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| Number | Title | Issue Date |
| 8089998 | Ultra-short pulse laser system and method for producing femtosecond or picosecond pulses An ultra-short pulse laser system comprising an amplifying laser medium for producing a laser emission, a laser resonator having at least one resonator mirror and a pump source has a gas-filled section with a filling gas, the latter consisting of a single gas or a f... | 01/03/2012 |
| 7372887 | Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary. The gas supply device and gas exhaust device are controlled so that the l... | 05/13/2008 |
| 7317536 | Spectral bandwidth metrology for high repetition rate gas discharge lasers A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicati... | 01/08/2008 |
| 7317179 | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective el... | 01/08/2008 |
| 7291853 | Discharge produced plasma EUV light source An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source may have a debris shield that may comprise a plurality of curvilinear shield members... | 11/06/2007 |
| 7286283 | Optical fiber coupling arrangement Apparatus for optically pumping a clad amplifier fiber includes one or more transmission fibers arranged and configured to insert pump-light from a pump light source such as a diode-laser into the cladding of the amplifier fiber. The pump light propagates through th... | 10/23/2007 |
| 7277188 | Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the ... | 10/02/2007 |
| 7266271 | System, probe and methods for colorimetric testing A system and methods for performing calorimetric testing which includes a micro resonator that supports a plurality of whispering gallery mode resonant frequencies, a first waveguide that receives light and evanescently couples whispering gallery mode resonant frequ... | 09/04/2007 |
| 7266137 | Laser gas replenishment method Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas... | 09/04/2007 |
| 7256893 | Method and apparatus for measuring bandwidth of an optical spectrum output of a very small wavelength very narrow bandwidth high power laser An apparatus and method for controlling a laser system is disclosed which may comprise a spectrometer adapted to measure an unknown bandwidth of a spectrum of light emitted from the laser, which may comprise an optical bandwidth measuring unit adapted to provide as ... | 08/14/2007 |
| 7230964 | Lithography laser with beam delivery and beam pointing control The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam ... | 06/12/2007 |
| 7203562 | Process monitoring system for lithography lasers A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each o... | 04/10/2007 |
| 7136159 | Excimer laser inspection system A system and method for inspecting a specimen, such as a semiconductor wafer, including illuminating at least a portion of the specimen using an excimer source using at least one relatively intense wavelength from the source, detecting radiation received from the il... | 11/14/2006 |
| 7088758 | Relax gas discharge laser lithography light source An apparatus and method are disclosed for operating a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rate, which may comprise: a disp... | 08/08/2006 |
| 7085203 | Optical head with defocusing correction and spherical aberration correction An optical head with excellent optical characteristics even when using a light source that substantially has a wavelength broadening is provided. The optical head includes a light source, an objective lens for focusing a light beam emitted from the light source on a... | 08/01/2006 |
| 7082148 | Diode pumped alkali vapor fiber laser A method and apparatus is provided for producing near-diffraction-limited laser light, or amplifying near-diffraction-limited light, in diode pumped alkali vapor photonic-band-gap fiber lasers or amplifiers. Laser light is both substantially generated and propagated... | 07/25/2006 |
| 7079564 | Control system for a two chamber gas discharge laser The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam... | 07/18/2006 |
| 7075963 | Tunable laser with stabilized grating A line-narrowing module for a laser includes a prism beam expander and a grating preferably attached to a heat sink. A pressure-controlled enclosure filled with an inert gas seals the grating and/or other elements of the line-narrowing module. The pressure in the en... | 07/11/2006 |
| 7061961 | Very narrow band, two chamber, high rep-rate gas discharge laser system An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the... | 06/13/2006 |
| 7061960 | Diode-pumped alkali amplifier Compact, high-power, near-diffraction-limited sources of radiation in the near infrared spectral region are provided by a new class of power amplifiers that can be pumped by conventional high-power, multimode, relatively-broadband 1-D and 2-D laser diode arrays, whe... | 06/13/2006 |
| 7061959 | Laser thin film poly-silicon annealing system A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in a film on a workpiece is disclosed, which may comprise a master oscillator power amplifier MOPA or power oscillator power amplifier confi... | 06/13/2006 |
