Quotables
"The idea that cavalry will be replaced by these iron coaches is absurd. It is little short of treasonous."
Aide-de-camp to Field Marshal Haig ; At a tank demonstration, 1916
PatentStorm News
Make the Most of Our Site
See this month's Top Inventors and Most Cited Patents.
Stay on top of the latest innovations by subscribing to an RSS feed.
Registered users: Manage your profile.
| Number | Title | Issue Date |
| 8025473 | Carrying system, substrate treating device, and carrying method A carrying system 1 has a carrying path which is laid out in such a manner as to pass through the lower sides of loading table 11 and the like provided at the front face side of treating devices 10, 100, 200, and covered by a cover 5. As ... | 09/27/2011 |
| 7347007 | Low pressure high capacity dryer for resins and other granular and powdery materials A vacuum dryer and method for drying granular or powdery material including at least one canister for holding said material being movable among a series of locations including material heating and vacuum drying locations, means for moving said canister among said lo... | 03/25/2008 |
| 7273339 | Powder transport method and apparatus The present invention is directed to a powder paint delivery method and apparatus employing a pressurized reservoir pump that supplies a controlled stream of densely fluidized or dense phase powder paint to the applicator though a powder delivery conduit. The powder... | 09/25/2007 |
| 7270715 | Chemical vapor deposition apparatus A chemical vapor deposition apparatus includes a subatmospheric substrate transfer chamber. A subatmospheric deposition chamber is defined at least in part by a chamber sidewall. A passageway in the chamber sidewall extends from the transfer chamber to the depositio... | 09/18/2007 |
| 7234247 | Low pressure dryer A low pressure dryer for granular or powdery material includes a plurality of canisters rotatable about a common vertical axis serially among material heating, vacuum drying and material inventory discharge positions; pneumatic piston-cylinder means for rotating the... | 06/26/2007 |
| 7192487 | Semiconductor substrate processing chamber and accessory attachment interfacial structure A semiconductor substrate processor includes a substrate transfer chamber and a plurality of substrate processing chambers connected therewith. An interfacial structure is received between at least one of the processing chambers and the transfer chamber. The interfa... | 03/20/2007 |
| 7193682 | Exposure apparatus and device manufacturing method An exposure apparatus for exposing a substrate. The apparatus includes an optical system being set at a reference temperature, for directing light to the substrate, an exposure chamber for storing the optical system in a vacuum ambience, and a load-lock chamber, dis... | 03/20/2007 |
| 7105463 | Load lock chamber having two dual slot regions Provided herein is a substrate processing system, which comprises a cassette load station; a load lock chamber; a centrally located transfer chamber; and one or more process chambers located about the periphery of the transfer chamber. The load lock chamber comprise... | 09/12/2006 |
| 7092779 | Automated material handling system for a manufacturing facility divided into separate fabrication areas An automated material handling system is presented for a manufacturing facility divided into separate fabrication areas. The automated material handling system plans and carries out the movement of work pieces between fabrication areas and maintains a database indic... | 08/15/2006 |
| 7083161 | Method and apparatus for providing vacuum isolation A gate valve assembly provides vacuum isolation between a first treatment system and a second treatment system. The gate valve assembly includes an actuator rotatably coupled to at least one of the first treatment system and the second treatment system, and configur... | 08/01/2006 |
| 7076920 | Method of using a combination differential and absolute pressure transducer for controlling a load lock A pirani absolute pressure sensor for sensing absolute pressure in a load lock in a range from 100 to 10−4 torr and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in the load lock chamb... | 07/18/2006 |
| 7056806 | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces The present disclosure provides methods and apparatus useful in depositing materials on batches of microfeature workpieces. One implementation provides a method in which a quantity of a first precursor gas is introduced to an enclosure at a first enclosure pressure.... | 06/06/2006 |
| 7037063 | Substrate floating apparatus and method of manufacturing liquid crystal display apparatus using the same There are provided a substrate floating apparatus for preventing interference between a glass substrate and a floating board when floating and conveying the glass substrate and a method of manufacturing LCD devices using the substrate floating apparatus. The substra... | 05/02/2006 |
| 6994497 | Method and apparatus for treating high pressure particulate material An apparatus for pneumatically conveying particulate material containing reaction products of a high pressure reactor from a supply vessel at a pressure of at least two bar to a receiving vessel at a considerably lower pressure. The apparatus includes a conveyor lin... | 02/07/2006 |
| 6916009 | Load-lock device for introducing substrates into a vacuum chamber A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space loc... | 07/12/2005 |
| 6858119 | Mobile plating system and method An exemplary mobile plating system is provided for performing a plating process using virtually any known or available deposition technology for coating or plating as substrate. The mobile plating system may include a vacuum chamber positioned in a mobile storage vo... | 02/22/2005 |
| 6824617 | Input/output valve switching apparatus of semiconductor manufacturing system An input/output valve switching apparatus of a semiconductor manufacturing system minimizes a vibration set up while operating an input/output valve for opening and closing a wafer-transfer passage that connects chambers of the system. The switching apparatus includ... | 11/30/2004 |
| 6755980 | Process to remove solid slag particles from a mixture of solid slag particles and water Process to remove solid slag particles from a mixture of solid slag particles and water present in a quench zone, which quench zone is part of a process for the preparation of synthesis gas by partial combustion of finely dispersed solid carbon-containing fuel with ... | 06/29/2004 |
