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Class 378/70 - Diffraction, reflection, or scattering analysis


Subclass of Class 378 - X-ray or gamma ray systems or devices
Definition: Subject matter including the measurement or sensing of X-rays,
No. of patents: 230
Last issue date: 07/12/2011


1            
NumberTitleIssue Date
7978820X-ray diffraction and fluorescence
An instrument capable of both X-ray diffraction, XRD, and X-ray fluorescence measurements, XRF, arranges an X-ray source 10 creating an incident X-ray beam directed to a sample on a sample stage. An X-ray detection system is mounted at a fixed angle 2θ
07/12/2011
7831019System and methods for characterizing a substance
A system and methods for characterizing an unknown substance is described. One of the methods include determining an effective atomic number of the unknown substance as a first function of a first gradient of a first line. ...
11/09/2010
7778389X-ray imaging system and method
The present invention provides an X-ray imaging system and method capable of performing time-resolved observation in a short measurement time at the same density resolution and in the same dynamic range as those for a diffraction enhanced X-ray imaging method, and a...
08/17/2010
7742563X-ray source and detector configuration for a non-translational x-ray diffraction system
A system and method for scanning objects using a non-translational x-ray diffraction (XRD) system is disclosed. The system includes a scanning area through which an object to be scanned traverses and a distributed x-ray source having a plurality of focal spot locati...
06/22/2010
7715527System and method for matching diffraction patterns
A method of analyzing patterns. The method comprises: receiving a first diffraction pattern; receiving a second diffraction pattern; receiving a third diffraction pattern; determining a similarity between the first and second diffraction patterns; determining a simi...
05/11/2010
7653177Measurement system and method for the noninvasive determination of properties of an object to be examined and contrast medium X-ray phase-contrast measurement
A method and a measurement system are disclosed for the noninvasive determination of properties of an object to be examined and to the use of a contrast medium for X-ray phase-contrast measurement. in at least one embodiment of the invention, a mixture (suspension) ...
01/26/2010
7620148X-ray diffraction (Xrd) means for identifying the content in a volume of interest and a method thereof
The present invention discloses an XRD means for identifying the content of a volume of interest (VOI) and a method thereof. A remote XRD means is comprised inter alia of a plurality of x-ray sources target toward the VOI. A plurality of x-ray detectors adapted to r...
11/17/2009
7529340Systems and methods for identifying a substance
A method for iteratively identifying a substance is described. The method includes determining whether a function of a difference between an updated diffraction profile and an original diffraction profile of the substance exceeds a parameter. ...
05/05/2009
7519153X-ray metrology with diffractors
An electron probe microanalysis (EPMA) system includes a graded multilayer diffractor for tightly focusing output x-rays onto an x-ray detector. The graded multilayer construction of the diffractor allows a high x-ray flux to be generated in a small measurement spot...
04/14/2009
7483512Variable centre diffractometer
A diffractometer, having variable center and suitable for performing analysis on hidden or hardly accessible bodies or specimens is described. Said variable center diffractometer is equipped with an analytical unit that comprises: a circle arc structure, called Eule...
01/27/2009
7474732Calibration of X-ray reflectometry system
A method for inspection of a sample includes irradiating the sample with a beam of X-rays and measuring a distribution of the X-rays that are emitted from the sample responsively to the beam, thereby generating an X-ray spectrum. An assessment is made of an effect o...
01/06/2009
7418073Computed tomography device and method with three-dimensional backprojection
The invention relates to a computed tomography method in which an examination zone is irradiated along a circular trajectory by a fan-shaped radiation beam. Radiation coherently scattered in the examination zone is measured by a detector unit, the variation in space...
08/26/2008
7415096Curved X-ray reflector
A method for producing X-ray optics includes providing a wafer of crystalline material having front and rear surfaces and a lattice spacing suitable for reflecting incident X-rays of a given wavelength. A thin film is deposited on the front surface of the wafer so a...
08/19/2008
7403593Hybrid x-ray mirrors
An x-ray mirror provides focusing and monochromatization while maintaining a high degree of reflectivity. The mirror has at least two mirror portions, one with a multilayer surface that provides the desired monochromating, and the other with a total external reflect...
07/22/2008
7403592Digital lock-in detection of site-specific magnetism in magnetic materials
The polarization and diffraction characteristics of x-rays incident upon a magnetic material are manipulated to provide a desired magnetic sensitivity in the material. The contrast in diffracted intensity of opposite helicities of circularly polarized x-rays is meas...
07/22/2008
7397900Micro beam collimator for high resolution XRD investigations with conventional diffractometers
A micro collimator for compressing X-ray beams for use in a X-ray diffractometer is described, wherein said collimator has a channel means for providing a channel guiding said X-ray beams, said channel having a channel entrance portion and a channel exit portion. Th...
07/08/2008
7372941System and method for matching diffraction patterns
A method of analyzing patterns. The method comprises: receiving a first diffraction pattern; receiving a second diffraction pattern; receiving a third diffraction pattern; determining a similarity between the first and second diffraction patterns; determining a simi...
05/13/2008
7359206Radio frequency isolation system and cover assembly for vacuum electron device
A self-guiding cover assembly for a vacuum electron device (VED) enclosure (704, 1316) has a cover (1002, 1302), a pair of guide plates, and a pair of guide elements (1304, 1306). The cover has at least one electrical connector (1314) dis...
04/15/2008
7356119X-ray examination method and apparatus
An X-ray examination method comprises setting a tube voltage of an X-ray tube to a tube voltage that makes an X-ray absorptance difference between a first X-ray propagation medium and a second X-ray propagation medium in an object become not more than 10%, applying ...
