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| Number | Title | Issue Date |
| 7995637 | Gas discharge laser chamber One aspect of the disclosed subject matter describes a gas discharge laser chamber. The gas discharge laser chamber includes a discharge region formed between a first electrode and a second electrode, a tangential fan for circulating gas through the discharge region... | 08/09/2011 |
| RE42588 | Control system for a two chamber gas discharge laser system The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam... | 08/02/2011 |
| 7817699 | High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasers A laser device includes an optical resonator, a microwave driven discharge device, and a source for a second gas. The microwave driven discharge device is disposed relative to the optical resonator. The microwave driven discharge device operates at a discharge power... | 10/19/2010 |
| 7672354 | Electrically excited gas discharge laser for generating high-repetition frequency light pulses and method for the production thereof A transversally electrically excited gas discharge laser for generating light pulses with a high pulse repetition rate. The gas discharge laser has components include a gas-tight discharge tube with opposed wall passages and front ends. The discharge tube includes c... | 03/02/2010 |
| 7668221 | Gas laser apparatus, and method and device for monitoring blower A gas laser apparatus including a laser oscillating section including a blower forcibly circulating a medium gas in a medium circuit, and a blower monitoring section monitoring a maintenance state of the blower. The blower includes a lubricant storage chamber storin... | 02/23/2010 |
| 7664154 | Gas laser oscillator and gas laser beam machine A pressure of a laser gas in an enclosure (7) is detected by a gas pressure sensor (12), and a pressure comparison circuit (13) determines whether the thus-detected pressure is normal or anomalous. An electric current output from an inverter ( | 02/16/2010 |
| 7551661 | Gas laser oscillator A gas laser oscillator (2) that excites a laser gas to generate laser light includes a circulation path (9) for the laser gas, a circulation means (14) for circulating the laser gas through the circulation path, a pressure detection means (16... | 06/23/2009 |
| 7460577 | RF laser An RF excited gas laser including an offset V-shaped laser cavity. The laser includes a first and second ceramic body portions with the laser cavity at least partially defined by the ceramic body portions. At least one internal gas reservoir is also at least partial... | 12/02/2008 |
| 7382816 | Two-stage laser pulse energy control device and two-stage laser system A charging voltage Vosc applied to a main capacitor C0 disposed in an oscillating high-voltage pulse generator 12 of an oscillating laser 100 is subject to constant control such that a pulse energy Posc of the oscillating laser 100 become... | 06/03/2008 |
| 7372887 | Excimer laser device, laser gas exchange method and partial gas exchange quantity calculation method To provide an excimer laser device and method in which the frequency of full gas exchange within the laser chamber is reduced, and more preferably full gas exchange is made unnecessary. The gas supply device and gas exhaust device are controlled so that the l... | 05/13/2008 |
| 7372056 | LPP EUV plasma source material target delivery system An EUV light generation system and method is disclosed that may comprise a droplet generator producing plasma source material target droplets traveling toward the vicinity of a plasma source material target irradiation site; a drive laser; a drive laser focusing opt... | 05/13/2008 |
| 7369597 | Laser output light pulse stretcher Providing a high peak power short pulse duration gas discharge laser output pulse comprises a pulse stretcher a laser output pulse optical delay initiating optic diverting a portion of the output laser pulse into an optical delay having an optical delay path and com... | 05/06/2008 |
| 7369596 | Chamber for a high energy excimer laser source A chamber for a gas discharge laser is disclosed and may include a chamber housing having a wall, the wall having an inside surface surrounding a chamber volume and an outside surface, the wall also being formed with an orifice. For the chamber, at least one electri... | 05/06/2008 |
| 7366213 | MOPA excimer or molecular fluorine laser system with improved synchronization The relative timing delay between channels of a discharge circuit can be adjusted through application of appropriate control voltages. A control voltage of relatively long duration and relatively small voltage, with respect to a common system pulse, can be applied t... | 04/29/2008 |
| 7365349 | EUV light source collector lifetime improvements An apparatus and method for cleaning a plasma source material compound from a plasma produced EUV light source collector optic which may comprise reacting the plasma source material compound with hydrogen to form a hydride of the plasma source material from the plas... | 04/29/2008 |
| 7366219 | Line narrowing module A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive c... | 04/29/2008 |
| 7355191 | Systems and methods for cleaning a chamber window of an EUV light source Systems and methods are disclosed for cleaning a chamber window of an extreme ultraviolet (EUV) light source. The window may have an inside surface facing a chamber interior and an opposed outside surface and the light source may generate debris by plasma formation.... | 04/08/2008 |
