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| Number | Title | Issue Date |
| 8167521 | Substrate transfer apparatus and vertical heat processing apparatus The present invention restrains, during a transfer of a substrate, a central portion of the substrate from being warped by its own weight, which might be caused by a super-enlargement of a diameter of the substrate. A substrate transfer apparatus 18 includes:... | 05/01/2012 |
| 7230702 | Monitoring of smart pin transition timing A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the mova... | 06/12/2007 |
| 7208047 | Apparatus and method for thermally isolating a heat chamber An apparatus through which a substrate may be transferred between a first chamber and a second chamber in which the first chamber is maintained at a high temperature relative to the ambient temperature of the second chamber. The apparatus comprises a passageway for ... | 04/24/2007 |
| 7208074 | Substrate processing apparatus and substrate plating apparatus A substrate processing apparatus fills a metal such as copper or the like in fine interconnection patterns or trenches defined in a semiconductor substrate. The substrate processing apparatus has a loading/unloading unit for placing a substrate cassette to allow a s... | 04/24/2007 |
| 7198447 | Semiconductor device producing apparatus and producing method of semiconductor device A semiconductor device producing apparatus is disclosed. The apparatus includes a carrier-holding stage for placing a carrier; first, second and third stages each for holding first and second boats one at a time, each boat holding one or more substrates; a boat tran... | 04/03/2007 |
| 7179334 | System and method for performing semiconductor processing on substrate being processed A semiconductor process system (10) includes a measuring section (40), an information processing section (51), and a control section (52). The measuring section (40) measures a characteristic of a test target film formed on a targe... | 02/20/2007 |
| 7176114 | Method of depositing patterned films of materials using a positive imaging process The invention generally encompasses a method for forming a pattern on a substrate. The method comprises applying a precursor comprising at least one metal to a substrate to form a precursor layer, exposing a predetermined portion of the precursor layer and developin... | 02/13/2007 |
| 7134825 | Device for handling substrates inside and outside a clean room A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room condi... | 11/14/2006 |
| 7134827 | Reduced footprint tool for automated processing of microelectronic substrates The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool desig... | 11/14/2006 |
| 7134826 | Substrate transfer apparatus, substrate processing apparatus and holding table A loader includes a receiving section for receiving a FOUP (front opening unified pod), an opener for transporting substrates out of the FOUP, and a transport robot for transporting the FOUP between the receiving section and the opener. When the opener transports th... | 11/14/2006 |
| 7092779 | Automated material handling system for a manufacturing facility divided into separate fabrication areas An automated material handling system is presented for a manufacturing facility divided into separate fabrication areas. The automated material handling system plans and carries out the movement of work pieces between fabrication areas and maintains a database indic... | 08/15/2006 |
| 7077614 | Sorting/storage device for wafers and method for handling thereof Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the... | 07/18/2006 |
| 7074640 | Method of making barrier layers The present invention involves a low-temperature, photoresist-free method of fabricating a barrier layer on a flexible substrate. An embodiment involves the conversion of a precursor into a top-surface imaging layer during a direct patterning step. Preferred precurs... | 07/11/2006 |
| 7066707 | Wafer engine An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The ... | 06/27/2006 |
| 7067346 | Titanium carboxylate films for use in semiconductor processing The present invention involves the formation of titanium carbonate films that exhibit improved hydrolytic stability and photosensitivity. Such films can be used in semiconductor processing to deposit titanium and titanium oxide layers on a substrate and to form patt... | 06/27/2006 |
| 7014415 | Substrate transfer apparatus, method for removing the substrate, and method for accommodating the substrate A substrate transfer apparatus, for removing a substrate from a substrate accommodating tray accommodating the substrate in a horizontal state, includes a plurality of support pins for raising the substrate accommodated in the substrate accommodating tray above the ... | 03/21/2006 |
| 6979165 | Reduced footprint tool for automated processing of microelectronic substrates The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool desig... | 12/27/2005 |
| 6962472 | Vacuum processing apparatus and semiconductor manufacturing line using the same A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plural... | 11/08/2005 |
| 6926489 | Latch sensor for pod transport gripper A latch sensor for a pod transport gripper for transferring semiconductor wafers is disclosed. The transport gripper has a left bar and a right bar, as well as a cross bar connecting the left and the right bars. The gripper also has a left clamp and a right clamp di... | 08/09/2005 |
| 6916146 | Device for distributing bulk materials with rotary chute having a variable angle of inclination A device for distributing materials in bulk includes a suspension rotor and a chute located below the suspension rotor. The chute is provided with two lateral suspension arms which are connected to the suspension rotor. A driving mechanism produces a pivoting torque... | 07/12/2005 |
| 6911112 | Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices A method of manufacturing a semiconductor device includes first and second processes, the latter requiring more processing time. An apparatus for performing the semiconductor manufacturing process includes a first reactor, and a plurality of second reactors for each... | 06/28/2005 |
