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| Number | Title | Issue Date |
| 8184963 | Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer A vapor deposition source including a crucible configured to hold a quantity of molten constituent material and at least one nozzle to pass vapor evaporated from the molten constituent material out of the crucible. ... | 05/22/2012 |
| 8059945 | Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer A vapor deposition source including a crucible configured to hold a quantity of molten constituent material and at least one nozzle to pass vapor evaporated from the molten constituent material out of the crucible. ... | 11/15/2011 |
| 7962016 | Heating crucible for organic thin film forming apparatus Provided is a heating crucible for an organic thin film forming apparatus, the heating crucible including a main body in which to contain an organic substance, a cover provided on the main body, the cover formed of an insulating material and having a nozzle through ... | 06/14/2011 |
| 7899308 | Evaporation device with receptacle for receiving material to be evaporated The invention relates to an evaporator device with a receptacle for holding material to be evaporated. With this evaporator device an oil film can be applied onto specific sites of a sheet to be coated, this sheet being coated with aluminum or zinc in a further step... | 03/01/2011 |
| 7471884 | Resistance-heated vaporizer boat Resistance-heated ceramic vaporizer boat (10) comprising an elongated vaporizer body having an upper side (1) and a lower side (2) being parallel to each other, and the vaporizer body having plane lateral side surfaces (3) being non-paral... | 12/30/2008 |
| 7437060 | Delivery systems for efficient vaporization of precursor source material A delivery system for vaporizing and delivering vaporized solid and liquid precursor materials at a controlled rate having particular utility for semiconductor manufacturing applications. The system includes a vaporization vessel, a processing tool and a connecting ... | 10/14/2008 |
| 7429361 | Method and apparatus for providing precursor gas to a processing chamber In one embodiment, an apparatus for generating a gaseous chemical precursor used in a vapor deposition processing system is provided which includes a canister comprising a sidewall, a top, and a bottom encompassing an interior volume therein, an inlet port and an ou... | 09/30/2008 |
| 7369758 | Molecular beam source for use in accumulation of organic thin-films A molecular beam source for use in accumulation of organic thin-films which enables the forming of a uniform thin-film on film-forming surfaces of a large-sized substrate, but without producing deposition or separation of a film-forming material in an opening for di... | 05/06/2008 |
| 7359630 | Evaporation source for evaporating an organic electroluminescent layer The present invention relates to an evaporation source for evaporating an organic electroluminescent layer. In particular, the present invention relates to the evaporation source preventing an aperture, through which a vaporized evaporation material is emitted, from... | 04/15/2008 |
| 7339139 | Multi-layered radiant thermal evaporator and method of use The present invention provides a system and method for uniform coating of a substrate at high deposition rates by evaporating a coating material in a vacuum chamber. The system includes an evaporator having a heating crucible for containing a coating material to be ... | 03/04/2008 |
| 7309269 | Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device In this embodiment, an interval distance between a desposition source holder 17 and an object on which deposition is performed (substrate 13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source hol... | 12/18/2007 |
| 7291224 | Covering assembly for crucible used for evaporation of raw materials The present invention provides an assembly comprising two plates or covers, one of which being an outermost plate or cover, and both, at least in part having a perforation pattern over a surface area covering an open side of a crucible having a bottom and surroundin... | 11/06/2007 |
| 7289701 | Integrated platform for passive optical alignment of semiconductor device with optical fiber A platform for converting a signal between optical and electrical form and vice versa is provided. The platform includes a dielectric mount, a semiconductor light source and optical fibers. Some of these components are fabricated separately and then brought together... | 10/30/2007 |
| 7261118 | Method and vessel for the delivery of precursor materials Vessel and method for the production and delivery of a precursor-containing fluid stream comprising the gaseous phase of a precursor material are disclosed herein. In one aspect, there is provided an vessel comprising: an interior volume wherein the interior volume ... | 08/28/2007 |
| 7259358 | Encapsulated graphite heater and process A graphite heater and method of forming a graphite heater comprising a graphite body configured to form an electrical heating circuit for at least one heating zone through the graphite encapsulated in a continuous overcoat layer comprising at least one of a nitride,... | 08/21/2007 |
| 7212734 | Portable carbon monoxide generation apparatus for testing CO sensors, detectors and alarms An apparatus for generating carbon monoxide comprising an enclosure (6) having an inlet and an outlet at least one of which is provided with means (8) restricting air flow from the inlet to the outlet, a container (1) located within the enclosur... | 05/01/2007 |
| 7211326 | Carbon material and process of manufacturing A carbon material is formed by heat-treating a carbonaceous material in a reaction mix of boron oxide or its precursors and ammonia-generating phases such as melamine or its like in a nitrogen atmosphere to temperatures of 1600 to 2000° C. The surface of the carbon... | 05/01/2007 |
| 7194197 | Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer A vapor deposition source including a crucible configured to hold a quantity of molten constituent material and at least one nozzle to pass vapor evaporated from the molten constituent material out of the crucible. ... | 03/20/2007 |
| 7186385 | Apparatus for providing gas to a processing chamber An apparatus for generating gas for a processing system is provided. In one embodiment, an apparatus for generating gas for a processing system includes a canister having at least one baffle disposed between two ports and containing a precursor material. The precurs... | 03/06/2007 |
