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| Number | Title | Issue Date |
| 8175221 | X-ray beam processor An x-ray beam processor system that includes an x-ray beam generator for generating x-ray beams; a collecting cone that includes multilayer waveguide optics; a condensing cone that includes multilayer waveguide optics; and polycapillary tubes with channels, where th... | 05/08/2012 |
| 8121254 | Optical element, exposure apparatus using this, and device manufacturing method On a multilayer film mirror, a protective layer is formed having a varied composition in the depth direction. The protective layer includes an interface side layer formed on a thin film layer, i.e., the outermost layer of a multilayer film, a surface side layer prov... | 02/21/2012 |
| 8085900 | Method for X-ray wavelength measurement and X-ray wavelength measurement apparatus A Method for X-ray wavelength measurement and an X-ray wavelength measurement apparatus capable of determining absolute wavelength easily and carrying out wavelength measurement having high precision with a simple structure are provided. The present invention is a M... | 12/27/2011 |
| 8068582 | Methods and systems for the directing and energy filtering of X-rays for non-intrusive inspection Systems and methods are disclosed herein for lenses based on crystal X-ray diffraction and reflection to be used to direct and energy filter X-ray beams. ... | 11/29/2011 |
| 8000443 | High precision posture control method of X-ray mirror A high precision posture control method for sustaining the posture of an X-ray optical element constantly at 1 μrad or less. A longitudinal condensation mirror and a lateral condensation mirror, each having a condensation plane band consisting of an elliptical refl... | 08/16/2011 |
| 7991116 | Monochromatic x-ray micro beam for trace element mapping An x-ray system or method for exciting a sample under x-ray analysis, using a curved monochromating optic for directing a monochromatic x-ray beam from an x-ray source towards a first focal area. A second optic is positioned within, and receives, the monochromatic x... | 08/02/2011 |
| 7983389 | X-ray optical element and diffractometer with a soller slit An X-ray optical element (1, 1′, 1″) with a Soller slit comprising several lamellas for collimating an X-ray beam with respect to the direction of the axis (5, 15) of the Soller slit, and a further collimator for delimiting an X-ray (10), wh... | 07/19/2011 |
| 7978822 | Mirror mounting, alignment, and scanning mechanism and scanning method for radiographic X-ray imaging, and X-ray imaging device having same An X-ray imaging device and alignment/scanning system include at least one multilayer X-ray mirror mounted on a multi-axis adjustable mirror mount pivotable about a scanning axis. A mirror scanner is coupled with the mirror mount and synchronized with the X-ray sour... | 07/12/2011 |
| 7936860 | X-ray condensing method and its device using phase restoration method An X-ray condensing method and its device are provided with an X-ray mirror that has a wavefront adjustable function to finely adjust a wavefront of a reflecting X-ray, measure an X-ray intensity distribution in the vicinity of a focus, measure an X-ray intensity di... | 05/03/2011 |
| 7924978 | System and method for XRD-based threat detection System and method for XRD-based threat detection. An object is scanned with a first threat detection system. One or more alarm objects are identified. Data about the one or more alarm objects is passed from the first threat detection system to a second threat detect... | 04/12/2011 |
| 7903784 | Apparatus and method of narrow band x-ray filtering Disclosed are an apparatus and method of filtering a narrow band X-ray. The apparatus includes a micro filter array to configure a plurality of micro filters in an array, a filter array storing unit to store a filter table having information about an angle of each o... | 03/08/2011 |
| 7889842 | Doped lithium fluoride monochromator for X-ray analysis The invention relates to a crystalline lithium fluoride doped with at least 0.018 mol per kg of a divalent positive ion M present in the fluoride state, in particular of the single-crystal type. The ion may be Mg2+, Zn2+ or Co2+. Thi... | 02/15/2011 |
| 7881432 | X-ray focusing device Disclosed is an X-ray reflecting device and an X-ray reflecting element constituting the X-ray reflecting device capable of facilitating a reduction in weight and being prepared in a relatively simple manner. The X-ray reflecting element of the present invention com... | 02/01/2011 |
| 7864922 | Wavelength-dispersive X-ray spectrometer An X-ray spectrometer which uses at least one curved analyzing crystal and which provides improved wavelength resolution of characteristic X-rays used for analysis and improved ratio of characteristic X-rays to background intensity by using only effective diffractiv... | 01/04/2011 |
| 7817780 | X-ray focusing device Disclosed is an X-ray reflecting device and an X-ray reflecting element constituting the X-ray reflecting device capable of facilitating a reduction in weight and being prepared in a relatively simple manner. The X-ray reflecting element of the present invention com... | 10/19/2010 |
| 7809108 | Method and apparatus for generating small size, high-intensity X-ray beams In an X-ray diffraction apparatus, a high brightness source, such as a rotating anode generator, is combined with demagnification X-ray optics to produce a beam with small image size and high-intensity. In one embodiment, an elliptical X-ray optic is positioned rela... | 10/05/2010 |
| 7770232 | Scanning probe microscope system A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a... | 08/03/2010 |
| 7769136 | Apparatus and method for positioning an x-ray lens and x-ray device incorporating said apparatus A positioning technique for aligning an X-ray lens (28) is described. A positioning apparatus (16) comprises a lens mounting component (44) and a positioning component (42). The positioning component (42) includes at least one goni... | 08/03/2010 |
| 7742566 | Multi-energy imaging system and method using optic devices A multi-energy imaging system and method for selectively generating high-energy X-rays and low-energy X-ray beams are described. A pair of optic devices are used, one optic device being formed to emit high X-ray energies and the other optic device being formed to em... | 06/22/2010 |
