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Class 374/9 - EMISSIVITY DETERMINATION


Subclass of Class 374 - Thermal measuring and testing
Definition: Subject matter for determining the ability of an object
No. of patents: 84
Last issue date: 09/16/2008


1      
NumberTitleIssue Date
7425896Tag testing device, tag testing method, and tag testing program
A tag testing device uses an infrared camera to take an image of a plurality of radio frequency identification tags, compares the image with a stored standard tag pattern image storage, and detects defective tags based on the comparison. A radio wave transceiver bul...
09/16/2008
7407325Method and apparatus for measuring thermophysical properties
The present invention provides a method for measuring thermophysical properties that includes: rapid resistive self-heating of a specimen by using a heating current; emitting a light to the specimen heated by the rapid resistive self-heating of the specimen; measuri...
08/05/2008
7390123Variable emittance surfaces
Designs for constructing a surface with variable emittance are described. This is achieved by making a surface where the emissivity varies on a scale smaller than the resolution of a thermal imager viewing the surface. One design utilizes many cylindrical surfaces w...
06/24/2008
7325971Method and apparatus for locating hydrocarbon deposits
A method and apparatus for locating hydrocarbon deposits includes temperature 16 sensor for measuring earth surface temperature at each of a plurality of locations, and a solar absorption sensor 14 for measuring the absorption coefficient of the earth'...
02/05/2008
7318671Heat-flux based emissivity/absorptivity measurement
A mechanism and method for directly observing data from which the thermal emissivity or absorptivity of a surface can be calculated. The invention teaches the use of a substantially planar heat-flux or heat-flow sensor employing a thermopile, to measure the rate of ...
01/15/2008
7316505Method of defining the emission coefficient of a surface to be heated
A method of defining the emission coefficient of a surface to be heated by measuring the temperature of a heating surface and the flow of heat from the heating surface to a surface to be heated to derive a pair of values representative thereof and of selecting a pre...
01/08/2008
7205231Method for in-situ uniformity optimization in a rapid thermal processing system
The present invention is directed to a method for thermally processing a substrate in a thermal processing system. The method provides an amount of heat to the substrate and obtains information associated with the substrate when the amount of heat is provided. For e...
04/17/2007
7186978Compact emissivity and temperature measuring infrared detector
A hand-held, fleet deployable infrared camera with integrated hardware and software providing real time processing of infrared images. The camera senses variable temperature images over a selected object of interest and senses variable emissivities over the object. ...
03/06/2007
7156717situ finishing aid control
A method of using finishing aids for advanced finishing control is described. A finishing surface is used generally to induce frictional wear. The finishing aids with preferred in situ control can improve control of the coefficient of friction, the tangential force ...
01/02/2007
7131890In situ finishing control
An apparatus and method of using a in situ finishing information for finishing semiconductor wafers is described. The method uses operative sensors such as friction sensors for detecting and improving control during finishing. The method can aid control of finishing...
11/07/2006
7118271Calibrating temperature sensors of weathering devices by means of contactless temperature measurement
Calibrating temperature sensors of weathering devices by means of contactless temperature measurement A temperature sensor (10) which is, for example, designed as a black standard sensor and is typically used in apparatuses for artificial weathering of...
10/10/2006
7075636Apparatus and methods for evaluating performance of endoscopy devices and systems
A test and measurement system to assess performance characteristics of an endoscope or other optically based diagnostic or treatment devices. The performance characteristics can include the photometric characteristics, the imaging characteristics and the physical ch...
07/11/2006
7059765Temperature measuring apparatus and related improvements
An apparatus for measuring the temperature of an object. The apparatus includes a device for establishing a standing wave pattern or radiation emanating from the object and a coupling device for coupling the radiation to a detector, such as a measuring radiometer.
06/13/2006
7037733Method for measuring temperature, annealing method and method for fabricating semiconductor device
When the emissivity ε on the reverse face of a substrate 10 is measured during annealing processing for the substrate 10, films made from a material that varies the emissivity ε, such as a first DPS film 15 used for forming a plug 15A, ...
05/02/2006
6971793Test handler temperature monitoring system
The invention provides a temperature monitoring system for a semiconductor test handler. A preparation stage brings a test device to a predetermined temperature for testing at a test platform at said predetermined temperature. At least one radiation sensor, such as ...
12/06/2005
6964514Temperature measuring apparatus
An improved apparatus for measuring the temperature of an object such as a food object. Also, a related method, container, transportation member and production line which utilizes this apparatus. The apparatus includes a coupling device for coupling radiation emanat...
11/15/2005
6963692Heat-treating methods and systems
A method involves increasing a temperature of a workpiece over a first time period to an intermediate temperature, and heating a surface of the workpiece to a desired temperature greater than the intermediate temperature, the heating commencing within less time foll...
11/08/2005
6941063Heat-treating methods and systems
A method involves pre-heating a workpiece to an intermediate temperature, heating a surface of the workpiece to a desired temperature greater than the intermediate temperature, and enhancing cooling of the workpiece. Enhancing cooling may involve absorbing radiation...
09/06/2005
6796144System and method for glass processing and temperature sensing
Techniques for measuring the temperature at various locations through the thickness of glass products and to control the glass processing operation with the sensed temperature information are disclosed. Fluorescence emission of iron or cerium in glass is excited and...
09/28/2004
6461036System and method for determining stray light in a thermal processing system
A system and method for determining the stray radiation within a heating chamber of a thermal processing apparatus. The stray radiation is determined by moving a generally unheated wafer vertically through the heating chamber, and measuring with a detecto...
