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| Number | Title | Issue Date |
| 7970038 | Slab laser with stand-off for ceramic spacers An RF excited gas discharge laser is disclosed including a housing holding the lasing gas. An electrode assembly is mounted within the housing. The electrode assembly includes a pair of elongated planar electrodes mounted in face to face relationship with a narrow g... | 06/28/2011 |
| 7885310 | Gas slab laser The invention relates to a gas slab laser comprising a gas-filled chamber limited by a housing (1, 2, 3). The laser is provided with at least two high-frequency excited electrodes (5, 6) that extend into the housing and overlap. The electrodes define a... | 02/08/2011 |
| 7778303 | Laser having distributed inductances An RF excited laser assembly includes a pair of opposed electrodes, and at least one inductor. The pair of opposed electrodes defines an inter-electrode gap that provides a discharge volume for laser propagation within a gas medium. The pair of opposed electrodes de... | 08/17/2010 |
| 7729403 | High-order harmonic generation in a capillary discharge A pre-ionized medium created by a capillary discharge results in more efficient use of laser energy in high-order harmonic generation (HHG) from ions. It extends the cutoff photon energy, and reduces the distortion of the laser pulse as it propagates down the wavegu... | 06/01/2010 |
| 7664155 | Gas laser oscillating unit A gas laser oscillating unit having a gas junction part where gas flow may be stable, whereby a stable laser beam output and/or a laser beam that does not fluctuate very much may be achieved. The laser gas, flowing through first and second excitation parts, is intro... | 02/16/2010 |
| 7586969 | Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator A discharge excitation type gas laser oscillator has a discharge excitation unit for exciting a laser gas by discharge in a discharge tube to generate induced emission of laser light, a high-frequency power supply unit for supplying power to the discharge tube, and ... | 09/08/2009 |
| 7577177 | Multi-path laser system A laser chamber is provided that increases power, initiation, and discharge efficiency over single chamber lasers by providing a multi-fold laser chamber, protrusions, discharge segmentation and inversion techniques. ... | 08/18/2009 |
| 7529285 | Frequency stabilised gas laser A method for the frequency stabilization of a gas laser with a laser tube (1), in stable operation includes a continuous operation control procedure with the following steps: Operating the gas laser for the radiation of lase... | 05/05/2009 |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
| 7372202 | Phase locked microdischarge array and AC, RF or pulse excited microdischarge The invention is directed to a method and apparatus for phase-locking microdischarge device arrays and an ac, rf, or pulse-excited microdischarge. The invention provides output from a non-laser optical source that is a phase-locked array of microdischarges formed of... | 05/13/2008 |
| 7369597 | Laser output light pulse stretcher Providing a high peak power short pulse duration gas discharge laser output pulse comprises a pulse stretcher a laser output pulse optical delay initiating optic diverting a portion of the output laser pulse into an optical delay having an optical delay path and com... | 05/06/2008 |
| 7365349 | EUV light source collector lifetime improvements An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas... | 04/29/2008 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation.... | 04/08/2008 |
| 7342948 | Blower used for laser oscillator In an laser oscillator (100), a blower (10, 20, 120) for circulating a laser medium between an electric discharge tube (102) and a circulating passage (104) includes: a casing (12) having a suction port (12a) and an e... | 03/11/2008 |
| 7317179 | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective el... | 01/08/2008 |
| 7317536 | Spectral bandwidth metrology for high repetition rate gas discharge lasers A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicati... | 01/08/2008 |
| 7315562 | Stable/unstable optical cavity resonator for laser An improved resonator and optical cavity is adapted for use with a chemical laser that has a nozzle upstream of the resonator that emits a gain medium in a flow direction, and a pressure-recovery system downstream of the resonator. The optical resonator comprises fi... | 01/01/2008 |
| 7305016 | Laser diode package with an internal fluid cooling channel A laser diode assembly has a laser diode. The laser diode has an emitting surface and a reflective surface opposing the emitting surface. The laser diode has first and second side surfaces between the emitting and reflective surfaces. A first electrically-insulating... | 12/04/2007 |
| 7277188 | Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the ... | 10/02/2007 |
| 7274722 | COslab laser CO2 slab laser having a gas-filled tubular housing, sealed off at both ends by end pieces, which accommodates two overlapping electrodes extending into the tubular housing and mirrors arranged in the region of the electrodes, where each of the two end pie... | 09/25/2007 |
| 7263116 | Dielectric coupled COslab laser A slab laser includes two elongated electrodes arranged spaced apart and face-to-face. Either one or two slabs of a solid dielectric material extend along the length of the electrodes between the electrodes. A discharge gap is formed either between one of the electr... | 08/28/2007 |
