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| Number | Title | Issue Date |
| 8107509 | Monolithic folded F-P cavity and semiconductor laser using the same This invention relates to a monolithic folded F-P cavity used for semiconductor laser, which is composed of a monolithic optical element. The monolithic optical element is made of the material having low propagation loss for a certain spectrum range. Light entering ... | 01/31/2012 |
| 7924902 | Highly repetitive laser system having a compact design The invention relates to a highly repetitive laser system operating according to the reproducible amplifier principle. Said system comprises at least one amplified laser medium, a laser resonator provided with at least one resonator mirror and at least one modulator... | 04/12/2011 |
| 7826513 | Re-entrant structure for thin disk resonators The present embodiment provides a system and method for lowering the saturated gain level of a thin-disk laser oscillator by multipassing each gain generator in such a way to cancel some of the wavefront error contributions from the disk surfaces. Wavefront aberrati... | 11/02/2010 |
| 7817702 | High SMSR unidirectional etched lasers and low back-reflection photonic device Unidirectionality of lasers is enhanced by forming one or more etched gaps (78, 80) in the laser cavity. The gaps may be provided in any segment of a laser, such as any leg of a ring laser, or in one leg (62) of a V-shaped laser (60). A Brewster... | 10/19/2010 |
| 7804881 | Laser system with segmented diode laser Disclosed is a laser system comprising: A laser assembly (101) comprising a plurality of emitters; first and second light feedback devices (208, 232) forming respective external cavities with the laser assembly; a dispersive device (205) for red... | 09/28/2010 |
| 7711025 | Laser amplifier In a solid-state laser amplifier including at least two laser-active media in a common laser radiation field, the laser-active media do not form a hard aperture for the laser radiation field. Each of the laser-active media define a plane that is penetrated by the la... | 05/04/2010 |
| 7440643 | Variable light controlling device and variable light controlling method A variable light controlling device comprising a substrate, an optical waveguide disposed on the substrate, a first heater and a second heater to change the optical waveguide's temperature is fabricated. And a total amount of the power supplied to the first and the ... | 10/21/2008 |
| 7411991 | Tunable laser Embodiments of methods, apparatuses, devices, and/or systems for a tunable laser are described. An apparatus includes: a tunable laser cavity including at least three mirrors, at least one filter and a plurality of crystals, wherein the three mirrors are substantial... | 08/12/2008 |
| 7408971 | Longitudinally pumped solid state laser and methods of making and using A laser apparatus for producing a laser light beam can include a gain medium; a pump light source to provide a pump light beam to the gain medium; a first reflector disposed between the first gain medium and the first pump light source and spaced apart from a gain p... | 08/05/2008 |
| 7379651 | Method and apparatus for reducing laser speckle An apparatus and method for reducing speckle of a laser beam is disclosed. The apparatus includes a light guide, a highly reflective mirror at the input face of the light guide and a partially reflective mirror at the exit face of the light guide. A coherent laser b... | 05/27/2008 |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
| 7365349 | EUV light source collector lifetime improvements An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas... | 04/29/2008 |
| 7356066 | Solid state laser A solid body laser has a crystal disk forming its laser active medium. A flat side of the crystal disk is totally reflecting. A resonator mirror configuration includes a partially transparent end mirror and one or more folding mirrors, which are disposed with spatia... | 04/08/2008 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation.... | 04/08/2008 |
| 7343067 | Precise and permanent modification of the resonant frequency of a dielectric microcavity and correction of frequency shifts in dielectric coupled-resonator filters A coupled resonator includes a plurality of resonators such that at least one of the resonators is modified so as to adjust the resonant frequency associated with the coupled resonator. ... | 03/11/2008 |
| 7330300 | Optical frequency mixer and method for the same An optical frequency mixer according to one embodiment of the present invention comprises a V-shaped resonant cavity including a first reflective surface, a second reflective surface and an output coupler, a pumping unit configured to emit a pumping wave to the lase... | 02/12/2008 |
| 7330301 | Inexpensive variable rep-rate source for high-energy, ultrafast lasers System for converting relatively long pulses from rep-rate variable ultrafast optical sources to shorter, high-energy pulses suitable for sources in high-energy ultrafast lasers. Fibers with positive group velocity dispersion (GVD) and self phase modulation are adva... | 02/12/2008 |