| 7039086 | Control system for a two chamber gas discharge laser The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam... | 05/02/2006 |
| 7023893 | Low-pressure axial direction excitation type Flaser oscillator An axial direction excitation type F2 laser apparatus comprises a discharge tube consisting of an insulating cylinder and metal electrodes at both ends of thereof, and a reflecting mirror or a transmitting mirror, constituting a resonator, outside the ele... | 04/04/2006 |
| 7009140 | Laser thin film poly-silicon annealing optical system A high energy, high repetition rate workpiece surface heating method and apparatus are disclosed which may cmprise a pulsed XeF laser operating at or above 4000 Hz and producing a laser output light pulse beam at a center wavelength of about 351 nm; an optical syste... | 03/07/2006 |
| 7006548 | Excimer laser device and gas for excimer laser Burst and spike characteristics in an excimer laser output in a burst operation are efficiently improved. Xenon gas is added from a compact Xe gas cylinder to gases for excimer laser in a chamber supplied from an Ar/Ne gas cylinder and an Ar/F2/Ne gas cylinder, a ra... | 02/28/2006 |
| 7006546 | Gas laser electrode, laser chamber employing the electrode, and gas laser device Provided is a gas laser electrode in which a stable laser output can be obtained by inhibiting the deterioration of the electrode (discharge characteristics). In an anode 3, a dielectric material 4 is applied on the surface of a discharging portion ... | 02/28/2006 |
| 7006541 | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibrati... | 02/28/2006 |
| 6998620 | Stable energy detector for extreme ultraviolet radiation detection A detector for use with an EUV photon source emitting around 11-15 nm includes at least one multilayer mirror for reflecting the beam along an optical path include a detector element, a filter for reducing the bandwidth of the beam, and the detector element. The det... | 02/14/2006 |
| 6970492 | DUV and VUV laser with on-line pulse energy monitor A beam parameter monitoring unit for coupling with an excimer or molecular fluorine (F2) laser resonator that produces an output beam having a wavelength below 200 nm includes an on-line laser pulse energy detector. This, in turn, allows output pulse ener... | 11/29/2005 |
| 6970612 | Surface optical device apparatus, method of fabricating the same, and apparatus using the same A surface optical device apparatus includes a surface optical device and a second substrate. The surface optical device includes a functional layer grown on a first substrate, which acts as a supporting substrate for fabricating the functional layer thereon. The fir... | 11/29/2005 |
| 6965624 | Laser gas replenishment method A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluor... | 11/15/2005 |
| 6963595 | Automatic gas control system for a gas discharge laser An automatic F2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F2 consumption rates through the operating life of the ... | 11/08/2005 |
| 6941259 | Laser software control system A first software program for simulating an operating laser system controls a processor that generates one or more dummy parameters each corresponding to a parameter of an operating laser system. The dummy parameter is read over a same or similar signal interface as ... | 09/06/2005 |
| 6922428 | Gas laser apparatus for lithography The present invention relates to a long pulse gas laser apparatus for lithography further improved in the laser oscillation efficiency and stability increased by addition of xenon gas. A gas laser apparatus for lithography has a pair of discharge electrodes 2 | 07/26/2005 |
| 6920290 | Multi-wavelength high bandwidth communication receiver and system An array of diffraction grating coupled infrared photodetectors is coupled to corresponding high-speed amplifiers for creating a multiple channel high speed receiver for an optical communication system. Each photodetector includes a three-dimensional diffractive res... | 07/19/2005 |
| 6914919 | Six to ten KHz, or greater gas discharge laser system The present invention provides gas discharge laser systems capable of reliable long-term operation in a production line capacity at repetition rates in the range of 6,000 to 10,0000 pulses power second. Preferred embodiments are configured as KrF, ArF and F2 | 07/05/2005 |
| 6912052 | Gas discharge MOPA laser spectral analysis module A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwid... | 06/28/2005 |
| 6907058 | Energy monitor for molecular fluorine laser A beam parameter monitoring unit for coupling with a molecular fluorine (F2) or ArF laser resonator that produces an output beam having a wavelength below 200 nm includes a detector and a beam path enclosure. The unit may also include a beam splitter with... | 06/14/2005 |
| 6904073 | High power deep ultraviolet laser with long life optics The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicant... | 06/07/2005 |
| 6879617 | Two stage laser system The present invention relates to a two stage laser system in which a desired spectral line width can be obtained at high output even when the integrated spectral characteristic of oscillator laser does not have the desired spectral line width, comprising an oscillat... | 04/12/2005 |