10/08/2002
6379038Temperature determining device and process
The present invention relates to a device useful for the measurement of the temperature of a radiating body. More particularly, the present invention relates to a radiation pyrometer that detects and compensates for emissivity that changes with wavelength...
04/30/2002
6375348System and method for the real time determination of the in situ emissivity and temperature of a workpiece during processing
A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the ther...
04/23/2002
6369363Method of measuring electromagnetic radiation
A method is provide for measuring electromagnetic radiation radiated from a surface of an object that is irradiated by electromagnetic radiation given off by at least one radiation source. The radiation given off by the radiation source is determined by a...
04/09/2002
6183127System and method for the real time determination of the in situ emissivity of a workpiece during processing
A system and method for determining the reflectivity of a workpiece during processing in a heating chamber of a thermal processing apparatus. The system first determines directly the reflectivity of the workpiece outside of the heating chamber of the ther...
02/06/2001
6156148Process for producing a protective cap for an infrared radiation thermometer that can be introduced into a body cavity
The invention is directed to a process for manufacturing a protective cap which is adapted to be fitted to an ear canal temperature measurement probe of an infrared radiation thermometer and to be introduced into a body cavity. The protective cap (1) is f...
12/05/2000
6056434Apparatus and method for determining the temperature of objects in thermal processing chambers
The present invention is generally directed to a system and process for accurately determining the temperature of an object, such as a semiconductive wafer, by sensing and measuring the object radiation being emitted at a particular wavelength. In particu...
05/02/2000
5993059Combined emissivity and radiance measurement for determination of temperature of radiant object
A system and method of measurement of emissivity and radiance of a wafer in a rapid thermal processing chamber enables determination of wafer temperature and control of temperature of the wafer. Mirrors enclose the chamber and reflect radiation from lamps...
11/30/1999
5868496Non-contact surface temperature, emissivity, and area estimation
Method and apparatus for non-contact temperature, emissivity and area estimation for gray and non-gray (uniform and non-uniform surface emissivity) are disclosed. Optical power measurements are obtained for radiation from a surface of interest in multiple...
02/09/1999
5864776Apparatus and method for detecting an error in the placement of a lead frame on a surface of a die mold
A position detection system is provided which, without physical contact, by the use of detected infrared energy emissions determines whether there is correct placement of one or more small objects, e.g., lead frames, on the lower half of a two-part die mo...
01/26/1999
5822222Multi-wavelength imaging pyrometer
An apparatus and method for non-contact real-time measurements of temperature and emissivity profiles of radiant targets with unknown spectral emissivity. The selected points or regions on the radiant target are imaged onto an array of photodetectors thro...
10/13/1998
5785426Self-calibrated active pyrometer for furnace temperature measurements
Pyrometer with a probe beam superimposed on its field-of-view for furnace temperature measurements. The pyrometer includes a heterodyne millimeter/sub-millimeter-wave or microwave receiver including a millimeter/sub-millimeter-wave or microwave source for...
07/28/1998
5772323Temperature determining device and process
The present invention relates to a totally novel device and process useful for the measurement of the temperature of a radiating body. More particularly, the present invention relates to a device that enhances the resolution and repeatability of the measu...
06/30/1998
5769540Non-contact optical techniques for measuring surface conditions
Thermal, optical, physical and chemical characteristics of a substrate (11) surface are determined with non-contact optical techniques that include illuminating (23) the surface with radiation having a ripple intensity characteristic (51), and then measur...
06/23/1998
5738440Combined emissivity and radiance measurement for the determination of the temperature of a radiant object
A system and method of measurement of emissivity and radiance of a wafer in a rapid thermal processing chamber enables determination of wafer temperature and control of temperature of the wafer. Mirrors enclose the chamber and reflect radiation from lamps...
04/14/1998
5727017Method and apparatus for determining emissivity of semiconductor material
A method and apparatus for measuring the emission coefficient of a semiconductor material for light of wavelength λ having photon energy less than the semiconductor bandgap energy is introduced. The reflection coefficient for the light of wavelength λ i...
03/10/1998
5690430Apparatus and method for measuring temperature and/or emissivity of steel strip during a coating process
Method and apparatus for measuring the surface temperature/emissivity of coated steel strip during a coating (e.g., galvannealing) process. The apparatus includes first and second radiation sensors each having a response exponentially related to the recip...
11/25/1997
5601366Method for temperature measurement in rapid thermal process systems
A method for obtaining real-time emissivity and temperature values of a semiconductor wafer in a processing system having at least one lamp (preferably a plurality of lamps arranged in a plurality of zones so as to provide multizone temperature and emissi...
02/11/1997
5597237Apparatus for measuring the emissivity of a semiconductor wafer
Apparatus adapted for use in measuring emissivity of a semiconductor wafer having a radiant energy reflecting surface includes a hollow integrating sphere having first and second spaced apart openings and having an inner surface upon which radiant energy ...
01/28/1997
5564830Method and arrangement for determining the layer-thickness and the substrate temperature during coating
The invention describes a procedure and an arrangement for measurement of temperature and thickness of layer during a deposition or coating process. As coating or depositing processes known technologies of semi-conductor manufacturing arrangements, plasma...
10/15/1996
5505543Emissivity measurement apparatus and method
Method and apparatus for measuring thermal radiation emitted by a sample, and for determining emissivity. The apparatus comprises a chamber in which the sample may be positioned, the chamber comprising a plurality of walls including a first wall containin...
04/09/1996
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