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| Number | Title | Issue Date |
| 7677858 | Vertical heat treatment system and method of transferring process objects Disclosed is an improved transfer mechanism that transfers, in a vertical heat treatment system, process objects W between a container (carrier), and a holder (boat) holding plural process objects at vertical intervals. The transfer mechanism includes plural substra... | 03/16/2010 |
| 7229240 | Substrate processing apparatus and substrate processing method When the processing temperature in a heater should be changed between lots, for example, a foremost substrate in a subsequent lot is transported to a position close to the heater such as a substrate holding part, and is held in standby thereat until adjustment of a ... | 06/12/2007 |
| 6786974 | Insulating film forming method and insulating film forming apparatus Both of a first insulating film and a second insulating film are formed by a spin coating method. Accordingly, the formation of the first insulating film and the second insulating film can be performed in the same SOD processing system. Moreover, the aforesaid forma... | 09/07/2004 |
| 6267587 | Thermal curing oven and thermal curing process An apparatus and a method for curing coatings on ophthalmic lenses is disclosed. The apparatus includes an oven that is continuously supplied with lenses. A vertically oriented conveyor having multiple carrier bars for supporting the lenses is positioned ... | 07/31/2001 |
| 6092980 | Substrate treatment equipment and method with testing feature An exclusive carrier (EQMC) housing therein equipment testing wafers (EQMW) is housed in a carrier housing rack (32) of a treatment equipment. An equipment testing parameter setting section (62) is provided for setting a cycle, in which the equipment test... | 07/25/2000 |
| 5976258 | High temperature substrate transfer module A system and method for processing a substrate. The system includes a substrate heating station, a processing station, a conveyor for transporting the heated substrate from the substrate heating station to the processing station and a conveyor heating sta... | 11/02/1999 |
| 5915308 | Discharge apparatus A discharge apparatus includes a housing into which a discharge pipe of a carbonization drum opens. A residue discharge chute which starts from the housing opens into a conveying device ending at an outlet. A filling-level meter is disposed at the residue... | 06/29/1999 |
| 5564340 | Coke oven rail car with drive control system for positioning the car and door extractor which compensates for thermal distortion of oven jambs A coke oven door extractor is mounted on the rail car and includes door engaging supports movable in individually differing amounts relative to a plane parallel to and including the door jamb and a door jamb height axis of symmetry and movable vertically,... | 10/15/1996 |
| 5475969 | System for applying a heat-shrinkable sleeve to a container An improved system for applying labels to pharmaceutical vials or the like includes a heating tunnel assembly having an insulated heating chamber defined by a first stationary portion and a second removable portion, with a heater positioned within the ins... | 12/19/1995 |
| 5033926 | Heat retaining means Screens for limiting heat losses from heated material, e.g. bars and slabs in rolling mills. Screens are provided in the form of strings of heat insulating bodies composed of metal shells containing insulating material. These screens may form curtains and... | 07/23/1991 |
| 4976612 | Purge tube with floating end cap for loading silicon wafers into a furnace A purge tube for protecting a boat(s) of wafers. This purge tube does not enter the furnace. A floating end cap within the tube moves to substantially seal the furance opening during processing. The floating end cap is withdrawn back to the closed end of ... | 12/11/1990 |
| 4767251 | Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes An apparatus for loading semiconductor wafers into a cantilever diffusion tube includes a cantilever paddle supporting a boatload of wafers. The paddle is moved into alignment with the open end of the cantilever diffusion tube. The open end portion of can... | 08/30/1988 |
| 4714396 | Process for controlling the charging of a shaft furnace A process for controlling the charging of a shaft furnace of the type utilizing a distribution spout and one or more storage hoppers with each hopper being provided with a dosing device for regulating the flow of charging material from the hopper to the s... | 12/22/1987 |
| 4708643 | Apparatus for charging a shaft furnace for burning carbonaceous material Apparatus for charging a shaft furnace for burning carbonaceous mineral material in at least two furnace shafts comprises a common feed container, which is connected to each furnace shaft by a separate charging duct. In order to provide a simple structure... | 11/24/1987 |
| 4708640 | Apparatus for batch preparation and feeding into the smelting process The present invention relates to a method and apparatus for preparing a feed mixture, made of several batch components, at one stage in order to feed it into a smelting furnace. The preparation of the batch may include the preheating and drying of the mat... | 11/24/1987 |
| 4531909 | Handling system for IC device There is provided a handling system for IC devices having a guide stage comprising a bank portion in which both sides of a IC device to be tested are held at a position other than a portion where terminals of the IC device project and a vacuum suction por... | 07/30/1985 |
| 4455762 | Glass batch pellet production and drying process and apparatus In a rotary apparatus for the production of layered glass batch pellets there is provided a dryer for final drying of the pellets prior to their being fed to a melting furnace.... | 06/26/1984 |
| 4449924 | Industrial furnace An industrial furnace, for instance a heating and/or reducing furnace, arranged to treat material in powder or in small pieces and having a chamber with refractory walls to which energy is supplied by electric means and/or by combustion and into which the... | 05/22/1984 |
| 4357883 | Bed drain cover assembly for a fluidized bed A loose fitting movable cover plate (36), suitable for the severe service encountered in a fluidized bed combustor (10), restricts the flow of solids into the combustor drain lines (30) during shutdown of the bed. This cover makes it possible to empty spe... | 11/09/1982 |
| 4322196 | Soup retort A cooking retort for soup or the like in which the individual cans are stored in storage rack clusters arranged around a generally horizontal axis. The retort employs a power cylinder to tilt the retort and thus the storage racks to enable inclination of ... | 03/30/1982 |
| 4309194 | Particle withdrawal from fluidized bed systems Method and apparatus for removing ash formed within, and accumulated at the lower portion of, a fluidized bed coal gasification reactor vessel. A supplemental fluidizing gas, at a temperature substantially less than the average fluidized bed combustion op... | 01/05/1982 |
| 4141796 | Coke oven emission control method and apparatus Method and apparatus for receiving and transporting hot coke in a coke oven pushing operation and controlling emissions resulting therefrom comprising a one spot quench car having a receptacle which is tiltable to a coke receiving position, a travel and q... | 02/27/1979 |
| 4139419 | Arrangement for dosing a coal charge to a coking battery Coal not normally used for coking is, prior to feeding to coking batteries, processed in a vertical suspension preheater heated by combustion gases from the coking batteries; the coal particles are separated from these combustion gases in two alternately ... | 02/13/1979 |
| 4087333 | Traveling hood for coke oven emission control A coke oven emission control system comprising a traveling hood for the quench car into which hot coke is pushed from the coke oven. The hood is independently supported by wheels traveling on rails and is of a length to cover the entire length of the quen... | 05/02/1978 |
