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Class 372/55 - Gas


Subclass of Class 372 - Coherent light generators
Definition: Subject matter wherein the active media is in a gaseous
No. of patents: 627
Last issue date: 04/24/2012


1                      
NumberTitleIssue Date
8165181Polarization purity control device and gas laser apparatus provided with the same
A degree of polarization control device includes: a calcium fluoride crystal substrate for transmitting a laser beam; a polarization monitor for measuring the degree of polarization of a laser beam transmitted thro...
04/24/2012
8126027Line narrowing module
An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In on...
02/28/2012
8116346COlaser output power control during warm-up
A CO2 gas discharge laser includes a housing enclosing spaced-apart electrodes and a lasing gas. A laser resonator extends between the spaced-apart electrodes. An RF power supply provides RF power for creating a discharge in the lasing gas, causing laser ...
02/14/2012
8098705Radio frequency excited gas laser source
There is described a gas laser comprising a pair of substantially mutually parallel and opposed electrodes (17, 37), between which a volume is defined containing a gas in which said electrodes generate a discharge. At opposed ends of the electrodes, in said v...
01/17/2012
8050306Acousto-optically Q-switched COlaser
A pulsed CO2 laser is Q-switched by an intracavity acousto-optic (AO) Q-switch including an AO material transparent at a fundamental wavelength of the laser. In one example the AO material is germanium. ...
11/01/2011
8014432Regenerative ring resonator
A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the ...
09/06/2011
7970037Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
RF power is transmitted to a CO2 gas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of t...
06/28/2011
7965756Optical element for gas laser and gas laser apparatus using the same
At least either of the light entering plane or the light exiting plane is parallel to the (111) crystal face of the CaF2 crystal and the laser beam entering from the entering plane passes through the plane located between the [111] axis and the first azim...
06/21/2011
7920616Laser system
A method/apparatus may comprise a laser light source which may comprise a solid state seed laser system producing a seed laser output having a nominal center wavelength at a pulse repetition rate; a first and a second gas discharge laser amplifier gain medium each o...
04/05/2011
7903714Guiding a beam from an unstable laser resonator
A gas laser includes an unstable laser resonator disposed in a laser housing, and a beam guide configured to guide a laser beam decoupled from the laser resonator out of the laser housing. The laser beam is coupled into the beam guide, and the beam guide is an optic...
03/08/2011
7903715Slab type laser apparatus
A slab type laser apparatus has a slab type gas laser medium part formed in a region defined by a pair of electrode flat plates oppositely disposed in parallel with each other in a space to be filled with a gas laser medium which is excited by high-frequency electri...
03/08/2011
7894500Non-linear waveguided laser channel for a gas laser
An RF-excited waveguide laser module comprises a first electrode having a first elongate surface defining in part a waveguide laser channel extending along an optical axis, the first elongate surface having a substantially linear cross-section normal to the optical ...
02/22/2011
7889775Particle damage protection for high power COslab laser mirrors
A CO2 gas discharge laser includes elongated planar live and ground electrodes vertically spaced and electrically insulated from each. The electrodes are spaced apart by ceramic spacer strips arranged along the edges of the electrodes. An auxiliary electr...
02/15/2011
7885308Frequency-agile RF-power excitation for driving diffusion-cooled sealed-off, RF-excited gas lasers
A gas discharge laser includes a laser housing including a laser gas and an electrode-assembly for lighting a discharge in the laser gas. The electrode assembly has a first resonant frequency when the discharge is not lit and a second resonant frequency when the dis...
02/08/2011
7852899Timing control for two-chamber gas discharge laser system
Feedback timing control equipment and process for an injection seeded modular gas discharge laser. A preferred embodiment is a system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to...
12/14/2010
7830942Ultraviolet laser light source pulse energy control system
A method and apparatus is disclosed which may comprise: a gas discharge laser system energy controller which may comprise: a laser system energy controller providing a first laser operating parameter control signal based on an error signal related to a value of the ...
11/09/2010
7822092Laser system
A method and apparatus may comprise a line narrowed pulsed excimer or molecular fluorine gas discharge laser system which may comprise a seed laser oscillator producing an output comprising a laser output light beam of pulses which may comprise a first gas discharge...
10/26/2010
7782922Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifyin...
08/24/2010
7773656Molecular hydrogen laser
There is disclosed a laser comprising a laser medium comprising H2(1/p) where p is an integer and 1≦p≦137, a cavity comprising the laser medium, and a power source to form an inverted population in the energy level of H2(1/p). The power sou...
08/10/2010
7760788Bandwidth-limited and long pulse master oscillator power oscillator laser systems
Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplificatio...