| 6742977 | Substrate processing device, substrate conveying device, and substrate processing method An unprocessed substrate is conveyed to a film-processing chamber at the same time a processed substrate is conveyed to a substrate preparation chamber, reducing the substrate processing cycle, thereby increasing the yield per unit time. The substrate preparation ch... | 06/01/2004 |
| 6619901 | Method and apparatus for air guidance in a processing chamber An apparatus for air guidance in a processing chamber has a housing with an entrance gate and an exit gate. Inside the housing the processing chamber is embodied for filling and sealing small bottles or ampules. The processing chamber is separated from an... | 09/16/2003 |
| 6551044 | Bellows isolation for index platforms A loadlock chamber for a semiconductor processing apparatus comprises an index platform or registration plate, a shaft extending through a wall of the chamber to actuate the platform, and a bellows located on the outside of the chamber to isolate the shaf... | 04/22/2003 |
| 6517691 | Substrate processing system A substrate processing system includes a primary processing assembly and secondary processing assembly. The secondary processing assembly has one or more interconnected modules and includes one or more process stations. The primary and secondary processin... | 02/11/2003 |
| 6503379 | Mobile plating system and method An exemplary mobile plating system and method are provided for performing a plating process using virtually any known or available deposition technology for coating or plating. The mobile plating system may include a vacuum chamber positioned in a mobile ... | 01/07/2003 |
| 6394733 | Substrate body transfer apparatus A substrate body transfer apparatus which is capable of isolating the atmospheres of an external processing apparatus and an air conveyance apparatus and preventing the mutual contamination thereof, and which is capable of conducting the transfer of subst... | 05/28/2002 |
| 6358377 | Apparatus for sputter-coating glass and corresponding method A sputter coating apparatus includes at least a first sputter coating line and a second sputter coating line. The first and second sputter coating lines may be operated in parallel with one another in certain embodiments in order to independently form coa... | 03/19/2002 |
| 6325856 | Vacuum treatment equipment A vacuum treatment system has an outer housing which defines a substantially cylindrical inner wall around an axis. At least two openings are provided for treating or conveying-through a respective workpiece arranged along at least one great circle of the... | 12/04/2001 |
| 6319373 | Substrate transfer apparatus of substrate processing system A substrate transfer system is used in an in-line film deposition system. The substrate transfer system is provided with an auxiliary vacuum chamber and a main vacuum chamber. The auxiliary vacuum chamber has a plurality of first substrate cassettes. The ... | 11/20/2001 |
| 6315879 | Modular deposition system having batch processing and serial thin film deposition A flexible, modular thin film deposition machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a thin film deposition station including a serial deposition chamber and an inte... | 11/13/2001 |
| 6315512 | Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the su... | 11/13/2001 |
| 6309161 | Load lock with vertically movable support A load lock has a substrate carrier movable between one position and another position each position vertically separated from the other, to locate the carrier at vertically discrete positions to load substrates onto the carrier or remove substrates from t... | 10/30/2001 |
| 6250869 | Three chamber load lock apparatus A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing platform for making integrated circuits on silicon wafers. Each... | 06/26/2001 |
| 6231290 | Processing method and processing unit for substrate A processing unit for a substrate comprises a partition 6 provided between an atmospheric area S1 and an inert gas area S2. The partition 6 has an opening 22 to communicate the atmospheric area S1 and the inert gas area S2. A door 23 is provided at the op... | 05/15/2001 |
| 6139695 | Modular deposition system having batch processing and serial thin film deposition A flexible, modular thin film deposition machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a thin film deposition station including a serial deposition chamber and an inte... | 10/31/2000 |
| 6000905 | High speed in-vacuum flat panel display handler Transport of a workpiece into and out of high vacuum conditions is achieved using a vacuum handler having an ante-chamber which buffers a vacuum lock and other mechanically vulnerable components from high pressure differences. During loading of the workpi... | 12/14/1999 |
| 5961269 | Three chamber load lock apparatus A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing platform for making integrated circuits on silicon wafers. Each... | 10/05/1999 |
| 5810930 | Photo-chemical vapor deposition apparatus having exchange apparatus of optical window and method of exchanging optical window therewith A photo-chemical vapor deposition ("photo-CVD") apparatus has exchange apparatus of optical window and method of exchanging optical window therewith. There photo-CVD apparatus has exchange apparatus of optical window which can replace an optical window bl... | 09/22/1998 |
| 5793050 | Ion implantation system for implanting workpieces An ion implantation system that rapidly and efficiently processes large quantities of workpieces, such as flat panel displays. The ion implantation system includes a high vacuum process chamber that mounts an ion source, a single workpiece translating sta... | 08/11/1998 |
| 5707198 | Method and device for discharging particulate material from a pressurized container A method of discharging particulate material from a first container to a lower positioned storage area being under a lower pressure than the first container. Particulate material is discharged via an upper tube section of a discharge tube communicating wi... | 01/13/1998 |
| 5470473 | Rotary vacuum filtration drum with valved hopper cake treatment means An assembly for recovering crystals from a slurry comprises a filtration unit including a rotatably mounted cylindrical filter, a slurry input for receiving slurry pressurized by a pump. The filtration unit has an outlet for discharging crystalline materi... | 11/28/1995 |
| 5421979 | Load-lock drum-type coating apparatus Vacuum coating apparatus (30) includes a coating chamber (32), and a load-lock chamber (34) connected to the coating chamber via a high vacuum valve (44). The coating chamber includes deposition-devices (123) and a cylindrical or drum shaped substrate-tra... | 06/06/1995 |