| 7738629 | X-ray focusing optic having multiple layers with respective crystal orientations A diffracting x-ray optic for accepting and redirecting x-rays. The optic includes at least two layers, the layers having a similar or differing material composition and similar or differing crystalline orientation. Each of the layers exhibits a diffractive effect, ... | 06/15/2010 |
| 7720197 | High intensity x-ray beam system An x-ray optical system for producing high intensity x-ray beams. The system includes an optic with a surface formed by revolving a defined contour around a revolving axis that is different than the geometric symmetric axis of the optic. Accordingly, the system may ... | 05/18/2010 |
| 7706503 | X-ray optic with varying focal points An x-ray optical device delivers an x-ray beam with variable convergence. The convergence or the divergence of the x-ray beams varies over different parts of the reflector. The device may include an adjustable aperture to further select the convergence or divergence... | 04/27/2010 |
| 7702072 | X-Ray or neutron monochromator The invention relates to a monochromator device for selecting at least one wavelength band from incident radiation in a given wavelength range. The monochromator device may include at least one optical layer of a monocrystalline material having a crystallographic li... | 04/20/2010 |
| RE41220 | Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements The projection lithographic method for producing integrated circuits and forming patterns with extremely small feature dimensions includes an illumination sub-system (36) for producing and directing an extreme ultraviolet soft x-ray radiation λ from an extre... | 04/13/2010 |
| 7583789 | X-ray imaging systems employing point-focusing, curved monochromating optics An x-ray imaging system includes an optical device having at least one point-focusing, curved monochromating optic for directing x-rays from an x-ray source towards a focal point. The at least one point-focusing, curved monochromating optic provides a focused monoch... | 09/01/2009 |
| 7542548 | X-ray optical system An X-ray optical system provides selectively a linear X-ray beam and a point X-ray beam while using an X-ray source which generates an X-ray beam having a linear section. When the point X-ray beam is selected, an X-ray intensity per unit area becomes higher. The X-r... | 06/02/2009 |
| 7508911 | X-ray imaging system and methods of using and forming an array of optic devices therein An X-ray imaging system is provided that includes a target for emitting X-rays and having at least one target focal spot, and an array of multilayer optic devices for transmitting X-rays through total internal reflection. The array of multilayer optics devices are i... | 03/24/2009 |
| 7505560 | 3-dimensional image construction method and apparatus A method and apparatus for constructing a 3-dimensional image of the internal organs invisible by the conventional method is provided. The apparatus comprises: generating means for generating a monochromatic and parallel X-ray beam from an X-ray beam; a reflection-t... | 03/17/2009 |
| 7474733 | Optical element such as multilayer film reflection mirror, production method therefor and device using it A multilayer film reflector capable of simply correcting a wavefront phase and a method of forming the reflector are disclosed. For this purpose, a reflector using reflection by a multilayer film is disclosed. This multilayer film is formed in a number of cyc... | 01/06/2009 |
| 7443952 | X-ray diffraction measurement method and X-ray diffraction apparatus Disclosed is an X-ray diffraction apparatus that irradiates a sample with X-ray emitted from an X-ray source by resting the X-ray using a divergence slit and detects diffracted X-ray generated from the sample using an X-ray detector. The divergence angle of the dive... | 10/28/2008 |
| 7443953 | Structured anode X-ray source for X-ray microscopy An x-ray source comprises a structured anode that has a thin top layer made of the desired target material and a thick bottom layer made of low atomic number and low density materials with good thermal properties. In one example, the anode comprises a layer of coppe... | 10/28/2008 |
| 7440546 | Method of making and structure of multilayer laue lens for focusing hard x-rays A zone plate multilayer structure includes a substrate carrying a plurality of alternating layers respectively formed of tungsten silicide (WSi2) and silicon (Si). The alternating layers are sequentially deposited precisely controlling a thickness of each... | 10/21/2008 |
| 7430277 | Optical device for X-ray applications The invention relates to an optical device intended to treat an incident X-ray beam. The optical device comprises a monochromator and an optical element for conditioning the incident beam. The reflective surface of the optical element is able to produce a two-dimens... | 09/30/2008 |
| 7415096 | Curved X-ray reflector A method for producing X-ray optics includes providing a wafer of crystalline material having front and rear surfaces and a lattice spacing suitable for reflecting incident X-rays of a given wavelength. A thin film is deposited on the front surface of the wafer so a... | 08/19/2008 |
| 7412030 | Apparatus employing conically parallel beam of X-rays An apparatus directing x-rays along a predetermined axis includes an x-ray optic having one or more nested x-ray reflector rings positioned relative to a source generating broad spectrum x-rays so that generated x-rays moving away from the predetermined axis are col... | 08/12/2008 |
| 7403593 | Hybrid x-ray mirrors An x-ray mirror provides focusing and monochromatization while maintaining a high degree of reflectivity. The mirror has at least two mirror portions, one with a multilayer surface that provides the desired monochromating, and the other with a total external reflect... | 07/22/2008 |
| 7400699 | Illumination system with raster elements of different sizes There is provided an illumination system for lithography with wavelengths of ≦193 mn. The system comprises a first optical element, which is divided into first raster elements and lies in a first plane. The first plane defines an x-direction and a y-direction, the... | 07/15/2008 |
| 7394890 | Optimized x-ray energy for high resolution imaging of integrated circuits structures An x-ray imaging system uses particular emission lines that are optimized for imaging specific metallic structures in a semiconductor integrated circuit structures and optimized for the use with specific optical elements and scintillator materials. Such a system is ... | 07/01/2008 |
| 7372059 | Plasma-based EUV light source Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can prod... | 05/13/2008 |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