| 7321468 | Method and optical arrangement for beam guiding of a light beam with beam delay A method for beam guiding of a light beam generated by a light source to a target location along a path distance LS, comprises splitting the light beam on the path distance LS at least once into a first partial beam and a second partial beam, g... | 01/22/2008 |
| 7317179 | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective el... | 01/08/2008 |
| 7301981 | Methods for synchronized pulse shape tailoring A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective puls... | 11/27/2007 |
| 7289549 | Lasers for synchronized pulse shape tailoring A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective puls... | 10/30/2007 |
| 7286241 | System and method for high-speed laser detection of ultrasound A system and method for laser light amplification provides amplification of a laser light beam emitted from a laser light source as low-amplification seed laser light signal. The low-amplification seed laser light signal is transmitted to an amplification component.... | 10/23/2007 |
| 7281807 | Positionable projection display devices Described herein are devices that provide projection-type video output in a portable and flexible design. The design includes a projection chamber, a base, and an interface that permits relative positioning between the projection chamber and base. The base maintains... | 10/16/2007 |
| 7277188 | Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the ... | 10/02/2007 |
| 7274723 | Method for amplifying a solid-state laser Conventionally, a laser beam is amplified by making a single pass through an amplifier but the laser beam emitted from the oscillator generally has low energy, so the energy stored in the amplifier cannot be fully extracted and only low laser output power and overal... | 09/25/2007 |
| 7254153 | Optically pumped semiconductor ring laser An optically pumped semiconductor laser includes an active ring-resonator having two or more optically pumped semiconductor (OPS) structures each including a mirror-structure and a multilayer gain-structure. The mirror-structures serve as fold mirrors for the resona... | 08/07/2007 |
| 7245419 | Wavelength-stabilized pump diodes for pumping gain media in an ultrashort pulsed laser system In an optical amplifier, passively wavelength-stabilized pump diodes generate pumping light to excite a gain medium (e.g., rare-earth-ion doped optical fiber or solid-state optical amplifier) near an absorption peak of the gain medium. The gain medium amplifies a pu... | 07/17/2007 |
| 7233607 | Pulsed light sources A source of pulses of coherent radiation at a wavelength of approximately 1 μm, comprises a pump source for producing pump light; a laser cavity comprising an Yb3+-doped gain medium arranged to receive the pump light, the laser cavity being modelocked to... | 06/19/2007 |
| 7230964 | Lithography laser with beam delivery and beam pointing control The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam ... | 06/12/2007 |
| 7230967 | Waveguide laser A laser waveguide, where the laser waveguide can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier... | 06/12/2007 |
| 7218655 | Solid state laser insensitive to temperature changes A temperature insensitive diode-pumped solid state laser is disclosed in this invention. The components of the laser are optimized with temperature insensitive design, making the laser capable of operating in a wide temperature range without using any cooling/heatin... | 05/15/2007 |
| 7218443 | Generation of tunable light pulses A device for generating tunable light pulses has a non-linear optical fiber. The optical spectrum of femtosecond light pulses can be modified by this optical fiber, taking advantage of solitonic effects. In order to make available such a device, which makes it possi... | 05/15/2007 |
| 7217941 | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one ... | 05/15/2007 |
| 7203216 | Timing control for two-chamber gas discharge laser system Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to... | 04/10/2007 |
| 7197060 | Waveguide laser A laser waveguide, where the laser waveguide can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier... | 03/27/2007 |
| 7196342 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a... | 03/27/2007 |
| 7180928 | High-power external-cavity optically-pumped semiconductor lasers External-cavity optically-pumped semiconductor lasers (OPS-lasers) including an OPS-structure having a mirror-structure surmounted by a surface-emitting, semiconductor multilayer (periodic) gain-structure are disclosed. The gain-structure is pumped by light from dio... | 02/20/2007 |
| 7180083 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interac... | 02/20/2007 |
| 7170919 | Diode-pumped solid-state laser gain module A laser gain device (10) holds a laser slab (60) which is pumped by pump energy from at least one diode array assembly (24). An angle at which pump energy from the diode array assembly (24) impinges the laser slab (60) is adjustabl... | 01/30/2007 |
| 7161684 | Apparatus for optical system coherence testing The present invention is directed at a coherence test reticle or lithographic plate, and a method for testing the coherence of a laser beam using the test reticle. The quality or coherence of the laser beam is measured by illuminating the test reticle and recording ... | 01/09/2007 |