07/20/2010
7756182RF excited COslab laser tube housing and electrodes cooling
The laser tube housing of a CO2 slab laser is provided with a cooling system in which coolant fluid tubes are inserted into hollowed out portions formed in the longitudinal sidewalls of the laser tube housing; mounting the coolant fluid tubes in this way ...
07/13/2010
7751460Solid state laser with beam path conditioning
A solid state laser system having at least one gas injector is disclosed. The gas injector may be configured to so as cause gas flow in a path of the laser beam in order to mitigate distortion of the laser beam due to optical path difference. Each gas injector may b...
07/06/2010
7715459Laser system
An apparatus/method which may comprise: a very high power line narrowed lithography laser light source which may comprise: a solid state seed laser system which may comprise: a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-see...
05/11/2010
7706424Gas discharge laser system electrodes and power supply for delivering electrical energy to same
A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first elec...
04/27/2010
7693207Pre-ionizer for pulsed gas-discharge laser
In a CO2 laser a pre-ionizer is assembled in a flange configured to be attached to a laser-gas enclosure of the laser over an aperture in a wall of the enclosure. An aperture in the base of the flange is aligned over the aperture in the enclosure wall. Th...
04/06/2010
7653112Line narrowing module
A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: ...
01/26/2010
7643529Laser system
An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producin...
01/05/2010
7643528Immersion lithography laser light source with pulse stretcher
An apparatus and method which may comprise a pulsed gas discharge laser which may comprise a seed laser portion; an amplifier portion receiving the seed laser output and amplifying the optical intensity of each seed pulse; a pulse stretcher which may comprise: a fir...
01/05/2010
7633989High pulse repetition rate gas discharge laser
A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the h...
12/15/2009
7609740Method and arrangement for the excitation of a gas laser arrangement
For exciting a gas laser arrangement with a plurality of HF signals, at least two pulsed HF signals are generated arid at least two electrodes or pairs of electrodes of the gas laser arrangement are supplied with the pulsed HF signals, respectively. At least two of ...
10/27/2009
7583717Laser system
A laser discharge, where the laser discharge can be formed by electrodes and at least one sidewall in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes allow easier laser starts, and sectional sidewall(s) allow easier...
09/01/2009
7570683Waveguided laser channels for a gas laser
An RF-excited waveguide laser module comprises a first electrode having a first elongate surface defining in part a waveguide laser channel extending along an optical axis, the first elongate surface having a substantially linear cross-section normal to the optical ...
08/04/2009
7567607Very narrow band, two chamber, high rep-rate gas discharge laser system
An oscillator-amplifier gas discharge laser system and method is disclosed which may comprise a first laser unit which may comprise a first discharge region which may contain an excimer or molecular fluorine lasing gas medium; a first pair of electrodes defining the...
07/28/2009
7558308High power low inductance RF hermetic sealed feed-through for slab CO2 lasers
A low inductance, hermetically sealed, RF shielded feed-through is provided for exciting low impedance discharges associated with high power CO2 slab lasers. The feed-through mechanically obtains RF contact, preferably, at the center of the length of the ...
07/07/2009
7505504Laser processing device
A laser processing device in which even a short nozzle provided with a follower roller (35) can prevent disturbance of a laser beam and contamination of protective glass and in which shield gas can act effectively. The laser processing device comprises a head...
03/17/2009
7480323Laser tube with external adjustable reactance for a gas discharge RF-excited laser
A laser device is provided. The laser device includes a laser tube, oscillator circuitry, and a compensating reactive component that is arranged in parallel with the laser tube. ...
01/20/2009
7453918Pulsed RF high pressure COlasers
An improved laser system includes a sealed-off, RF excited, diffusion cooled, high pressure, short pulsed, high peak power waveguide and slab CO2 laser that avoids problems typically associated with obtaining a diffused discharge at high gas pressures, wi...
11/18/2008
7453917Supersonic all gas-phase iodine laser
A continuous wave laser based on the electronic I*(2P½)−I(2P 3/2) transition of atomic iodine at 1.315 microns from the NCl(a1Δ)+I(2P 3/2) energy transfer reaction using a transverse fl...
11/18/2008
7439530LPP EUV light source drive laser system
An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam; a drive laser beam first path having a first axis; a drive laser redirecting mechanism transferring the drive la...
10/21/2008
7436872High frequency discharge excited gas laser oscillator
A high-frequency discharge excited gas laser oscillator receiving power from a laser power supply controlled by a pulse command, the high-frequency discharge excited gas laser oscillator provided with a power detecting section for detecting supply power from the las...
10/14/2008
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