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| Number | Title | Issue Date |
| 7387455 | Substrate processing device, substrate processing method, and developing device Rinsing nozzles 310a to 310e are moved on a wafer W while they are discharging rinsing solution 326. At that point, discharging openings 317a to 317e are contacted to developing solution 350 coate... | 06/17/2008 |
| 7329058 | High flow rate development of photosensitive plates A process for developing an imaged lithographic printing plate, including the step of delivering developing fluid to the plate at a high volumetric flow rate for a short dwell time such that the non-image is completely solubilized while the image remains unaffected ... | 02/12/2008 |
| 7316515 | Liquid processing apparatus processing a substrate surface with a processing liquid, liquid processing method, and liquid condition detection apparatus detecting fluctuation of the processing liquid In a liquid processing apparatus a spin chuck holds a wafer having a surface supplied with a liquid to be applied through a nozzle receiving the liquid through a feed path and whether the liquid passing through the feed path has fluctuation is detected by a fluctuat... | 01/08/2008 |
| 7314053 | Load sensing system A load sensing system for maximizing the cleaning efficiency of particulate raw materials such as sand, gravel, rock, ores, etc., in a log washer by sensing the weight of the aggregate in the log washer tank and adjusting the angle of inclination of the tank for cle... | 01/01/2008 |
| 7287919 | Developing process and apparatus The invention discloses a developing apparatus and a developing process. Wherein the developing process comprises following steps. First, a developing apparatus and a substrate are provided, wherein the developing apparatus comprises a conveyer and a nozzle. Then, t... | 10/30/2007 |
| 7284559 | Load sensing system A programmable microcomputer controlled load sensing system for maximizing the cleaning efficiency of particulate raw materials such as sand, gravel, rock, ores, etc. in a log washer by sensing the weight of the aggregate in the log washer tank and adjusting the ang... | 10/23/2007 |
| 7275879 | Processing device of photo-sensitive material Disclosed is a processing device of a photo-sensitive material which comprises a conveying device for conveying a photo-sensitive material, a slot die for applying a processing liquid to the photo-sensitive material conveyed by the conveying device, a reservoir tank... | 10/02/2007 |
| 7263240 | Method, system, and software for improving signal quality using pyramidal decomposition A method, system, and software are disclosed for improving the quality of a signal. A base signal is recursively decomposed for a desired number of pyramid levels. The decomposed signal from the lowest level is modified to generate a preprocessed signal. The preproc... | 08/28/2007 |
| 7044662 | Developing photoresist with supercritical fluid and developer An apparatus for developing a polymeric film without the need for a water rinse step is disclosed. An object having a surface supporting a polymeric film is placed onto a support region within a pressure chamber of the apparatus. A fluid and developer is introduced ... | 05/16/2006 |
| 7025514 | Development apparatus for manufacturing semiconductor device A development apparatus for discharging a developer onto a surface of a semiconductor substrate (15) comprises a nozzle pipe (13) for supplying the developer, and a nozzle (14) having a shape of a spoon with a taper and discharging the developer... | 04/11/2006 |
| 7020344 | Match blur system and method A method for blurring in signal processing, for example, in digital film processing, is performed with digital artifacts. The digital artifacts are derived, such as by scanning, and include a noisy artifact and a less noisy artifact. The artifacts are subdivided int... | 03/28/2006 |
| 7018481 | Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle There is disclosed a substrate treating method comprising supplying a treating solution onto a substrate, and continuously discharging a first cleaning solution to the substrate from a first discharge region disposed in a nozzle, while moving the nozzle and substrat... | 03/28/2006 |
| 7018115 | Washing method and apparatus An apparatus for washing contaminants from a coated surface of a material comprises an inclined substantially planar surface up which the material is passed, an inlet for the introduction of wash solution at the upper part of the planar surface and pressure applying... | 03/28/2006 |
| 7016080 | Method and system for improving scanned image detail Methods are provided for generating a dynamic image mask for improving image detail in a digital image. An electronic representation of an image is scanned. A dynamic image mask is generated from the electronic representation of the image. The dynamic image mask has... | 03/21/2006 |
| 7001086 | Developing method, substrate treating method, and substrate treating apparatus A developing method comprises determining in advance the relation of resist dissolution concentration in a developing solution and resist dissolution speed by the developing solution, estimating in advance the resist dissolution concentration where the resist dissol... | 02/21/2006 |
| 6965692 | Method and apparatus for improving the quality of reconstructed information Image processing apparatus and methods according to the present invention are described in which data for each color channel are separately processed, on a pixel by pixel basis, such that the data associated with the primary color channel is filtered less than the c... | 11/15/2005 |
| 6943920 | Method, system, and software for signal processing using pyramidal decomposition A method, system, and software are disclosed for improving the quality of a signal. A base signal is recursively decomposed and modified for a desired number of pyramid levels. At each level, the decomposed signal from the previous level is modified to improve one o... | 09/13/2005 |
| 6942401 | Photographic processing system having a vertical stacker arrangement The invention relates to a photographic processor and a method of processing photographic material. The photographic processor is adapted to achieve a high speed processing of photographic material by utilizing the combination of a vacuum platen and a stacker arrang... | 09/13/2005 |
| 6938625 | Load sensing system A load sensing system for maximizing the cleaning efficiency of particulate raw materials such as sand, gravel, rock, ores, etc. in a log washer by sensing the weight of the aggregate in the log washer tank and adjusting the angle of inclination of the tank for clea... | 09/06/2005 |
| 6916125 | Method for film inspection and development A method of preparing a roll of film for development. The method involves inspecting the film for defects and imperfections as the film is unwound from a magazine. A method of preparing a roll of film for development and developing the film is also disclosed. The de... | 07/12/2005 |