| 7342948 | Blower used for laser oscillator In an laser oscillator (100), a blower (10, 20, 120) for circulating a laser medium between an electric discharge tube (102) and a circulating passage (104) includes: a casing (12) having a suction port (12a) and an e... | 03/11/2008 |
| 7339973 | Electrodes for fluorine gas discharge lasers Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge s... | 03/04/2008 |
| 7320450 | Configurable mounting apparatus A multiply configurable mounting apparatus having an elongated permanently bendable support leg with a support base coupled to a first end of the support leg, the support base being structured for securing the mounting apparatus relative to an external surface; and ... | 01/22/2008 |
| 7321607 | External optics and chamber support system A gas discharge laser and method of operating same is disclosed which may comprise a gas discharge laser chamber support structure comprising a first support arm attached to a mounting table; a gas discharge laser chamber slideably engaging the first support arm; an... | 01/22/2008 |
| 7317536 | Spectral bandwidth metrology for high repetition rate gas discharge lasers A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicati... | 01/08/2008 |
| 7317179 | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective el... | 01/08/2008 |
| 7315561 | Laser generator Flow laminators are attached to gas introducing parts installed in a laser generator preventing impurities from attaching to surfaces of a translucent mirror and a condensing lens. The flow laminators prevent airflow from producing a turbulent flow and air on the su... | 01/01/2008 |
| 7301980 | Halogen gas discharge laser electrodes A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric ... | 11/27/2007 |
| 7291853 | Discharge produced plasma EUV light source An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source may have a debris shield that may comprise a plurality of curvilinear shield members... | 11/06/2007 |
| 7277466 | High power gas discharge laser with helium purged line narrowing unit A helium purge for a grating based line narrowing device for minimizing thermal distortions in line narrowed lasers producing high energy laser beams at high repetition rates. Applicants have shown substantial improvement in performance with the use of helium purge ... | 10/02/2007 |
| 7277188 | Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the ... | 10/02/2007 |
| 7277464 | Method and apparatus for controlling the output of a gas discharge laser system The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine. ... | 10/02/2007 |
| 7274722 | COslab laser CO2 slab laser having a gas-filled tubular housing, sealed off at both ends by end pieces, which accommodates two overlapping electrodes extending into the tubular housing and mirrors arranged in the region of the electrodes, where each of the two end pie... | 09/25/2007 |
| 7266137 | Laser gas replenishment method Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas... | 09/04/2007 |
| 7263116 | Dielectric coupled COslab laser A slab laser includes two elongated electrodes arranged spaced apart and face-to-face. Either one or two slabs of a solid dielectric material extend along the length of the electrodes between the electrodes. A discharge gap is formed either between one of the electr... | 08/28/2007 |
| 7260134 | Dielectric coupled COslab laser An slab CO2 laser includes spaced-apart elongated slab electrodes. A lasing gas fills a discharge gap between the electrodes. An RF power supply is connected across the electrodes and sustains an electrical discharge in the lasing gas in the discharge gap. Either on... | 08/21/2007 |
| 7257144 | Rare gas-halogen excimer lasers with baffles An excimer laser comprises a gas chamber, electrodes for creating rare gas/halide molecules that disassociate and produce optical emission, and reflective surfaces that form an optical resonant cavity. The excimer laser further comprises flow control surfaces that d... | 08/14/2007 |
| 7252806 | Flue gas conversion apparatus and method An apparatus and method of converting flue gases produced by a fossil fuel burning furnace boiler is disclosed. The flue gas is separated into its constituent parts by cooling and filtering. Carbon dioxide, the main constituent, is then converted to carbon monoxide ... | 08/07/2007 |
| 7251263 | Capillary discharge x-ray laser A compact, high repetition rate, extreme ultraviolet/soft x-ray laser and method for generating such radiation are described. Excitation of the gaseous or vaporous lasing medium is achieved by discharging energy stored in a solid-dielectric capacitive device through... | 07/31/2007 |
| 7244029 | Laser projector having temperature control A laser projector including a cooling system having an internal wall dividing the housing into a first compartment containing the optical components and a second compartment containing the electrical components, wherein the internal wall has a first face receiving t... | 07/17/2007 |
| 7245420 | Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in... | 07/17/2007 |
| 7239656 | Closed-loop purging system for laser A method of minimizing contamination of optical components of a laser resonator is disclosed. The resonator components are located in an enclosure, which may contain contaminants including water vapor and organic favor released by the optical components, mounts of t... | 07/03/2007 |
| 7230964 | Lithography laser with beam delivery and beam pointing control The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam ... | 06/12/2007 |