| 6808592 | High throughput plasma treatment system A system for the plasma treatment of parts. The system includes a chamber base sealingly engageable with a reaction chamber to form a treatment chamber and a lifting device operable to lift the reaction chamber from the chamber base. A transfer mechanism is operable... | 10/26/2004 |
| 6786974 | Insulating film forming method and insulating film forming apparatus Both of a first insulating film and a second insulating film are formed by a spin coating method. Accordingly, the formation of the first insulating film and the second insulating film can be performed in the same SOD processing system. Moreover, the aforesaid forma... | 09/07/2004 |
| 6676355 | Apparatus and method to effectuate pre-lift positioning for a drop furnace cage An apparatus and method whereby precise furnace cage positioning may be effectuated. The apparatus of the instant invention is embodied as a uniquely structured multi-plane positioning device which comprises the positional attachment of a drop furnace cag... | 01/13/2004 |
| 6413481 | Sterilization tunnel A sterilization tunnel for pharmaceutical containers such as vials has an inlet zone, a sterilization zone, and a cooling zone. A conveyor belt for the vials is disposed inside the sterilization tunnel. An emptying device that can be raised and lowered is... | 07/02/2002 |
| 6390753 | System for loading, processing and unloading substrates arranged on a carrier In a system for loading, processing and unloading substrates, a carrier has a bottom and a plurality of slots to receive a plurality of substrates for processing in a reactor. The reactor is tubular and has an inlet opening to receive the carrier loaded w... | 05/21/2002 |
| 6355577 | System to reduce particulate contamination The invention provides a method for depositing a film on a surface of a semiconductor wafer while preventing formation of defects on the surface of the wafer. The method includes selecting a quartz wafer carrier for holding the semiconductor wafer during ... | 03/12/2002 |
| 6318944 | Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassette A semiconductor fabricating apparatus having a vertical reaction furnace, a boat for holding plural wafers in a multi-layered fashion and being loaded into the vertical reaction furnace, a storage disposed at a location corresponding to the boat for stori... | 11/20/2001 |
| 6257819 | System for handling and in particular for hooking and picking up flexible printed circuits to be introduced into a kiln or the like A device for hooking, picking up and unloading flexible printed circuits to be introduced into a kiln, comprising one or more jaws to grip the circuit and to rotate freely around a horizontal axis--to supports which slide along vertical guides; handling s... | 07/10/2001 |
| 6223975 | Method and apparatus for the temperature regulation of components, for example semiconductor circuits, printed circuit boards and the like A method and apparatus for the temperature regulation of components such as semiconductor circuits, printed circuit boards and the like. The components are conveyed on carriers through an inlet slot into a temperature regulating housing provided with temp... | 05/01/2001 |
| 6210156 | Heat treatment material handling unit A method and apparatus for sequentially heat treating small parts processes the parts individually through a heat treatment process at a predetermined rate, so that each part is heat treated for a predetermined time and all parts are heat treated equally.... | 04/03/2001 |
| 6036424 | Cart for unloading and transporting chain A cart for unloading and transporting chain is provided. The cart includes a frame with a number of tracks of a predetermined configuration which are superimposed over one another. Long segments of chain are routed from an oven onto a transfer rail assemb... | 03/14/2000 |
| 6030208 | Thermal processor A thermal processor for treating a plurality of semiconductor articles introduced into the processor and pods includes a work-in-process stocker and furnace combination. The stocker includes a loading port, shelves for storing pods and a loadport. The loa... | 02/29/2000 |
| 5981966 | Auto-teaching method in semiconductor processing system A detecting apparatus for performing an auto-teaching operation is used in a vertical heat treatment system to cause a controller for controlling movement of a wafer transfer arm to learn a unit of positional information about a wafer boat placed on a tra... | 11/09/1999 |
| 5549473 | Loader device for an automatic space furnace The loader device comprises a cartridge-carrying carousel provided with a set of cartridge-holders in which sealed closed cartridges are mounted in removable manner, each cartridge being designed to contain a sample for processing in a space furnace, the ... | 08/27/1996 |
| 5464313 | Heat treating apparatus A heat treatment apparatus for semiconductor wafers is provided with a number, such as two, of heat treatment units which are arranged horizontally and which load wafer boats containing wafers from below. A wafer delivery section is provided to correspond... | 11/07/1995 |
| 5446263 | Device for setting the temperature of a sample selectively to different values Device for setting the temperature of a sample selectively to different ves comprising a sample holder block having good thermal conductivity properties and at least one recess (14) for receiving a sample whose temperature is to be adjusted, and a device... | 08/29/1995 |
| 5382884 | Means and method for testing volatile material The present invention includes a crucible which holds volatile material to be tested. The crucible is lowered into an oven apparatus and removed from the oven apparatus by equipment programmed in a predetermined manner.... | 01/17/1995 |
| 5380137 | Wafer transfer device A wafer transfer device is intended to transfer wafers between a wafer boat in which a plurality of wafer support plates are vertically arranged at regular intervals and a cassette in which a plurality of wafer-mounted levels are vertically arranged at re... | 01/10/1995 |
| 5356261 | Wafer boat rotating apparatus A wafer boat rotating apparatus is disclosed, which includes a boat holding portion for holding both ends of the wafer boat, a vertical rotation drive mechanism for rotating the boat holding portion on a vertical plane, and a horizontal rotation drive mec... | 10/18/1994 |
