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Class 372/86 - Having an auxiliary ionization means


Subclass of Class 372 - Coherent light generators
Definition: Subject matter in which the apparatus includes more than
No. of patents: 236
Last issue date: 06/09/2009


1            
NumberTitleIssue Date
7545842Pre-ionizer for pulsed gas-discharge laser
In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. Th...
06/09/2009
7542502Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
A corona-discharge type, preionizer assembly for a gas discharge laser is disclosed. The assembly may include an electrode and a hollow, dielectric tube that defines a tube bore. In one aspect, the electrode may include a first elongated 0o conductive member having ...
06/02/2009
7339973Electrodes for fluorine gas discharge lasers
Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge s...
03/04/2008
7301980Halogen gas discharge laser electrodes
A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric ...
11/27/2007
7274722COslab laser
CO2 slab laser having a gas-filled tubular housing, sealed off at both ends by end pieces, which accommodates two overlapping electrodes extending into the tubular housing and mirrors arranged in the region of the electrodes, where each of the two end pie...
09/25/2007
7266137Laser gas replenishment method
Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas...
09/04/2007
7263116Dielectric coupled COslab laser
A slab laser includes two elongated electrodes arranged spaced apart and face-to-face. Either one or two slabs of a solid dielectric material extend along the length of the electrodes between the electrodes. A discharge gap is formed either between one of the electr...
08/28/2007
7250635Light emitting system with high extraction efficency
In an epitaxial structure of a solid state lighting system, electrical current injection into the active layer is used to excite the photon emission. The present invention employs a unique waveguide layer in the epitaxial structure for trapping the light generated b...
07/31/2007
7230965Anodes for fluorine gas discharge lasers
Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the ele...
06/12/2007
7227881Master oscillator—power amplifier excimer laser system
A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirem...
06/05/2007
7197060Waveguide laser
A laser waveguide, where the laser waveguide can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier...
03/27/2007
7190708Annealed copper alloy electrodes for fluorine containing gas discharge lasers
An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them after the electrodes are machined. This annealing relieves the surface st...
03/13/2007
7166830Light detecting sensor
A substrate 18, a cathode 20 and an anode 22 are stored in a space demarcated by a casing 10, and the space is evacuated. The cathode 20 and the anode 22 are provided on the same surface of a substrate 18 having elect...
01/23/2007
7147759High-power pulsed magnetron sputtering
Magnetically enhanced sputtering methods and apparatus are described. A magnetically enhanced sputtering source according to the present invention includes an anode and a cathode assembly having a target that is positioned adjacent to the anode. An ionization source...
12/12/2006
7132123High rep-rate laser with improved electrodes
The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is ...
11/07/2006
7124059Managing maintenance for an item of equipment
A method and system for maintaining an item of equipment supports the provision of predictive maintenance in a manner which eliminates or reduces downtime of the equipment. The method includes tracking performance data on the equipment or a particular component of t...
10/17/2006
7099365Oscillation method and device of fluorine molecular laser
An oscillation method and a device of fluorine molecular laser with narrow spectral line width are provided. For this purpose, the device includes main electrodes (14, 15) for performing main discharge (50) in substantially a same direction as an optic...
08/29/2006
7095774Cathodes for fluorine gas discharge lasers
A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a di...
08/22/2006
7079565Systems and methods utilizing laser discharge electrodes with ceramic spoilers
Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An in...
07/18/2006
7075963Tunable laser with stabilized grating
A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating and/or other elements of the line-narrowing module. The pressure in the en...
07/11/2006
7050475Waveguide laser
A laser waveguide, where the laser waveguide can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier...
05/23/2006
7046713Discharge laser with porous layer covering anode discharge surface
A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electr...
05/16/2006
7003012Discharge laser with porous insulating layer covering anode discharge surface
A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electr...
02/21/2006
6999492Reduced-maintenance excimer laser with oil-free solid state pulser
An oil-free pulser design can be used to produce an excimer or molecular fluorine laser system that is lighter, cheaper to produce, and simpler than existing systems. Such designs allow a relatively low DC voltage to be applied to a main transformer, allowing the pu...
02/14/2006
6999490Discharge igniter for a waveguide COlaser
A waveguide gas laser includes an enclosure filled with a lasing gas. A ceramic block is provided with one or more waveguide channels. At least one of the waveguide channels includes an open region which is in fluid communication with a waveguide channel. Lasing gas...
02/14/2006
6998620Stable energy detector for extreme ultraviolet radiation detection
A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The det...
02/14/2006
6987790Excimer or molecular fluorine laser with several discharge chambers
Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using ...
01/17/2006
6965624Laser gas replenishment method
A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluor...
11/15/2005
6963596Pre-ionizer for RF-energized gas laser
A pre-ionizing arrangement for a gas laser includes two ceramic-jacketed ionizer electrodes extending into an enclosure including spaced-apart slab electrodes of the laser and a lasing gas at reduced pressure. RF power is applied to the dielectric-jacketed ionizer e...
11/08/2005
6950453Pulser driven, helium free transversely excited atmospheric-pressure (TEA) CO2 laser
A novel and inexpensive excitation circuit based on a single switch and a single source drives helium-free TEA CO2 lasers, mini to conventional types, providing low divergent output. By varying the partial pressure of either CO2 or N2
09/27/2005
6941259Laser software control system
A first software program for simulating an operating laser system controls a processor that generates one or more dummy parameters each corresponding to a parameter of an operating laser system. The dummy parameter is read over a same or similar signal interface as ...
09/06/2005
6937635High rep-rate laser with improved electrodes
The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is ...
08/30/2005
6907058Energy monitor for molecular fluorine laser
A beam parameter monitoring unit for coupling with a molecular fluorine (F2) or ArF laser resonator that produces an output beam having a wavelength below 200 nm includes a detector and a beam path enclosure. The unit may also include a beam splitter with...
06/14/2005
6903511Generation of uniformly-distributed plasma
Methods and apparatus for generating uniformly-distributed plasma are described. A plasma generator according to the invention includes a cathode assembly that is positioned adjacent to an anode and forming a gap there between. A gas source supplies a volume of feed...
06/07/2005
6757315Corona preionization assembly for a gas laser
A preionization device for a gas laser includes an internal preionization electrode having a dielectric housing around it such that the preionization device is of corona type. The internal electrode connects to advantageous electrical circuitry, preferably external ...
06/29/2004
6714576Excimer laser and method of operating an excimer laser
The present invention relates to an excimer laser comprising a charging circuit including a parallel connection of a storage capacitor (CB) with a series connection of a reoscillation inductance (LB), a charging inductance (LL) and a...
03/30/2004
6700908Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
The present invention is a device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge. The invention uses a pair of main electrodes provided in a closed gas discharge volume, and at least one pair of corona electrodes wh...
03/02/2004
6671302Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
A device for use with a repetitively pulsed gas laser provides self-initiated UV preliminary ionization of the active volume of a laser, which has extended high-voltage and grounded electrodes disposed parallel to one another, to which peaking capacitors ...
12/30/2003
6654402Corona preionization electrode unit for use in gas laser apparatus
A corona preionization electrode unit for use in gas laser apparatus, wherein the electric field for corona discharge is concentrated, and ultraviolet radiation is not blocked, and further the laser gas stream is not obstructed, thereby allowing efficient...
11/25/2003
6650679Preionization arrangement for gas laser
A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cy...
11/18/2003
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