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| Number | Title | Issue Date |
| 8090190 | Method and apparatus for reviewing defects An apparatus for reviewing defects including an image processing section (defect classification device section) with a function of estimating a non-defective state (reference image) of a portion in which the defect exists by use of a defect image, and a function of ... | 01/03/2012 |
| 8031932 | Pattern inspection apparatus and method A pattern inspection apparatus includes a stage configured to mount thereon a target workpiece to be inspected where patterns are formed, at least one sensor configured to move relatively to the stage and capture optical images of the target workpiece to be inspecte... | 10/04/2011 |
| 8027529 | System for improving critical dimension uniformity A system for improving substrate critical dimension uniformity is described. The system includes an exposing means for exposing a plurality of mask patterns on a first plurality of substrates at predetermined locations with common splits of focus ({Fj}) a... | 09/27/2011 |
| 7760929 | Grouping systematic defects with feedback from electrical inspection Methods and apparatus for categorizing defects on workpieces, such as semiconductor wafers and masks used in lithographically writing patterns into such wafers are provided. For some embodiments, by analyzing the layout in the neighborhood of the defect, and matchin... | 07/20/2010 |
| 7657078 | Method and apparatus for reviewing defects An apparatus for reviewing defects including an image processing section (defect classification device section) with a function of estimating a non-defective state (reference image) of a portion in which the defect exists by use of a defect image, and a function of ... | 02/02/2010 |
| 7602961 | Reference data generating method, pattern defect checking apparatus, pattern defect checking method, reference data generating program, and semiconductor device manufacturing method A method of generating reference data is disclosed, in which two-value or multi-value gradated data of pixels is obtained in units of pixels from a design data of a pattern to be formed on an object, a processed data is obtained by carrying out calculations to the g... | 10/13/2009 |
| 7526119 | Pattern inspection apparatus With a pattern inspection apparatus, image data corresponding to all patterns on an inspection target plate can be generated on the basis of scanned pattern data obtained with low-magnification optics different from ordinary inspection optics, or design pattern data... | 04/28/2009 |
| 7440606 | Defect detector and defect detection method A control part of a defect detector is provided with a magnification operation part, an inspected image display part and a master image display part. The magnification operation part operates a display magnification α1 (display magnification data) for a defe... | 10/21/2008 |
| 7423743 | Method and an apparatus for measuring positions of contact elements of an electronic component A method and an apparatus for measuring respective positions of a set of N contact elements of an electronic component. A first and a second light path are created by a first and a second light beam which have different viewing angles. Both the first and the second ... | 09/09/2008 |
| 7406191 | Inspection data producing method and board inspection apparatus using the method After a CAD data and a parts library are combined to produce an inspection data, the set data for the inspection window is automatically corrected using the image of a bare board for a board to be inspected. In this correcting process, an inspection window based on ... | 07/29/2008 |
| 7391894 | System and method for remote navigation of a specimen A system and method for remote navigation of a specimen. ... | 06/24/2008 |
| 7389004 | Image processing apparatus A signal processing apparatus comprises an input unit for inputting first image data having a first resolution, a resolution converting unit for converting the resolution of the input first image data and outputting second image data having a second resolution which... | 06/17/2008 |
| 7366354 | 10-bit per pixel processing using 8-bit resources This invention relates to an imaging device that extends the processing of resources to data having a greater bit-depth. A signal having data at the first bit-depth is received, and at least a portion of the data at the first bit-depth is converted into an estimated... | 04/29/2008 |
| 7366344 | Edge normal process An edge inspection method for detecting defects on a wafer edge normal surface includes acquiring a set of digital images which captures a circumference of the wafer. An edge of the wafer about the circumference is determined. Each digital image is segmented into a ... | 04/29/2008 |
| 7349106 | Apparatus and method for thin-layer metrology An apparatus (1) and a method for thin-layer metrology of semiconductor substrates (16) are disclosed. The semiconductor substrates (16) are delivered or transported to the apparatus (1) by means of at least one cassette element. A measur... | 03/25/2008 |
| 7349129 | Controller for photosensor array with multiple different sensor areas A controller controls selection of rows of photosensors residing in a photosensor array having at least one row of photosensors with a first sensor size, and at least one row of photosensors with a second sensor size. In a first example embodiment, the controller ma... | 03/25/2008 |
| 7340087 | Edge inspection A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the image... | 03/04/2008 |
| 7277197 | Image communication apparatus and image communication method In a pre-procedure in an image communication method, a receiver notifies a transmitter as to whether a capability of receiving JPEG-encoded information is provided, whether a capability of receiving full-color information in Lab color space is provided, whether a ca... | 10/02/2007 |
| 7269280 | Method and its apparatus for inspecting a pattern In a pattern inspecting apparatus, images of places which can be expected to be the same pattern are compared with one another. However, a comparison of images obtained by different stage scans and the occurrence of a place capable of being inspected only once lead ... | 09/11/2007 |
| 7255748 | Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof The present invention relates to an integrated apparatus for monitoring wafers and for process control in the semiconductor manufacturing process, by means of at least two different measurements that can be installed inside any part of the semiconductor production l... | 08/14/2007 |
