and supplies the palette to a pick-up point where a pick-up head of a parts-mounting-apparatus picks up parts, the head starts lowering and halts at a stand-by position before t...
09/09/2003
6542786Apparatus and method for feeding electronic components
Apparatus for feeding electronic components comprises a slide base, a plurality of tape cassettes mounted on the slide base, a linear motor 14, and a control unit for the motor. The control unit includes a motor driver 61, a memory device 66, and a contro...
04/01/2003
6536559Goods lift
A storage lift has two columns, and a hoisting shaft for a conveyor unit (2) movable up and down between the two columns. A light grille (5) is arranged in the storage lift on the end of the conveyor unit (2) facing a charging and discharging opening (1)....
03/25/2003
6530734Methods and apparatus for positive wafer process status identification during semiconductor wafer processing
The processing status of a plurality of semiconductor wafers undergoing processing is positively identified by the use of indicator flags associated with cassettes containing the wafers. The flags are moved between at least two processing state indicating...
03/11/2003
6429016System and method for sample positioning in a robotic system
A system and method for positioning a sample, or cargo, with respect to a device in a robotic system is provided. The system includes a macro positioning system for "gross" movement of the sample between stations and a micro positioning system for precise...
08/06/2002
6405610Wafer inspection apparatus
This invention relates to a wafer inspection apparatus having various types of structures for realizing a reduction in convey time of a selected wafer as an inspection target, an improvement in operability, or the like. In particular, this wafer inspectio...
06/18/2002
6332751Transfer device centering method and substrate processing apparatus
In centering a transfer device so that tweezers of the transfer device transfer a substrate to a predetermined delivery position on a spin chuck when the substrate is delivered to a coating unit by means of the transfer device, the substrate is transferre...
12/25/2001
6197117Wafer out-of-pocket detector and susceptor leveling tool
An apparatus and method for monitoring the level of a semiconductor processing chamber susceptor and the inclination of a wafer residing within a pocket of the susceptor. In one embodiment, a light beam transmitter is positioned to direct a light beam, su...
03/06/2001
6183831Hard disk vapor lube
Disclosed is a system for transporting disks in vacuum to a vacuum station whereat a lubricant film is applied uniformly to the surfaces of the disks by evaporation. Thickness uniformity is achieved by directing the evaporate through a multi-hole aperture...
02/06/2001
6178361Automatic modular wafer substrate handling device
The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber module having an integrated, sturdy, chemical and temperature ...
01/23/2001
6145648Method and system for continuously processing successive workpieces along a production line
A system for continuously processing successive workpieces along a production line having a loader for loading workpieces onto main conveyor for conveying through a workstation and an unloader for unloading a processed workpiece. The loading and unloading...
11/14/2000
6146077Wafer transfer system of semiconductor fabricating equipment using a serial number detecting device
A wafer transfer system of semiconductor fabricating equipment is capable of successively arranging a plurality of wafers in a designated order (e.g., an ascending order, a descending order, an odd/even number order or an individual selection order). The ...
11/14/2000
6050389Carrier apparatus with more than one carrier belts and processing apparatus therewith
A carrier apparatus is provided with a first carrier mechanism, a second carrier mechanism, and a sensor. The first carrier mechanism has a holding portion holding a substrate, a driving pulley, an idler pulley, and a first endless belt, the first endless...
04/18/2000
6019564Semiconductor device transporting and handling apparatus
An IC handler affords ICs to be tested for a sufficiently long period of time for them to take up either heat or cold. A turntable is formed with N circular rows of positioning recesses lying on concentric circles. ICs to be tested are successively fed in...
02/01/2000
6000900Wafer cassette conveying system
A wafer cassette conveying system is capable of reducing a communication amount between a conveying device and a control device, further shortening the time period required for a movement of the conveying device. A control device 15, when receiving both o...
12/14/1999
5961722Apparatus for establishing reference coordinates for a point on a component
An apparatus and method for establishing reference coordinates for a point on a component. The apparatus includes a base and a component carriage that is movably attached to the base for movement relative to the base along a first axis. The apparatus furt...
10/05/1999
5944475Rotated, orthogonal load compatible front-opening interface
A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvir...
08/31/1999
5921459Modular robotic welding station
A modular robotic welding station comprises a base skid to which is mounted robotic welding equipment. The base skid defines one or more docking stations. Satellite modules can have either stationary tables or turn tables that hold the workpieces to be we...
07/13/1999
5838042DMOS device structure, and related manufacturing process
A DMOS device structure includes a lightly doped semiconductor layer of a first conductivity type, a plurality of lightly doped semiconductor regions of a second conductivity type extending from a top surface of the lightly doped semiconductor layer there...
11/17/1998
5834706Method and apparatus for verifying the contents of packages delivered to or leaving a warehouse
Apparatus and method for handling of packages containing goods in a warehouse and for verifying contents of the packages includes conveying the packages through consecutive stations; performing a plausibility check on the packages by generating and output...
11/10/1998
5820679Fabrication system and method having inter-apparatus transporter
Disclosed is a fabricating system including a plurality of processing apparatuses connected to each other by means of an inter-apparatus transporter, wherein one group of semiconductor wafers are processed in processing apparatuses and other group of wafe...
10/13/1998
5805472Test handler for semiconductor devices
In a test handler for semiconductor devices according to the invention, test trays are provided with respective identification codes specific to them and the identification codes of the test trays are read by a reading device arranged respectively at give...
09/08/1998
5788448Processing apparatus
A processing apparatus is provided with a reaction furnace for subjecting semiconductor wafers, which are objects to be processed, to a predetermined processing; a storage rack for storing carriers (wafer cassettes), each containing a predetermined number...
08/04/1998
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