04/08/2008
7352845Energy dispersion type X-ray diffraction/spectral device
A white X-ray generating means and an X-ray detecting means are respectively moved to a first position and a second position that are separated, X-ray intensities, for each energy, detected at respective positions by the X-ray detecting means are obtained as first d...
04/01/2008
7317784Multiple wavelength X-ray source
A multiple wavelength X-ray source includes an electron-generating cathode and an anode with multiple target regions, each of which emits X-rays at a different characteristic wavelength in response to the electrons. The different X-ray radiation outputs are focused ...
01/08/2008
7311407Mirror unit, method of producing the same, and exposure apparatus and method using the mirror unit
Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrat...
12/25/2007
7295650Method for operating a primary beam stop
A method for operating an X-ray or neutron-optical system and beam stop comprising an X-ray or neutron source (1) from which corresponding radiation is guided as a primary beam (2) to a sample (4) under investigation, with an X-ray or neutron de...
11/13/2007
7286637Optical thin film and mirror using the same
To provide an optical thin film structure capable of efficiently dissipating heat in an optical thin film which is generated upon irradiating a surface of an X-ray mirror made up of the optical thin film with an X-ray. The optical thin film having an isotope purity ...
10/23/2007
7286628Phase-contrast enhanced computed tomography
A phase-contrast x-ray computed tomography scanner, a monochromatic diffraction computed tomography scanner, a rotatable monochromatic diffraction computed tomography scanner, and a combination phase-contrast and monochromatic computed tomography scanner are provide...
10/23/2007
7280634Beam conditioning system with sequential optic
An x-ray beam conditioning system with a first diffractive element and a second diffractive element. The two diffractive elements are arranged in a sequential configuration, and one of the diffractive elements is a crystal. The other diffractive element may be a mul...
10/09/2007
7280636Device and method for producing a spatially uniformly intense source of x-rays
An x-ray source for producing a uniformly intense area x-ray beam. The x-ray source includes a vacuum chamber. An area electron emitter is disposed at a first end of the vacuum chamber. A target material is disposed at a second end of the vacuum chamber and spaced a...
10/09/2007
7277231Projection objective of a microlithographic exposure apparatus
A projection objective of a microlithographic projection exposure apparatus has a correction device which can correct photoinduced imaging errors without optical elements having to be removed for this purpose. The correction device includes a first optical element a...
10/02/2007
7272206Method and apparatus for void content measurement and method and apparatus for particle content measurement
A void or particle content is determined using the X-ray small angle scattering measurement for a sample made of a thin film having voids or particles disorderly dispersed in the matrix, the diffraction peaks being not available for such a sample. The invention incl...
09/18/2007
7269245Combinatorial screening system and X-ray diffraction and Raman spectroscopy
A sample analysis system makes use of both X-ray diffraction analysis and Raman spectroscopy of a sample. The sample is part of a sample library that is mounted on an XYZ stage that allows each sample to be examined in turn, as the XYZ stage is moved to position suc...
09/11/2007
7265754Method for displaying material characteristic information
A system and method for displaying graphical information indicative of a plurality of material characteristics for a portion of a part under test. Energy is directed at the selected portion of the part under test. Resultant energy is detected from the selected porti...
09/04/2007
7263161Analysis device with variably illuminated strip detector
An X-ray or neutron-optical analysis device comprising means for directing radiation from a source (1) onto a sample (2), and a detector (7) with n substantially identical detector elements (Di) which are disposed parallel, next to ea...
08/28/2007
7258485X-ray thin film inspection apparatus and thin film inspection apparatus and method for patterned wafer
An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray ir...
08/21/2007
7257192Method and apparatus for X-ray reflectance measurement
In a method for X-ray reflectance measurement in which an intensity of a reflected X-ray is observed for each incident angle, a measuring scale for the incident angle ω is corrected, before the reflectance measurement, using an analyzer crystal. In the corrective o...
08/14/2007
7253901Laser-based cleaning device for film analysis tool
A system for analyzing a thin film uses an energy beam, such as a laser beam, to remove a portion of a contaminant layer formed on the thin film surface. This cleaning operation removes only enough of the contaminant layer to allow analysis of the underlying thin fi...
08/07/2007
7248669Method for analyzing membrane structure and apparatus therefor
A method and apparatus for analyzing a membrane structure by fitting simulated operation data to measured data obtained by X-ray reflectivity measurement to analyze the membrane structure. The analysis result obtained by the fitting can be prevented from falling int...
07/24/2007
7242745X-ray diffraction screening system convertible between reflection and transmission modes
An X-ray diffraction apparatus provides analysis in either transmission or reflective mode and easy conversion between the two modes. An X-ray source and X-ray detector are each connected to a different circle of a goniometer. The two circles may be rotated independ...
07/10/2007
7242135High voltage connection for vacuum electron device
A high voltage direct current contact for a vacuum electron device (VED), including (a) an outer cathode line having a first hollow cylinder having a first VED connection end, (b) a contact block removably positioned within the outer cathode line, having a heater co...
07/10/2007
7236566In-situ X-ray diffraction system using sources and detectors at fixed angular positions
An x-ray diffraction technique for measuring a known characteristic of a sample of a material in an in-situ state. The technique includes using an x-ray source for emitting substantially divergent x-ray radiation—with a collimating optic disposed with respect to t...
06/26/2007
7231016Efficient measurement of diffuse X-ray reflections
A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse ref...
06/12/2007
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