| 6913404 | Film processing solution cartridge and method for developing and digitizing film A digital film processing system and film processing solution cartridge are disclosed. The cartridge comprises a housing and a chamber for storing a film processing fluid. The processing solution may be contained within a flexible bladder within the chamber. The car... | 07/05/2005 |
| 6915021 | Method and system for selective enhancement of image data A method and apparatus for selectively applying image enhancement processing to parts of an image. In one embodiment, spatial processing transformations, such as sharpening for example, are reduced or bypassed for pixels having color code values within a range known... | 07/05/2005 |
| 6910815 | Photosensitive material processing apparatus The present invention provides a photosensitive material processing apparatus in which a photosensitive material is processed with a processing solution. Reliable liquid displacement in the vicinity of the surface of a photosensitive material, and uniform temperatur... | 06/28/2005 |
| 6910816 | Digital film processing method A method of developing a latent image on a photographic element (such as imagewise exposed photographic film) by absorbing a dye precursor into the film, applying a developer solution to the film to develop the latent image and form a dye in the film, scanning the f... | 06/28/2005 |
| 6905267 | Method for reducing consumption of plate processing fluid Disclosed herein are a method and apparatus for efficiently processing workpieces which are developed using a liquid developer. According to the invention a first set of workpieces is obtained from an imaging station, a second set of workpieces is obtained from a wo... | 06/14/2005 |
| 6869234 | Developing apparatus and developing method A substrate (SW) is rotatably held in an approximately horizontal position by a wafer holding and rotation mechanism (810). One end of a rinsing liquid supply nozzle (840) is rotatably supported by a rinsing liquid supply nozzle rotation supporting mec... | 03/22/2005 |
| 6857795 | Developing apparatus and method for developing organic electroluminescent display panels A developing apparatus for organic electroluminescent display panels comprises a developing unit for supplying a developing solution to be uniformly dispensed to the surface of an organic electroluminescent display panel by immersing the organic electroluminescent d... | 02/22/2005 |
| 6851873 | Method and apparatus for removing organic films A method and an apparatus for removing an organic film, such as a resist film, from a substrate surface are provided wherein a treatment liquid containing dissolved ozone, and preferably formed from liquid ethylene or propylene carbonate, or both, is contacted with ... | 02/08/2005 |
| 6830389 | Parallel plate development with the application of a differential voltage A system and method is provided for applying a developer to a photoresist material layer disposed on a semiconductor substrate. The developer system and method employ a developer plate having a plurality of a apertures for dispensing developer. Preferably, the devel... | 12/14/2004 |
| 6817790 | Substrate processing method and substrate processing apparatus On the occasion of developing processing, a mixed solution produced by stirring a developing solution and a solution with a specific gravity smaller than the developing solution is supplied to the front surface of a substrate and left as it is for a fixed period of ... | 11/16/2004 |
| 6752545 | Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipment A treating liquid adjusting equipment for adjusting an alkali-based treating liquid for use in treating an organic film applied onto a substrate, which includes an adjusting portion. The adjusting portion for adjusting an alkalinity of the alkali-based treating liqu... | 06/22/2004 |
| 6752544 | Developing apparatus and developing method A substrate (W) is held in an approximately horizontal position by a substrate holder (10) and is rotated by a spinning motor (13). A rinsing liquid supply nozzle (140) is rotatably supported at its one end by a second nozzle movement mechanism ... | 06/22/2004 |
| 6749351 | Apparatus for developing substrate A developer supply nozzle moves from a first end toward a second end of a substrate for supplying a developer to the overall main surface of the substrate. After a lapse of a required developing time, a rinse discharge nozzle moves from the first end toward the seco... | 06/15/2004 |
| 6739769 | Photographic film developing apparatus A photographic film developing apparatus maintains a photographic film, a developer solution and a second processing solution at a specific temperature while performing film development operation by directly applying the individual solutions to an emulsion side of t... | 05/25/2004 |
| 6736556 | Substrate processing apparatus A resist coating unit includes a coater cup surrounding a wafer W held by a spin chuck and an air supply mechanism for blowing an air into the coater cup. The air supply mechanism includes a hollow frame having a first open portion formed in the vertical wall, an ai... | 05/18/2004 |
| 6715943 | Solution treatment method and solution treatment unit The present invention is a solution treatment unit for supplying a treatment solution to a substrate and treating the substrate inside an accommodating vessel, comprising a frame for having the accommodating vessel mounted therein. The accommodating vessel has a str... | 04/06/2004 |
| 6709174 | Apparatus and method for development A solution-receiving plate having solution-passing holes for passing a developer solution therethrough toward the back side of the plate is provided. Respective surfaces of the solution-receiving plate and a substrate are at the same height, and the solution-receivi... | 03/23/2004 |
| 6692165 | Substrate processing apparatus A developer is supplied onto a substrate and thereafter a rinse discharge nozzle is moved toward an operating direction. The rinse discharge nozzle is so moved on the substrate as to continuously supply pure water onto the substrate from a slit discharge ... | 02/17/2004 |
| 6688784 | Parallel plate development with multiple holes in top plate for control of developer flow and pressure A system and method is provided for applying a developer to a photoresist material layer disposed on a semiconductor substrate. The developer system and method employ a developer plate having a plurality of a application apertures for dispensing developer... | 02/10/2004 |
| 6634805 | Parallel plate development A system and method is provided for applying a developer to a photoresist material wafer disposed on a semiconductor substrate. The developer system and method employ a developer plate having a plurality of a apertures for dispensing developer. Preferably... | 10/21/2003 |