| 7251263 | Capillary discharge x-ray laser A compact, high repetition rate, extreme ultraviolet/soft x-ray laser and method for generating such radiation are described. Excitation of the gaseous or vaporous lasing medium is achieved by discharging energy stored in a solid-dielectric capacitive device through... | 07/31/2007 |
| 7239656 | Closed-loop purging system for laser A method of minimizing contamination of optical components of a laser resonator is disclosed. The resonator components are located in an enclosure, which may contain contaminants including water vapor and organic favor released by the optical components, mounts of t... | 07/03/2007 |
| 7230967 | Waveguide laser A laser waveguide, where the laser waveguide can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier... | 06/12/2007 |
| 7230965 | Anodes for fluorine gas discharge lasers Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the ele... | 06/12/2007 |
| 7217941 | Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source A system is disclosed for protecting an internal EUV light source component from ions generated at a plasma formation site. In one aspect, the system may comprise a plurality of foil plates and an arrangement for generating a magnetic field to deflect ions into one ... | 05/15/2007 |
| 7215695 | Discharge excitation type pulse laser apparatus For the purpose of providing a discharge excitation type pulse laser apparatus capable of reducing disturbance of the discharge space caused by shock waves, the discharge excitation type pulse laser apparatus according to the present invention is designed for genera... | 05/08/2007 |
| 7203217 | Narrow band electric discharge gas laser having improved beam direction stability An electric discharge, narrow band gas laser with improvements in wavelength stability. Improvements result from reduced laser beam directional fluctuations or fast correction of those fluctuations. Applicant has discovered, using an extremely sensitive knife edge o... | 04/10/2007 |
| 7197060 | Waveguide laser A laser waveguide, where the laser waveguide can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier... | 03/27/2007 |
| 7196342 | Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a... | 03/27/2007 |
| 7190708 | Annealed copper alloy electrodes for fluorine containing gas discharge lasers An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them after the electrodes are machined. This annealing relieves the surface st... | 03/13/2007 |
| 7180083 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation system and method is disclosed which may comprise a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interac... | 02/20/2007 |
| 7173954 | Gas laser oscillation device A plurality of discharge sections are formed in an optical resonance space and are provided with electrodes that are mutually different in for example shape, size and construction. Laser medium gas flows through a circulatory passage passing through a fan and heat e... | 02/06/2007 |
| 7167499 | Very high energy, high stability gas discharge laser surface treatment system A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed which may comprise, a multichamber laser system comprising, a first laser unit comprising, a fi... | 01/23/2007 |
| 7164703 | Temperature control systems for excimer lasers Improved temperature stabilization can be obtained for pulsed gas discharge laser systems, such as excimer laser systems, using information about the energy dissipation of the system. Temperature sensors have a limited response time, which can lead to undesirable in... | 01/16/2007 |
| 7154925 | Gas laser oscillator A gas laser oscillator of easy maintenance which is capable of switching a beam mode at high speed. Electric discharge sections in which gas medium is flown are formed in an optical resonating space in an electric discharge tube between a rear mirror and an output m... | 12/26/2006 |
| 7141806 | EUV light source collector erosion mitigation An EUV light source collector erosion mitigation method and apparatus for a collector comprising a multilayered mirror collector comprising a collector outer surface composed of a capping material subject to removal due to a removing interaction with materials creat... | 11/28/2006 |
| 7134941 | Methods for residue removal and corrosion prevention in a post-metal etch process A method of plasma assisted CO2 cleaning for dry removal of residual photoresist and sidewall polymer with an etch gas mixture comprising fluorine containing gas, oxygen and hydrogen in N2 or H2O. The process removes polymer residues... | 11/14/2006 |
| 7130324 | Axial flow type gas laser oscillator A gas laser oscillator achieving a substantial increase in laser output is provided. This gas laser oscillator includes a permeable screen plate at a position of a laser gas passage and can increase the laser output substantially by suppressing and uniformizing lase... | 10/31/2006 |
| 7101260 | Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants A method for manufacturing an article where the article has polymeric residue that is to be removed during the manufacture of the article. The article is introduced into a controlled environment of a processing tool that has at least first and second processing cham... | 09/05/2006 |