| 7166169 | Vaporization source with baffle A vapor deposition source for depositing organic material includes a boat having a cavity for holding organic material and an aperture plate, having a plurality of spaced apertures, for enclosing the boat. The vapor deposition source also includes a heating element ... | 01/23/2007 |
| 7155115 | Method and device for vacuum sputtering The invention concerns a device and a process for applying a lubricant by means of vapour deposition to a target object, especially a magnetic data carrier. The device in accordance with the invention comprises a lubricant supply means (1) that can be filled ... | 12/26/2006 |
| 7132128 | Method and system for depositing material on a substrate using a solid precursor A system and method is disclosed for vaporizing a solid precursor and transporting the precursor vapor to a process chamber. The film precursor vaporization system is coupled to the process chamber and positioned directly above the substrate. A precursor valve syste... | 11/07/2006 |
| 7122085 | Sublimation bed employing carrier gas guidance structures Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto which a solid source material for vapor reactant is coated. Preferably, ... | 10/17/2006 |
| 7112804 | Ion implantation ion source, system and method An ion implantation device for vaporizing decaborane and other heat-sensitive materials via a novel vaporizer and vapor delivery system and delivering a controlled, low-pressure drop flow of vapors, e.g. decaborane, into the ion source. The ion implantation device i... | 09/26/2006 |
| 7070658 | Vapor deposition apparatus A vapor deposition apparatus, developed in particular for on-line deposition of phosphor or scintillator material, wherein said vapor deposition apparatus comprises a crucible containing a mixture of raw materials, a chimney having at least one inlet in communicatio... | 07/04/2006 |
| 7031600 | Method and apparatus for silicon oxide deposition on large area substrates A method and apparatus for depositing a dielectric material at a rate of at least 3000 Angstroms per minute on a large area substrate that has a surface area of at least about 0.35 square meters is provided. In one embodiment, the dielectric material is silicon oxid... | 04/18/2006 |
| 7025832 | Source for thermal physical vapor deposition of organic electroluminescent layers A deposition source is provided which is installed in a chamber, heated by applied electric power to transfer heat to a vapor deposition material received therein and applying a vaporized deposition material generated therein to a substrate to form deposition organi... | 04/11/2006 |
| 7021238 | Molecular beam epitaxy equipment Epitaxy equipment including an epitaxy chamber under vacuum containing a substrate support and at least one cell under vacuum for evaporation of epitaxy material closed by a diaphragm having at least one opening and communicating with the epitaxy chamber by a connec... | 04/04/2006 |
| 7004234 | Vaporizer for generating feed gas for an arc chamber A vaporizer generating feed gas for the arc chamber of an ion source has a crucible which is heated to a temperature at which material in the crucible sublimes to produce a vapour for use as the feed gas. In addition to the heating element for heating the crucible, ... | 02/28/2006 |
| 7003215 | Vapor flow controller A vapor flow controller apparatus for delivery of chemical reagent vapors from a liquid phase source material is provided which includes a source container containing the liquid phase source material, a pump to transport the liquid phase source material to a vaporiz... | 02/21/2006 |
| 6982005 | Multiple-nozzle thermal evaporation source A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may comprise a thermally conductive material having a low emissivity material. ... | 01/03/2006 |
| 6923867 | Substrate processing apparatus and method for manufacturing semiconductor device A substrate processing apparatus and a method for manufacturing a semiconductor device can supply the vapor of the raw material to the substrate without fail. A main heater 22 is prepared outside the outer tube 21, an inner tube 23 is prepared i... | 08/02/2005 |
| 6911094 | Evaporation apparatus An evaporation apparatus comprises an elongated crucible having an upper opening and storing an evaporation material, an electric heater which covers the upper opening of the elongated crucible, generates heat by causing electric current to flow therein for heating ... | 06/28/2005 |
| 6909839 | Delivery systems for efficient vaporization of precursor source material The present invention relates to a delivery system for vaporizing and delivering vaporized solid and liquid precursor materials at a controlled rate having particular utility for semiconductor manufacturing applications. The system includes a vaporization vessel, a ... | 06/21/2005 |
| 6881271 | Fixing member for evaporation apparatus An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed... | 04/19/2005 |
| 6837939 | Thermal physical vapor deposition source using pellets of organic material for making OLED displays A thermal physical vapor deposition source for vaporizing compacted pellets of organic materials onto a surface of a substrate in forming a display, including a housing defining a plurality of spaced passages each for receiving compacted pellets, a cover plate over ... | 01/04/2005 |
| 6709524 | Vapor deposition method and vapor deposition apparatus for forming organic thin films In order to provide a vapor deposition method for forming an organic thin film, which is advantageous in that a deposition rate can be easily controlled and deposition can be conducted with stable high controllability, there is prepared a crucible which is provided ... | 03/23/2004 |
| 6582523 | Organic source boat structure for organic electro-luminescent display fabricating apparatus An organic source boat structure for organic electro-luminescent display fabricating apparatus is provided to form an organic layer having uniform thickness. The organic source boat structure comprises: a plurality of host cells having a plurality of evap... | 06/24/2003 |
| 6562405 | Multiple-nozzle thermal evaporation source A multiple nozzle thermal evaporation source includes a plurality of nozzles having a tapered shape. The nozzles may be coated with a thermally conductive material with a low emissivity material.... | 05/13/2003 |
| 6507698 | Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film An inactive gas is introduced into an organic material evaporation source to place a thin organic film material in the organic material evaporation source in an atmosphere having a relatively high pressure, and the temperature of the thin organic film mat... | 01/14/2003 |