| 7249317 | Information processing apparatus, its control method, and storage medium This invention allows easy update of an image to be included in a document which is submitted on the network. For this purpose, data that set the image sensing times and image sensing states of a camera (111) the pan angle, tilt angle, and zoom ratio of which... | 07/24/2007 |
| 7239735 | Pattern inspection method and pattern inspection device In this pattern inspection device, the optical scanning section scans the inspected pattern using a laser beam. A photoelectric image processing section generates an image of the inspected pattern. A reference image generation section calculates the gray level of ea... | 07/03/2007 |
| 7230441 | Wafer staging platform for a wafer inspection system A wafer staging platform for a wafer inspection system for inspecting of semiconductors or like substrates and method of handling wafers. The platform and related method is designed to reduce the amount of time needed to exchange wafers on a processing tool. The sta... | 06/12/2007 |
| 7224486 | Image conversion method, image conversion apparatus, and image conversion program storage medium In an image conversion method of performing an image conversion between binary area tonal image-to-binary area tonal image, an image conversion apparatus, and an image conversion program storage medium storing an image conversion program which causes a computer to o... | 05/29/2007 |
| 7203355 | Automatic optical inspection system and method A system comprising automatic apparatus for automatic optical inspection (AOI), verification and correction of defects in an article, and a processor operative to select between AOI, verification and correction for performing on the article. ... | 04/10/2007 |
| 7200642 | Method and apparatus for electronic delivery of electronic model images A method, apparatus, and article of manufacture provide a distributed computing system delivering and manipulating electronic model images to end users. One aspect of the present invention includes a method for providing electronic delivery of electronic model image... | 04/03/2007 |
| 7180586 | System for detection of wafer defects Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane... | 02/20/2007 |
| 7173732 | Image processing method An image processing method of subjecting image data having been supplied to image processing so as to arrange the image data as output image data has the steps of: performing a verification for adjusting image processing conditions when necessary referring to a fini... | 02/06/2007 |
| 7162072 | Semiconductor processing device, semiconductor processing system and semiconductor processing management method A semiconductor processing device includes a processing section to process a semiconductor substrate in accordance with job information which is used to process the semiconductor substrate. An imaging section takes an image of a processed portion of the semiconducto... | 01/09/2007 |
| 7151850 | Apparatus and method for setting teaching data, teaching data providing system over network Teaching data setting apparatus and a method for image processing are provided to enable setting optimum teaching data to achieve reduction in errors and error detection in the image processing. A subject teaching data generating section 1 uses databases of s... | 12/19/2006 |
| 7149338 | Next process-determining method, inspecting method and inspecting apparatus There are provided a next process-determining method capable of determining a next process to be carried out next objectively and at the same time in a short time period, as well as an inspecting method and apparatus which are capable of carrying out a predetermined... | 12/12/2006 |
| 7149342 | Device and method for investigating predetermined areas of printed circuit boards A method for examining a circuit board in a predetermined area of the circuit board uses an apparatus that has a stationary camera and a display unit. The circuit board is arranged so as to be freely movable in the scanning zone of the camera. According to the inven... | 12/12/2006 |
| 7130467 | Real time data matching Representing source data with predefined data patterns, or identifying predefined data patterns in source data, where each data pattern includes a unique combination of pattern elements, without comparing every pattern element of each data pattern to the source data... | 10/31/2006 |
| 7113630 | PICA system detector calibration Methods, apparatus and data structures useful in correcting PICA image data are described. An exemplary method comprises acquiring optical image data of a target having identifiable optical-image features, acquiring PICA image data of the target having identifiable ... | 09/26/2006 |
| 7088471 | Density correction method and printing apparatus employing the same Density correction method capable of performing density correction at high speed with high precision. In a printing apparatus adopting this method, a predetermined test pattern image is printed on a printing medium, the printed test pattern image is optically read b... | 08/08/2006 |
| 7084970 | Inspection of TFT LCD panels using on-demand automated optical inspection sub-system In an inspection system for electrical and electro-optical inspection of TFT-LCD panels, a fine resolution area imaging camera with a pulse illumination source disposed to scan the region and operative capture images of the region illuminated with pulses of short il... | 08/01/2006 |
| 7073542 | Liquid quantity determination unit, photolithography apparatus, and liquid quantity determination method The invention automates determination of the quantity of a index matching liquid. The invention is a liquid quantity determination unit to determine the quantity of a filling liquid to be filled between a plurality of optical components, and includes an inspe... | 07/11/2006 |
| 7065239 | Automated repetitive array microstructure defect inspection A method and system for defect inspection of microfabricated structures such as semiconductor wafers, masks or reticles for micro-fabrication, flat panel displays, micro-electro-mechanical (MEMs) having repetitive array regions such as memories or pixels. In one emb... | 06/20/2006 |
| 7050622 | Image comparison apparatus, image comparison method, and program for causing computer to execute image comparison An image comparison apparatus includes an observation image capturing means for capturing at least one of a macroscopic observation image of a specimen and a microscopic observation image of the specimen, a photographing means for photographing an observation image ... | 05/23/2006 |
| 7035003 | Microscope arrangement for inspecting a substrate A microscope measuring arrangement for inspecting a substrate includes a microscope, an illuminating system, preferably a sight glass, a holder, a substrate pallet and a rotary apparatus and/or tilting apparatus. The substrate pallet can be moved between at least tw... | 04/25/2006 |
